Packaging substrate and method of fabricating the same

Abstract

The packaging substrate according to the present invention is a packaging substrate including: a core substrate; an insulating layer formed on one surface or each of both surfaces of the core substrate; and one or more wiring layers formed on the insulating layer and/or embedded in the insulating layer. The packaging substrate has a thin layer portion where the insulating layer is partially thinned at an outer peripheral portion of the insulating layer.

Claims

1. A packaging substrate comprising: a core substrate; an insulating layer formed on one surface or each of both surfaces of the core substrate; and at least one wiring layer formed on the insulating layer and/or embedded in the insulating layer, wherein the packaging substrate has a thin layer portion where the insulating layer is partially thinned at an outer peripheral portion of the insulating layer, wherein the core substrate is made of glass, and wherein the thin layer portion has a width w3 [m] between an end of the thin layer portion and a stepped surface of the insulating layer, the w3 has a value determined by the following formula:
w3(*E*T*L*d)/(63710^7)[Math 1] wherein [ppm/K] represents a linear expansion coefficient of the wiring layer and the insulating layer, E [Pa] represents a Young's modulus of the wiring layer and the insulating layer, T [K] represents a predetermined temperature difference, d [m] represents a composite thickness of the wiring layer and the insulating layer, and L [m] represents a length from an end of the thin layer portion to the other end of the thin layer portion.

2. The packaging substrate of claim 1, wherein the w3 is 120 m or more.

3. A method of fabricating a packaging substrate comprising: a step of forming a wiring layer and an insulating layer on one surface or each of both surfaces of a core substrate to form a wiring substrate; a step of forming an isolation trench at a predetermined position of the insulating layer by dicing, using a first dicing blade so that the insulating layer is partially thinned; and a step of dicing the insulating layer and the core substrate at a center of a width of a bottom surface of the isolation trench, using a second dicing blade having a tip width smaller than a tip width of the first dicing blade to obtain a plurality of packaging substrates each having a thin layer portion where the insulating layer is partially thinned.

4. The method of fabricating the packaging substrate of claim 3, wherein the core substrate is made of glass.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a cross-sectional view of a packaging substrate according to the present invention.

(2) FIG. 2 is a top view of the packaging substrate according to the present invention.

(3) FIG. 3 is a schematic cross-sectional view of a wiring substrate according to the present invention.

(4) FIG. 4 is a schematic diagram illustrating a step of fabricating the packaging substrate according to the present invention.

(5) FIG. 5 is a schematic diagram illustrating a step of fabricating the packaging substrate according to the present invention.

(6) FIG. 6 is a schematic diagram illustrating a step of fabricating the packaging substrate according to the present invention.

(7) FIG. 7 is a schematic diagram illustrating a step of fabricating the packaging substrate according to the present invention.

(8) FIG. 8 is a schematic diagram illustrating a step of fabricating the packaging substrate according to the present invention.

(9) FIG. 9 is a schematic diagram illustrating a step of fabricating the packaging substrate according to the present invention.

DESCRIPTION OF REPRESENTATIVE EMBODIMENTS

(10) Embodiments of a packaging substrate and a method of fabricating the same according to the present invention will hereafter be described in detail with reference to the drawings. The representative embodiments described below are merely examples of the present invention, and the design thereof could be appropriately changed by one skilled in the art.

(11) In the present specification, the term packaging substrate refers to a laminate fabricated by dicing a wiring substrate into pieces. Further, the term wiring substrate refers to a wiring substrate before being diced into pieces by dicing, that is, packaging substrates in a state of being continuous.

(12) It is known that, when a core substrate provided with an insulating layer and a wiring layer is diced as described above, minute cracks are likely to develop at the cut surface of the core substrate due to the impact generated during dicing. Thermal stresses of the insulating layer and the wiring layer generate tensile stress to the core substrate. This tensile stress extends the cracks of the core substrate, resulting in breakage of the core substrate.

(13) The inventor of the present invention has found that provision of thin layer portions on the surface of the core substrate by partially removing the insulating layer formed on the core substrate at a position near the cut surface of the core substrate can reduce tensile stress occurring in the core substrate to better prevent breakage of the core substrate, and completed the present invention.

(14) (Packaging Substrate)

(15) FIG. 1 is a cross-sectional view of a packaging substrate according to the present invention. As shown in FIG. 1, a packaging substrate 200 includes a core substrate 10, insulating layers 20, and one or more wiring layers 30 laminated on both surfaces of the core substrate 10 in the thickness direction of the core substrate 10. The packaging substrate 200 has a thin layer portion 21 that is configured such that the insulating layer 20 is partially thinned.

