Additive manufacturing of crystalline materials
10214833 ยท 2019-02-26
Assignee
Inventors
Cpc classification
B33Y10/00
PERFORMING OPERATIONS; TRANSPORTING
C30B7/14
CHEMISTRY; METALLURGY
International classification
C30B7/00
CHEMISTRY; METALLURGY
C30B25/10
CHEMISTRY; METALLURGY
Abstract
The present invention relates to additive manufacturing methods, in which crystalline materials can be formed by using a liquid precursor. In particular embodiments, the crystalline material is a perovskite. The methods include the use of a thermal voxel, which can be translated to form any arbitrary pattern of initial crystalline seed structure(s). Then, the seed structure can be incubated to promote crystal growth and/or crystal dissolution, thereby providing a patterned crystalline material.
Claims
1. A method of making an organometallic crystalline material, the method comprising: inducing an initial organometallic crystalline seed by positioning a direct write source at a first position on a substrate, wherein the direct write source is configured to produce a thermal voxel and has a wavelength of from about 500 nm to about 1,000 nm, and wherein a liquid precursor is in proximity to the substrate, and wherein the seed is a product arising from thermal heating of the liquid precursor by the thermal voxel; and promoting crystal growth or crystal dissolution of the seed, thereby providing the organometallic crystalline material that is patterned upon the substrate, wherein the organometallic crystalline material comprises an organic moiety.
2. The method of claim 1, wherein the inducing step comprises translating the thermal voxel from the first position to a second position on the substrate.
3. The method of claim 2, wherein the inducing step further comprises, after the translating step, remaining at the first position for a dwell time sufficient to result in the initial organometallic crystalline seed and then remaining at the second position for a dwell time sufficient to result in a further organometallic crystalline seed.
4. The method of claim 1, wherein the inducing step comprises translating the thermal voxel to a plurality of positions on the substrate, and wherein the plurality of positions, together, provide the initial organometallic crystalline seed comprising a pattern.
5. The method of claim 1, wherein the promoting step comprises incubating the substrate and the initial organometallic crystalline seed under an illumination source.
6. The method of claim 5, wherein the promoting step further comprises employing the liquid precursor comprising a precursor concentration optimized for crystal growth or comprises employing a further liquid precursor comprising a further precursor concentration optimized for crystal growth.
7. The method of claim 1, wherein the promoting step further comprises employing the liquid precursor comprising a precursor concentration optimized for crystal dissolution or comprises employing a further liquid precursor comprising a further precursor concentration optimized for crystal dissolution.
8. The method of claim 1, wherein the liquid precursor comprises an organic precursor reagent and a metal precursor reagent, in which a reaction between the organic and the metal precursor reagents produces the seed and/or the organometallic crystalline material.
9. The method of claim 8, wherein the liquid precursor comprises one or more of the following precursor reagents: AX.sup.1.sub.m, BX.sup.2.sub.n, AY.sub.m, and/or BY.sub.n, in which each of m and n is, independently, a number of from about 1 to 5; A comprises an organic moiety; B comprises a metal; each of X.sup.1 and X.sup.2, independently, comprises a halogen; and Y comprises a leaving group; and wherein the reaction between two or more of the precursor reagents produces the seed and/or the organometallic crystalline material having a formula ABX.sup.1.sub.3, ABX.sup.2.sub.3, or ABX.sup.1.sub.aX.sup.2.sub.b, in which a+b=3.
10. The method of claim 1, wherein the organometallic crystalline material comprises a perovskite.
11. The method of claim 10, wherein the organometallic crystalline material comprises a formula of ABX.sub.3, A.sub.2BX.sub.4, A.sub.4BX.sub.6, or A.sub.4B.sub.3X.sub.10, in which each A, independently, comprises an organic moiety; each B, independently, comprises a metal; and each X, independently, comprises a halogen.
12. The method of claim 11, wherein A is R.sup.1NH.sub.3.sup.+ or (NR.sup.1aR.sup.1b)R.sup.2(NR.sup.1aR.sup.1b).sup.+ in which each of R.sup.1, R.sup.1a, and R.sup.1b is, independently, selected from the group consisting of H, optionally substituted C.sub.1-24 alkyl, optionally substituted C.sub.2-24 alkenyl, optionally substituted C.sub.3-24 cycloalkyl, optionally substituted C.sub.4-18 aryl, optionally substituted C.sub.1-24 alk-C.sub.4-18 aryl, and optionally substituted C.sub.1-24 alk-C.sub.3-24 cycloalkyl, and in which R.sup.2 is an optionally substituted C.sub.1-24 alkylene; and B is a metal cation.
13. The method of claim 1, wherein the substrate comprises an absorber region or an absorber film.
14. The method of claim 13, wherein the absorber region or absorber film comprises a metal and/or a graphitic carbon, or composites or alloys thereof.
15. The method of claim 1, wherein the direct write source is a continuous wave laser source.
16. The method of claim 1, wherein the seed and/or the organometallic crystalline material is a product arising from solvothermal synthesis and/or crystallization in the presence of the liquid precursor.
17. The method of claim 1, wherein the positioning the direct write source comprises raster scanning across a reflectance mask.
18. The method of claim 17, wherein the positioning the direct write source comprises raster scanning an aligned set of reflectance masks, and wherein the set comprises a plurality of reflectance masks configured to provide a three-dimensional printed structure.
19. A method of making an organometallic crystalline perovskite material, the method comprising: providing a liquid precursor comprising an organic component and a metal component, in which a reaction between the organic component and the metal component produces an initial organometallic crystalline perovskite seed, wherein the liquid precursor is in proximity to a substrate; inducing formation of the initial organometallic crystalline perovskite seed by positioning a direct write source at a first position on the substrate, wherein the direct write source is configured to produce a thermal voxel within a volume of the liquid precursor and has a wavelength of from about 500 nm to about 1,000 nm, and wherein the initial organometallic crystalline perovskite seed is a product arising from thermal heating of the liquid precursor by the thermal voxel; and promoting crystal growth or crystal dissolution of the initial organometallic crystalline perovskite seed, thereby providing the organometallic crystalline perovskite material that is patterned upon the substrate, wherein the organometallic crystalline perovskite material comprises an organic moiety.
