DEVICE AND METHOD FOR HOLDING, ROTATING, AS WELL AS HEATING AND/OR COOLING A SUBSTRATE

Abstract

A device and a method for holding, rotating, heating and/or cooling a substrate. The device comprises a rotor, having: at least one secondary winding, a substrate holder with a substrate holder surface and fixing elements for fixing the substrate, a rotary shaft for rotating the substrate holder around a rotary axis, at least one electric heater for heating and/or a cooler for cooling the substrate holder surface; and a stator, having: at least one primary winding, a ring-shaped base, wherein the rotary shaft of the rotor is arranged at least partially inside the base; and wherein a current and/or a voltage is induced in the at least one secondary winding by the at least one primary winding, the induced current and/or voltage used to power the at least one heater and/or cooler so that the substrate holder surface is heated and/or cooled.

Claims

1. A device for holding, rotating, heating and/or cooling a substrate, said device comprising: a rotor having: at least one secondary winding, a substrate holder with a substrate holder surface and fixing elements for fixing the substrate, a rotary shaft for rotating the substrate holder around a rotary axis, at least one electric heater for heating and/or a cooler for cooling the substrate holder surface; and a stator having: at least one primary winding, a ring-shaped base, wherein the rotary shaft of the rotor is arranged at least partially inside the base; wherein a current and/or a voltage is induced in the at least one secondary winding by the at least one primary winding, and wherein the current and/or voltage induced in the at least one secondary winding powers the at least one heater and/or cooler to heat and/or cool the substrate holder surface.

2. The device according to claim 1, wherein the at least one primary winding is arranged on a base surface.

3. The device according to claim 1, wherein the at least one primary winding is arranged inside the base.

4. The device according to claim 1, wherein the at least one primary winding and the at least one secondary winding are configured as flat coils.

5. The device according to claim 4, wherein the at least one primary winding and the at least one secondary winding are arranged parallel to one another.

6. The device according to claim 4, wherein the at least one primary winding and the at least one secondary winding are arranged in and/or parallel to a plane that is arranged at right angles to the rotary axis.

7. The device according to claim 4, wherein the at least one primary winding is arranged on a base surface of the base, facing the substrate holder.

8. The device according to claim 4, wherein the at least one secondary winding is arranged on a reverse side of the substrate holder, facing the base.

9. The device according to claim 1, wherein the at least one primary winding and the at least one secondary winding are configured as cylinder coils.

10. The device according to claim 9, wherein the at least one primary winding and the at least one secondary winding are arranged concentrically in relation to the rotary axis.

11. The device according to claim 9, wherein the at least one primary winding is arranged on an inner base surface of the base facing the rotary shaft and the at least one secondary winding is arranged on a shaft surface of the rotary shaft facing the inner base surface.

12. The device according to claim 9, wherein the at least one primary winding and the at least one secondary winding are arranged acentrically in relation to the rotary axis.

13. The device according to claim 9, wherein at least two primary windings are arranged inside the base and at least two secondary windings are arranged inside the rotary shaft.

14. The device according to claim 13, wherein the at least two primary windings and the at least two secondary winding are arranged at an equal angular distance around the rotary axis.

15. The device according to claim 1, wherein the device further comprises: a measuring device for measuring the temperature of the heater, the substrate holder, the substrate holder surface and/or the substrate, and a device for transmitting the temperature measurements for the heater, the substrate holder, the substrate holder surface and/or the substrate from the rotor to the stator via the inductive coupling between the at least one primary winding and the at least one secondary winding.

16. The device according to claim 1, wherein the rotor has an identification chip for identification of the rotor, wherein the identification chip is located on the rim of the rotary shaft.

17. The device according to claim 1, wherein the device further comprises a flushing agent for flushing the rotor using a gas flow.

