GUIDE ROLLER AND SUBSTRATE TRANSFER APPARATUS

Abstract

To provide: a guide roller, whereby a replacement operation time can be shortened, guide roller position adjustment operations are not needed, and an equipment stop time can be reduced, and which contributes to suppression of productivity deterioration; and a substrate transfer apparatus provided with the guide roller. A substrate transfer apparatus (1) is provided with transfer rollers (3); a plurality of transfer shafts (2) that are provided with the transfer rollers (3); a guide roller (5) that guides a substrate (10); and a roller holding section (6) having a supporting shaft (62) that supports the guide roller (5) at one end. A contact section (52) of the guide roller (5) in contact with the substrate (10) can be separated from other sections (a base section (51) and a nut section (53)).

Claims

1. (canceled)

2. A guide roller, a plurality of which is arranged along a transfer path of a substrate being transferred and guides the substrate so that the substrate does not leave the transfer path, the guide roller comprising: a contact section which may make contact with the substrate; a base section which is cylindrically shaped; and a movement preventing section, wherein the contact section is separable from a part of the guide roller other than the contact section, the base section further has a lidded part, an open portion, and a flange provided on the open portion, the contact section is ring-shaped, fitted to a cylindrical portion of the base section, and secured to the flange, and the movement preventing section is fitted to the lidded part of the base section and prevents the contact section from moving in an axial direction.

3. The guide roller according to claim 2, wherein a male screw is provided in the lidded part of the base section, and a female screw is provided in an inner peripheral surface of the movement preventing section.

4. The guide roller according to claim 2, wherein a side surface of the movement preventing section is screwed to a side surface of the lidded part of the base section.

5. The guide roller according to claim 2, wherein the movement preventing section is lidded and cylindrical, and is fitted over the lidded part of the base section.

6. The guide roller according to claim 2, wherein the contact section has a larger diameter than the sections of the guide roller other than the contact section.

7. A substrate transfer apparatus comprising: the guide roller according to claim 2; and a support section rotatably supporting an entirety of the guide roller or only the contact section.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0018] FIG. 1 is a schematic plan view of a substrate transfer apparatus according to a first embodiment.

[0019] FIG. 2 is a schematic side view illustrating a portion of the substrate transfer apparatus.

[0020] FIG. 3 is a schematic side view of a guide roller.

[0021] FIG. 4 is an exploded side view of the guide roller.

[0022] FIG. 5 is a schematic cross-sectional view of the guide roller and a supporting shaft.

[0023] FIG. 6 is a schematic plan view of the guide roller.

[0024] FIG. 7 is a schematic cross-sectional view of a guide roller according to a second embodiment.

[0025] FIG. 8 is a schematic plan view of a guide roller according to a third embodiment.

[0026] FIG. 9 is a schematic side view of a guide roller according to a fourth embodiment.

[0027] FIG. 10 is a schematic cross-sectional view of a guide roller according to a fifth embodiment.

[0028] FIG. 11 is a schematic cross-sectional view of a guide roller according to a sixth embodiment.

[0029] FIG. 12 is a schematic cross-sectional view of a guide roller according to a seventh embodiment.

DESCRIPTION OF EMBODIMENTS

[0030] The present invention will be specifically described as follows based on the drawings which illustrate embodiments of the present invention.

First Embodiment

[0031] FIG. 1 is a schematic plan view of a substrate transfer apparatus 1 according to a first embodiment. FIG. 2 is a schematic side view illustrating a portion of the substrate transfer apparatus 1.

[0032] The substrate transfer apparatus 1 is used for transferring a substrate to and from each processing apparatus in a manufacturing process of the substrate and washing the substrate. Examples of the substrate include the TFT substrate and the CF substrate for the liquid crystal display panel of the above-described liquid crystal display apparatus. In the following, the substrate transfer apparatus 1 will be described as transferring a substrate 10 in a horizontal posture.