20. The method of claim 19, wherein the inducing step comprises translating the thermal voxel from the first position to a second position on the substrate and then remaining at the second position for a dwell time sufficient to result in a further organometallic crystalline perovskite seed.
21. The method of claim 19, wherein the inducing step comprises translating the thermal voxel to a plurality of positions on the substrate, and wherein the plurality of positions, together, provide the initial organometallic crystalline perovskite seed comprising a pattern.
22. The method of claim 19, wherein the promoting step comprises incubating the substrate and the initial organometallic crystalline perovskite seed under an illumination source.
23. The method of claim 19, wherein the liquid precursor comprises one or more of the following precursor reagents: AX.sup.1.sub.m, BX.sup.2.sub.n, AY.sub.m, and/or BY.sub.n, in which each of m and n is, independently, a number of from about 1 to 5; A comprises an organic moiety; B comprises a metal; each of X.sup.1 and X.sup.2, independently, comprises a halogen; and Y comprises a leaving group; and wherein the reaction between two or more of the precursor reagents produces the seed and/or the organometallic crystalline perovskite material having a formula ABX.sup.1.sub.3, ABX.sup.2.sub.3, or ABX.sup.1.sub.aX.sup.2.sub.b, in which a+b=3.
24. The method of claim 23, wherein the organometallic crystalline perovskite material has a formula of ABX.sub.3, A.sub.2BX.sub.4, A.sub.4BX.sub.6, or A.sub.4B.sub.3X.sub.10, in which each A, independently, comprises an organic moiety; each B, independently, comprises a metal; and each X, independently, comprises a halogen.
25. The method of claim 19, wherein the substrate comprises an absorber region.
26. The method of claim 19, wherein the direct write source is a continuous wave laser source.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE INVENTION
(13) The present invention relates to methods, as well as systems implementing such methods, for direct write fabrication of a crystalline material. The methods rely on applying a thermal voxel within a liquid precursor, which results in the formation of an initial crystalline seed. This seed, in turn, can be used to initiate further crystal growth or to promote crystal dissolution, thereby providing a crystalline material.
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(15) An initial crystalline seed can be formed in any useful manner. As also seen in
(16) Translation 106 of the thermal voxel results in a patterned seed structure. Arbitrary structures including crystalline seeds can be formed by translating the thermal voxel to various positions on the substrate. The thermal voxel can be translated, with respect to a position on the substrate, in any useful manner. For instance, either the direct write source can be translated or the substrate can be translated. At each position, the thermal voxel can be maintained at a sufficient dwell time to allow the nucleation reaction to occur before moving to another position.
(17) A thermal voxel is provided when a volume of the liquid precursor sufficiently absorbs a portion of the electromagnetic spectrum provided by the direct write source, and in which this absorption provides a sufficient thermal gradient to facilitate a solvothermal reaction. Thus, in one non-limiting embodiment, if the precursor reagent sufficiently absorbs the direct write source, then an absorber region is not required. In another non-limiting embodiment, fabrication using thermal voxels begins by providing an optically absorbing structure (e.g., an absorber region 110 in proximity to a liquid precursor 103, as in
(18) After forming the initial crystalline seed, the method can further include promoting crystal growth and/or crystal dissolution of the seed, thereby providing a crystalline material that is patterned upon the substrate. As seen in
(19) As seen in
(20) Any useful absorber (e.g., a patterned absorber region or a deposited absorber film) can be employed to increased absorption of the direct write source, as compared to the substrate's material and/or to the liquid precursor. Exemplary absorbers include optically opaque materials, such as metals (e.g., including oxides thereof), graphitic carbon (e.g., carbon), as well as composites and multilayers thereof. For instance, the absorber can be a patterned material (e.g., an absorber region in
(21) As seen in
(22) The initial crystalline seed can be formed with any useful nucleation reaction involving an increased pressure and/or temperature. Increased pressure includes a pressure greater than ambient pressure (e.g., atmospheric pressure), such as a pressure greater than about 10.sup.5 Pa (e.g., of from about 10.sup.6 Pa to about 10.sup.9 Pa) or an autogenous pressure (e.g., pressure induced by other conditions, such as increasing reaction temperature); and increased temperature includes a temperature greater than ambient temperature (e.g., room temperature), such as a temperature equal to or greater than any useful baseline temperature (e.g., ambient temperature, such as room temperature), such as a temperature less than or equal to or greater than about 300 K (e.g., of from about 300K to about 2500 K).
(23) Exemplary nucleation reactions include those involving inverse temperature solubility or retrograde solubility, in which an increase in temperature results in the formation of a crystalline seed. Without wishing to be limited by mechanism, in some solute and solvent combinations, an increase in temperature can result in solvent exclusion, thereby initiating crystalline seed formation; and/or result in an exothermic dissolution reaction, which promotes reactant precipitation; and/or result in a phase change, thereby providing a discontinuous solubility curve, in which retrograde solubility is observed within a particular temperature range. Arrays of such seeds can be formed by providing an array of absorber regions (e.g., as in
(24) Experimental conditions within the thermal voxel can be controlled in any useful manner. For instance, the temperature of the reaction zone is determined, in part, by the extent of absorption (by the liquid precursor or by the absorber) for the emitted electromagnetic radiation of the direct write source. Thus, temperature can be controlled by choosing a liquid precursor or absorber having a particular absorption, by selecting a wavelength of the direct write source having a desired absorption spectrum (by the liquid precursor and/or by the nascent deposited material), and/or by providing a continuous wave source for constant supply of the thermal gradient. In another instance, temperature can be controlled by the size of the focused region provided by the direct write source (e.g., for a laser, the size can include a dimension of the focused laser spot). In yet another instance, the thermal conductivity of the substrate can be selected to provide the desired temperature rise.
