CATADIOPTRIC PROJECTION OBJECTIVE

Abstract

A method of providing a catadioptric projection includes: providing a first partial objective for imaging an object field onto a first real intermediate image; providing a second partial objective for imaging the first real intermediate image onto a second real intermediate image, in which the second partial objective includes a concave mirror; providing a third partial objective for imaging the second intermediate image onto an image field, the third partial objective including an aperture stop; providing a first folding mirror and a second folding mirror; and providing an antireflection coating onto a surface of at least one lens that is directly adjacent to the concave mirror or that is separate from the concave mirror by a single lens, in which the antireflection coating is designed to have reflectivity of less than 0.2% for a wavelength between 150 nm and 250 nm and for an angle-of-incidence range between 0 and 30.

Claims

1. (canceled)

2. A lens system for imaging light within a wavelength range, the lens system comprising: a first dioptric section; a second dioptric section; and a catadioptric section between the first dioptric section and the second dioptric section, wherein the catadioptric section comprises a curved mirror and a first lens, and is configured and arranged to receive light from the first dioptric section and to direct the light received from the first dioptric section to the second dioptric section, wherein the first lens is positioned in front of the curved mirror such that, during operation of the lens system, both light received from the first dioptric section and light reflected from the curved mirror pass through the first lens, and wherein a first surface of the first lens supports a first coating comprising at least six layers, wherein the first coating comprises a first antireflection coating, wherein the first antireflection coating is configured to reduce reflection of light within the wavelength range, and wherein the first surface of the first lens has a deviation from a marginal ray concentricity of less than 20.

3. The lens system of claim 2, wherein a second surface of the first lens supports a second coating comprising at least six layers, wherein the second coating comprises a second antireflection coating, wherein the second antireflection coating is configured to reduce reflection of light within the wavelength range, and wherein the second surface of the first lens has a deviation from a marginal ray concentricity of less than 20.

4. The lens system of claim 2, wherein the catadioptric section comprises a second lens.

5. The lens system of claim 4, wherein a first surface of the second lens supports a second coating comprising at least six layers, wherein the second coating comprises a second antireflection coating, wherein the second antireflection coating is configured to reduce reflection of light within the wavelength range, wherein the first surface of the second lens has a deviation from a marginal ray concentricity of less than 25.

6. The lens system of claim 2, wherein each lens in the catadioptric section is arranged nearer to the curved mirror than to an adjacent intermediate image plane.

7. The lens system of claim 2, wherein the first antireflection coating has a reflectivity of below 0.2% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 to 30.

8. The lens system of claim 2, wherein the first antireflection coating has a reflectivity of below 0.1% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 and 20.

9. The lens system of claim 2, wherein the first antireflection coating has a reflectivity of below 0.02% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 and 10.

10. A lens system for imaging light within a wavelength range, the lens system comprising: a first dioptric section; a second dioptric section; and a catadioptric section between the first dioptric section and the second dioptric section, wherein the catadioptric section comprises a curved mirror and a first lens, and is configured and arranged to receive light from the first dioptric section and to direct the light received from the first dioptric section to the second dioptric section, wherein the first lens is positioned in front of the curved mirror such that, during operation of the lens system, both light received from the first dioptric section and light reflected from the curved mirror pass through the first lens, and wherein a first surface and a second surface of the first lens have a deviation from a marginal ray concentricity for light within the wavelength range that is greater than 20.

11. The lens system of claim 10, wherein the catadioptric section comprises a second lens.

12. The lens system of claim 11, wherein a first surface and a second surface of the second lens have a deviation from a marginal ray concentricity for light within the wavelength range that is greater than 20.

13. The lens system of claim 10, wherein each lens in the catadioptric section is arranged nearer to the curved mirror than to an adjacent intermediate image plane.

14. The lens system of claim 10 comprising a folding mirror, comprising a diaphragm arranged in the second dioptric section to block stray light resulting from single reflections from the first surface and/or the second surface of the first lens.

15. The lens system of claim 10, wherein both the first surface and the second surface of the first lens are configured as aspherical surfaces.

16. A lens system for imaging light, the lens system comprising: a first dioptric section; a second dioptric section; and a catadioptric section between the first dioptric section and the second dioptric section, wherein the first dioptric section, the second dioptric section and the catadioptric section define a projection light path, wherein the catadioptric section comprises a curved mirror and a first lens, and is configured and arranged to receive light from the first dioptric section and to direct the light received from the first dioptric section to the second dioptric section, wherein the first lens is positioned in front of the curved mirror such that, during operation of the lens system, both light received from the first dioptric section and light reflected from the curved mirror pass through the first lens, and wherein a first surface of the first lens supports a first antireflection coating configured to reduce single light reflections that result in stray light paths traveling along the projection light path.

