Ceiling module for the construction of a clean room

Abstract

A ceiling module for the construction of a clean room cell, where the ceiling module includes at least a module support for arrangement on and connection to a support structure, a technical device including at least one filter unit, and a ceiling support which is spaced apart from the module support such that a technical space is formed between the ceiling support and the module support, wherein the technical device is arranged inside the technical space.

Claims

1. A Ceiling module for the construction of a clean room cell, the Ceiling module comprising: a module support for arrangement on and connection to a support structure; a technical device including at least one filter unit; and a ceiling support which is spaced apart from the module support such that a technical space is formed between the ceiling support and the module support, wherein the module support, the ceiling support and the technical device are connected to form a unit, the technical device is arranged inside the technical space, the ceiling support is formed by mutually perpendicular frame rails, outer frame rails are provided which define a periphery of the ceiling support and inner frame rails are provided which are perpendicular to a longitudinal extent of the ceiling support, the ceiling support has connecting portions which are designed for connection of the ceiling support to clean room side wall elements and the ceiling support has connecting portions which are designed for connection of the ceiling support to clean room partition wall elements, the connecting portions for connecting the ceiling support to the clean room side wall elements are arranged on the outer frame rails and the connecting portions for connecting the ceiling support to clean room partition wall elements are arranged on the inner frame rails, and the frame rails comprise the outer frame rails and the inner frame rails.

2. The Ceiling module according to claim 1, wherein the at least one filter unit is designed as a modular unit with its own module housing, and the module housing is completely accommodated in the technical space between the module support and the ceiling support.

3. The Ceiling module according to claim 2, wherein the at least one filter unit includes at least one filter means for filtering air and an air conveying means for generating an airflow.

4. The Ceiling module according to claim 3, wherein the at least one filter unit is held on the ceiling support.

5. The Ceiling module according to claim 4, wherein the technical device further includes: at least one fluid line for conducting supply air and/or return air for the at least one filter unit, the at least one fluid line having at least one air connection; at least one fluidic supply line having at least one fluid connection; and at least one electrical supply line having at least one cable connection.

6. The Ceiling module according to claim 5, wherein the at least one air connection, the at least one fluid connection and the at least one cable connection form a plurality of connections, and the at least one air connection, the at least one fluid connection and the at least one cable connection are arranged such that a first connection of the plurality of connections is accessible from an upper side of the ceiling module.

7. The Ceiling module according to claim 6, wherein the ceiling support is designed as a frame which delimits a plurality of frame openings, and the frame openings are each designed for arranging the at least one filter unit or a clean room ceiling panel.

8. The Ceiling module according to claim 7, wherein a subset of the frame openings is occupied by the at least one filter units and the remaining frame openings are occupied by clean room ceiling panels.

9. The Ceiling module according to claim 7, wherein a first filter unit of said at least one filter unit and/or a first clean room ceiling panel are connected to the ceiling support in an airtight and particle-tight manner.

10. The Ceiling module according to claim 1, wherein the module support is rectangular and has two longitudinal supports and a plurality of transverse supports.

11. The Ceiling module according to claim 10, wherein each longitudinal support has a central region and two end regions, the longitudinal support has a smaller thickness in the end regions than in the central region, and an underside of the longitudinal support forms abutment portions in the respective end regions for abutting a support structure.

12. A System comprising the Ceiling module according to claim 1 and at least one clean room side wall element that is or can be connected to the Ceiling module.

13. The System according to claim 12, wherein the at least one clean room side wall element has at least one of the following: a. the at least one clean room side wall element has a door; b. the at least one clean room side wall element has at least one window; c. the at least one clean room side wall element has at least one integrated fluid duct for exhaust air and/or at least one integrated cable duct for electrical cables; d. the at least one clean room side wall element has at least one air outlet which, in a connected state of the at least one clean room side wall element and the ceiling module, is arranged at the end of the at least one clean room side wall element that is remote from the Ceiling module; e. the at least one clean room side wall element has at least one feedthrough means for feeding, in an airtight and particle-tight manner, supply lines through the clean room side wall element; and/or f. the at least one clean room side wall element has a fire protection layer.

