MATERIALS, COMPONENTS, AND METHODS FOR USE WITH EXTREME ULTRAVIOLET RADIATION IN LITHOGRAPHY AND OTHER APPLICATIONS

Abstract

New classes of materials and associated components for use in devices and systems operating at ultraviolet (UV), extreme ultraviolet (EUV), and/or soft X-ray wavelengths are described. This invention relates to increasing the bandwidth and general performance of EUV reflective and transmissive materials. Such a material structure and combination may be used to make components such as mirrors, lenses or other optics, panels, light sources, photomasks, photoresists, or other components for use in applications such as lithography, wafer patterning, astronomical and space applications, biomedical applications, or other applications.

Claims

1. A multilayer Bragg reflective coating for an optical element, the optical element for use in an optical system operating a target wavelength in the UV, DUV, or EUV bandwidths, the coating comprising: a substrate; repeating sets of bi-layer pairs forming a multilayer stack; each bi-layer pair further comprising: a first layer; and a layer formed with Carbon, an H-group element, and a Metal in the ratio M.sub.xC.sub.yH.sub.z; a protective or capping layer; and wherein x0, y0, and z0; excluding x=y=z=0, and x=1, y=z=0.

2. The coating according to claim 1, wherein the first layer is formed with Carbon, an H-group element, and a Metal in the ratio M.sub.xC.sub.yH.sub.z and wherein x0, y0, and z0; excluding x=y=z=0, and x=1, y=z=0.

3. The coating according to claim 1, wherein the H-group element is Helium, Hydrogen, Neon or an atom from an elemental gas.

4. The coating according to claim 1, wherein the metal (M) is a metal selected from row 4, 5, or 6 from the periodic table of elements, or is any of the following, Molybdenum, Niobium, Ruthenium, Zirconium, Technetium, Platinum, Palladium, Gold or Nickel.

5. The coating according to claim 1, wherein the carbon (C) and the hydrogen (H) are hydrocarbons, carbides, hydrides, carbenes, or an organometallic complex of hydrogen and carbon.

6. The coating according to claim 1, wherein the coating gives the optical element a spectral bandwidth greater than that of a MoSi multilayer coating at the target wavelength.

7. The coating according to claim 1, wherein the coating gives the optical element an angular bandwidth greater than greater than that of a MoSi multilayer coating at the target wavelength.

8. The coating according to claim 1, wherein the coating is a layer of a photomask, mirror, lens, filter, covering layer, capping layer, substrate, film, pellicle, reflector, detector, collector or used in a lightsource.

9. The coating according to claim 1, wherein the first layer is Si.

10. A reflective coating or transmissive coating for an optical element, the optical element for use in an optical system operating a target wavelength in the UV, DUV, or EUV bandwidths, the coating comprising: a combined material M.sub.xC.sub.yH.sub.z used in a coating constructed with two or more dimensional features; a membrane or a substrate; and excluding x=y=z=0.

11. The coating according to claim 10, wherein the carbon (C) and the H-group element are hydrocarbons, carbides, hydrides, carbenes, or an organometallic complex of hydrogen and carbon.

12. The coating according to claim 10, wherein the metal atom (M) is bonded to the carbon (C) or the H-group element (H) using one or more ligands.

13. The optical element according to claim 10, wherein the optical element is a photomask, mirror, lens, filter, covering layer, capping layer, substrate, film, pellicle, reflector, detector, or collector, or used in a light source.

14. A method for fabricating a material coating for use in an optical element that operates at a target wavelength within the range of 0.1 nm to 250 nm, comprising: combining a metal (M), Carbon (C), and an H-group element (H) in the ratio M.sub.xC.sub.yH.sub.z to form a combination material, wherein x0, y0, and z0; bombarding a target with a combination of two or more types of ions; using a controlled deposition technique to deposit the M.sub.xC.sub.yH.sub.z combination material uniformly into a layer; and except for x=y=z=0.

15. The method according to claim 14, further comprising: providing a second layer material; bombarding a second target with a combination of two or more types of ions; and using the controlled deposition technique to deposit the second material uniformly into a layer pair for a multilayer coating.

16. The method according to claim 14, wherein the ions are selected from the group consisting of Argon, Nitrogen, Helium, Hydrogen, Krypton and Neon ions.

17. The method according to claim 14, wherein the H-group element is Helium, Hydrogen, Neon, or an elemental gas.

18. The method of fabricating the coating according to claim 14, using a controlled deposition technique such as sputtering, ion beam deposition, PECVD, Atomic layer deposition, ion assisted deposition, e-beam deposition, chemical vapor deposition, thermal evaporation, ion implantation, or molecular beam epitaxy.