17. The lens system of claim 16, wherein a second surface of the first lens supports a second antireflection coating configured to reduce single light reflections that result in stray light paths traveling along the projection light path.

18. The lens system of claim 16, wherein the catadioptric section comprises a second lens.

19. The lens system of claim 18, wherein a first surface of the second lens supports a second antireflection coating configured to reduce single light reflections that result in stray light paths traveling along the projection light path.

20. The lens system of claim 16, wherein each lens in the catadioptric section is arranged nearer to the curved mirror than to an adjacent intermediate image plane.

21. The lens system of claim 16, wherein the first antireflection coating has a reflectivity of below 0.2% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 to 30.

22. The lens system of claim 16, wherein the first antireflection coating has a reflectivity of below 0.1% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 and 20.

23. The lens system of claim 16, wherein the first antireflection coating has a reflectivity of below 0.02% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 and 10.

24. A lens system for imaging light within a wavelength range, the lens system comprising: a first dioptric section; a second dioptric section; and a catadioptric section between the first dioptric section and the second dioptric section, wherein the catadioptric section comprises a curved mirror and a first lens, and is configured and arranged to receive light from the first dioptric section and to direct the light received from the first dioptric section to the second dioptric section, wherein the first lens is positioned in front of the curved mirror such that, during operation of the lens system, both light received from the first dioptric section and light reflected from the curved mirror pass through the first lens, and wherein a first surface of the first lens supports a first coating comprising at least six layers, wherein the first coating comprises a first antireflection coating, and wherein the first antireflection coating is configured to reduce reflection of light within the wavelength range and for an angle-of-incidence range of between 0 and 20.

25. The lens system of claim 24, wherein a second surface of the first lens supports a second coating comprising at least six layers, wherein the second coating comprises a second antireflection coating, and wherein the second antireflection coating is configured to reduce reflection of light within the wavelength range and for an angle-of-incidence range of between 0 and 20.

26. The lens system of claim 24, wherein the catadioptric section comprises a second lens.

27. The lens system of claim 26, wherein a first surface of the second lens supports a second coating comprising at least six layers, wherein the second coating comprises a second antireflection coating, wherein the second antireflection coating is configured to reduce reflection of light within the wavelength range, and wherein the second antireflection coating is configured to reduce reflection of light within the wavelength range and for an angle-of-incidence range of between 0 and 20.

28. The lens system of claim 26, wherein each lens in the catadioptric section is arranged nearer to the curved mirror than to an adjacent intermediate image plane.

29. The lens system of claim 26, wherein the first antireflection coating has a reflectivity of below 0.1% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 and 20.

30. The lens system of claim 26, wherein the first antireflection coating has a reflectivity of below 0.02% for light within the wavelength range and having an angle of incidence on the first antireflection coating of between 0 and 10.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Details and aspects of the invention are explained more specifically below on the basis of the exemplary embodiments illustrated in the figures, in which:

[0039] FIG. 1 shows the lens section of a catadioptric projection objective together with the projection light path;

[0040] FIG. 2 shows the lens section of the projection objective from FIG. 1 together with a stray light path;

[0041] FIG. 3 shows a schematic illustration of an antireflection coating;

[0042] FIG. 4 shows a schematic illustration of an antireflection coating;

[0043] FIG. 5 shows a schematic illustration of an antireflection coating;

[0044] FIG. 6 shows a diagram with the reflectivity values of the antireflection coatings from FIGS. 3 to 5 as a function of the angles of incidence;

[0045] FIG. 7 shows a stray light intensity distribution as a contour line illustration for the pupil filling factor =0.2;

[0046] FIG. 8 shows stray light intensity profiles in the case of antireflection coating of the lenses that are passed through twice in the projection objective of FIG. 1 with a reflectivity of 0.2%;

[0047] FIG. 9 shows stray light intensity profiles in the case of an antireflection coating in accordance with FIG. 4 of the lenses that are passed through twice in the projection objective of FIG. 1;

[0048] FIG. 10 shows a schematic illustration for illustrating the stray light measurement technique;

[0049] FIG. 11 shows the lens section of a catadioptric projection objective together with the projection light beam path;

[0050] FIG. 12 shows the lens section of the projection objective of FIG. 11 with a stray light path;

[0051] FIG. 13 shows the lens section of the projection objective of FIG. 11 with a stray light path;

[0052] FIG. 14 shows stray light intensity profiles in the case of antireflection coating of the lenses that are passed through twice in the projection objective of FIG. 11 with a reflectivity of 0.2%;

[0053] FIG. 15 shows stray light intensity profiles in the case of an antireflection coating in accordance with FIG. 4 of the lenses that are passed through twice in the projection objective from FIG. 11;

[0054] FIG. 16 shows the lens section of a catadioptric projection objective together with the projection light beam path;

[0055] FIG. 17 shows the lens section of a catadioptric projection objective together with the projection light beam path; and