14. The System according to claim 13, wherein at least one clean room partition wall element is provided which is or can be connected to the ceiling support of the Ceiling module.

15. The System according to claim 13, wherein at least one clean room partition wall element is provided which is capable of connecting to the ceiling support of the Ceiling module.

16. A System comprising a transport frame and a Ceiling module for the construction of a clean room cell, the Ceiling module comprising: a module support for arrangement on and connection to a support structure; a technical device including at least one filter unit; and a ceiling support which is spaced apart from the module support such that a technical space is formed between the ceiling support and the module support, wherein the module support, the ceiling support and the technical device are connected to form a unit, and the technical device is arranged inside the technical space, wherein the transport frame and the Ceiling module are designed such that the Ceiling module can be held in the transport frame for transport, and the transport frame has abutment portions which are designed to abut an underside of the module support of the Ceiling module in a transport state of the Ceiling module and to abut an upper side of the module support of the Ceiling module in an installed state of the Ceiling module.

17. The System according to claim 16, wherein the transport frame is substantially U-shaped with one long limb and two short limbs, and free ends of the short limbs form the abutment portions for abutting the module support of the Ceiling module.

Description

(1) The invention will be explained in more detail in the following with reference to the drawings,

(2) in which:

(3) FIG. 1 is an outline of a system for the construction of a clean room cell in a side view;

(4) FIG. 2 is an outline of a clean room cell in an installed state in a side view;

(5) FIG. 3 is an outline of a ceiling module of the clean room cell according to FIG. 2 in a side view;

(6) FIG. 4 is an outline of the ceiling module according to FIG. 3 in a first perspective view;

(7) FIG. 5 is an outline of the ceiling module according to FIG. 3 in a second perspective view;

(8) FIG. 6 is an outline of a system comprising a ceiling module according to FIG. 3 and a transport frame in a side view;

(9) FIG. 7 is an outline of the clean room cell according to FIG. 2 with a fire protection means in a first embodiment in a side view;

(10) FIG. 8 is an outline of the clean room cell according to FIG. 2 with a fire protection means in a second embodiment in a side view;

(11) FIG. 9 is an outline of a plurality of clean room side wall elements with different functional units in a side view;

(12) FIG. 10 schematically shows clean room cells with differently configured clean room partition wall elements in a plan view; and

(13) FIG. 11 schematically shows an exemplary embodiment of a clean room facility constructed from clean room cells in a plan view.

(14) In the following description and in the drawings, the same reference signs are used in each case for identical or corresponding features.

(15) FIG. 1 outlines a system for constructing a clean room cell designated as a whole by reference sign 8. Such a clean room cell 8 is shown in FIG. 2 in a fully assembled state.

(16) The system comprises a ceiling module 10 which, in an installed state shown in FIG. 2, is arranged on a support structure 12 and connected thereto. The support structure 12 is formed in the present example by pillars 14 (for example steel beams) which are arranged, in particular vertically, on a foundation 16. The foundation 16 may be a building floor.

(17) The system further comprises a plurality of clean room side wall elements 18 which, in the assembled state of the clean room cell 8, cooperate with a ceiling support 20 of the ceiling module 10 and define therewith a clean room plenum 22, i.e. the actual clean room area of the clean room cell 8 (cf. FIG. 2).

(18) The system further comprises a holder 24 which, in an assembled state of the clean room cell 8, is arranged on an upper side 26 of the ceiling module 10. The holder 24, as described in more detail below, is formed by a transport frame 110 which is used to hold the ceiling module 10 during transport.

(19) In embodiments not shown, the system may further comprise a clean room floor element, for example a clean room floor covering arranged on a building floor. These clean room floor elements are preferably adapted in terms of area to the ceiling module. In particular, the clean room floor elements are also designed as a modular structure, comprising a support frame and at least one cover layer fastened thereto. In particular, the cover layer comprises, as the uppermost layer, a floor covering which is adapted to the intended use of the clean room.

