Regulating device

Abstract

A regulating device may include a housing that defines an inlet chamber and an outlet chamber, with a flow restriction seat between the inlet chamber and the outlet chamber. A flow restriction valve is movable relative to the flow restriction seat to adjust the flow between the inlet chamber and the outlet chamber of the regulating device. A servo valve having a servo chamber may be used to adjust the position of the flow restriction valve. The servo chamber may be fluidly coupled to the inlet chamber though a fixed flow restriction and to the outlet chamber though an adjustable flow restriction. A stepper motor may be used to adjust the servo valve to adjust the adjustable flow restriction between the servo chamber and the outlet chamber. This causes a change of the servo pressure, which moves the flow restriction valve and adjusts the flow of the regulating device.

Claims

1. A gas regulating device, comprising a housing defining a gas inlet chamber having a gas inlet pressure and a gas outlet chamber having a gas outlet pressure, the housing further having a flow restriction seat that defines a flow path between the gas inlet chamber and the gas outlet chamber that extends along a flow axis; a flow restriction valve movable relative to the flow restriction seat to adjust a flow between the gas inlet chamber and the gas outlet chamber in the flow path, wherein the flow restriction valve is movable along the flow axis of the flow path; a servo valve including: a valve body attached to a membrane, wherein the membrane defines at least part of the servo chamber in which the servo pressure is present and the membrane positioned between a first membrane support plate and a second membrane support plate; a servo chamber in which a servo pressure is present, wherein the servo chamber is fluidly coupled to the gas inlet chamber through a fixed orifice and to the gas outlet chamber through an adjustable orifice; and a stepper motor for adjusting the adjustable orifice between the servo chamber and the gas outlet chamber, which is configured to cause a change of the servo pressure present in the servo chamber, which is configured to move the flow restriction valve relative to the flow restriction seat along the flow axis to thereby adjust the flow between the gas inlet chamber and the gas outlet chamber of the housing, wherein the fixed orifice is provided by an opening in the flow restriction valve, and the adjustable orifice is defined by the valve body of the servo valve and by the first membrane support plate.

2. The gas regulating device of claim 1, wherein: when the stepper motor is driven in a first direction, the servo valve is moved in a first direction thereby decreasing or closing the adjustable orifice, thereby changing the servo pressure present in the servo chamber towards the gas inlet pressure present in the gas inlet chamber and thereby decreasing or alternatively increasing flow between the gas inlet chamber and the gas outlet chamber; and when the stepper motor is driven in a second direction, the servo valve is moved in a second direction thereby increasing or opening the adjustable orifice, thereby changing the servo pressure present in the servo chamber towards the gas outlet pressure present in the gas outlet chamber and thereby increasing or alternatively decreasing flow between the gas inlet chamber and the gas outlet chamber.

3. The gas regulating device of claim 1, wherein: the flow restriction valve is coupled to the first membrane support plate through a hollow valve stem; and a servo flow channel provided by the hollow valve stem of the flow restriction valve, by the valve body of the servo valve and by the first membrane support plate, is coupled to the gas inlet chamber through the fixed orifice, to the gas outlet chamber through the adjustable orifice, and to the servo chamber.

4. The gas regulating device of claim 1, wherein the adjustable orifice comprises multiple flow channels, wherein the multiple flow channels are arranged in a circumferential pattern around an axis along which the flow restriction valve is axially movable.

5. A method for adjusting a position of a flow restriction valve in an axial direction between a gas inlet chamber and a gas outlet chamber in order to adjust the flow of gas between the gas inlet chamber and a gas outlet chamber, wherein the flow of gas impinges on the flow restriction valve and provides a force on the flow restriction valve in the axial direction, the method comprising: using a stepper motor to adjust a position of a servo valve in a first direction, which decreases a size of an adjustable orifice between a servo chamber and the gas outlet chamber, wherein a fixed orifice is present between the servo chamber and the gas inlet chamber, wherein decreasing the size of the adjustable orifice changes a pressure in the servo chamber towards a gas inlet pressure in the gas inlet chamber and moves the flow restriction valve in a first axial direction thereby adjusting a flow of gas acting on the flow restriction valve in the axial direction between the gas inlet chamber and the gas outlet chamber, wherein the servo valve including a valve body attached to a membrane, wherein the membrane defines at least part of the servo chamber in which the servo pressure is present and the membrane positioned between a first membrane support plate and a second membrane support plate; and using the stepper motor to adjust the position of the servo valve in a second direction, which increases the size of the adjustable orifice between the servo chamber and the gas outlet chamber, wherein increasing the size of the adjustable orifice changes the pressure in the servo chamber towards a gas outlet pressure in the gas outlet chamber and moves the flow restriction valve in a second axial direction thereby adjusting the flow of gas acting on the flow restriction valve in the axial direction between the gas inlet chamber and the gas outlet chamber, wherein the fixed orifice is provided by an opening in the flow restriction valve, and the adjustable orifice is defined by the valve body of the servo valve and by the first membrane support plate.