18. A method for holding, rotating and heating and/or cooling a substrate, said method comprising: holding the substrate using a rotor comprised of a substrate holder with a substrate holder surface and fixing elements for fixing the substrate, and inducing a current in at least one secondary winding of the rotor using at least one current-carrying primary winding of a stator, wherein the current induced in the at least one secondary winding powers at least one heater and/or cooler so that the substrate holder surface, and thereby the substrate, are heated and/or cooled.

19. The method according to claim 18, wherein the rotor is flushed by a gas flow wherein a primary-side capacitor component and a secondary-side capacitor component are flushed, and wherein an overpressure is built up between the rotor and the stator, which is greater than an ambient pressure.

Description

[0118] Further advantages, features, and details of the invention are revealed in the following description of preferred exemplary embodiment as well as by means of the drawings in which

[0119] FIG. 1a shows a schematic, not-to-scale drawing of a cross-section through a part of a first embodiment of the invention,

[0120] FIG. 1b shows a schematic, not-to-scale top view of part of the first embodiment of the invention,

[0121] FIG. 2a shows a schematic, not-to-scale drawing of a cross-section through a part of a second embodiment of the invention,

[0122] FIG. 2b shows a schematic, not-to-scale top view of part of the second embodiment of the invention,

[0123] FIG. 3a shows a schematic, not-to-scale drawing of a cross-section through a part of a third embodiment of the invention,

[0124] FIG. 3b shows a schematic, not-to-scale top view of part of the third embodiment of the invention,

[0125] FIG. 4a shows a schematic, not-to-scale drawing of a cross-section through a part of another embodiment of the invention with capacitive measurement,

[0126] FIG. 4b shows a schematic, not-to-scale drawing of a cross-section through a part of another embodiment of the invention with infrared measurement,

[0127] FIG. 4c shows a schematic, not-to-scale drawing of a cross-section through a part of another embodiment of the invention with radio measurement,

[0128] FIG. 4d shows a schematic, not-to-scale drawing of a cross-section through a part of another embodiment of the invention with radiation measurement,

[0129] FIG. 4e shows a schematic, not-to-scale drawing of a cross-section through a part of another embodiment of the invention with radiation measurement.

[0130] FIG. 5a shows a schematic, not-to-scale drawing of a cross-section through a part of another embodiment of the invention with a coupling before the coupling engages,

[0131] FIG. 5b shows a schematic, not-to-scale drawing of a cross-section through the coupling after the coupling engages,

[0132] FIG. 6 shows another embodiment of the invention.

[0133] In the figures, identical components, or components with the same function are marked with the same reference symbols.

[0134] In the following FIGS. 1a to 3b, electronics 11, in particular for controlling a heater 3, may be present in the primary and/or secondary circuit(s). The heater 3 is preferably supplied with power exclusively via a voltage induced in a secondary winding 6s (also called a secondary coil 6s in the following), whilst control of the same by electronics 11 in a stator occurs exclusively on the primary side.

[0135] FIG. 1a shows a schematic, not-to-scale drawing of a cross-section through a first device 1 according to the invention. In particular the components necessary for transferring the electric power are represented, whilst the components for measuring a temperature are shown in FIGS. 4a to 4c.

[0136] The device 1 comprises a rotor 9 with a rotary shaft 8 (also called shaft 8 in the following) with a rotary axis R and a stator 10. A primary winding 6p (also called primary coil 6p in the following) is built into the stator 10. The primary winding 6p concerns, in particular a flat coil. The primary winding 6p may be installed on either a base surface 7o of the base 7, or as represented in the figure, in the base 7.

[0137] Current, in particular alternating current, flows through the primary winding 6p via wires 5. According to the invention, the alternating magnetic field produced by this in the secondary winding 6s, induces a voltage. The induced voltage allows the production of a current, which flows through the heater 3 and allows the heating up of the sample holder 2 with a sample holder surface 20 and fixing elements 4, but in particular a fixed substrate.