(16) FIG. 2 is a top view of a packaging substrate 200 according to the present invention. As shown in FIG. 2, the thin layer portion 21 is provided at the outer peripheral portion of the insulating layer 20. In FIG. 2, wiring layers 30 are omitted for the sake of simplification.

(17) FIG. 3 is a cross-sectional view of a wiring substrate according to the present invention. By dicing a wiring substrate 100 shown in FIG. 3 into pieces by a method described later, the packaging substrate 200 can be fabricated.

(18) (Core Substrate)

(19) The core substrate 10 can be made of a material that improves the electrical properties of the wiring substrate 100 and the packaging substrate 200. Examples of the material for the core substrate 10 include a brittle material such as a glass substrate, silicon substrate, ceramic substrate, plastic plate, or plastic tape. The core substrate 10 is preferably a glass substrate made of, for example, a soda-lime glass, alumino-silicate glass or the like. The glass substrate used for the core substrate 10 of the present invention may be surface-treated by a method generally used in the art. For example, the glass substrate may be surface-treated by a roughening process, by hydrofluoric acid, or by silicon. In one aspect of the present invention, a glass substrate used for the core substrate 10 may have an underlayer (not shown) formed on the surface of the glass substrate. The thickness of the core substrate 10 is not particularly limited, but is preferably in the range of 50 m to 700 m.

(20) (Wiring Layer)

(21) The wiring layers 30 are formed on the surfaces of the core substrate 10 in the thickness direction of the core substrate 10, and/or on the surfaces of the insulating layers 20, and/or inside the insulating layers 20. In one aspect of the present invention, at least one wiring layer 30 is formed so as to be in contact with the core substrate 10. In another aspect of the present invention, the wiring layers 30 may not be in contact with the core substrate. Each wiring layer 30 may be formed of a single layer or a plurality of layers.

(22) The wiring layers 30 may be made of a conductive material commonly used in the art. Specifically, the wiring layers 30 can be made of copper, silver, tin, gold, tungsten, conductive resin or the like. For the wiring layers 30, copper is preferably used. The wiring layers 30 can be formed by a method that is common in the art. Examples of a method of forming the wiring layers 30 include, but are not limited to, a subtractive process, a semi-additive process, ink-jet printing, screen-printing, or gravure offset printing. The method of forming the wiring layers 30 may preferably be the semi-additive process. Each wiring layer 30 basically has a thickness smaller than that of the core substrate 10 and the insulating layers 20. Total thickness of each wiring layer 30 is preferably, for example, in the range of 1 m to 100 m, although it depends on the method of forming the wiring layers 30.

(23) (Insulating Layer)

(24) In one aspect of the present invention, the insulating layers 20 are formed over the core substrate 10 and the wiring layers 30 so as to embed the wiring layers 30. Each insulating layer 20 may be formed of a single layer or a plurality of layers.

(25) The insulating layers 20 may be made of an insulating material that is common in the art. Specifically, the insulating layers 20 can be made of an epoxy resin-based material, an epoxy acrylate-based resin, a polyimide-based resin and the like. These insulating materials may each contain a filler. As the insulating material forming the insulating layers 20, an epoxy-containing resin having a linear expansion coefficient in the range of 7 to 130 ppm/K is preferable because it is easily available in general.

(26) The insulating material forming the insulating layers 20 may be a liquid or a film. When the insulating material is a liquid, the insulating layers 20 can be formed by a method such as of spin coating, die coating, curtain coating, roll coating, doctor blading, or screen printing that are common in the art. When the insulating material is a film, the insulating layers 20 can be formed, for example, by vacuum lamination. Each insulating layer 20 formed as described above may be cured by heating or light irradiation. Each insulating layer 20 has a thickness d.sub.1 which is preferably in the range of 1 m to 200 m, although the thickness depends on the method of forming the insulating layers 20.

(27) (Formation of Packaging Substrate)

(28) The packaging substrate 200 according to an aspect of the present invention can be formed according to the steps shown in FIGS. 3 to 9, but the steps are not limited thereto. First of all, as shown in FIG. 3, the wiring layers 30 and the insulating layers 20 are formed on the surfaces of the core substrate 10 in the thickness direction of the core substrate 10 to form the wiring substrate 100 by the method described above.