(20) In the following, the ceiling module 10 will first be described in detail with reference to FIGS. 3 to 5.

(21) The ceiling module 10 comprises a module support 30 for arrangement on and connection to the support structure 12. The ceiling module 10 further comprises the ceiling support 20 already mentioned above. When the ceiling module 10 is mounted as intended, the ceiling support is arranged below the module support 30 and is spaced apart therefrom. As a result, a technical space 32 is formed between the ceiling support 20 and the module support 30 (cf. FIG. 3). In the technical space 32, a technical device 34 is arranged which comprises clean room technology described in more detail below. The ceiling module 10 itself is therefore modularly constructed from the module support 30, the ceiling support 20 and the technical device 34 arranged between the module support 30 and the ceiling support 20. These units are preassembled to form the ceiling module 10.

(22) In the present example, the module support 30 has a rectangular basic shape overall and is formed by two mutually parallel and mutually spaced longitudinal supports 36 which are interconnected by a plurality of transverse supports 38 (cf. FIG. 5). The transverse supports 38, viewed in the longitudinal direction of the module support 30, are arranged at regular intervals, such that free spaces 40 are formed between the transverse supports 38 which allow access to the technical space 32 from the upper side 26 of the ceiling module 10.

(23) By way of example and preferably, the longitudinal supports 36 and the transverse supports 38 are designed as double-T supports (cf. FIG. 5).

(24) The two longitudinal supports 36 are identical in the present example. Each longitudinal support 36 has a central region 42 and two end regions 44 (cf. FIG. 4). In these regions, an upper side 46 of the longitudinal support 36 and an underside 48 of the longitudinal support 36 extend in parallel with one another. In the end regions 44, the longitudinal support 36 has a smaller thickness (highlighted in FIG. 4 by the double arrow designated by reference sign 50), i.e. a smaller distance between the upper side 46 and underside 48 of the longitudinal support 36, the thickness reducing linearly in a relevant transition region 52 between the central region 42 and the relevant end region 44 (cf. FIG. 4).

(25) The underside 48 of the longitudinal supports 36—in the present example, a relevant lower flange of the longitudinal support 36 designed as a double-T support—forms abutment portions 54 in the respective end regions 44. In an installed state of the ceiling module 10, these abutment portions 54 then rest on corresponding bearing portions 56 of the support structure 12 (cf. FIG. 2).

(26) The technical device 34 of the ceiling module 10 comprises three filter units 58 in the example shown. This embodiment is not mandatory and can be adapted to the particular application. The filter units 58 are designed as modular units each with their own module housing 59, the relevant module housing 59 being completely accommodated in the technical space 32 between the module support 30 and the ceiling support 20 (cf. FIGS. 3 and 4). The filter units 58 are interconnected via a common fluid line 60 (cf. FIGS. 3 and 5) in order to conduct supply and/or return air. The fluid line 60 has an air connection 62 which opens into the upper side 26 of the ceiling module 10. In a fully mounted state of the ceiling module 10 on the support structure 12, the air connection 62 can then be connected to an HVAC unit 64 via a connection line 66 (cf. FIG. 2).

(27) The technical device 34 further comprises a fluid supply line 68 for feeding in cooling water and a fluid supply line 70 for returning cooling water. In the present example, the supply lines 68, 70 extend substantially in parallel with a longitudinal extent of the ceiling module 10 (cf. FIG. 4). The fluidic supply lines 68, 70 each have a fluid connection 72, 74 for connecting to an external cooling water supply. As can be seen from FIG. 5, the fluid connections 72, 74 likewise open, by way of example and preferably, into an upper side 26 of the ceiling module 10.

(28) In the present example, the technical device 34 further comprises a fluidic supply line 76 for conducting supply air for clean room devices (not shown) arranged in the clean room plenum 22, and a corresponding fluidic supply line 78 for conducting exhaust air. The fluidic supply line 76 for conducting supply air and the fluidic supply line 78 for conducting exhaust air each have a fluid connection 80, 82. As can be seen from FIG. 5, the connections 80, 82 likewise open into the upper side 26 of the ceiling module 10.