[0138] For the sake of completeness it is noted that a flat coil, in particular the primary winding 6p, is not radially symmetrical in relation to an axis A, which normally stands on a plane E, in which the flat coil is located. Therefore a static magnetic field produced by a direct current will also not be radially symmetrical. In accordance with Faraday's law of induction, a voltage must therefore be induced in a conductor loop rotating in the non-symmetrical magnetic field, in particular the rotating secondary winding 6s, which is also designed as a flat coil. Nevertheless, an inductive coupling through an alternating magnetic field caused by an alternating current is to be preferred for control-technology and other physical reasons. In particular, induced voltage is always directly proportional to periodical variation of the magnetic flux. The higher the frequency of the applied alternating current, the faster is the variation in the magnetic flux and the higher is the induced voltage.

[0139] FIG. 1b shows a schematic, not-to-scale top view of the device 1 with the primary coil 6p and the secondary coil 6s. Both coils 6p, 6s are constructed as flat coils, in particular spiral coils, more preferably Archimedean coils. The Archimedean spirals comply with the mathematical equation:

r()=a*

wherein r() is the radius at the angle position and a is a constant. The smaller the constant a, the smaller the distance between the spiral arms. The distance between the two arms of an Archimedean spiral along a ray radiating out from the coordinate origin always equals 2a. For the sake of clarity the two flat coils 6p, 6s are depicted in FIG. 1b with a bigger constant a than in FIG. 1a. FIG. 2a shows a schematic, not-to-scale drawing of a cross-section through a second device 1 according to the invention.

[0140] FIG. 2b depicts, in particular, the components necessary for transferring the electrical power, whilst the components for measuring temperature are shown in FIGS. 4a to 4c.

[0141] The device 1 according to the invention, comprises a rotor 9 and a stator 10. There is a primary winding 6p and a secondary winding 6s which are cylinder coils arranged concentrically to each other. The primary winding 6p may be built into either an inner base surface 7i of the base 7, or, as depicted in FIG. 2a, the inside of the base 7. An alternating current passes through the primary winding 6p via the wires 5. The secondary winding 6s may be located, as depicted in FIG. 2a on a shaft surface 8o or in the shaft 8.

[0142] FIG. 2b shows a schematic, not-to-scale top view of the device 1 with the primary winding 6p and the secondary winding 6s. Both coils 6p, 6s are realised as cylinder coils. The concentric position of the primary coil 6p and the secondary coil 6s in relation to the rotary axis R is visible.

[0143] FIG. 3a shows a schematic, not-to-scale drawing of a cross-section through a third device 1 according to the invention.

[0144] It depicts, in particular, the components necessary for transferring the electrical power, whilst the components for measuring temperature are shown in FIGS. 4a to 4c.

[0145] In the device 1 according to the invention, there is at least one primary winding 6p in the stator 10, and at least one secondary winding 6s in the rotor 9.

[0146] A symmetry axis Ap of the primary winding 6p and a symmetry axis As of the secondary winding 6s are not arranged congruently. They are arranged acentrically in relation to the rotary axis R. In particular, several of such primary windings 6p may be positioned in the stator 10 and/or several secondary windings 6s in the rotor 9. The primary winding 6p and/or the secondary winding 6s may be positioned symmetrically or asymmetrically in the stator 10, or rotor 9. The symmetry axes Ap and/or As may be at any angle to the rotary axis R. However, the symmetry axes Ap and/or As are preferably parallel to the rotary axis R.

[0147] FIG. 3b shows a schematic, not-to-scale sectional view in which three primary windings 6p arranged at an angular distance of 120 to each other in the stator 10 and three secondary windings 6s arranged at an angular distance of 120 to each other in the rotor 9, are visible.

[0148] FIGS. 1a to 3a, at the same time, also show all the components necessary for constructing a first measurement and data transmission device according to the invention (also called a measuring system in the following) in which the inductive coupling can be used, for example, to determine the temperature of the heater 3 by using an impedance measurement. It will be clear to any expert in this field, that where there is an increase in the temperature of the heater, the secondary-side impedance changes. However, due to the inductive coupling, the primary-side impedance also changes, which can easily be determined by measuring the voltage and the current as already described further in the above text. Thus, the primary-side impedance measurement offers the possibility of determining the secondary-side temperature. The primary-side impedance is preferably calibrated using the measured secondary-side temperature, or temperature variation. In this way, for each impedance value, or impedance variation, a corresponding temperature, or temperature variation, is obtained.