(29) Then, as shown in FIGS. 4 and 5, isolation trenches 40 each having a depth d.sub.m are formed, from a first surface side, at predetermined positions of the insulating layer 20 of the wiring substrate 100 by using a first dicing blade 50 having a tip width w.sub.1. By using the first dicing blade 50 having the tip width w.sub.1, the isolation trenches 40 having a width w.sub.1 at the bottom surface thereof can be formed. When the tip of the first dicing blade 50 has a tapered shape, the width of the portion having the largest width is taken to be the width of the tip of the dicing blade. The same applies to a second dicing blade 60 described later.

(30) The first dicing blade 50 may be any dicing blade as long as it is used for typical dicing. For example, the first dicing blade 50 may be a diamond blade where diamond abrasive grains are embedded in a resin. The thin layer portion 21 of each insulating layer 20 that is left on the core substrate 10 has a thickness ds which is, for example, 0<d.sub.s45 m. By allowing the thickness ds of each insulating layer 20 to remain on the core substrate 10, the surface of the core substrate 10 can be protected to better prevent chipping of the core substrate material caused by dicing. As shown in FIG. 1, the sum of d.sub.m and d.sub.s is equal to the thickness d.sub.1 of each insulating layer 20.

(31) Then, as shown in FIG. 6, the isolation trenches 40 are similarly formed on a second surface of the wiring substrate 100.

(32) Then, as shown in FIGS. 7 and 8, the wiring substrate 100 is diced into pieces by dicing the insulating layers 20 and the core substrate 10 along the line passing through the center of the width of the bottom surface of each isolation trench 40, by using the second dicing blade 60. The second dicing blade 60 has a tip width w.sub.2 which is smaller than the tip width w.sub.1 of the first dicing blade 50, that is, smaller than the width w.sub.1 of the bottom surface of each isolation trench 40.

(33) Since each insulating layer 20 is thinned at the bottom surface of each isolation trench 40, each packaging substrate 200 fabricated by cutting the wiring substrate 100 at the center of each isolation trench 40 has the thin layer portion 21 where the insulating layers 20 are partially thinned on the surfaces of outer peripheral portions thereof. Let us assume that the vertical surface between the surface of the thick layer portion in the insulating layer 20 and the surface of the thin layer portion 21 is a stepped surface 20a, and the length from an end of the insulating layer 20 in the thin layer portion 21 to the stepped surface 20a is a width w.sub.3. It has been found that the width w.sub.3 is preferably 120 m or more, as will be described later, although the width w.sub.3 depends on the thickness or the material of the insulating layers 20 and the wiring layers 30. The width w.sub.3 of the thin layer portion 21 may be configured to be different between the front and the back surfaces of the packaging substrate 200.

(34) As described above, by dicing the wiring substrate 100 into pieces at the center of each isolation trench 40, a plurality of packaging substrates 200 is formed as shown in FIG. 9.

(35) It is difficult to estimate an exact value of w.sub.3, but it is expected that the value is influenced by: a linear expansion coefficient [ppm/K] and a Young's modulus E [Pa] of a laminate formed by laminating the wiring layers 30 and the insulating layers 20, the laminate being regarded as integrated materials; a temperature difference T [K] between the highest temperature of the insulating layer 20 at the time of lamination and the lowest temperature of the insulating layer 20 in a temperature cycle test (TCT) for giving temperature change; a length L [m] of one side of the packaging substrate 200, the side extending from an end of the thin layer portion 21 to the other end thereof; a composite thickness d [m] which is the sum of thicknesses of the wiring layers 30 and the insulating layer 20 laminated on the core substrate 10; and a representative stress value F [Pa] that the core substrate 10 can withstand, based on the strength of the core substrate 10. In the present invention, the lower limit value of w.sub.3 [m] is regarded to be proportional to a square root of .Math.E.Math.T/F which is a dimensionless quantity, and also regarded to be proportional to a square root of L.Math.d so as to match the results of the experiments. That is, the following (Formula 1) is regarded to be approximately established.

(36) $\begin{array}{cc}\left[\mathrm{Math}2\right]& \\ w_3\sqrt{\frac{.Math.E.Math.T.Math.L.Math.d}{F}}& \left(\mathrm{Formula}1\right)\end{array}$

(37) Using, for example, a temperature change of 125 C. to 55 C. prescribed as a standard in the temperature cycle test (TCT) described below, T can be determined to be equal to 180 K (T=180 K). F can be determined in a back calculation manner through Formula 1 using the lower limit value w3 determined from the evaluations of the temperature cycle test (TCT) for the packaging substrate.