6. The method of claim 5, wherein decreasing the size of the adjustable orifice changes the pressure in the servo chamber towards the gas inlet pressure in the gas inlet chamber and decreases the flow of gas between the gas inlet chamber and a gas outlet chamber.

7. The method of claim 6, wherein increasing the size of the adjustable orifice changes the pressure in the servo chamber towards the gas outlet pressure in the gas outlet chamber and increases the flow of gas between the gas inlet chamber and a gas outlet chamber.

8. A regulating device, comprising a housing providing a first chamber in which a first pressure is present and a second chamber in which a second pressure is present, the housing further providing a flow restriction seat that defines a flow path between the first chamber and the second chamber that extends along a flow axis; a flow restriction valve positioned in the housing, wherein the flow restriction valve comprises a valve body acting together with the flow restriction seat to adjust a flow from the first chamber into the second chamber, the flow restriction valve being movable along the flow axis of the flow path; a servo valve positioned in the housing, wherein the servo valve comprises a valve body attached to a membrane, wherein the membrane defines at least part of a servo chamber in which a servo pressure is present, the membrane positioned between a first membrane support plate and a second membrane support plate, and wherein the servo chamber is connected to the first chamber though a fixed orifice, and the servo chamber is connected to the second chamber though an adjustable orifice; and a stepper motor for moving the valve body of the servo valve, thereby adjusting the adjustable orifice, wherein the adjustment of the adjustable orifice causes a change of the servo pressure present in the servo chamber which is used to move the flow restriction valve to adjust the flow from the first chamber into the second chamber, wherein the fixed orifice is provided by an opening in the flow restriction valve, and the adjustable orifice is defined by the valve body of the servo valve and by the first membrane support plate.

9. The regulating device of claim 8, wherein: when the stepper motor is driven in a first direction, the valve body of the servo valve is moved in a first direction thereby decreasing or closing the adjustable orifice, thereby changing the servo pressure present in the servo chamber towards the first pressure present in the first chamber and thereby increasing or alternatively decreasing flow resistance over flow restriction valve and thereby decreasing or alternatively increasing flow over the flow restriction valve from the first chamber into the second chamber; when the stepper motor is driven in a second direction, the valve body of the servo valve is moved in a second direction thereby increasing or opening the adjustable orifice, thereby changing the servo pressure present in the servo chamber towards the second pressure present in the second chamber and thereby decreasing or alternatively increasing flow resistance over flow restriction valve and thereby increasing or alternatively decreasing flow over the flow restriction valve from the first chamber into the second chamber.

10. The regulating device of claim 8, wherein: the valve body of the flow restriction valve is coupled to the first membrane support plate through a hollow valve stem; a servo flow channel provided by the hollow valve stem, by the valve body of the servo valve and by the first membrane support plate, is coupled to the first chamber though the fixed orifice, to the second chamber though the adjustable orifice, and to the servo chamber; the fixed orifice is provided by an opening in the valve body of the flow restriction valve or by an opening in the hollow valve stem; the adjustable orifice is defined by the valve body of the servo valve and by the first membrane support plate.

11. The regulating device of claim 10, wherein the servo chamber is connected to the servo flow channel between the fixed orifice and the adjustable orifice.

12. The regulating device of claim 10, wherein the valve body of the servo valve is moveable relative to the first membrane support plate by the stepper motor to thereby adjust the adjustable orifice.

13. The regulating device of claim 8, wherein the valve body of the servo valve is coupled to the stepper motor by a spindle, wherein the spindle converts a rotation of the stepper motor into a linear movement of the valve body of the servo valve.

14. The regulating device of claim 8, wherein the second pressure within the second chamber is measured by a sensor, and that the stepper motor is operated on basis on a pressure measured by the sensor in such a way that the second pressure within the second chamber is kept substantially constant.