19. The method according to claim 14, wherein the metal (M) is a metal selected from row 4, 5, or 6 from the periodic table of elements.

20. The method according to claim 14, wherein the optical element is a photomask, mirror, lens, filter, covering layer, capping layer, substrate, film, pellicle, reflector, detector, or collector, or used in a light source.

21. A method for fabricating a material coating for use in an optical element that operates at a target wavelength within the range of 0.1 nm to 250 nm, comprising: using a controlled deposition technique to deposit a transition metal as a layer in an optical element; using a controlled deposition technique to deposit a hydrocarbon in the layer of the optical element; and wherein the controlled depositions are done simultaneously and in the presence of an ambient gas.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The present disclosure may be more fully appreciated in connection with the following detailed description taken in conjunction with the accompanying drawings, wherein:

[0035] FIG. 1 illustrates the reflectivity response as a function of (a) wavelength and (b) angle of a multilayer MoSi. The FWHM spectral bandwidth is 0.63 nm.

[0036] FIG. 2 illustrates the reflectivity response as a function of (a) wavelength and (b) angle of a multilayer of M.sub.xH.sub.yC.sub.zSi. The FWHM spectral bandwidth is 0.76 nm.

[0037] FIG. 3 illustrates the reflectivity response of a single layer coating deposited on an SiO.sub.2 substrate. The reflectivity response is at 13.5 nm, and measured as a function of angle from grazing (0 degrees) to normal (90 degrees) incidence. In one example, a metal coating (M) is deposited with an angular bandwidth (FWHM) of 25 degrees. In a second example, a coating of M.sub.xH.sub.yC.sub.z of similar thickness is deposited with an angular bandwidth (FWHM) of 51.3 degrees.

[0038] FIG. 4 shows the architecture of a known multilayer Bragg reflective coating. The architecture consists of a stack of alternative materials, material 1 and material 2 (multilayer) on a substrate, plus a protective layer or capping layer.

[0039] FIG. 5 shows the architecture of a multilayer Bragg reflective coating. The architecture consists of a stack of alternative materials (multilayer) on a substrate, plus a protective layer or capping layer. The stack of materials consists of bilayer pairs of M.sub.xH.sub.yC.sub.z and silicon, or alternatively M and Si-M.sub.xH.sub.yC.sub.z.

[0040] FIG. 6 shows a 3D architecture with an M.sub.xH.sub.yC.sub.z material, which forms a direct part of the coating.

DETAILED DESCRIPTION OF THE INVENTION

[0041] A list of definitions used in this invention is provided below.

TABLE-US-00001 BiLayers A pair of layers of from two different materials, e.g. Mo and Si Multilayer A stack of one or more layers, ranging from 2 layers to greater than 200 layers. Alternating Layers A sequence of repeating bilayers, multiple layers made from two or more different materials Multilayer Coating A coating made from a multilayer stack Bragg Reflective A reflective multilayer stack, containing bilayer pairs, of Coating alternating materials, each layer approximately a quarter wavelength/refractive index in thickness Wavelength range EUV wavelengths range from 0.1 nm to 100 nm, DUV wavelengths range from 100 nm to 250 nm. Specifically 10-20 nm, and 13.5 nm. No. of Bilayer Pairs Number of Bilayer pairs ranges from 20 to 40 to 80 or 100 or greater than 100. 3D Architecture This is a coating, usually formed in a single deposition, and consist of a three dimensional architecture, with structural features or periodicity in two or three dimensions. Unlike a 3D architecture, a multilayer coating is an example of a 1-D architecture. The architecture may contain a plurality structural features including, layers, spheres, cylinders and other such materials. M.sub.xH.sub.yC.sub.z x and/or y and/or and/or z can be 0. For x = 0, no metal is present, but a hydrocarbon. For the case where z = 0, no carbon is present, and M.sub.xH.sub.y may be a metal hydride, or a mixture or compound. For the case where y = 0, M.sub.xC.sub.z, no H is present may be a carbide e.g. Mo.sub.2C. For the case x = 0, e.g. a hydrocarbon H.sub.yC.sub.z. There is no case where x = y = z = 0, or x = 1, y = z = 0. The default assumption is x = 1, y = 1, x = 1 in the case where no subscript is designated. x, y, z x, y, z represent stoichiometric ratios, but may also represent mixture ratios, of one element relative to the next, or the relative number of atoms of one element to the next. e.g. Ru.sub.20He.sub.20C.sub.20 may represent a mixture of 10 atoms of Ru, 20 atoms of He, and 20 atoms of Carbon, or a relative mixture in that ratio. Combination material A mixture, alloy, compound or any combination of two or more elements to form a material, in crystalline, amorphous, metallo- organic nature. Ambient Gas Ambient Gas is the background gas in a vacuum chamber. e.g Argon, N.sub.2, H.sub.2, He, Ne, Kr. These are also referred to as elemental gases. Blended Gas This is a combination of two or more Ambient Gases Ions This may be any ions of the ambient gas Argon, N.sub.2, H.sub.2, He, Ne, Kr, or any combination used in sputtering or ion beam deposition Controlled deposition Intentional and deliberate deposition of any given material with a specific location and quantity to tune or control the optical properties of that material. Sputtering A process by which a target of a given material is targeted with a beam of ions or atoms of a given species, which generates a plume of the given material, which then deposits uniformly on a substrate forming a film of such material, usually in a vacuum chamber. Reflectivity Curve A graph show a reflectivity response function or resonance as a function of wavelength/frequency or angle. Transmission Curve A graph show a transmission response function or resonance as a function of wavelength/frequency or angle. Bandwidth A spectral or angular range of a reflectivity or transmission curve, bounded by the width of the curve Full Width Half Max The full bandwidth range at half the peak reflectance of the (FWHM) reflectivity or transmission curve. Integrated Energy The integrated area under the spectral curve which represents the total energy of the in band radiation Optical Element An element in a light source system e.g a photolithography tool or an x-ray telescope which interacts with the light. e.g. a mirror. Bandwidth Mismatch The differences in spectral or angular bandwidth from one optical element to another optical element, making them non-identical. Hydrocarbon A compound of hydrogen and carbon.