[0056] FIG. 18 shows a schematic illustration of a microlithography projection exposure apparatus.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

[0057] FIG. 1 shows the lens section of a catadioptric projection objective 1. The optical design of the projection objective 1 has been taken from the patent application US2009/0092925A1 in the name of Omura, published on 9 Apr. 2009, and corresponds to FIG. 4 therein. The optical data of the design are summarized in Table 1 in US2009/0092925A1. For a more detailed description of the optical design of the projection objective 1, therefore, reference is made to US2009/0092925A1, which is hereby incorporated into the present application by reference. The projection objective 1 images the object field 3 in the object plane 5 onto the image field 7 in the image plane 9. It includes a first partial objective 11, which images the object field 3 on to the first real intermediate image 13, the second partial objective 15, which images the first intermediate image 13 on to the second real intermediate image 17, and the third partial objective 19, which images the second intermediate image 17 onto the image field 7. The second partial objective 15 is embodied as a catadioptric objective having the concave mirror 21 and the two lenses L21 and L22. The folding mirror 23 is arranged in the region of the first intermediate image 13, the folding mirror deflecting the projection light 31 from the object plane 5 toward the concave mirror 21. The folding mirror 25 is arranged in the region of the second intermediate image 17, this folding mirror deflecting the projection light from the concave mirror 21 toward the image plane 9.

[0058] A stray light analysis was carried out for the projection objective 1 in order to determine the stray light paths on which the stray light can pass into the image plane 9 as single, double or multiple reflection and lead to a background illumination there. FIG. 2 shows for the projection objective 1 such a stray light path 33 arising from the fact that the projection light 31 is reflected at that surface of the lens L21 which faces the concave mirror 21, the surface being referred to hereinafter as back surface of the lens L21. In the stray light path 33 illustrated, the stray light 33, deviating from the projection light path 31, does not pass through the lens L22 and the concave mirror 21, but passes through all further optical surfaces which the projection light 31 would also pass through if the projection light 31 entered into the lens L21 again after reflection at the concave mirror 21 and after passing through the lens L22. In the stray light path 33, the stray light intermediate image 35 arises in the region of the folding mirror 25 and therefore simultaneously also virtually at a location of the second intermediate image 17. As a result, virtually the entire stray light is reflected at the second folding mirror 25 without being vignetted by the physical boundary of the folding mirror 25, and, in a manner similar to the projection light 31, passes through the third partial objective 19 as far as the image plane 9. The aperture stop 29 is virtually completely illuminated by the stray light, such that it is also not possible to filter out the stray light with a spatially delimited diaphragm in the region of the aperture stop plane without the projection light 31 being significantly vignetted.

[0059] The back surface of the lens L21 consequently produces a single reflection with very high stray light intensity. In this case, the stray light intensity corresponds approximately to the intensity of the projection light multiplied by the reflectivity of the back surface of the lens L21. This strong single reflection arises because the back surface of the lens L21 has a marginal ray concentricity of 0.6. Therefore, virtually marginal ray concentricity is provided. Together with the fact that the second partial objective 15 has an absolute value of the imaging scale of 1.03 and the concave mirror 21 is arranged in the region of a pupil plane, the stray light intermediate image 35 is thereby generated virtually at the location of the second intermediate image 17 and the stray light 33 is thus transmitted almost completely via the second folding mirror 25.

[0060] The front surface of the lens L21, with a value of 15.9, likewise has a low marginal ray concentricity, with the result that this surface also makes a contribution to the stray light in the image plane 9. The marginal ray concentricity of the back surface of the lens L22, which faces the concave mirror 21, is 24.0, and the marginal ray concentricity of the front surface of the lens L22 is 22.9, with the result that although these two surfaces likewise contribute to the stray light in the image plane 9, the magnitude of their contribution falls far short of that of the back surface of the lens L21. Very generally, the lenses L21 and L22 of the second partial objective 15 should be regarded as susceptible to stray light since both lenses are lenses which are passed through twice and through which the projection light 31 passes both on the light path toward the concave mirror 21 and on the light path away from the concave mirror 21. As soon as a stray light ray reflected at the lens surfaces of these lenses L21 and L22 that are passed through twice passes through the second folding mirror 25, there is the possibility of such a stray light ray reaching the image plane 9 and contributing to the extraneous light. This is a fundamental problem of this class of projection objectives.

[0061] In the case of single reflections, the intensity of the stray light in the image plane 9 is linearly dependent on the reflectivity of that lens surface at which the stray light is reflected. The lens surfaces of the lenses L21 and L22 that are passed through twice in the projection objective 1 are covered therefore with an antireflection coating having a reflectivity of less than 0.2% for the projection light wavelength of 193.3 nm and for an angle of incidence range of between 0 and 30. FIGS. 3 to 5 illustrate various exemplary embodiments of such an antireflection coating.