(25) Nucleation of the crystalline seed and subsequent crystal growth can be controlled in any useful manner. In one instance, thermal diffusion may also play a role, in which a generated thermal gradient can be maintained in any useful manner. In another instance, the size of the initial crystalline seed may play a role, in which crystal dissolution can be related to the concentration of the precursor(s) within the liquid precursor (see, e.g.,
(26) The dwell time of the thermal voxel is understood to be a time for which the direct write source is maintained at a particular position in proximity to the substrate. By increasing the dwell time, a constant source of thermal energy is provided at that particular position; and the dwell time can be selected to sufficiently result in an initial crystalline seed at that particular position. Chemical and physical characteristics of the liquid precursor can also play a role, in which the concentration, viscosity, and/or heat capacity of the liquid precursor can be selected to provide desired thermal properties.
(27) Multidimensional structures (e.g., two-dimensional or three-dimensional structures) can be formed. If desired, scaffolds can be employed to during printing. Optionally, such scaffolds can be removed to after printing to provide a printed structure. In some embodiments, the scaffold can be maintained in the final structure. Such scaffolds can be useful for mechanical support when printing three-dimensional structures or nano-scaled features, as well as for providing an absorber to initiate formation of a thermal voxel. Exemplary scaffolds include an optically transparent scaffold (e.g., that can be removed after printing) or an absorbing scaffold. Exemplary scaffolds include those formed from a hydrogel, a sol gel, an aerogel, a ceramic, a xerogel, a protein gel (e.g., including gelatin or a serum protein), a saccharide (e.g., including alginate or agar), etc.
(28) Any useful structure can be printed. Exemplary structures include nanostructures (e.g., nanowires, nanotubes, nanorods, nanocomposites, or nanoparticles), microstructures (e.g., microparticles, microplates, or microspheres), perovskites, metal-organic framework structures, zeolites, organic-inorganic hybrid materials, ceramics, metal, metal oxides, metallic glasses, magnetic structures, particles (e.g., quantum dots), wires, photonic structures (e.g., waveguides), crystals (e.g., photonic crystals or electromagnetic bandgap crystals), crystallites, metamaterials (e.g., mechanical materials, optical metamaterials, or electromagnetic bandgap materials), elemental carbon structures (e.g., carbon nanotubes, fullerenes, or graphitic carbon materials, such as a graphene, a graphite, a non-graphitic carbon materials, as well as allotropes of such materials), as well as alloys thereof (e.g., metal alloys and shape memory alloys) and/or arrays thereof and/or composites thereof. Such printed structures can have any use (e.g., such as those described herein, including custom metal parts, electronics (e.g., transistors or antennas), optoelectronics, photovoltaic devices (e.g., photovoltaic cells), displays, sensors, etc., with ultrahigh resolution for industrial and/or consumer product markets). Additional structures and uses are described in Arnold C B et al., Laser direct-write techniques for printing of complex materials, MRS Bull. 2007; 32:23-31, which is incorporated herein by reference in its entirety.
(29) Liquid Precursor and Absorber Material
(30) The present invention employs a liquid precursor to provide precursor reagents for the initial crystalline seed that is induced within the thermal voxel. In general, the liquid precursor includes a solvent and one or more precursor reagents. Any useful solvent and reagents may be employed (e.g., any described herein), and optional additives may be included to control morphology, oxidation site, pore size, ligand coordination, encapsulated agents, etc.
(31) For any of the methods herein, the liquid precursor can be optimized for the inducing step and/or the promoting step. In one instance, the initial crystalline seed is formed in a first liquid precursor that is optimized for forming the seed, and crystal growth is formed in a second liquid precursor that is optimized for growing the seed into a crystalline material. In another instance, the initial crystalline seed is formed in a first liquid precursor that is optimized for forming the seed, and crystal dissolution is conducted in a second liquid precursor that is optimized for dissolving the seed into a crystalline material. The first and second liquid precursors can be same or different. Different liquid precursors can include those having different precursor reagents, the same precursor reagents available at a different concentration, or a change in solvent or solvent mixture. For instance, the first liquid precursor can be formed in a solvent system (including one or more solvents) that provides retrograde solubility of the solute, but the second liquid precursor can be formed in a second solvent system that provides high quality crystal growth. In another instance, that second liquid precursor can be formed in a solvent system and/or a precursor concentration range that provides controlled crystal dissolution.
(32) Exemplary solvents include water, an aqueous solution, a buffer, an electrolyte solution (e.g., a salt solution), an ionic liquid, an organic solvent (e.g., a polar aprotic solvent, a nonpolar solvent, a cosolvent, etc., such as N,N-dimethylformamide (DMF), dimethyl sulfoxide (DMSO), -butyrolactone (GBL), N-methyl-2-pyrrolidone (NMP), 1,8-diiodooctane (DIO), chlorobenzene (ClBz), 1-octadecene (ODE), toluene, tetrahydrofuran (THF), etc.), and a fluorous solvent (e.g., a perfluorinated solvent), as well as mixtures thereof. The precursor liquid can include any useful additive, such as coordinating ligands (e.g., fatty acid ligands), surfactants (e.g., oleic acid and oleylamine), etc.
(33) The liquid precursor can include any useful combination of one or more precursor reagents and solvents. The liquid precursor can be optimized to possess inverse temperature solubility or inverse retrograde solubility, in which exposure to a higher temperature results in a lower solubility and in the formation of an initial crystalline seed. In one non-limiting instance, for controlled dissolution in a reaction characterized by inverse temperature solubility, a decrease in temperature can provide controlled dissolution of the crystalline seed.
(34) The initial crystalline seed and/or the crystalline material can include any useful material, such as an organometallic material. Exemplary organometallic material includes those having the formula ABX.sub.3, A.sub.2BX.sub.4, A.sub.4BX.sub.6, or A.sub.4B.sub.3X.sub.10, in which each A, independently, includes a cation, an organic moiety, or an alkali metal; each B, independently, includes a metal; and each X, independently, includes a halogen (e.g., each A, B, and X in each formula can be the same or different; B is a metal cation, X is a halide (i.e., a halogen anion)). Such materials can include mixed halide formulas, in which the material includes a mixture of two or more halides within a crystal structure, e.g., CH.sub.3NH.sub.3PbBr.sub.xCl.sub.3-x(MAPbBr.sub.xCl.sub.3-x), as well as others described herein.