(38) and E used for the calculation of the width w3 are determined by using conditions shown in Table 1 below and Formulas 2 to 4 provided below.

(39) TABLE-US-00001 TABLE 1 Linear Expansion Coefficient Young's Modulus Thickness Insulating Layer .sub.1 E.sub.1 d.sub.1 Wiring Layer .sub.2 E.sub.2 d.sub.2 Equivalent composite .sup. E.sup. d.sup. (Insulating Layer + Wiring Layer)

(40) Composite physical properties , E and d of the insulating layer 20 and the wiring layer 30 can be calculated using Formulas 2 to 4 mentioned below. The wiring layers 30 are embedded in each insulating layer 20, and therefore d is expressed by the following Formula 2.
d=d.sub.1(Formula 2)

(41) As shown in Formula 2, the thickness d.sub.1 of the insulating layer 20 can be regarded as a composite thickness d which is a sum of thicknesses of the insulating layer 20 and the wiring layers 30.

(42) Since the wiring layers 30 are formed according to a wiring pattern, the wiring layers 30 are not actually formed over the entire surface. However, for the purpose of generalization, if the wiring layers 30 are taken to be formed on the entire surface in the calculations (more strict conditions are established in terms of the occurrence of breakage in the core substrate if the wiring layers 30 are assumed to be formed over the entire surface), the composite Young's modulus E can be determined using the following Formula 3, since the ratio of thicknesses d.sub.1 to d.sub.2 is equal to the volume ratio of insulating layers 20 to wiring layers 30.

(43) $\begin{array}{cc}\left[\mathrm{Math}3\right]& \\ E=\frac{E_1{d}_1}{d}+\frac{E_2{d}_2}{\mathrm{dt}}& \left(\mathrm{Formula}3\right)\end{array}$

(44) Assuming that each layer is to be formed on the entire surface, the volumes of each insulating layer 20 and each wiring layers 30 are regarded as V.sub.1 and V.sub.2, respectively, and the Poisson ratios of each insulating layer 20 and each wiring layers 30 are regarded as v.sub.1 and v.sub.2, respectively. In this case, the composite linear expansion coefficient (CTE) a is expressed by the following Formula 4.

(45) $\begin{array}{cc}\left[\mathrm{Math}4\right]& \\ =\frac{\left(1-v_2\right){}_1{E}_1{V}_1+\left(1-v_1\right){}_2{E}_2{V}_2}{\left(1-v_2\right)E_1{V}_1+\left(1-v_1\right)E_2{V}_2}& \left(\mathrm{Formula}4\right)\end{array}$

(46) The width w.sub.3 according to the linear expansion coefficient, Young's modulus, thickness, Poisson ratio and volume of each wiring layer 30 and insulating layer 20 can be determined by using Formulas 2 to 4 in the calculation of Formula 1 after empirically determining F.

(47) Use of such a packaging substrate 200, can reduce the tensile stress applied to an end surface of the core substrate 10 caused by the difference in thermal stress between the core substrate 10, insulating layers 20 and wiring layers 30 to reduce breakage of the core substrate 10 caused by stress. Moreover, by providing the thin layer portion 21 that is formed by allowing the thickness ds of each insulating layer 20 to remain on the core substrate 10 at the outer peripheral portion thereof, both surfaces of the core substrate 10 are protected to better prevent chipping of the core substrate 10.

EXAMPLES

(48) Examples of the present invention are described below, however the following examples do not limit the range of application of the present invention.

Example 1

(49) The core substrate 10 was made of aluminosilicate glass, and the thickness of the core substrate 10 was set to 300 m. On both surfaces of the core substrate 10, the wiring layers 30 each having a thickness of 5 m were formed in a thickness direction of the core substrate 10 by copper plating using a semi-additive method. After laminating the wiring layers 30 on the core substrate 10, an insulating material which was an epoxy-containing resin was laminated on both surfaces of the core substrate 10 by vacuum lamination at 190 C., to form insulating layers 20. Then, the wiring layers 30 and the insulating layers 20 were repeatedly formed to produce a laminate of four wiring layers 30 and three insulating layers 20 on both surfaces of the core substrate 10. Thus, the wiring substrate 100 shown in FIG. 3 was obtained. Each insulating layer 20 on both surfaces of the core substrate 10 had a thickness d.sub.1 of 60 m.