[0062] FIG. 3 shows in a schematic illustration the layer sequence of the antireflection coating 337 proceeding from the substrate 339 of the lens, this substrate being composed of quartz (SiO.sub.2). The antireflection coating 337 includes six layers composed alternately of material having high refractive index and material having a low refractive index. Magnesium fluoride (MgF.sub.2) is used as material having a low refractive index. Lanthanum fluoride (LaF.sub.3) is used as material having a high refractive index. The geometrical thicknesses of the individual layers, the materials and the refractive indices thereof and also the reference signs used in FIG. 3 are indicated in table 1. The thicknesses of the individual layers are illustrated correctly relative to one another in FIG. 3.

TABLE-US-00001 TABLE 1 Reference symbol Thickness [nm] Material Refractive index 339 Substrate SiO.sub.2 1.56 341 21.568 LaF.sub.3 1.69 343 67.626 MgF.sub.2 1.42 345 29.775 LaF.sub.3 1.69 347 42.969 MgF.sub.2 1.42 349 34.261 LaF.sub.3 1.69 351 26.823 MgF.sub.2 1.42

[0063] FIG. 4 shows an embodiment of an antireflection coating 437, in turn having six layers composed alternately of material having a high refractive index and material having a low refractive index. MgF.sub.2 is used as material having a low refractive index, and LaF.sub.3 is used as material having a high refractive index. The thicknesses of the individual layers, the materials and the refractive indices thereof and also the reference signs used in FIG. 4 are compiled in table 2.

TABLE-US-00002 TABLE 2 Reference symbol Thickness [nm] Material Refractive index 439 Substrate SiO.sub.2 1.56 441 13.762 LaF.sub.3 1.69 443 69.414 MgF.sub.2 1.42 445 42.945 LaF.sub.3 1.69 447 16.440 MgF.sub.2 1.42 449 40.914 LaF.sub.3 1.69 451 30.145 MgF.sub.2 1.42

[0064] FIG. 5 shows an exemplary embodiment of an antireflection coating 537, including seven layers composed alternately of material having a high refractive index and material having a low refractive index. MgF.sub.2 is used as material having a low refractive index, and LaF.sub.3 is used as material having a high refractive index. The thicknesses of the individual layers, the materials and the refractive indices thereof and also the reference signs used in FIG. 5 are compiled in table 3.

TABLE-US-00003 TABLE 3 Reference Refractive symbol Thickness [nm] Material index 539 Substrate SiO.sub.2 1.56 541 37.738 MgF.sub.2 1.42 543 15.378 LaF.sub.3 1.69 545 9.098 MgF.sub.2 1.42 547 29.126 LaF.sub.3 1.69 549 36.117 MgF.sub.2 1.42 551 29.917 LaF.sub.3 1.69 553 33.958 MgF.sub.2 1.42

[0065] FIG. 6 shows, for the antireflection coatings 337, 437 and 537 illustrated in FIGS. 3 to 5, the reflectivity values in the unit [%] as a function of the angles of incidence in the unit []. The dash-dotted reflectivity curve 655 results for the antireflection coating 337 having the layer construction in accordance with table 1, the solid reflectivity curve 657 results for the antireflection coating 437 having the layer construction in accordance with table 2 and the dashed reflectivity curve 659 results for the antireflection coating 537 having the layer construction in accordance with table 3. In the case of all three antireflection coatings, the reflectivity curves 655, 657 and 659 for the angle of incidence range of 0 to 30 run below a reflectivity value of 0.2%, even below a reflectivity value of 0.1%. Up to an angle of incidence of 20, the reflectivity curves 655, 657 and 659 run below a reflectivity value of 0.1%, even below a reflectivity value of 0.05%. In the case of the antireflection coatings 337 and 537, the reflectivity curves 655 and 659 for an angle of incidence range of 0 to 10 even run below a reflectivity value of 0.02%.

[0066] Using suitable ray tracing programs, for a given optical design of a projection objective, it is possible to calculate the intensity distribution of the stray light in the image plane taking account of the antireflection coatings. FIG. 7 shows for the projection objective 1 the intensity distribution 761 of the stray light in the image plane 9 in a contour line illustration. The contour lines are illustrated with a spacing of 0.1%. In this case, the stray light intensity relates to the homogeneous ambient brightness in the image field. In the simulation, the object field 3 was illuminated homogeneously with a pupil filling factor of =0.2. In this case, exclusively the single reflections at the lens surfaces of the lenses L21 and L22 that are passed through twice in the second partial objective 15 are taken into account as stray light. In this case, the lens surfaces are covered with an antireflection coating having a reflectivity of 0.2% for all angles of incidence. Antireflection coatings such as are used for reducing double reflections or higher-order reflections have this reflectivity value. A reflectivity of 0.2% is sufficient for avoiding double reflections since such a reflection, on account of the two reflections, has an intensity of just 0.2%.Math.0.2%=0.0004%. The contour line illustration makes it clear, however, that such an antireflection coating does not effectively suppress the formation of disturbing single reflections. The single reflections completely illuminate the image field 763 which is depicted using dashed lines, and over the entire image field lead to a background illumination of at least 0.4%, in extensive regions even above 0.8%. The extent of the stray light in the image plane 9 (this extent being comparable with the extent of the image field 7) is caused by the fact that the stray light image of the object field 3 is situated more or less in the image plane 9, as becomes clear in FIG. 2 for the single reflection at the back surface of the lens L21.