(35) Exemplary organometallic materials include CH.sub.3NH.sub.3PbI.sub.3 (MAPbI.sub.3), CH.sub.3NH.sub.3PbBr.sub.3 (MAPbBr.sub.3), CH.sub.3NH.sub.3PbCl.sub.3 (MAPbCl.sub.3), CH.sub.3NH.sub.3PbBr.sub.xCl.sub.3-x(MAPbBr.sub.xCl.sub.3x), CH.sub.3NH.sub.3PbBr.sub.xI.sub.3-x (MAPbBr.sub.xI.sub.3-x), CH.sub.3NH.sub.3PbCl.sub.xI.sub.3x (MAPbBr.sub.xI.sub.3-x), HC(NH.sub.2).sub.2PbI.sub.3 (FAPbI.sub.3), HC(NH.sub.2).sub.2PbBr.sub.3 (FAPbBr.sub.3), HC(NH.sub.2).sub.2PbCl.sub.3 (FAPbCl.sub.3), CH.sub.3NH.sub.3SnBr.sub.3 (MASnBr.sub.3), CH.sub.3NH.sub.3SnI.sub.3 (MASnI.sub.3), CH.sub.3NH.sub.3SnCl.sub.3 (MASnCl.sub.3), CH.sub.3NH.sub.3SnBr.sub.xCl.sub.3-x(MASnBr.sub.xCl.sub.3x), CH.sub.3NH.sub.3SnBr.sub.xI.sub.3-x (MASnBr.sub.xI.sub.3-x), CH.sub.3NH.sub.3SnCl.sub.xI.sub.3-x (MASnBr.sub.xI.sub.3-x), HC(NH.sub.2).sub.2SnI.sub.3 (FASnI.sub.3), HC(NH.sub.2).sub.2SnBr.sub.3 (FASnBr.sub.3), HC(NH.sub.2).sub.2SnCl.sub.3 (FASnCl.sub.3), CH.sub.3NH.sub.3Pb.sub.1-xSn.sub.xI.sub.3(MAPbSnI.sub.3), CsSnI.sub.3, and CsSnI.sub.3xBr.sub.x, in which x is of from about 0.1 to about 2.9 (e.g., 0.1, 0.2, 0.25, 0.3, 0.4, 0.5, 0.6, 0.7, 0.75, 0.8, 1.2, 1.8, 2.0, 2.25, or 2.5).
(36) The liquid precursor can include one or more precursor reagents and one or more solvent, which in turn can produce the crystalline material. Exemplary precursor reagents include AX.sup.1.sub.m, BX.sup.2.sub.n, AY.sub.m, and/or BY.sub.n, in which each of m and n is, independently, a number of from about 1 to 5; A includes an organic moiety, a cationic moiety, or an alkaline metal; B includes a metal (e.g., a divalent metal); each of X.sup.1 and X.sup.2, independently, includes a halogen (e.g., a halide); and Y include a leaving group. In some embodiments, a reaction between two or more of the precursor reagents produces the seed and/or the crystalline material having any useful formula (e.g., a formula of ABX.sup.1.sub.3, ABX.sup.2.sub.3, or ABX.sup.1.sub.aX.sup.2.sub.b, in which a+b=3). Non-limiting, exemplary reactions include the following: AX+BX.sub.2.fwdarw.ABX.sub.3; AX.sup.1+BX.sup.2.sub.2.fwdarw.ABX.sup.1X.sup.2.sub.2; AX.sup.1+BX.sup.2.sub.2.fwdarw.ABX.sup.1X.sup.2.sub.2; AY+BY.sub.2+3HX.fwdarw.ABX.sub.3+3HY; and 2A*+2YR.sup.Y+3BX.sub.2.fwdarw.2ABX3+BY, in which A=A*R.sup.Y, where A* is a cationic precursor (e.g., an amino, as defined herein), R.sup.Y is H or optionally substituted alkyl, such that a binding reaction between A* and R.sup.Y provides a cationic moiety (e.g., an ammonium, as defined herein), where each of A, B, X, X.sup.1, X.sup.2, and Y, independently, can be any described herein.
(37) In any of the precursor reagents and crystalline material herein, the formula can include any useful combination of A, B, X (e.g., X.sup.1 or X.sup.2), and Y (e.g., any described herein). Exemplary A includes an organic moiety, such as a quaternary amine, e.g., R.sup.1NH.sub.3+ or (NR.sup.1aR.sup.1b)R.sup.2(NR.sup.1aR.sup.1b).sup.+ in which each of R.sup.1, R.sup.1a, and R.sup.1b is, independently, selected from the group consisting of H, optionally substituted C.sub.1-24 alkyl, optionally substituted C.sub.2-24 alkenyl, optionally substituted C.sub.3-24 cycloalkyl, optionally substituted C.sub.4-18 aryl, optionally substituted C.sub.1-24 alk-C.sub.4-18 aryl, and optionally substituted C.sub.1-24 alk-C.sub.324 cycloalkyl, and in which R.sup.2 is an optionally substituted C.sub.1-24 alkylene (e.g., CH.sub.3NH.sub.3+, HC(NH.sub.2).sub.2.sup.+, or CH.sub.3CH.sub.2NH.sub.3.sup.+); a cation (e.g., having a diameter larger than B); or an alkali metal (e.g., Rb.sup.+ or Cs.sup.+). Exemplary B includes a metal (e.g., lead, germanium, or tin), including metal cations (e.g., Pb.sup.2+, Ge.sup.2+, or Sn.sup.2+ or divalent metals. Exemplary X includes halogen (e.g., a halide, such as Cl.sup., Br.sup., or I.sup.) or other anions, such as tetrafluoroborate anion (BF.sub.4.sup.), hexafluorophosphate anion (PF.sub.6.sup.), sulfate anion (SO.sub.4.sup.2), carbonate anion (CO.sub.3.sup.2), and hydroxide anion (OH.sup.). Exemplary precursor reagents include those containing an organic moiety, such as CH.sub.3NH.sub.3X and CH.sub.3NH, in which X is halo; as well as those containing a metal, such as PbX.sub.3 and Pb(CH.sub.3COOH).sub.2, X is halo.