[0149] FIG. 4a shows a schematic, not-to-scale drawing of a cross-section through another device 1 according to the invention, in which a second measuring system in accordance with the invention is depicted. For the sake of clarity, the components for transferring power in accordance with FIGS. 1a to 3b are not shown.

[0150] The sample holder 2 contains electronics 11 for activating at least one thermal element 12. In accordance with the invention, several thermal elements 12 may be present. The thermal element 12 is preferably attached to the sample holder surface 2o of the sample holder 2 in order to be able to measure the temperature of a fixed substrate. In special embodiments the temperature element 12 can also be located in the sample holder 2. A combination of thermal elements 12 which are installed in the sample holder 2 and on the sample holder surface 2o, is also possible.

[0151] The electronics 11 are part of an electrical circuit closed via primary-side capacitor parts 13p and secondary-side capacitor parts 13s and wires 5. The primary-side capacitor parts 13p and the secondary-side capacitor parts 13s are preferably completely closed rings. It would also be feasible to use primary-side ring segments 13p and/or secondary-side ring segments 13s. If the primary-side capacitor parts 13p and the secondary-side capacitor parts 13s are ring segments, the electrical circuit will only ever be briefly closed after a full rotation.

[0152] FIG. 4b shows a schematic, not-to-scale drawing of a cross-section through another device 1 according to the invention in which a third measuring system in accordance with the invention is depicted. For the sake of clarity, the components for transferring power in accordance with FIGS. 1a to 3b are not shown.

[0153] The sample holder 2 contains electronics 11 for controlling at least one thermal element 12. In accordance with the invention, several thermal elements 12 may be present. The thermal element 12 is preferably attached to the sample holder surface 2o of the sample holder 2 in order to be able to measure the temperature of a fixed substrate. In special embodiments the temperature element 12 can also be located in the sample holder 2. A combination of thermal elements 12 which are installed in the sample holder 2 and on the sample holder surface 2o, is also possible.

[0154] The electronics 11 are part of an electrical circuit closed via primary-side infrared receivers 14p and secondary-side infrared transmitters 14s. The infrared receivers 14p and infrared transmitters 14s constitute an opto-coupler. The infrared receivers 14p and infrared transmitters 14s are preferably ring-shaped.

[0155] FIG. 4c shows a schematic, not-to-scale drawing of a cross-section through another device 1 according to the invention in which a fourth measuring system in accordance with the invention is depicted. For the sake of clarity, the components for transferring power in accordance with FIGS. 1a to 3b are not shown.

[0156] The sample holder 2 contains electronics 11 for activating at least one thermal element 12. In accordance with the invention, several thermal elements 12 may be present. The thermal element 12 is preferably attached to the sample holder surface 2o of the sample holder 2 in order to be able to measure the temperature of a fixed substrate. In special embodiments the temperature element 12 can also be located in the sample holder 2. A combination of thermal elements 12 which are installed in the sample holder 2 and on the sample holder surface 2o, is also possible.

[0157] The electronics 11 are part of an electrical circuit closed via a primary-side radio receiver 15p and a secondary-side radio transmitter 15s. The secondary-side radio transmitted 15p does not necessarily have to be located in the stator 10, but may also be located anywhere within range of the radio transmitter 15s, in particular in a computer.