[0067] FIG. 8 shows a section through the intensity distribution 761 along the line 765, running in the longitudinal direction of the image field 7 through the center of the image field 7, as intensity profile 867. The maximum stray light intensity is 0.93% in the image center and 0.41% at the image edge at x=13 mm. The stray light simulation was carried out not only with an illumination with the pupil filling factor of =0.2 but also with a pupil filling factor of =1.0, that is to say with complete illumination of the entrance pupil of the projection objective. The section through the stray light intensity distribution for a pupil filling factor of =1.0 along the line 765 is illustrated in dashed fashion as intensity profile 869 in FIG. 8. With complete illumination of the entrance pupil of the projection objective, the maximum stray light intensity is 0.40%. Within the image field 7, the stray light intensity has a virtually constant value. It is evident that the stray light intensity is greatly dependent on the pupil filling factor. Thus, the maximum stray light intensity within the image field 7 for a pupil filling factor of =1.0 is lower by 0.523% than that for a pupil filling factor of =0.2. This is characteristic of stray light caused by single reflections. Although stray light on account of surface or a volume scattering likewise leads to a background illumination in the entire image field, the intensity distribution thereof is virtually independent of the pupil filling factor in the image plane in comparison with single reflections. If the measured stray light, as in the present case, has a great dependence on the pupil filling factor, then this is an indication of the formation of single reflections.

[0068] FIG. 9 shows the intensity profile 971 for a pupil filling factor of =0.2 and the intensity profile 973 for the pupil filling factor of =1.0 as sections through stray light intensity distributions, which arise if the lens surfaces of the second partial objective are covered with the antireflection coating 437, the layer construction of which is indicated in table 2. With the improved antireflection coating the maximum stray light intensity within the image field 7 decreases from 0.93% to 0.02% for the pupil filling factor of =0.2, and from 0.40% to 0.01% for the pupil filling factor of =1.0. It should be taken into consideration that in FIG. 9 the scale of the intensity axis is reduced by a factor of 10 in comparison with the scale in FIG. 8. For the improved antireflection coating the maximum variation of the stray light between the two pupil filling factors is just 0.01% and is therefore vanishingly small. The single reflections can thus be effectively suppressed with the improved antireflection coating 437. By therefore measuring the stray light intensity once for the pupil filling factor of =0.2 and once for the pupil filling factor of =1.0 within the image field 7, it is possible to determine the influence of the single reflections of the lenses that are passed through twice in the second partial objective 15 independently of further contributions to the stray light which have other causes and are not dependent on the pupil factor chosen.

[0069] In order to measure the stray light in the image plane, the so-called Kirk test is employed, for example, which is described in US2009/0086179A1, inter alia. In the Kirk test, a square object which has a predetermined edge length, for example, 1.0 mm and is itself not luminous is arranged within the object field 3. The object used is a small box, for example, which completely absorbs the illumination light and therefore can be regarded as black. By contrast, the surroundings of the small box are homogeneously illuminated by the illumination light. The small box is imaged into the image plane 9 by the projection objective 1. In the case of ideal imaging and disregarding stray light, a square, unilluminated region would arise in the image plane 9. FIG. 10 shows in schematic illustration, a section through the intensity profile in the region of the image of the small box. In the case of ideal imaging and disregarding the stray light, the intensity curve 1075, depicted by a dashed line, arises, which falls abruptly from 100% to 0% in the region of the image of the small box. The stray light has the effect, however, that it is not dark in the center 1081 of the image of the small box, rather a stray light intensity can be detected. The intensity curve 1077, illustrated by a solid line, illustrates the intensity profile which arises upon taking account of the single reflections at the lens surfaces of the second partial objective 15. Stray light on account of surface or volume scattering leads to the intensity profile 1079 illustrated in dash-dotted fashion, which leads to a significantly lower stray light intensity in the center of the image of the small box given a sufficient edge length of the small box. By virtue of the edge length of the small box being 1.0 mm, during the measurement of the stray light it is possible to distinguish the contribution of the lens surfaces of the second partial objective 15 from other stray light contributions. In this case, the intensity value in the center 1081 of the image of the small box corresponds to the integrated stray light intensity which results from stray light sources arranged outside the small box.