(38) An absorber region or film can be formed from any useful material, such as a metal (e.g., a transition metal element, such as titanium (Ti), zirconium (Zr), vanadium (V), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), iron (Fe), ruthenium (Ru), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni), palladium (Pd), platinum (Pt), copper (Cu), silver (Au), gold (Ag), and zinc (Zn); or other metals, such as aluminum (Al), indium (In), and lead (Pb)), an inorganic element (e.g., a metalloid element, such as silicon (Si)), a graphite source (e.g., graphitic carbon, graphite, or graphene), an elemental carbon source (including allotropes thereof, such as various forms of graphitic carbon materials and non-graphitic carbon materials, or allotropes thereof), or salts, oxides, phosphates, hydroxides, hydrates, solvates, and/or mixtures thereof.
(39) Further exemplary precursor reagents, solvents, and/or liquid precursors are described in An B W et al., Direct printing of reduced graphene oxide on planar or highly curved surfaces with high resolutions using electrohydrodynamics, Small 2015; 11(19):2263-8; Ahmad S et al., Direct deposition strategy for highly ordered inorganic organic perovskite thin films and their optoelectronic applications, Opt. Mater. Express 2014; 4(7):1313-23; Alias M S et al, Enhanced Etching, surface damage recovery, and submicron patterning of hybrid perovskites using a chemically gas-assisted focused-ion beam for subwavelength grating photonic applications, J. Phys. Chem. Lett. 2016; 7:137-42; Dong W J et al., Ultrafast laser-assisted synthesis of hydrogenated molybdenum oxides for flexible organic solar cells, J. Mater. Chem. A 2016; 4:4755-62; Dwivedi V K et al., Direct deposition of inorganic-organic hybrid semiconductors and their template-assisted microstructures, Mater. Chem. Phys. 2013; 137:941-6; Feng J et al., Liquid knife to fabricate patterning single-crystalline perovskite microplates toward high-performance laser arrays, Adv. Mater. 2016; 28(19):3732-41; In J B et al., Laser crystallization and localized growth of nanomaterials for solar applications, Proc. SPIE 2013; 8826:88260E (5 pp.); Kanaujia P K et al., Laser-induced microstructuring of two-dimensional layered inorganic-organic perovskites, Phys. Chem. Chem. Phys. 2016; 18:9666-72; Kim K et al., 3D optical printing of piezoelectric nanoparticle-polymer composite materials, ACS Nano 2014; 8(10):9799-806; Liu Y et al., Two-inch-sized perovskite CH.sub.3NH.sub.3PbX.sub.3 (XCl, Br, I) crystals: growth and characterization, Adv. Mater. 2015; 27:5176-83; Niu G et al., Review of recent progress in chemical stability of perovskite solar cells, J. Mater. Chem. A 2015; 3:8970-80; Niu L et al., Controlled synthesis of organic/inorganic van der Waals solid for tunable light-matter interactions, Adv. Mater. 2015; 27(47):7800-8; Saidaminov M I et al., High-quality bulk hybrid perovskite single crystals within minutes by inverse temperature crystallization, Nature Commun. 2015; 6:7586 (6 pp.); Saliba M et al., Structured organic-inorganic perovskite toward a distributed feedback laser, Adv. Mater. 2016; 28:923-9; Sum T C et al., Advancements in perovskite solar cells: photophysics behind the photovoltaics, Energy Environ. Sci. 2014; 7:2518-34; Wang G et al., Wafer-scale growth of large arrays of perovskite microplate crystals for functional electronics and optoelectronics, Sci. Adv. 2015; 1(9):e1500613 (9 pp.); and Zhu H et al., Lead halide perovskite nanowire lasers with low lasing thresholds and high quality factors, Nature Mater. 2015; 14:636-42, each of which is incorporated herein by reference in its entirety.
(40) The composition and delivery of the liquid precursor can be optimized to provide deposited seeds or crystalline materials having a different composition. In one instance, the liquid precursor can include multiple precursor reagents, in which a nucleation reaction between the agents provides a seed or crystalline material with multiple chemical elements. In another instance, a first liquid precursor can have one or more precursor reagents to deposit a first structure (e.g., seed or crystalline material), and then a second liquid precursor can be provided to deposit further chemical elements within, above, or in proximity to the first structure.
(41) The liquid precursor can include one or more additives. Exemplary additives include one or more surfactants (e.g., a cationic surfactant, such as a quaternary ammonium salt like a C.sub.10-20 alkyltrimethylammonium halide or cetyltrimethylammonium bromide; a non-ionic surfactant, such as a polyethylene oxide-based compounds, including Triton X-114), ligands (e.g., phosphoric acids), ions (e.g., fluoride ions), salts (e.g., lithium, potassium, or sodium), acids (e.g., nitric acid), bases (e.g., ammonium hydroxide), sensitizers, dyes (e.g., methylene blue, infrared dyes, near-infrared dyes, etc.), reducing agents (e.g., a polyol), oxidizing agents, stabilizing agents, chelating agents, polymers (e.g., polyvinylpyrrolidone (PVP)), and/or hydrogels.
(42) Upon thermal heating, the liquid precursor reacts to produce the deposited seed or crystalline material, which can be further heated (or annealed). Any useful deposited material can be formed using the methods herein. Exemplary deposited materials can include organometallic crystalline structures for any useful purpose including diverse electronic and optoelectronic systems, such as transistors, dye-sensitized solar cells, planar heterojunction devices, organic photovoltaics, semiconductor-sensitized or extremely thin absorber solar cells, meso-superstructured solar cells, light emitting diodes, photodetectors, laser diodes, or lasers.