15. The regulating device of claim 8, wherein the flow restriction valve and the servo valve are coaxially aligned.

16. The regulating device of claim 8, further comprising a safety shut-off valve positioned in the housing, wherein the safety shut-off valve comprises a valve body acting together with a valve seat provided by the housing, wherein a flow from the first chamber into the second chamber is prevented when the valve body of the safety shut-off valve is pressed against the valve seat provided by the housing, wherein a flow from the first chamber into the second chamber is possible when the valve body of the safety shut-off valve is lifted up from the valve seat provided by the housing.

17. The regulating device of claim 16, wherein the safety shut-off valve, the flow restriction valve and the servo valve are all coaxially aligned.

18. The regulating device of claim 16, wherein the flow restriction valve adjusts the flow from the first chamber into the second chamber when the valve body of the safety shut-off valve is lifted up from the valve seat provided by the housing.

Description

BRIEF DESCRIPTION OF THE FIGURES

(1) Preferred developments of the invention are provided by the description which follows. Exemplary embodiments are explained in more detail on the basis of the drawing, in which:

(2) FIG. 1 shows a cross sectional view of an illustrative gas regulating device;

(3) FIG. 2 shows a detailed view of part of FIG. 1 in a first state;

(4) FIG. 3 shows the detailed view of FIG. 2 in a second state;

(5) FIG. 4 shows the detailed view of part of FIG. 3; and

(6) FIG. 5 shows a cross sectional view of another illustrative gas regulating device.

DESCRIPTION

(7) FIGS. 1 though 5 show illustrative embodiments of gas regulating devices. The use of the invention in connection with gas regulating devices is preferred. However, the invention can also be used in connection with regulating devices for other mediums like water or cooling agents.

(8) FIG. 1 shows a cross sectional view of an illustrative gas regulating device 10. The illustrative gas regulating device 10 comprises a housing 11 providing a first chamber 12, hereinafter called first gas chamber, in which a first gas pressure is present, and a second chamber 13, hereinafter called second gas chamber, in which a second gas pressure is present. The first chamber 12 can also be called an inlet chamber and the second chamber 13 can also be called an outlet chamber. The first gas pressure present in the first gas chamber 12 can also be called an inlet gas pressure and the second gas pressure present in the second gas chamber 13 can also be called an outlet gas pressure.

(9) The illustrative gas regulating device 10 may further comprise a safety shut-off valve 14 positioned in the housing 10. Other regulating devices for other mediums like water or cooling agents may not comprise such a safety shut-off valve 14.

(10) The illustrative safety shut-off valve 14 comprises a valve body 15 carried by a valve stem 16. The valve body 15 of the safety shut-off valve 14 acts together with a valve seat 17 provided by the housing 11. The valve body 15 of the safety shut-off valve 14 is pressed against the valve seat 17 by a spring element 18 of the safety shut-off valve 14. The valve body 15 of the safety shut-off valve 14 can be lifted up from the valve seat 17 against the force of the spring element 18 by an actuator 19, namely by energizing a magnetic coil.

(11) A gas flow from the first gas chamber 12 into the second gas chamber 13 is impossible when the valve body 15 of the safety shut-off valve 14 is pressed against the valve seat 17 provided by the housing 11. A gas flow from the first gas chamber 12 into the second gas chamber 13 is possible when the valve body 15 of the safety shut-off valve 14 is lifted up from the valve seat 17 provided by the housing 11.

(12) The gas regulating device 10 further comprises a flow restriction valve 20 positioned in the housing 11. The flow restriction valve 20 comprises a valve body 21 acting together with a flow restriction seat 22 provided by the housing 11. It is also possible that the flow restriction seat 22 is not provided by the housing 11 but by a different part placed inside the housing 11. The flow restriction valve 20 adjusts the gas flow from the first gas chamber 12 into the second gas chamber 13 when the valve body 15 of the safety shut-off valve 14 is lifted up from the valve seat 17 provided by the housing 11.

(13) FIGS. 1 and 2 show the flow restriction valve 20 in a relatively closed state and FIG. 3 shows the flow restriction valve 20 in a relatively opened state. In both states, the flow restriction valve 20 allows a gas flow from the first gas chamber 12 into the second gas chamber 13, namely in the state of FIGS. 1 and 2 a relatively small or relatively low gas flow and in the state of FIG. 3 a relatively big or relatively high gas flow.