[0070] For a pupil filling factor of =0.2 and for a small box having the edge length of 1.0 mm, an intensity of 1.1% arises in the center of the image of the small box if all the lens surfaces of the partial objective 15 are covered with an antireflection coating having a reflectivity of 0.2% for all angles of incidence. If, by contrast, the lens surfaces of the lenses L21 and L22 are covered with the antireflection coating 437 indicated in table 2, then the stray light intensity in the center of the image of the small box decreases to 0.3%. The measurement of the stray light according to the Kirk test using a square small box having an edge length of between 0.8 mm and 1.2 mm thus makes it possible to directly determine the stray light proportion owing to single reflections.

[0071] FIG. 11 shows a lens section of a catadioptric projection objective 1101. The elements in FIG. 11, which correspond to the elements from FIG. 1, have the same reference signs as in FIG. 1 increased by the number 1100; for a description of these elements, reference is made to the description concerning FIG. 1.

[0072] The optical data for the projection objective 1101 are compiled in table 4. The aspherical surfaces can be described by the following sagitta formula:

[00001]$p\left(h\right)=\frac{\frac{1}{R}.Math.h^2}{1+\sqrt{1-\left(1+K\right).Math.{\left(\frac{1}{R}\right)}^2.Math.h^2}}+\underset{k=1}{.Math.}.Math.C_k.Math.h^{2.Math..Math.k+2}$

[0073] In this case, p represents the axial distance in [mm] of the aspherical surface from a planeperpendicular to the optical axisthrough the vertex of the aspherical surface in the case of radial distance h in [mm], R represents the vertex radius in [mm], K represents the conical constant, and Ck represents the individual aspherical constants of the order k in

[00002]$\frac{1}{\left[{\mathrm{mm}}^{2.Math..Math.k+2}\right].}$

[0074] The projection objective 1101 has a numerical aperture of NA=1.2 in the image plane 1109. The operating wavelength is 193.306 nm. The image field 1107 amounts to 26.0 mm5.5 mm and has a minimum distance from the optical axis 1127 of 1.98 mm. The projection objective 1101 has an absolute value of the imaging scale of 0.25. This present embodiment involves an immersion projection objective, in which during operation water as immersion liquid is situated between the last lens surface and the object to be exposed.

[0075] The first partial objective 1111 is formed by the surfaces 1 to 20, the second partial objective 1115 is formed by the surfaces 22 to 26 and the third partial objective 1119 is formed by the surfaces 28 to 52. The folding mirrors 1123 and 1125 with the surface numbers 21 and 27 are not assigned to any of the three partial objectives 1111, 1115 and 1119, since the folding mirrors 1123 and 1125, as plane mirrors have no influence on the imaging, but rather only deflect the projection light 1131. The first partial objective 1111 has an absolute value of the imaging scale of 1.05, the second partial objective 1115 has an absolute value of the imaging scale of 1.01 and the third partial objective 1119 has an absolute value of the imaging scale of 0.23.

[0076] All the principal rays which emerge from the object field 1103 and which intersect the optical axis 1127 at the location of the aperture diaphragm 1129 have at the concave mirror 1121 a height which is less than 9.1% of the diameter of the optically utilized region of the concave mirror 1121. The concave mirror 1121 is thus arranged in the region of a pupil plane of the projection objective 1101.

[0077] The principal ray emerging from the object point (x=52.00 mm, y=29.93 mm) has a radial distance from the optical axis of 70 mm in a fictitious plane which is perpendicular to the optical axis 1127 and which intersects the optical axis 1127 at the same location as the second folding mirror 1125. The fictitious marginal ray has, by contrast, nearly a radial distance of 1.5 mm in this plane. In this case, the object point (x=52.00 mm, y=29.93 mm) has the largest distance from the optical axis 1127 within the object field 1103. The second intermediate image 1117 is thus arranged in the region of the second folding mirror 1125.

[0078] The sequence of the lens surfaces in table 4 corresponds to the projection light path. The projection light passes through all the surfaces in the order indicated. The lens L1111 of the second partial objective 1115 is passed through twice and is therefore indicated twice with the surface numbers 22 and 23, and 26 and 25, in table 4. In this case, the lens L1111 is the sole lens in the second partial objective 1115. The distance between the lens L1111 and the concave mirror 1121 is 40.2 mm. The first paraxial intermediate image has a distance of 312.12 mm from the concave mirror 1121, the second paraxial intermediate image has a distance of 316.25 mm from the concave mirror 1121. The lens L1111 is therefore arranged nearer to the concave mirror 1121 than to the first intermediate image 1113 or to the second intermediate image 1117.