(43) Devices including such organometallic crystalline structures can also include further functional structures, such as a hole transport layer including, e.g., 2-7,7-tetrakis(N,N-di-p-methoxyphenylamine)-9,9-spirobifluorene (spiro-OMeTAD), nickel oxide (NiO.sub.x), MoO.sub.3, a tetrathiafulvalene derivative (e.g., TTF-1 having a C.sub.18 tail), poly(3-hexylthiophene) (P3HT), poly [2-methoxy-5-(2-ethylhexyloxy)-1,4-phenylenevinylene] (MEH-PPV), poly [2,6-(4,4-bi s-(2-ethylhexyl)-4H-cyclopenta[2,1-b;3,4-b]dithiophene)-alt-4,7(2,1,3-benzothiadiazole)](PCPDTBT), poly [2-methoxy-5-(3,7-dimethyloctyloxy)-1,4-phenylenevinylene] (MDMO-PPV), poly [N-9-heptadecanyl-2,7-carbazole-alt-5,5-(4,7-di-2-thienyl-2,1,3-benzothiadiazole)] (PCDTBT), poly({4,8-bis[(2-ethylhexyl)oxy]benzo[1,2-b:4,5-b]dithiophene-2,6-diyl} {3-fluoro-2-[(2-ethylhexyl)carbonyl]thieno[3,4-b]thiophenediyl}) (PTB7), PBDTTPD (a copolymer between 1,3-dibromo-5-octylthieno[3,4-c]pyrrole-4,6-dione and di(2-ethylhexyloxy)benzodithiophene distannane monomers), poly-(triarylamine) (PTAA), or poly(3,4-ethylenedioxythiophene)/polystyrene sulfonate (PEDOT/PSS); an electron transport layer (a hole blocking layer) including, e.g., fullerene [phenyl-C.sub.61-butyric acid methyl ester (PC.sub.61BM)], fullerene [phenyl-C.sub.71-butyric acid methyl ester (PC.sub.71BM)], bathocuproine (BCP), indene-C.sub.60 bisadduct (ICBA), TiO.sub.2, ZnO, Sb.sub.2S.sub.3, or SnO.sub.2; an n-type layer including, e.g., TiO.sub.2 or ZnO; a p-type layer including, e.g., NiOx or PEDOT; a cathode buffer layer including, e.g., TiO.sub.2, ZnO, SnO.sub.x, titanium (IV) oxide bis(2,4-pentanedionate) (TOPD), titanium (diisopropoxide) bis(2,4-pentanedionate) (TIPD), or zirconium acetylacetonate (ZrAcac); an anode buffer layer including, e.g., MoO.sub.3, V.sub.2O.sub.5, WO.sub.3, NiO.sub.x, ReO.sub.3, or CuOx; a modification layer including, e.g., Sb.sub.2S.sub.3; an optical spacer layer including, e.g., TiO.sub.x, ZnO, V.sub.2O.sub.5, or ZrAcac; an electrode including, e.g., Au, Ag, or Al (e.g., as a top metal electrode); or a conducting film including, e.g., indium tin oxide (ITO), fluorine doped tin oxide (FTO) optionally with TiO.sub.2 (e.g., as a transparent electrode).
(44) Direct Write Sources
(45) The present invention can include the use of a direct write source to provide electromagnetic radiation, which in turn provides a thermal gradient or a thermal voxel. Exemplary direct write sources include a laser (e.g., a solid-state laser, a semiconductor laser, a diode laser, a fiber laser, etc.). Such direct write source can have any useful operating wavelength, such as of from about 500 nm to about 1,000 nm or in the ultraviolet, visible, near-infrared, or infrared wavelengths (e.g., a Ti:sapphire laser operating at about 750 nm; or a Nd:YAG laser operating at 1064 nm or 532 nm). In one instance, the direct write source is a continuous wave laser source wavelength of from about 500 nm to about 1,000 nm. In another instance, the direct write source is a heated micromachined tip (e.g., a heated atomic force microscopy (AFM) tip or a heated scanning tunneling microscopy (STM) tip, which is heated by an electron-beam).
(46) A direct write source can be used in conjunction with a mask, such as an optical mask or a light modulator. Exemplary light modulators include a liquid crystal module (LCM, such as a liquid crystal display LCD, including a transmission LCD or a reflection LCD) or a digital micromirror device (DMD), optionally including a polarizing element (e.g., a polarizing mirror) or a diffraction grating (e.g., an amplitude grating).
(47) Systems
(48) The present invention also relates to systems configured to implement the methods described herein. Such systems can have any useful components to provide and translate the thermal voxel to produce the desired printed structure. Exemplary components include one or more direct write sources, optical lenses, optical plates, nonlinear crystals, mirrors (e.g., galvo mirrors), beam splitters, objectives, microscopes, analysis modules, controllers (e.g., stages and scan boxes), masks (e.g., optical masks and/or light modulators), processors, etc. Additional systems and components are described in Kaehr B et al., Mask-directed multiphoton lithography, J. Am. Chem. Soc. 2007; 129(7):1904-5; Kaehr B et al., Direct-write fabrication of functional protein matrixes using a low-cost Q-switched laser, Anal. Chem. 2006; 78(9):3198-202; Kaehr B J, Defining cellular microenvironments using multiphoton lithography, Ph.D. dissertation for the Department of Biochemistry, University of Texas at Austin, August 2007, 172 pp.; Zarzar L D et al., Multiphoton lithography of nanocrystalline platinum and palladium for site-specific catalysis in 3D microenvironments, J. Am. Chem. Soc. 2012; 134(9):4007-10; Zarzar L D, Dynamic hybrid materials: hydrogel actuators and catalytic microsystems, Ph.D. dissertation for the Department of Chemistry, Harvard University, May 2013, 154 pp.; and Zhang Y L et al., Designable 3D nanofabrication by femtosecond laser direct writing, Nano Today 2010; 5:435-48, each of which is incorporated herein by reference in its entirety.