(29) In addition, the technical device 34 comprises a plurality of electrical supply lines 84 which are used in particular for supplying power to the filter units 58 and for supplying power to clean room devices (not shown) arranged in the clean room plenum 22. The electrical supply lines 84 are preferably arranged in one or more cable ducts 86 (cf. FIG. 3). A cable connection 90 is provided such that the electrical supply lines 84 open into an electrical connection box 88. The connection box 88 is arranged such that it is accessible from the upper side 26 of the ceiling module 10. By way of example, the electrical connection box 88 is arranged in the region of a free space 40 between two transverse supports 38 of the module support 30 (cf. FIG. 3). For the sake of clarity, the electrical supply lines 84 and the connections box 88 are not shown in some figures.

(30) The ceiling support 20 is formed in the present example as a space frame which delimits a plurality of frame openings 92. As can be seen from FIGS. 4 and 5, the ceiling support 20 is suspended from the module support 30 via support anchors 94 (in particular by threaded rods).

(31) The ceiling support 20 is, by way of example and preferably, formed by mutually perpendicular frame rails 96 which are interconnected at node points 98 via corresponding connecting elements 100. Preferably, the frame rails 96 are formed as aluminum profile rails.

(32) The frame openings 92 are used in each case for arranging a filter unit 58 or a clean room ceiling panel 102 (cf. FIG. 3). Depending on requirements, one or more frame openings 92 may be occupied by a filter unit 58. The remaining ones, that is to say the frame openings 92 not occupied by filter units 58, are then provided with clean room ceiling panels 102.

(33) In the present example, three frame openings 92 are occupied by filter units 58, a frame opening 92 occupied by a clean room ceiling panel 102 being arranged between each of the frame openings 92 occupied by filter units 58 (cf. FIG. 3). The clean room ceiling panels 102 and the filter units 58 are connected to the ceiling support 20 in an airtight and particle-tight manner and held thereon.

(34) The ceiling support 20, together with the clean room ceiling panels 102 and the filter units 58—more precisely, respective air outlets 104 of the filter units 58—forms the clean room ceiling. In FIGS. 4 and 5, the clean room ceiling panels 102 are removed for a better view.

(35) The ceiling support 20 also has connecting portions 106 which are designed for airtight and particle-tight connection of the ceiling support 20 to clean room side wall elements 18. In the present example, the connecting portions 106 are designed as connecting rails which are integrated in the outer frame rails 96 of the ceiling support 20, i.e. in those frame rails 96 which define a periphery of the ceiling support 20.

(36) To construct the clean room cell 8, the ceiling module 10 is arranged on the support structure 12 such that the abutment portions 54 of the module support come into abutment with the bearing portions 56 of the support structure 12. In addition, the clean room side wall elements 18 are connected to the ceiling support 20 via the connecting portions 106 such that the clean room plenum 22 is formed.

(37) FIG. 6 shows a system 108 which comprises a ceiling module 10 as explained above and a transport frame 110. The transport frame 110 is used to hold the ceiling module 10 during transport.

(38) The transport frame 110 is substantially U-shaped with one long limb 112 and two short limbs 114. The long limb 112 extends at the bottom, in particular horizontally, in a transport state shown in FIG. 6. The two short limbs 114 then extend substantially vertically. The free ends of the short limbs 114 of the transport frame 110 form abutment portions 116 for abutting the abutment portions 54 on the underside 48 of the module support 30—which cooperate, in an installed state of the ceiling module 10, with the bearing portions 56 on the support structure (see above).

(39) As can be seen from FIG. 6, the technical device 34 and the ceiling support 20 of the ceiling module 10 are arranged, in the transport state, in a transport space 118 formed between the short limbs 114 of the transport frame 110.