[0079] In principle, the lens L1111, owing to its arrangement in the second partial objective as a lens that is passed through twice, would be critical for the production of a single reflection in the image plane 1109. However, that lens surface of the lens L1111 which faces the concave mirror 1121, that is to say the back surface of the lens L1111, has a marginal ray concentricity of 30.0, and the front surface has a marginal ray concentricity of 30.8. Both surfaces thus deviate considerably from the marginal ray concentricity. At the same time, the extent of the second folding mirror 1125 is adapted to the extent of the projection light beam 1131. Thus, the extent of the projection light beam on the second folding mirror 1125 is 141.1 mm65.4 mm, while the second folding mirror 1125 has an extent of 145 mm70 mm. The formation of a single reflection is largely suppressed on account of the deviation of the two lens surfaces of the lens L1111 from the marginal ray concentricity and the second folding mirror 1125 adapted to the extent of the projection light beam.

[0080] FIG. 12 shows, for the exemplary embodiment from FIG. 11, the stray light path 1233, formed if the projection light 1131 is reflected at the back surface of the lens L1111. It becomes clear from the stray light path 1233 that the stray light intermediate image 1235 is not formed on the second folding mirror 1125, but rather far away from the folding mirror 1125 in the vicinity of the aperture stop plane with the aperture stop 1129. The stray light beam at the second folding mirror 1125 thus has a much larger extent than the second folding mirror 1125 and is largely vignetted. Consequently, the stray light beam in the object plane 1105 has only a small aperture in comparison with the maximum possible aperture. In addition, this stray light is greatly focused in the region of the aperture stop 1129, such that it could be shaded by a diaphragm around the optical axis.

[0081] FIG. 13 shows, for the exemplary embodiment from FIG. 11, the stray light path 1333 formed if the projection light 1131 is reflected at the front surface of the lens L1111. In this case, the stray light intermediate image 1335 is formed shortly after the lens L1111 and thus likewise far away from the folding mirror 1125 such that the stray light beam at the second folding mirror 1125 has a much larger extent than the second folding mirror 1125 and is largely vignetted.

[0082] By virtue of the front and back surfaces of the lens L1111 deviating more than 20 from the marginal ray concentricity, the formation of a single reflection in the image plane 1109 can be largely suppressed.

[0083] In order to show the reduction of the single reflections by the specific configuration of the lens surfaces of the second partial objective 1115, stray light simulations were carried out for the projection objective 1101 and the stray light intensity distributions in the image plane 1109 were determined. In the simulation, the object field 1103 was homogeneously illuminated firstly with a pupil filling factor of =0.2 and secondly with a pupil filling factor of =1.0. In this case, exclusively the single reflections at the lens surfaces of the lens L1111 that is passed through twice in the second partial objective 1115 are taken into account as stray light. In this case, the lens surfaces are covered with an antireflection coating having a reflectivity of 0.2% for all angles of incidence. FIG. 14 shows, with the intensity profile 1483, a section through the stray light intensity distribution for the pupil filling factor of =0.2 along a line running in the longitudinal direction of the image field 1107 through the center of the image field 1107. The maximum stray light intensity is 0.18% in the image center and 0.13% at the image edge at x=13 mm. The section through the stray light intensity distribution for a pupil filling factor of =1.0 is illustrated as intensity profile 1485 in FIG. 14. The maximum stray light intensity is just 0.01% with complete illumination of the entrance pupil of the projection objective. Although a dependence of the stray light on the pupil filling factor is still evident, the variation between a pupil filling factor of =1.0 and a pupil filling factor of =0.2 is only 0.17%.

[0084] FIG. 15 shows the intensity profile 1487 for a pupil filling factor of =0.2 and the intensity profile 1489 for the pupil filling factor of =1.0 as sections through stray light intensity distributions, which arise if the lens surfaces of the second partial objective are covered with the antireflection coating 437, the layer construction of which is indicated in table 2. With the improved antireflection coating, the maximum stray light intensity within the image field 1107 decreases from 0.18% to 0.004% for the pupil filling factor of =0.2 and from 0.01% to 0.002% for the pupil filling factor of =1.0. It should be taken into consideration that in FIG. 15 the scale of the intensity axis has once again been reduced by a factor of 10 in comparison with the scale in FIG. 14. Consequently, the single reflection is practically no longer detectable.

[0085] If the Kirk test is employed using a square small box having an edge length of 1.0 mm, an intensity of 0.4% results for a pupil filling factor of =0.2 in the center of the image of the small box if all the lens surfaces of the partial objective 1115 are covered with an antireflection coating having a reflectivity of 0.2% for all angles of incidence. If, by contrast, the lens surfaces of the lens L1111 are covered with the antireflection coating 437 indicated in table 2, then the stray light intensity in the center of the image of the small box decreases to 0.3%.

[0086] FIG. 16 shows a lens section of a catadioptric projection objective 1601. The elements in FIG. 16 which correspond to the elements from FIG. 1 have the same reference signs as in FIG. 1 increased by the number 1600; for a description of these elements reference is made to the description of FIG. 1.