(14) The illustrative flow restriction valve 20 is shown coaxially aligned to the safety shut-off valve 14. Coaxial alignment of flow restriction valve 20 and safety shut-off valve 14 is optional. The invention would also work when the same are eccentric placed or when the flow restriction valve 20 is placed at an angle in respect to the shut-off valve 14.

(15) The illustrative gas regulating device 10 further comprises a servo valve 23 positioned in the housing 11. The servo valve 23 comprises a valve body 24 attached to a membrane 25. The membrane 25 defines a servo gas chamber 26 in which a servo gas pressure is present. The servo gas chamber 26 is connected to the first (inlet) gas chamber 12 though a fixed flow restriction element, hereinafter called fixed orifice 27. The servo gas chamber 26 is also connected to the second (outlet) gas chamber 13 though an adjustable flow restriction element, hereinafter called adjustable orifice 28.

(16) The illustrative membrane 25 is positioned between a first, upper membrane support plate 29 and a second, lower membrane support plate 30. The illustrative servo valve 23 including the valve body 24, the membrane 25 and the membrane support plates 29, 30 is shown positioned in a space defined by a lower housing section, wherein the membrane 25 divides that space, with the servo gas chamber 26 positioned below the membrane 25 and a gas chamber 36 positioned above the membrane 25.

(17) The gas chamber 36 positioned above the membrane 25 is shown connected with the second gas chamber 13 by an opening 37 in the housing 11 so that the same gas pressure is present within the gas chamber 36 positioned above the membrane 25 and the second gas chamber 13.

(18) The illustrative valve body 21 of the flow restriction valve 20 is mechanically coupled to the first membrane support plate 29 through a hollow valve stem 31. In some instances, valve stem 31 and first membrane support plate 29 can be provided by one single part. In the embodiment shown, a servo gas flow channel 32 is provided by the hollow valve stem 31, by the valve body 24 of the servo valve 23 and by the first membrane support plate 29. The servo gas flow channel 32 is coupled to the first gas chamber 12 through the fixed orifice 27, is coupled to the second gas chamber 13 through the adjustable orifice 28, and is coupled to the servo gas chamber 26. The servo gas chamber 26 is connected to the servo gas flow channel 32 between the fixed orifice 27 and the adjustable orifice 28. FIG. 4 illustrates the servo gas flow 38 though the servo gas flow channel 32 between the chambers 12, 13, 26. The area above the membrane 25 around the servo valve 23 is connected with the servo pressure, which occurs between the fixed orifice 27 and adjustable orifice 28.

(19) The fixed orifice 27 is provided by an opening in the valve body 21 of the flow restriction valve 20. Alternatively, the fixed orifice 27 is provided by an opening in the valve stem 31. In the embodiment shown, the adjustable orifice 28 is provided by the valve body 24 of the servo valve 23 and by the first membrane support plate 29. The servo valve 23 is shown coaxially aligned to safety shut-off valve 14 and to the flow restriction valve 20, but this is not required.

(20) The illustrative gas regulating device 10 further comprises a gas tight stepper motor 33 for moving the valve body 24 of the servo valve 23 thereby adjusting the adjustable orifice 28. The stepper motor 33 acts together with a spindle 34 and a threaded section of the valve body 24 of the servo valve 23. By rotating the stepper motor 33 the spindle 34 becomes rotated, whereby an outer thread of the spindle 34 engages with an inner thread of the threaded section of the valve body 24 thereby causing a linear movement of the valve body 24 of the servo valve 23.

(21) In this case, the membrane 25 prevents the servo valve 23 for rotating with the spindle 34. It is also possible to use other means like a pin, to prevent the servo valve 23 from rotating with the spindle 34. The spindle 34 converts the rotation of the stepper motor 33 into a linear movement of the valve body 24 of the servo valve 23. So, in the illustrative embodiment, the valve body 24 of the servo valve 23 is moveable relative to the first membrane support plate 29 by the stepper motor 33 thereby adjusting the adjustable orifice 28.

(22) A spring element 35 acts on the valve body 24 of the servo valve 23. This spring element 35 is optional, to push any axial play in the stepper motor 33, or between the spindle 34 and the threaded section of the valve body 24 to one side. The spring element 35 does not have a supporting function towards linear movement of the valve body 24 of the servo valve 23.