EXAMPLES
Example 1: Additive Manufacturing of Crystalline Semiconductor Materials
(49) Semiconductors are the foundational material that underpins all modern electronic devices (e.g., integrated circuits, LEDs, photovoltaics, radiation detectors etc.). Two major factors govern most aspects of their performance: (1) the intrinsic quality of the material (e.g., crystallinity, defect density, and stability) and (2) the material interface (e.g., transistor placement and solid/solid contacts). The ability to direct write, high quality semiconductor materials with site-specific accuracy can drastically free up the design space for various potential applications.
(50) The present invention, in part, relates to an additive manufacturing approach for the emerging class of semiconductor materials broadly known as organometallic perovskites of the form ABX.sub.3, in which A is a cation (e.g., an organic ammonium cation), B is a metal (e.g., a metal cation), and X is a halogen (e.g., a halide). Common examples of organometallic perovskites include CH.sub.3NH.sub.3PbI.sub.3, CH.sub.3NH.sub.3PbBr.sub.3, and CH.sub.3NH.sub.3PbCl.sub.3.
(51) Although organometallic perovskite materials have been studied for decades, only recently have they gained widespread attention for their remarkable power conversion efficiency (PCE) employed in a photovoltaic device (from 3% in 2009 to >20% in 2016). Moreover, these materials display exceptional qualities that may prove transformative for the development of low-cost lasers, sensors, and detectors.
(52) Perhaps unsurprisingly, the processing of perovskite materials plays a central role in determining their properties. Indeed, significant efforts are aimed at engineering the ideal perovskite film, with notable contributions coming from solvent engineering, sequential deposition, temperature engineering and stability additives.
(53) Regardless of the preferred method of preparation, there remains the challenge of incorporating perovskite materials into devices. Lead-based perovskites are highly sensitive to degradation; and extended exposure to mixed solvents, photoresists, and etchants imparts challenges for the preservation of desired chemical and/or microstructural properties. Ideally, these materials could be processed in situ, with site-specific accuracy using processes analogous to lithography.
(54) To address this challenge, we surmised that the temperature-dependent (solvent-dependent) solubility of lead halide perovskites could be used as a mechanism to induce highly localized crystal growth, for example, using a laser focused on an absorbing substrate or using a heated sharp tip (e.g., an AFM tip). Further details are provided herein.
Example 2: Experimental Conditions for Laser Direct Write (LDW) of Perovskite Materials
(55) The recent incorporation of lead halide perovskites in photovoltaics has proven to be a watershed moment for solar energy research and semiconductor materials science. Yet, many questions remain regarding the fundamental chemistry, physics, material properties and processing of photoactive perovskites. For example, abilities to control seeding and crystallization processes are necessary to develop devices incorporating perovskite-based materials as energy harvesters, photodetectors, light emitting diodes and lasers. Thus, there is a need to develop chemistries and processing strategies that enable precise patterning of perovskites.
(56) Some recent studies have investigated both lithographic and contact printing methods to pattern perovskite materials, but these strategies have drawbacks and do not allow for single step crystallization nor for the writing of arbitrary patterns (e.g., new masks and masters must be generated in order to develop new patterns). Thus, there are opportunities to develop complementary processing techniques for perovskites that are more conducive to rapid prototyping and device functionalization including methods that provide for direct-write printing. To develop a direct write (additive manufacturing) approach, we hypothesized that the temperature-dependent solubility effect of perovskite crystallization could be localized using laser heating. This would allow for the laser direct write (LDW) of perovskites materials.
(57) Initial LDW experiments were conducted under the following liquid precursor conditions. Perovskite precursor reagents were dissolved in stoichiometric ratios of PbX.sub.2 and CH.sub.3NH.sub.3X. For XBr, 2 ml stock solutions at 1.7 M (about the solubility limit) were prepared in N,N-dimethylformamide (DMF) by sonication and stirring overnight, yielding a clear solution. For X=1, 2 ml of stock solutions were prepared at nominally 0.5M concentrations (above the solubility limit). After stirring at 80 C. for 1 hour, the mixture was then filtered with a syringe (0.2 m PTFE) to yield a transparent orange solution that was typically 0.2 M.
(58) Specifically for the CH.sub.3NH.sub.3PbBr.sub.3 precursor solution, lead (II) bromide (PbBr.sub.2 99.999%) and N,N-dimethylformamide (DMF, anhydrous, 99.8%) were purchased from Sigma-Aldrich Corp. (St. Louis, Mo.). Methylammonium bromide (MABr) was prepared via stoichiometric neutralization of methylamine with HBr in glacial acetic acid at 0 C. After stirring for 3 hours, methylammonium bromide was precipitated by the addition of diethyl ether, filtered, washed, and dried under vacuum. Solutions of PbBr.sub.2:MABr (1:1) were mixed in DMF, dissolved using a bath sonicator, and subsequently filtered using a polytetrafluoroethylene membrane filter (0.2 m pore size) prior to laser-induced crystallization of methylammonium lead bromide.
(59) By providing laser illumination within the liquid precursor, a thermal voxel was provided at the focal point of the laser. Frequently, an absorber was employed to enhance the thermal gradient provided by the thermal voxel, in which the absorber can be a region for site-specific crystal synthesis (
(60) In one instance, a Ti:sapphire laser (Tsunami; Spectra Physics) operating at 750 nm was employed. For deposition of platinum crosses, the laser was mode-locked to deliver high frequency (80 MHz) short pulses (60 fs) for multiphoton absorption (for deposition of platinum pad) or continuous wave (CW) mode. The beam was expanded to slightly overfill the back aperture of an oil-immersion objective (Nikon 100 Fluor, 1.3 numerical aperture) situated on an inverted microscope. Laser powers used for these experiments, obtained by attenuating the laser beam using a half-wave plate/polarizing beam-splitter pair, measured between 1-50 mW at the objective. The beam focus was translated in XY using a motorized stage controller to generate simple lines. Seed structures were subsequently grown on the microscope setup using a broadband light source (halogen lamp, 12V, 100 W) focused onto the substrate using the microscope condenser. This provided for uniform heating of the substrate (using Kohler illumination) to the field of view.