(50) Then, as shown in FIGS. 4 and 5, isolation trenches 40 each having the trench width w.sub.1 of 390 m at a bottom surface and a depth of 45 m were provided, from a first surface side, at predetermined positions of each insulating layer 20 by using a first dicing blade 50 having the tip width w.sub.1 of 390 m to dice the wiring substrate 100 into pieces. Then, as shown in FIG. 6, the isolation trenches 40 each having the width w.sub.1 of 390 m and a depth 45 m were also formed from a second surface side of the insulating layer 20.

(51) After forming the isolation trenches 40, insulating layers 20 and the core substrate 10 were diced, as shown in FIGS. 7 and 8, at the center of the trench width of each isolation trench 40 to dice the wiring substrate 100 into pieces by using a second dicing blade 60 having the tip width w.sub.2 of 150 m. Thus, packaging substrates 200 were obtained. The size of the packaging substrate 200 was set to be 10 mm10 mm (L=10 mm). As a result, the width w.sub.3 of the thin layer portion 21 was 120 and the thickness ds of the thin layer portion 21 was 15 m.

(52) In Example 1, regarding the linear expansion coefficient, Young's modulus, thickness, Poisson ratio and volume, values shown in the following Table 2 were used.

(53) TABLE-US-00002 TABLE 2 Linear Expansion Young's Coefficient Modulus Thickness Poisson Volume (ppm/K) [Pa] [m] Ratio [m.sup.3] Insulating Layer .sub.1 = 23 E.sub.1 = 7.5 10.sup.9 d.sub.1 = 60 10.sup.6 .sub.1 = 0.37 V.sub.1 = 6 10.sup.9 Wiring Layer .sub.2 = 17 E.sub.2 = 120 10.sup.9 d.sub.2 = 20 10.sup.6 .sub.2 = 0.343 V.sub.2 = 2 10.sup.9 Equivalent composite = 18 E = 47.5 10.sup.9 d = 60 10.sup.6 (Insulating Layer + Wiring Layer)

(54) Using a temperature change of 125 C. to 55 C. prescribed as a standard in the temperature cycle test (TCT) mentioned below, T was set to be equal to 180 K (T=180 K), and the width w3 of the thin layer portion 21 was set to 120 m.

(55) 1000 cycles of temperature cycle test (TCT) MIL-STD-883H for giving temperature change of 125 C. to 55 C. was performed on 10 packaging substrates 200 fabricated in Example 1. As a result, in the fabricated packaging substrates 200, reliability was not impaired due to breakage of the core substrate 10 and the like.

Example 2

(56) In Example 2, for the wiring substrate 100 formed with conditions similar to those of the wiring substrate used in Example 1, the tip width w.sub.1 of the first dicing blade 50 was changed to 450 m, while all other conditions including the tip width of the second dicing blade 60 and the like remained the same as those of Example 1. As a result, packaging substrates 200 obtained in Example 2 were provided with the isolation trenches 40 each having a width w.sub.1 of 450 m, and the thin layer portions 21 each having a width w.sub.3 of 150 m on both surfaces thereof.

(57) 1000 cycles of temperature cycle test MIL-STD-883H for giving temperature change of 125 C. to 55 C. was performed on 10 packaging substrates 200 fabricated in Example 2. As a result, in the fabricated packaging substrates 200, reliability was not impaired due to breakage of the core substrate 10 and the like.

Example 3

(58) In Example 3, for the wiring substrate 100 formed with conditions similar to those of the wiring substrate used in Example 1, the tip width w.sub.1 of the first dicing blade 50 was changed to 750 m, while all other conditions including the tip width of the second dicing blade 60 and the like remained the same as those of Example 1. As a result, packaging substrates 200 obtained in Example 3 were provided with the isolation trenches 40 each having a width w.sub.1 of 750 m and the thin layer portions 21 each having a width w.sub.3 of 300 m.

(59) 1000 cycles of temperature cycle test MIL-STD-883H for giving temperature change of 125 C. to 55 C. was performed on 10 packaging substrates 200 fabricated in Example 3. As a result, in the fabricated packaging substrates 200, reliability was not impaired due to breakage of the core substrate 10 and the like.

Example 4

(60) In Example 4, packaging substrates 200 were obtained in the same manner as in Example 1, except that the value of ds was changed to 30 m.