(23) Regardless of the position of the servo valve 23, the flow restriction valve 20 always seeks for equilibrium of axial forces. In FIG. 2 the axial forces F1, F2, F3 and F4 acting on the pressure regulation valve 20 and on the servo valve 23 are shown, whereby the axial forces F1, F2, F3 and F4 depend on the pressure p1 within the first gas chamber 12, the pressure p2 within the second gas chamber 13 and the servo gas pressure p3 within the servo gas chamber as follows:
F1=p1*A1
F2=p2*A2
F3=p2*A3
F4=P3*A4
wherein A1, A2 are the effective areas of the valve body 21, and wherein A3, A4 are the effective areas of the support plates 29, 30 and membrane 25. A1 might be equal to A2 and A3 might be equal to A4.

(24) Assuming that an additional undefined force F5 is acting on the flow restriction valve 20, in a static situation the following scenarios are possible: (1) The resulting force FR=F1F2+F3F4+F5>0: Then the flow restriction valve 20 is pushed downwards towards the servo valve 23 which has a defined position which is fixed by the spindle 34 for the moment. Result of this movement is the opening of that adjustable orifice 28 decreases and the flow resistance increases through adjustable orifice 28. Because of this increased flow resistance, servo pressure p3 will increase towards pressure p1, and force F4 will increase accordingly. Resulting force FR will decrease towards zero. (2) The resulting force FR=F1F2+F3F4+F5<0: Then the flow restriction valve 20 is pushed upwards away from the servo valve 23 which has a defined position. Result of this movement is that opening of the adjustable orifice 28 increases and the flow resistance decreases through the adjustable orifice 28. Because of this decreased flow resistance, servo pressure p3 will decrease towards pressure p2 and force F4 will decrease accordingly. Resulting force FR will increase towards zero.

(25) If resulting force FR is not equal to zero, the servo pressure p3 will change to compensate for any unbalance.

(26) In a dynamic situation, the following scenarios are possible: (1) When the stepper motor 33 is rotated in a first direction, the valve body 24 of the servo valve 23 is moved in a first direction towards the flow restriction valve 20: thereby decreasing or closing the adjustable orifice 28; thereby changing the servo gas pressure present in the servo gas chamber 26 towards the first gas pressure present in the first gas chamber 12; thereby creating a resulting force that acts on the membrane 25 and flow restriction valve 20 in the same direction as the moving direction of the servo valve 23; thereby moving the flow restriction valve 20 in the same direction as the moved servo valve 23, away from the servo valve 23; thereby restoring increasing or opening the adjustable orifice 28; thereby restoring servo pressure p3; thereby restoring equilibrium of forces; thereby increasing the flow resistance over flow restriction valve 20; and thereby decreasing the gas flow over the flow restriction valve 20 from the first gas chamber 12 into the second gas chamber 13. With such an actuation, the gas regulating device 10 can be transferred from the state shown in FIG. 3 into the state shown in FIGS. 1 and 2. (2) When the stepper motor 33 is rotated in a second direction, the valve body 24 of the servo valve 22 is moved in a second direction opposite to the above first direction: thereby increasing or opening the adjustable orifice 28; thereby changing the servo gas pressure present in the servo gas chamber 26 towards the second gas pressure present in the second gas chamber 13; thereby creating a resulting force that acts on the membrane 25 and flow restriction valve 20 in the opposite direction as the moving direction of the servo valve 23; thereby moving the flow restriction valve 20 in the opposite direction as the moved servo valve 23; thereby restoring decreasing or closing the adjustable orifice 28; thereby restoring servo pressure p3; thereby restoring equilibrium of forces; thereby decreasing flow resistance over flow restriction valve 20; and thereby increasing gas flow over the flow restriction valve 20 from the first gas chamber 12 into the second gas chamber 13. With such an actuation, the gas regulating device 10 can be transferred from the state shown in FIGS. 1 and 2 into the state shown in FIG. 3.

(27) The above actuations are initiated by rotating the stepper motor 33 and thereby moving the valve body 24 of the servo valve 23. The movements of the valve body 24 of the servo valve 23 cause a pressure change within the servo gas chamber 26. This pressure change within the servo gas chamber 26 finally causes the movement of the valve body 21 of the flow restriction valve 20, and thereby changes the gas flow over the flow restriction valve 20 from the first gas chamber 12 into the second gas chamber 13. The position of the flow restriction valve 20 depends on the position of the servo gas valve 23.