[0158] FIG. 4d shows a schematic, not-to-scale drawing of a cross-section through another device 1 according to the invention in which a fifth measuring system in accordance with the invention is depicted. For the sake of clarity, the components for transferring power in accordance with FIGS. 1a to 3b are not shown. The measuring system according to the invention allows the determination of the temperature of the sample holder 2 using radiant power. According to embodiments of the invention already mentioned, the underside and/or the rim of the substrate holder 2 is thermally insulated. According to the present embodiment of the invention, an infrared transparent window 23 is located on the underside of the substrate holder 2, via which radiation, in particular infrared radiation, can exit the substrate holder 2. A detector 25 can measure the radiation emitted in this way and the radiation curve, or radiant power can be used to calculate the temperature of the sample holder 2. The detector 25 is preferably an infrared detector. However, detectors which can measure radiant power over a wider range of frequencies than infrared are also feasible.

[0159] FIG. 4e shows a schematic, not-to-scale drawing of a cross-section through another device 1 according to the invention in which a sixth measuring system in accordance with the invention is depicted. For the sake of clarity, the components for transferring power in accordance with FIGS. 1a to 3b are not shown. The measuring system according to the invention has a detector arm 24, on which a detector 25 is mounted, which can measure the surface of the sample holder 2, in particular however, the surface of a substrate (not shown) lying on the surface. The detector 25 is preferably an infrared detector. However, detectors which can measure radiant power over a wider range of frequencies than infrared are also feasible.

[0160] FIG. 5a shows the lower part of a rotary shaft 8 of a rotor 9 with a bore 20 and a groove 18 above a drive shaft 16 with tappets 17 and pins 21 prior to coupling. An identification chip 19, in particular an RIFD chip, may be located on the rim of the shaft 8 which allows unambiguous and, in particular, fully automated identification of the rotor 9. The identification chip 19 may also be installed in the shaft 8, or in any other part of the rotor 9. The bore 20 of the shaft 8 sits on the pin 21 of a drive shaft 16 in such a way that the tappet 17 is enclosed by the groove 18.

[0161] FIG. 5b shows the lower part of the shaft 8 when coupled to the drive shaft 16. Both FIGS. 5a and 5b only show a very simplified exemplary coupling system which can be substituted by generically similar coupling systems. However, the coupling systems are preferably always designed so that a fully automated coupling of the rotor 9 via the shaft 8 with the drive shaft 16, is possible, in particular by a robot.

[0162] FIG. 6 shows another device according to the invention in which a gas flow, in particular an inert gas flow, flushes the rotor 9. In this way all of the externally placed electric components, for example the primary-side capacitor part 13p and the secondary-side capacitor part 13s, are also flushed and therefore protected.

[0163] By flushing such externally placed current-carrying or charge-carrying components with an inert gas 22, sparking is again reduced by a multiple. However, the main reason for using such an inert gas 22 is primarily that an overpressure is built up between the rotor 9 and the stator 10, which is greater than the ambient pressure p1.

[0164] In this way the ingress of potentially flammable fluids, vapours or gases between the rotor 9 and the stator 10 is made more difficult, or even completely prevented.

LIST OF REFERENCE SYMBOLS

[0165] 1,1,1 Device [0166] 2 Substrate holder [0167] 2o Substrate holder surface [0168] 3 heater [0169] 4 fixing elements [0170] 5,5 cables/wires [0171] 6p,6p,6p primary windings [0172] 6s,6s,6s secondary windings [0173] 7 base [0174] 7o base surface [0175] 7i base inner surface [0176] 8 rotary shaft [0177] 8o shaft surface [0178] 9 rotor [0179] 10 stator [0180] 11 electronics [0181] 12 thermal element [0182] 13p primary-side capacitor part [0183] 13s secondary-side capacitor part [0184] 14p primary-side infrared receiver [0185] 14s secondary-side infrared transmitter [0186] 15p primary-side radio receiver [0187] 15s secondary-side radio transmitter [0188] 16 drive shaft [0189] 17 tappet [0190] 18 groove [0191] 19 identification chip [0192] 20 bore [0193] 21 pins [0194] 22 gas flow [0195] 23 infrared window [0196] 24 detector arm [0197] 25 detector [0198] Ap primary-side symmetry axis [0199] As secondary-side symmetry axis [0200] R rotary axis [0201] E plane [0202] p1,p2 pressure