[0042] Optical elements used in photolithography include photomasks, mirrors, detectors, reflectors, spectral purity filters, filters, pellicles, diffraction gratings, polarizers, collectors. Each element may typically contain a substrate e.g. fused silica, silicon, glass, chrome, followed by a reflective or transmissive coating and optionally a protective layer. Each of these elements use similar materials based around a set of pure elements as the basis of their materials, e.g. Molybdenum, Silicon, Niobium, Ruthenium, Technetium, Zirconium, Strontium.

[0043] Metal refers to elements of the periodic table that are metallic and that can be neutral, or negatively or positively charged as a result of having more or fewer electrons in the valence shell than is present for the neutral metallic element. Metals useful in the present invention include the alkali metals, alkali earth metals, transition metals and post-transition metals. Alkaline earth metals include Be, Mg, Ca, Sr and Ba. Transition metals include Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y, Zr, Nb, Mo, Mg, Tc, Ru, Rh, Pd, Ag, Cd, La, Hf, Ta, W, Re, Os, Ir, Pt, Au, Hg, Al and Ac. Post-transition metals include Al, Ga, In, Tl, Ge, Sn, Pb, Sb, Bi, and Po. Rare earth metals include Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu. Alkali metals include Li, Na, K, Rb and Cs. One of skill in the art will appreciate that the metals described above can each adopt several different oxidation states, all of which are useful in the present invention.

A. Multilayer Coating Embodiment

[0044] A typical embodiment of a reflective coating is shown in FIG. 4. The architecture contains a substrate, topically fused silica, glass, chrome, silicon, quartz, a 1D multilayer Bragg reflective coating e.g. MoSi, NbSi, WSi, RuSi, or other materials as described in this invention, or as found in U.S. patent application Ser. No. 15/198,291, which is incorporated by reference. The multilayer consists of many layers of alternating material, each set of materials forming a bi-layer pair. Optionally on top of the stack of layers or bilayers is a capping layer or protective layer is a coating typically made from Ruthenium or other noble metal.

[0045] FIG. 4 illustrates a known multilayer reflective optical element 400 having a substrate 402 and a multilayer stack 411 that is constructed with many bi-layer pairs 409. Each bi-layer pair has a first layer of material 1 405, and a second layer of material 2 407. As is well known and common, one of the layers may be Si, and the other layer Mo.

[0046] In another embodiment the multilayer coating may be replaced by a 3D architecture, or having a plurality of structural features or one or more material combinations, such as those set out in U.S. patent application Ser. No. 13/745,618, which is incorporated herein by reference, as if set forth in its entirety. In this case the 3D architecture may be made from a single metal or other material.

[0047] In another embodiment e.g. as used in a pellicle, the coating maybe on a membrane, or suspended without a substrate. The coating may consist of a single material, or thin film or porous structure. The material may be Mo or Si or Metal Silicide.

[0048] This invention discloses an embodiment that replaces one or more layers in the multilayer reflective coating, the transmissive material used in the pellicle, or the material or the material in the 3D architecture with an M.sub.xH.sub.yC.sub.z combination material.