[0033] The substrate transfer apparatus 1 includes a plurality of transfer rollers 3, a plurality of transfer shafts 2 on which the transfer rollers 3 are provided except on both ends of each transfer shaft 2, a transfer roller rotation section 4 for rotating the transfer rollers 3 through rotation of the transfer shafts 2, a plurality of guide rollers 5, and two roller holding sections 6 for holding the transfer rollers 3 and the guide rollers 5.

[0034] The transfer roller rotation section 4 includes a motor 41, a shaft section 42 which rotates due to driving force of the motor 41, and a plurality of worms 43 provided on the shaft section 42.

[0035] A worm wheel 21 is mounted to one end of each transfer shaft 2. Each worm wheel 21 meshes with the corresponding worm 43.

[0036] The substrate 10 is to be placed in a center of the substrate transfer apparatus 1 in a width direction thereof, that is, arranged in a horizontal posture on the transfer rollers 3.

[0037] The shaft section 42 rotates due to the driving force of the motor 41. The transfer shafts 2 rotate in a rotational direction that is altered due to the engagement of the worms 43 and the worm wheels 21. The transfer rollers 3 rotate accordingly, and the substrate 10 is guided by the guide rollers 5 and transferred in a direction indicated by an arrow in FIG. 1.

[0038] Each roller holding section 6 includes a plate frame section 61, supporting shafts 62, and coupling sections 65. The plate frame section 61 is a long and thin longitudinally placed rectangular plate. The plate frame section 61 is configured so as to support each transfer shaft 2 on an upper surface of the plate frame section 61. Each coupling section 65 is perpendicularly mounted to a lower portion of the plate frame section 61. One end of each supporting shaft 62 supports a guide roller 5 through a bearing 63 (refer to FIG. 5). A male screw 64 is provided on a lower end of the supporting shaft 62. The male screw 64 has a smaller diameter than the rest of the supporting shaft 62. An insertion hole is provided in the coupling section 65 through which a small diameter portion of the supporting shaft 62 is inserted. With the small diameter portion in the insertion hole, a washer 67 in contact with an upper surface of the coupling section 65, and a washer 68 in contact with a lower surface of the coupling section 65, the supporting shaft 62 is fixed to the coupling section 65 by the male screw 64 being fastened such that a nut 69 is in contact with the washer 68. The guide rollers 5 are freely rotatable around the supporting shafts 62, and are located in positions to be in contact with either of a pair of long edge surfaces of the substrate 10.

[0039] FIG. 3 is a schematic side view of a guide roller 5. FIG. 4 is an exploded side view of the guide roller 5. FIG. 5 is a schematic cross-sectional view of the guide roller 5 and the supporting shaft 62. FIG. 6 is a schematic plan view of the guide roller 5.

[0040] The guide roller 5 is made from synthetic resin. Examples of the synthetic resin include general-purpose plastic such as polytetrafluoroethylene (PTFE) and engineering plastic such as polyether ether ketone (PEEK). The guide roller 5 can be broken down into three parts: a base section 51, a contact section 52, and a nut section 53.

[0041] The base section 51 has an upper lid surface and is cylindrical with an open lower portion. A male screw is provided in a lidded part 51b that has a smaller diameter than the rest of the base section 51, and a flange 51a is provided on the open portion.

[0042] The contact section 52 is ring-shaped, fitted to a cylindrical portion of the base section 51, and is secured to the flange 51a and prevented from moving in an axial direction. A width of the contact section 52 is established such that a surface area of the contact section 52 is small and the cost of the contact section 52 is low, thus allowing overall part cost to be reduced. This is because the substrate 10 does not strike the flange 51a or the nut section 53 when the substrate 10 oscillates up and down while being transferred, and only the contact section 52 is to be replaced as explained later. As an example, the width of the contact section 52 is preferably 10 mm to 15 mm when a thickness of the substrate 10 is 0.5 mm to 0.7 mm.

[0043] The nut section 53 is fastened to the male screw of the base section 51 above the contact section 52 in FIGS. 3 to 5 and is threaded onto the lidded part 51b of the base section 51. The nut section (movement preventing section) 53 prevents the contact section 52 from moving in the axial direction. The base section 51, the contact section 52, and the nut section 53 are integrated with each other and, in this state, are fitted over the bearing 63 which is fitted over the upper end of the supporting shaft 62. The bearing 63 is prevented from moving in the axial direction by a snap ring 66.