(40) In an installed state of the ceiling module 10—i.e. when the ceiling module 10 is removed from the transport frame 110 and is connected to the support structure 12—the transport frame 110, as already explained above, can be arranged on the upper side 26 of the ceiling module 10. The abutment portions 116 of the transport frame 110 then abut the upper side 46 of the module support 30 (cf. FIG. 2). The transport frame 110, as already explained, then forms a holder 24, in particular for the HVAC unit 64. The transport space 118 then serves as a distribution space in which distribution lines 120, for example distribution lines for connecting the supply lines 68, 70, 76, 78, 84 to corresponding supply lines of adjacent ceiling modules 10, can be arranged (cf. FIG. 2).

(41) In an embodiment shown in FIGS. 7 and 8, the clean room cell 8 can also have a fire protection means. For this purpose, the ceiling module 10 can be provided with a fire protection layer 122 which, in a first embodiment shown in FIG. 7, can be connected to a fire protection layer 124 of a relevant clean room side wall element 18 in order to form a fire protection layer that encloses the clean room plenum 22. In an alternative embodiment shown in FIG. 8, the fire protection layer 122 of the ceiling module 10 can be designed to be connected to a fire protection layer 126 on the support structure side. Optionally, the clean room cell 8 can also have a smoke extraction unit 128 (cf. FIG. 7).

(42) FIG. 9 shows, by way of example, various embodiments of clean room side wall elements 18 which have different functional units. For example, a clean room side element 18 can have a window 130. Furthermore, it is possible for a clean room side wall element 18 to have an air outlet 132 for exhaust air, by way of example and preferably in the form of a perforated plate, which is arranged at a floor-side end of the clean room side wall element 18. In addition, feedthrough means 134 may be provided for feeding, in an airtight and particle-tight manner, supply lines (for example water lines, gas lines, cables, etc.) through the clean room side wall element 18. In embodiments not shown, a clean room side wall element 18 can also have an integrated fluid duct for exhaust air and/or at least one integrated cable duct for electrical cables or network cables, etc. In further embodiments, the clean room side element 18 can have a door. The clean room side wall elements 18 may each have one or more of the above-mentioned functional units.

(43) In a further embodiment, clean room partition wall elements 136 may be provided which are designed to subdivide a clean room plenum 22 defined by the clean room side wall elements 18 into sections 138 (cf. FIG. 10). The clean room partition wall elements 136 may be formed analogously to the clean room side wall elements 18 and may optionally also have functional units described above with respect to the clean room side wall elements 18.

(44) FIG. 10 shows, by way of example, various configuration possibilities of a clean room cell 8, which result from a varying number and arrangement of clean room partition wall elements 136. The exemplary clean room cells 8 shown in FIG. 10 constitute a set of standard clean room cells which can be modularly assembled to form complex clean room facilities.

(45) As can be seen from FIG. 10, the clean room partition wall elements 136 are arranged in particular orthogonally to a longitudinal extent of the ceiling module 10. In order to connect a clean room intermediate wall element 136 to the ceiling support 20, the ceiling support 20 can have connecting portions (not shown) which are preferably formed analogously to the connecting portions for connecting the ceiling support 20 to the clean room side wall elements 18, but in particular are integrated in the inner frame rails 96 extending transversely to a longitudinal extent of the ceiling support 20.

(46) FIG. 11 shows an example of a clean room facility 140 which is modularly constructed from a plurality of clean room cells 8 arranged beside one another—more precisely from the standard clean room cells shown in FIG. 10. As can be seen from FIG. 11, different configurations of the clean room side wall elements 18 and the clean room partition wall elements 136 also make it possible to form complex clean room structures. For example, in the clean room facility 140 shown in FIG. 11, individual clean room side wall elements 18 and clean room partition wall elements 136 are fitted with doors 142 to allow the passage from one section 138 of a clean room cell 8 to another section 138 of the clean room cell 8 or to a section 138 of an adjacent clean room cell 8. Furthermore, individual sections 138 are connected to form common sections (indicated in FIG. 11 by the vertical lines designated by reference sign 144).