(28) The adjustment of the position of the valve body 21 of the flow restriction valve 20 and thereby the adjustment of the flow resistance over the flow restriction valve 20 takes place until the system is in equilibrium. In equilibrium, the flow restriction valve 20 is in force equilibrium and flow equilibrium, meaning that resultant forces that act on the restriction valve 20 are zero and that the servo flow 23 that exits the servo chamber 26 via the adjustable orifice 28 equals the servo flow that enters the servo chamber 26 via the fixed orifice 27. Servo flow that exits the servo chamber 26 via the adjustable orifice 28 defines the distance between the servo valve 23 and the upper support plate 29 precisely.

(29) The illustrative gas regulating device 10 comprises the flow restriction valve 20 positioned inside, above or below a flow port of safety shut-off valve 14. The illustrative gas regulating device 10 provides three levels of pressure, namely first/inlet gas pressure, second/outlet gas pressure and servo gas pressure. The first/inlet gas pressure is input from the system. The second/outlet gas pressure is the result of the position of the flow restriction valve 20.

(30) Inside the flow restriction valve 20 is the servo gas valve 23 positioned such that it can manipulate the servo gas pressure level by opening or closing the adjustable outlet orifice 28 to make use of that servo gas pressure for moving or positioning the flow restriction valve 20 at a defined distance from that servo gas valve 23. The position of that servo gas valve 23 is defined by the stepper motor 23. With the position of the servo gas valve 23 and the defined distance between flow restriction valve 20 and servo gas valve 23, the position flow restriction valve 20 and hence flow resistance over the flow restriction valve 20 is precisely defined and controlled.

(31) In some cases, the second gas pressure present within the second gas chamber 13 can be measured by a sensor (not shown). In this case, the stepper motor 33 may be operated on basis on the pressure measured by said sensor in such a way that the second gas pressure within the second gas chamber 13 is kept constant at a defined level.

(32) In this case, the flow restriction valve 20 is used as a pressure controller. Alternatively, it is also possible to measure the gas flow through the gas regulating device and to operate stepper motor 33 to keep the gas flow constant. In this case, the flow restriction valve 20 is used as a flow controller.

(33) In the illustrative embodiment shown in FIGS. 1 to 4, the flow restriction valve 20 and the safety shut-off valve 14 become opened in opposite directions. In FIGS. 1 to 4, the safety shut-off valve 14 is moved upwards to become opened and flow restriction valve 20 is moved downwards to become opened. So, in FIGS. 1 to 4, the flow restriction valve 20 opens in the direction of the gas flow through the valve set 17 when the safety shut-off valve 14 is opened.

(34) FIG. 5 shows an illustrative embodiment of a gas regulating device 10 in which the flow restriction valve 20 and the safety shut-off valve 14 become opened in the same direction. In FIG. 5, the safety shut-off valve 14 and the flow restriction valve 20 are both moved upwards to become opened. So, in FIG. 5 the flow restriction valve 20 opens in the opposite direction of the gas flow through the valve set 17 when the safety shut-off valve 14 is opened.

(35) In this case the following applies: When the stepper motor is rotated in a first direction, the valve body of the servo valve is moved in a first direction thereby decreasing or closing the adjustable flow restriction element, thereby changing the servo pressure present in the servo chamber towards the first pressure present in the first chamber and thereby decreasing flow resistance over flow restriction valve and thereby increasing flow over the flow restriction valve from the first chamber into the second chamber. When the stepper motor is rotated in a second direction, the valve body of the servo valve is moved in a second direction thereby increasing or opening the adjustable flow restriction element, thereby changing the servo pressure present in the servo chamber towards the second pressure present in the second chamber and thereby increasing flow resistance over flow restriction valve and thereby decreasing flow over the flow restriction valve from the first chamber into the second chamber. The position of the servo valve is defined as described above by the stepper motor. With the position of the servo valve and the equilibrium distance between flow restriction valve and servo valve, the position of flow restriction valve and hence flow resistance is precisely defined and controlled. All other details are the same. For that, identical reference signs are used and reference is made to the description of FIGS. 1 to 4.

LIST OF REFERENCE SIGNS

(36) 10 gas regulating device 11 housing 12 first/inlet gas chamber 13 second/outlet gas chamber 14 safety shut-off valve 15 valve body 16 valve stem 17 valve seat 18 spring element 19 actuator 20 flow restriction valve 21 valve body 22 flow restriction seat 23 servo valve 24 valve body 25 membrane 26 servo gas chamber 27 fixed orifice 28 adjustable orifice 29 first, upper membrane support plate 30 second, lower membrane support plate 31 valve stem 32 servo gas flow channel 33 stepper motor 34 spindle 35 spring element 36 gas chamber 37 opening 38 gas flow