[0044] A width of the nut section 53 is established such that the nut section 53 will not come loose when a female screw thereof is fastened to the male screw of the base section 51, and the female screw is therefore easily provided.

[0045] The base section 51, the contact section 52, and the nut section 53 are not limited to being made from the same material. The contact section 52 may be made from a different material than that of the other sections. The material is preferably soft and highly elastic. When a substrate is to be transferred and washed, a material that does not swell when wet is chosen. Materials such as silicone rubber, PTFE, and perfluoro alkoxy alkane (PFA) are given as examples.

[0046] The guide roller is not limited to a configuration that is broken down into three parts, and may be broken down into four parts. In this case, the guide roller may further include a fastening section which fastens the nut section 53 from above the nut section 53. The width of the contact section 52 is established such that the substrate 10 does not strike the flange 51a of the base section 51 or the nut section 53 when the substrate 10 oscillates. Only the contact section 52 is to be replaced.

[0047] As illustrated in FIG. 2, the contact section 52 of the guide roller 5 may make contact with the substrate 10 when the substrate 10 is transferred. The guide roller 5 is made from synthetic resin. In a configuration in which the material of the substrate 10 is glass, that is, the substrate 10 is harder than the guide roller 5, scratches may occur in the contact section 52 when the substrate 10 is transferred. In this case, the guide roller 5 needs to be replaced to prevent scratches from occurring in the substrate 10.

[0048] The substrate transfer apparatus 1 of the present embodiment is configured as above. When a scratch occurs in the contact section 52 due to the transfer of the substrate 10, unlike conventional configuration, the nut section 53 is loosened and removed from the lidded part 51b, and the contact section 52 is removed from the base section 51 without removing the supporting shaft 62 from the coupling section 65 and with the base section 51 of the guide roller 5 mounted to the supporting shaft 62.

[0049] A new contact section 52 is then fitted to the base section 51, and the original nut section 53 is threaded onto the male screw of the base section 51.

[0050] According to the present embodiment, the contact section 52 can be separated from the sections of the guide roller (the base section 51 and the nut section 53) other than the contact section 52 in a simple configuration. The nut section 53 is then readily fixed to the base section 51 by fastening the nut section 53 to the male screw of the base section 51 without using a tool such as a screwdriver or a spanner, and thus the nut section 53, the contact section 52, and the base section 51 can be integrated with each other.

[0051] According to the present embodiment, because only the contact section 52 is to be replaced and the entirety of the guide roller 5 is not to be replaced, the supporting shaft 62 need not be removed. Also, the position of the supporting shaft 62 need not be adjusted. Therefore, stoppage time of the equipment can be reduced. Accordingly, productivity can be prevented from decreasing.

Second Embodiment

[0052] FIG. 7 is a schematic cross-sectional view of a guide roller 16 according to a second embodiment. In FIG. 7, elements that are shared with FIG. 5 are labelled with the same reference signs and detailed description thereof will be omitted.

[0053] A contact section 54 of the guide roller 16 according to the second embodiment differs from the contact section 52 of the guide roller 5 according to the first embodiment by having a recess 54a indented toward a center in a width direction thereof. A surface of the recess 54a is tapered.

[0054] Accordingly, a substrate 10 is guided toward the center by the tapered surface of the recess 54a when the substrate 10 is transferred. The substrate 10 may make contact with the contact section 54 in a suitable range without striking a nut section 53 or a flange 51a, even when the substrate 10 oscillates up and down.

Third Embodiment

[0055] FIG. 8 is a schematic plan view of a guide roller 17 according to a third embodiment. In FIG. 8, elements that are shared with FIG. 6 are labelled with the same reference signs and detailed description thereof will be omitted.

[0056] A nut section 53 of the guide roller 17 has cutaway sections 53a in two places opposite each other in a circumferential direction of the guide roller 17.