(61) 1000 cycles of temperature cycle test MIL-STD-883H for giving temperature change of 125 C. to 55 C. was performed on 10 packaging substrates 200 fabricated in Example 4. As a result, in the fabricated packaging substrates 200, reliability was not impaired due to breakage of the core substrate 10 and the like.

Example 5

(62) In Example 5, packaging substrates 200 were obtained in the same manner as in Example 1, except that the value of ds was changed to 45 m.

(63) 1000 cycles of temperature cycle test MIL-STD-883H for giving temperature change of 125 C. to 55 C. was performed on 10 packaging substrates 200 fabricated in Example 5. As a result, in the fabricated packaging substrates 200, reliability was not impaired due to breakage of the core substrate 10 and the like.

COMPARATIVE EXAMPLE

Comparative Example 1

(64) Packaging substrates of 10 mm10 mm were obtained in the same manner as in Example 1, except that the isolated trenches 40 were not provided, that is, the thin layer portions 21 were not provided. The packaging substrates fabricated in Comparative Example 1 were left to stand at room temperature for 3 days. 3 days after, cracking was observed in 7 core substrates out of 10 core substrates.

Comparative Example 2

(65) In Comparative Example 2, packaging substrates of 10 mm10 mm were obtained in the same manner as in Example 1, except that the width w.sub.3, d.sub.m, and d.sub.s of the thin layer portion 21 was set to 60 m, 55 m, and 5 m, respectively.

(66) The packaging substrates fabricated in Comparative Example 2 were left to stand at room temperature for 3 days, 3 days after, cracking was observed in 7 core substrates out of 10 core substrates.

EVALUATIONS

(67) The following Table 3 shows a summary of evaluations of the Examples and Comparative Examples.

(68) TABLE-US-00003 TABLE 3 w.sub.3 (actual measured value) [m] d.sub.s [m] Evaluations Example 1 120 15 TCT 1000 cycles Example 2 150 15 TCT 1000 cycles Example 3 300 15 TCT 1000 cycles Example 4 120 30 TCT 1000 cycles Example 5 120 45 TCT 1000 cycles Comparative 0 No thin layer x After being left at Example 1 portion normal temperature Comparative 60 5 x After being left at Example 2 normal temperature

(69) As shown in Table 3, the core substrate 10, insulating layers 20, and wiring layers 30 with conditions of Examples 1 to 5 are considered to provide packaging substrates that can prevent breakage of the cut surfaces of the core substrate, by setting the width w.sub.3 of each thin layer portion 21 to 120 m or more.

(70) Here, the lower limit of the width w.sub.3 of the thin layer portion 21 was set to 120 m based on the evaluations set forth above, and w.sub.3=120 m was substituted into Formula 1 provided above to back-calculate the value of F. As a result, it was found that F=63710.sup.7 [Pa] was established. Therefore, in the case where the core substrate 10 is made of glass, by substituting F=63710.sup.7 [Pa] in Formula 1 mentioned above, the width w.sub.3 of the thin layer portion 21 can be determined according to the following Formula 5.

(71) $\begin{array}{cc}\left[\mathrm{Math}5\right]& \\ w_3\sqrt{\frac{.Math.E.Math.T.Math.L.Math.d}{637{10}^7}}& \left(\mathrm{Formula}5\right)\end{array}$

(72) In the case where the core substrate 10 is made of glass, use of Formula 5 is considered to enable estimation of the value of the width w.sub.3 of each thin layer portion 21 even if conditions of the laminate formed of the insulating layers 20 and the wiring layers 30 change.

(73) As described above, it is considered that packaging substrates 200 of the present invention better improved and even prevented extension of minute cracks caused by thermal stress that leads to breakage of the core substrate 10, the packaging substrates 200 each having the thin layer portion 21 that is formed by partially removing the outer peripheral portions of each insulating layer 20.

(74) In FIG. 2, the packaging substrate 200 is shown in a square shape in plan view. However, the shape of the packaging substrate 200 is not limited thereto, and the packaging substrate 200 may be formed, for example, into a rectangular shape in plan view.

REFERENCE SIGNS LIST

(75) 10 . . . Core substrate; 20 . . . Insulating layer; 21 . . . Thin layer portion; 30 . . . Wiring layer; 40 . . . Isolation trench; 50 . . . First dicing blade; 60 . . . Second dicing blade; 100 . . . Wiring substrate; 200 . . . Packaging Substrate.