[0049] The M.sub.xH.sub.yC.sub.z combination material is made during the fabrication of the coating using a controlled deposition technique where it is deliberately and intentionally distributed in the coating in controlled locations and proportions to uniformly affect the optical properties of the material in those locations. This is distinguished from operational use of the coating, e.g. a mirror placed in front of the plasma source and receives hydrocarbons from debris at the source or in the vacuum chamber and such hydrocarbons or particle defects or ions are randomly positioned in the coating as an adverse effect from operational use of the element.

[0050] Specifically in the embodiment containing a multilayer architecture the M.sub.xH.sub.yC.sub.z combination material may replace e.g one or more of the layers of the bilayer pair, or one or more layers of the alternating layers, or one or more layers of the architecture. The net effect is an improved reflectance spectral and or angular curve 200 as shown in FIG. 2. The reflectivity response as a function of (a) wavelength and (b) angle of for a multilayer stack of MxCyHz.-Si. The FWHM spectral bandwidth is 0.76 nm. The angular bandwidth is +/10.8 degrees. CRAO +/8 degrees. The in-band energy transmitted is proportional to 16.14 (arb units). The average spectral reflectance is 31%. The peak spectral reflectance is 76%. Improved reflectance curve includes either increased FWHM, spectral or angular bandwidth increased integrated in band radiation transmitted, less bandwidth mismatch or improved peak amplitude of the curve, as compared to the state of the art MoSi. For example in a typical multilayer reflective coating, e.g. MoSi, the M.sub.xH.sub.yC.sub.z combination material may replace Mo, or Si or both e.g. MoH.sub.yC.sub.zSi. FIG. 5 illustrates the invention in a multilayer (501, 502) architecture 500.

[0051] FIG. 3 illustrates the reflectivity response 300 of a single layer coating deposited on an SiO.sub.2 substrate. The reflectivity response is at 13.5 nm, and measured as a function of angle from grazing (0 degrees) to normal (90 degrees) incidence. In one example, a metal coating (M) is deposited with an angular bandwidth (FWHM) of 25 degrees. In a second example, a coating of M.sub.xH.sub.yC.sub.z of similar thickness is deposited with an angular bandwidth (FWHM) of 51.3 degrees. Deposition techniques for these multilayer coatings are sputtering, ion beam deposition, PECVD, Atomic layer deposition, ion assisted deposition, e-beam deposition, chemical vapor deposition, thermal evaporation, ion implantation, molecular beam epitaxy. In the cases of sputtering or ion beam deposition or e-beam deposition charged particles may be used to bombard a target and therefore smoothly, and sometimes uniformly, deposit these layers with absolute control over the M.sub.xH.sub.yC.sub.z quantities, location and distribution. In one embodiment of the process to deposit the M.sub.xH.sub.yC.sub.z combination material either Argon, Nitrogen, Helium, Hydrogen, Krypton or Neon ions may be used. Similarly a blended gas containing a combination of two or more of these elements in gas form may also be used.

[0052] The process consists of loading two targets of the alternating materials within the chamber, bombarding each of the targets with a combination of two or more of the ions described above, and alternatively depositing thin layers of each of the two materials on to a substrate.

[0053] A similar process is used for ion beam deposition, where a second beam or blended ions of one or more ions, the ion assisted deposition beam, may be directed near the substrate to increase the interaction of the plume of target material at the substrate as the film is formed.

[0054] Another embodiment of the process consists of co-sputtering or co-evaporating a hybrid material in a deposition chamber. For example, a transition metal may be sputtered at the same time as sputtering or evaporating hydrocarbon within the same vacuum deposition system, in the presence of an ambient or blended gas.

[0055] Deposition techniques for the pellicle may additionally include atomic layer deposition, or vapor deposition or electrodeposition or ion implantation. In this case a metal may be conformally deposited, and then post-treated with a hydrocarbon vapor, gas, ambient or blended gas.

[0056] FIG. 6 illustrates an optical element 600 having a deposition into a 3 D architecture 605. In this case a metal may be conformally deposited, and then post-treated with a hydrocarbon vapor, gas, ambient or blended gas. The optical element 600 may have an optional capping layer 603, and in some cases may have a substrate 607. In other cases, a substrate may not be required, for example, if the optical element is constructed as part of a membrane structure. Alternatively FIG. 6 may be formed by an organometallic complex described herein.

B. 3D Architecture Embodiment

[0057] The following architecture may be used on an optical element in a transmissive coating, a membrane, or as part of pellicle. It may also be used in a reflective coating on a mirror or a mask.