[0057] The cutaway sections 53a can function as slip resistance when the nut section 53 is tightened with a bare hand or a spanner.

Fourth Embodiment

[0058] FIG. 9 is a schematic side view of a guide roller 18 according to a fourth embodiment. In FIG. 9, elements that are shared with FIG. 3 are labelled with the same reference signs and detailed description thereof will be omitted.

[0059] A contact section 55 of the guide roller 18 according to the fourth embodiment differs from the contact section 52 of the guide roller 5 according to the first embodiment by having a larger diameter than the rest of the guide roller 18.

[0060] A nut section 53 is fastened to the male screw of a base section 51 above the contact section 55 and threaded onto a lidded part 51b of the base section 51. The base section 51, the contact section 55, and the nut section 53 are integrated with each other and, in this state, are fitted to a supporting shaft 62 and a bearing 63, and rotate.

[0061] When a substrate 10 is transferred, the substrate 10 may reliably make contact with the contact section 55 that has a larger diameter than the rest of the guide roller 18, and is prevented from striking the nut section 53 or the base section 51.

Fifth Embodiment

[0062] FIG. 10 is a schematic cross-sectional view of a guide roller 19 according to a fifth embodiment. In FIG. 10, elements that are shared with FIG. 5 are labelled with the same reference signs and detailed description thereof will be omitted.

[0063] A contact section 56 of the guide roller 19 according to the fifth embodiment has a larger diameter than the rest of the guide roller 19, similar to the guide roller 18 according to the fourth embodiment.

[0064] Unlike the guide roller 18, the guide roller 19 is fitted to a distal end of a supporting shaft 62 without interposing a bearing. The contact section 56 is not integrated with a base section 51 and a nut section 53 when the nut section 53 is fastened to a male screw of the base section 51. Thus, only the contact section 56 rotates with space above and below the contact section 56.

[0065] According to the present embodiment, the nut section 53 is loosened and removed from the lidded part 51b, and the contact section 56 is removed from the base section 51 without removing the supporting shaft 62 from a coupling section 65 and with the base section 51 of the guide roller 19 mounted to the supporting shaft 62, similar to the first embodiment.

[0066] A new contact section 56 is then fitted to the base section 51, and the original nut section 53 is threaded onto the male screw of the base section 51.

Sixth Embodiment

[0067] FIG. 11 is a schematic cross-sectional view of a guide roller 31 according to a sixth embodiment. In FIG. 11, elements that are shared with FIG. 5 are labelled with the same reference signs and detailed description thereof will be omitted.

[0068] A male screw is not provided in a lidded part 51b of a base section 51 in the guide roller 31 according to the sixth embodiment. Instead of a nut section 53, the guide roller 31 includes a lid section (movement preventing section) 57 covering lid and side surfaces of the lidded part 51b of the base section 51. A screw insertion hole 57a is provided in a center of the lid section 57, and a female screw 51c is provided for the screw insertion hole 57a in the lidded part of the base section 51. A screw 58 is inserted into the screw insertion hole 57a and fastened to the female screw 51c, thereby integrating the base section 51, a contact section 52, and the lid section 57 with each other. Thus, the contact section 52 is prevented from moving in an axial direction.

[0069] According to the present embodiment, when a scratch occurs in the contact section 52 due to the transfer of a substrate 10, the screw 58 is loosened to remove the lid section 57 from the base section 51 and the contact section 52 is removed from the base section 51 without removing a supporting shaft 62 from a coupling section 65 and with the base section 51 of the guide roller 31 mounted to the supporting shaft 62.

[0070] After a new contact section 52 is fitted to the base section 51 and secured to a flange 51a, the lid section 57 is fitted to the lidded part of the base section 51, and the screw 58 is inserted into the screw insertion hole 57a and fastened to the female screw 51c.

[0071] According to the present embodiment, the lid section 57 can be fixed to the base section 51, and the lid section 57, the contact section 52, and the base section 51 can be integrated with each other in a simple configuration.