(61) In addition, we modeled the temperature gradient induced via 1 mW of focused laser illumination (
(62) Further characterization methods included TEM, which was carried out in an FEI Tecnai F30 operating at 300 kV using a standard double-tilt holder. The perovskite material was laser-written onto a 300-mesh Cu grid with a lacey carbon support film. Time-resolved photoluminescent (TRPL) measurements were performed using 405 nm wavelength excitation from a frequency-doubled Ti:sapphire laser with 150 fs pulse width and 1 kHz repetition rate. A microscope objective was used to focus the laser source to a spot-size diameter of 50 m on the sample surface. The light emitted from the sample was collected through the same objective, focused into an optical fiber, and coupled into a spectrometer attached to a Hamamatsu streak camera with 10 ps temporal resolution. For measuring current-voltage and time-dependent characteristics of the interdigitated perovskite device, an Agilent B1500A Semiconductor Device Parameter Analyzer was employed. The device was illuminated in a light-tight enclosure with a high intensity, broadband fiber light source (Part No. OSL1, Thorlabs, Inc., Newton, N.J.) calibrated using a calibrated reference cell (Oriel Instruments Part No. 91150V).
Example 3: Site-Specific Synthesis of Organometallic Perovskites
(63) Site-specific patterning of crystals can be provided by a patterned array of absorber regions (
(64) Alternatively, patterning can be achieved by positioning of the direct write source. As seen in
(65) Further crystal growth can be employed to provide an array of crystalline material having an underlying pattern dictated by the absorber array (
Example 4: Characterization of LDW Perovskite Materials
(66) Further studies were conducted to characterize LDW perovskite materials and to preliminarily understand the kinetics of crystal growth and dissolution. Various structural properties confirmed the presence of high quality perovskite materials. For instance, TEM of a laser drawn perovskite showed perfect crystallinity (
(67) Further optical properties were studied, which compared the photoluminescent (PL) time-resolved decay of LDW perovskite and a single crystal (SC) of perovskite grown in a bulk solution.
(68) Site-specific heating enabled a more detailed understanding of the dependence of crystal growth and dissolution rates on precursor concentration and size of the initial crystalline seed.
Example 5: Laser Direct Write (LDW) of Free-Form Perovskites
(69) Precursor concentration can be selected to provide a long persistence time, which in turn can allow subsequent crystal growth to occur. For instance, a higher concentration of precursor(s) generally provides a slower dissolution rate, thereby allowing patterned crystalline seeds to persist long enough to promote crystal growth. Furthermore, if seed structures can be patterned to have an arbitrary form, then subsequent crystal growth potentially can be predetermined.
(70) To test this possibility for extended patterned, we sputtered semi-transparent thin films (e.g., Au or C absorber films) onto a substrate (e.g., a microscope coverglass). This light-absorbing layer was expected to function as a transducer to generate localized heating. Indeed, following immersion in a precursor solution, crystallites could be generated at the position of the laser spot. These structures could be extended into arbitrary forms by translating the beam in relation to the substrate (
(71) After obtaining a desired crystalline seed pattern, further crystal growth can provide a final crystalline structure. As shown in
(72) Any useful crystalline seed pattern can be generated, and then crystal growth of the seed can be promoted to provide a crystalline material (
Example 6: Direct Write Perovskite Functionalization of Devices
(73) The methods herein can be employed in any useful manner. In one instance, the methods provide an avenue for arbitrary deposition of a useful class of materials, e.g., lead halide perovskites. These perovskite materials are an important class of photovoltaic/semiconductor materials. The ability to form arbitrary patterns with such a material can provide a straightforward route for the design, iteration, and production of perovskite-based devices.
(74) Described herein is a non-limiting device including a laser direct write (LDW) crystalline perovskite material. To demonstrate the utility of the LDW perovskite method, we fabricated a CH.sub.3NH.sub.3PbBr.sub.3 wire directly onto an interdigitated micro-electrode array to create a micro-photodetection device.
(75) We tested the optical response of the device by measuring current-voltage (I-V) curves to +100 mV under broadband illumination. The I-V curves are plotted in
(76) Without wishing to be limited by mechanism, in devices with direct perovskite-gold contact, the hysteretic behavior has most commonly been attributed to anion migration, leading to built-in electric fields. This effect has been observed regardless of anion species within the perovskite (e.g., I or Br) and is independent of perovskite preparation. Our device behaves in accordance with these previous studies and others, which have exploited this behavior for optical/electrical resistive switching memory. Though very simple in design, the device exhibited strong on/off ratios, with dark current levels of 10-12 amps and demonstrates the ability of the LDW approach to yield functional patterns.
(77) Optical characterization of a functional device showed a nearly linear photocurrent-irradiance behavior at +100 mV (
Example 7: Direct Write and Dissolution of the Crystalline Seed
(78) As described herein, we demonstrated arbitrary pattern formation of crystalline CH.sub.3NH.sub.3PbBr.sub.3, in which perovskite seeds can be grown to large crystals with additional heating. Alternatively, the seeds could be dissolved to tune the feature size, e.g., to index structures onto micro-patterned (silicon) substrates, to control crystal size, to predetermine crystal orientation, etc. As seen in
Example 8. Direct Write on Various Substrates
(79) We have also demonstrated arbitrary pattern formation of crystalline CH.sub.3NH.sub.3PbBr.sub.3 on a range of substrates. The direct write procedure leverages the inverse temperature solubility of perovskite precursors, which enables site-selective crystallization from solution as directed by laser focus. Furthermore, we show that micropatterned substrates can be employed to form crystalline structures.
OTHER EMBODIMENTS
(80) All publications, patents, and patent applications mentioned in this specification are incorporated herein by reference to the same extent as if each independent publication or patent application was specifically and individually indicated to be incorporated by reference.
(81) While the invention has been described in connection with specific embodiments thereof, it will be understood that it is capable of further modifications and this application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure that come within known or customary practice within the art to which the invention pertains and may be applied to the essential features hereinbefore set forth, and follows in the scope of the claims.
(82) Other embodiments are within the claims.