[0058] 2D or 3D architectures are formed from self assembled organic synthetic templates, polymers, organic inorganic hybrids or metallo organic complexes. Such complexes contain Metal (M), Carbon and Hydrogen atoms e.g. for example metallocenes, or benzene/toluene based compounds, or cyclopentadienyl rings, or other complexes, where the atoms or molecules are joined by ligands. Examples of carbon include diamond like carbon, graphene, graphite, double bond carbon, single bond carbon.

[0059] Useful 3-dimensional reflective photonic crystals for the present invention are described in U.S. Pat. No. 9,322,964. The material can include features that can be used in applications that require operation at one or more electromagnetic wavelength range. In one embodiment, the dimension of structural features is approximately in the same order as the wavelengths used in extreme ultraviolet applications. For example, the structural features can have a dimension of approximately 13.5 nm. In some embodiments, the features can be structural features having dimensions in the order of 10 to 20 nm. In some embodiments, the material can have structural features in the range of 0.001 nm to 10 nm. In some embodiments, the material can have structural features in the range of 10 nm to 250 nm. These features can be referred to as nanoscale features. The nanoscale features can be one dimensional, two dimensional, or three dimensional. The structural features can reduce the bulk electromagnetic absorption of the material. For example, in some applications, the nanoscale features can approximately correlate with the wavelength of the radiation used in that application. The material may include sub-wavelength features.

[0060] The nanoscale features can include, for example, a periodic or semi-periodic, quasi-periodic or aperiodic structure or a repeating or repeated element. The periodic structure can be a one, two or three dimensional structure. The structure can be part of a layered structure, or on a substrate. The substrate can be planar. Examples of a periodic structure include a 2D or 3D array of nanoparticles, a gyroidal structure, spheres, cylinders, segments, a swiss-roll structure. The nanoscale features can be of any shape in any dimension, for example, but not limited to, layers, films, spheres, blocks, pyramids, rings, porous structures, cylinders, linked shapes, shells, freeform shapes, chiral structures, hemispheres, segments or any combination thereof.

[0061] The material can include, for example, a graded structure. For example a layered structure in any dimension where some layers within the material have lengths, depths, thicknesses, periods or repeating units, that increase or decrease from the previous layer. In one embodiment if the layers are arranged in such a way to produce a graded refractive index, then a customized optical response is produced for a broader range of wavelengths or angles. The structure can be part of a layered structure, or on a substrate.

[0062] The material can also include a polymer. The material may further comprise micro or nano structural features of the polymer. The polymer may also be a sacrificial material, or a soft templating or scaffolding structure. The polymer may be self assembled in two or three dimensions.

[0063] The polymer structure may be complexed with an organometallic complex using M.sub.xH.sub.yC.sub.z combination material and then assembled to form a 2D or 3D architecture.

C. Examples

[0064] FIG. 5 illustrates a Bragg reflector 500 in accordance with the present invention. FIG. 5 shows two example embodiments. In one embodiment 501, a multilayer stack 511 is deposited on a substrate 502. In example 501, each bi-layer pair 509 has a layer of Si and a layer of the M.sub.xH.sub.yC.sub.z material. A capping layer 515 may be formed to protect the top bi-layer pair. In example 2 502, each bi-layer pair 509 has a layer of Mo and a layer of the M.sub.xH.sub.yC.sub.z material. A capping layer 515 may be formed to protect the top bi-layer pair. In yet another example (not illustrated) the bi-layer pairs could have a first layer of the M.sub.xH.sub.yC.sub.z material, and the second layer could be a different the M.sub.xH.sub.yC.sub.z material having a ratio different than what is used for layer 1.

[0065] FIG. 6 illustrates a 3D architecture coating, self assembled to a given 3D structure with a single coating formed from a M.sub.xC.sub.yH.sub.z material.

D. Uses of Coatings

[0066] This invention includes use of the coating in apparatus related to lithography, imaging and printing systems and equipment, and their components and elements therein. This includes lightsources, scanner tools, inspection tools, metrology, and fabrication tools.

[0067] While the above detailed description has shown, described, and pointed out novel features as applied to various embodiments, it will be understood that various omissions, substitutions, and changes in the form and details of the devices or algorithms illustrated can be made without departing from the spirit of the disclosure. Thus, nothing in the foregoing description is intended to imply that any particular feature, characteristic, step, module, or block is necessary or indispensable. As will be recognized, the processes described herein can be embodied within a form that does not provide all of the features and benefits set forth herein, as some features can be used or practiced separately from others. The scope of protection is defined by the appended claims rather than by the foregoing description.