[0072] Note that the screw insertion hole 57a is not limited to being provided in the center of the lid section 57. The screw insertion hole 57a may be provided in an eccentric location on the lid section 57.

[0073] Also according to the present embodiment, because the entirety of the guide roller 31 is not to be replaced and only the contact section 52 is to be replaced, the supporting shaft 62 need not be removed and the position of the supporting shaft 62 need not be adjusted. Therefore, stoppage time of the equipment can be reduced. Accordingly, productivity can be prevented from decreasing.

[0074] Note that the lid section 57 is not limited to being screwed to the lidded part of the base section 51. The lid section 57 may be fitted to the lidded part of the base section 51 by pressure.

Seventh Embodiment

[0075] FIG. 12 is a schematic cross-sectional view of a guide roller 32 according to a seventh embodiment. In FIG. 12, elements that are shared with FIG. 11 are labelled with the same reference signs and detailed description thereof will be omitted.

[0076] The guide roller 32 according to the seventh embodiment includes a lid section (movement preventing section) 59 covering lid and side surfaces of a lidded part of a base section 51, similar to the guide roller 31. A cutaway section 59a similar to that of the nut section 53 in FIG. 8 is provided on the side surface of the lid section 59, and a female screw 59b is provided in the cutaway section 59a so as to reach the lidded part 51b of the base section 51 from an outer surface of the cutaway section 59a. The base section 51, a contact section 52, and the lid section 59 are integrated with each other by a stopping screw 60 fastened to the female screw 59b.

[0077] According to the present embodiment, when a scratch occurs in the contact section 52 due to the transfer of a substrate 10, the stopping screw 60 is loosened to remove the lid section 59 from the base section 51 and the contact section 52 is removed from the base section 51 without removing a supporting shaft 62 from a coupling section 65 and with the base section 51 of the guide roller 32 mounted to the supporting shaft 62.

[0078] After a new contact section 52 is fitted to the base section 51 and secured to a flange 51a, the lid section 59 is fitted to the lidded part 51b of the base section 51, and the stopping screw 60 is fastened to the female screw 59b.

[0079] According to the present embodiment, the lid section 59 can be fixed to the base section 51, and the lid section 59, the contact section 52, and the base section 51 can be integrated with each other in a simple configuration.

[0080] Also according to the present embodiment, because the entirety of the guide roller 32 is not to be replaced and only the contact section 52 is to be replaced, the supporting shaft 62 need not be removed and the position of the supporting shaft 62 need not be adjusted. Therefore, stoppage time of the equipment can be reduced. Accordingly, productivity can be prevented from decreasing.

[0081] Note that the presently disclosed first to seventh embodiments are merely examples in all aspects and should not be construed to be limiting. The scope of the present invention is indicated by the claims, rather than by the description given above, and includes all variations that are equivalent in meaning and scope to the claims.

[0082] For example, a substrate guided by the guide rollers is not limited to a substrate used for a liquid crystal display panel. Also, the substrate transfer apparatus is not limited to a case in which the substrate is transferred in a horizontal posture. The substrate may be transferred in a vertical posture or a diagonal posture.

REFERENCE SIGNS LIST

[0083] 1 Substrate transfer apparatus [0084] 2 Transfer shaft [0085] 3 Transfer roller [0086] 4 Transfer roller rotation section [0087] 5, 16, 17, 18, 19, 31, 32 Guide roller [0088] 51 Base section [0089] 51a Flange [0090] 51b Lidded part [0091] 52, 54, 55, 56 Contact section [0092] 53 Nut section (movement preventing section) [0093] 53a, 59a Cutaway section [0094] 54a Recess [0095] 57, 59 Lid section (movement preventing section) [0096] 57a Screw insertion hole [0097] 58 Screw [0098] 6 Roller holding section [0099] 60 Stopping screw [0100] 61 Plate frame section [0101] 62 Supporting shaft [0102] 63 Bearing [0103] 64 Male screw [0104] 65 Coupling section [0105] 66 Snap ring [0106] 67, 68 Washer [0107] 69 Nut [0108] 10 Substrate