[0087] The optical data for the projection objective 1601 are compiled in table 5. The projection objective 1601 has a numerical aperture of NA=1.2 in the image plane 1609. The operating wavelength is 193.306 nm. The image field 1607 is 26 mm5.5 mm and has a minimum distance from the optical axis 1627 of 1.98 mm. The projection objective 1601 has an absolute value of the imaging scale of 0.25. The present embodiment again involves an immersion projection objective, in which during the operation water as immersion liquid is situated between the last lens surface and the object to be exposed.

[0088] The first partial objective 1611 is formed by the surfaces 1 to 20, the second partial objective 1615 is formed by the surfaces 22 to 26 and the third partial objective 1619 is formed by the surfaces 28 to 52. The first partial objective 1611 has an absolute value of the imaging scale of 1.03, the second partial objective 1615 has an absolute value of the imaging scale of 1.01 and the third partial objective 1619 has an absolute value of the imaging scale of 0.24.

[0089] All the principal rays which emerge from the object field 1603 and which intersect the optical axis 1627 at the location of the aperture diaphragm 1629 have at the concave mirror 1621, a height which is less than 8.6% of the diameter of the optically utilized region of the concave mirror 1621. The concave mirror 1621 is thus arranged in the region of a pupil plane of the projection objective 1601.

[0090] The principal ray emerging from the object point (x=52 mm, y=29.93 mm) has a radial distance of 68.29 mm in a fictitious plane which is perpendicular to the axis 1627 and which intersects the optical axis 1627 at the same location as the second folding mirror 1625. By contrast, the fictitious marginal ray has only a radial distance of 0.82 mm in this plane. In this case, the object point (x=52 mm, y=29.93 mm) has the largest distance from the optical axis 1627 within the object field 1603. The second intermediate image 1617 is thus arranged in the region of the second folding mirror 1625.

[0091] The lens L1611 is the sole lens in the second partial objective 1615. Both the front surface and the back surface of the lens L1611 are configured as aspherical surfaces. The distance between the lens L1611 and the concave mirror 1621 is 40.2 mm. The first paraxial intermediate image has a distance of 300.48 mm from the concave mirror 1621, the second paraxial intermediate image has a distance of 316.25 mm from the concave mirror 1621. The lens L1611 is thus arranged nearer to the concave mirror 1621 than to the first intermediate image 1613 or to the second intermediate image 1617.

[0092] That lens surface of the lens L1611 which faces the concave mirror 1621, that is to say the back surface of the lens L1611, has a marginal ray concentricity of 30.9, and the front surface has a marginal ray concentricity of 30.2. Both surfaces thus deviate considerably from the marginal ray concentricity.

[0093] FIG. 17 shows a lens section of a catadioptric projection objective 1701. The elements in FIG. 17 which correspond to the elements from FIG. 1 have the same reference signs as in FIG. 1 increased by the number 1700; for a description of these elements reference is made to the description of FIG. 1, above.

[0094] The optical data for the projection objective 1701 are compiled in table 6. The projection objective 1701 has a numerical aperture of NA=1.2 in the image plane 1709. The operating wavelength is 193.307 nm. The image field 1707 is 26.0 mm5.5 mm and has a minimum distance from the optical axis 1727 of 1.98 mm. The projection objective 1701 has an absolute value of the imaging scale of 0.25. The present embodiment is again an immersion projection objective, in which during the operation water as immersion liquid is situated between the last lens surface and the object to be exposed.

[0095] The first partial objective 1711 is formed by the surfaces 1 to 22, the second partial objective 1715 is formed by the surfaces 24 to 28 and the third partial objective 1719 is formed by the surfaces 30 to 58. The first partial objective 1711 has an absolute value of the imaging scale of 0.96, the second partial objective 1715 has an absolute value of the imaging scale of 1.00 and the third partial objective 1719 has an absolute value of the imaging scale of 0.26.

[0096] All the principal rays which emerge from the object field 1703 and which intersect the optical axis 1727 at the location of the aperture diaphragm 1729 have at the concave mirror 1721, a height which is less than 7.5% of the diameter of the optically utilized region of the concave mirror 1721. The concave mirror 1721 is thus arranged in the region of a pupil plane of the projection objective 1701.

[0097] The principal ray emerging from the object point (x=52 mm, y=29.93 mm) has a radial distance of 67.77 mm in a fictitious plane which is perpendicular to the axis 1727 and which intersects the optical axis 1727 at the same location as the second folding mirror 1725. By contrast, the fictitious marginal ray has only a radial distance of 1.27 mm in this plane. In this case, the object point (x=52 mm, y=29.93 mm) has the largest distance from the optical axis 1727 within the object field 1703. The second intermediate image 1717 is thus arranged in the region of the second folding mirror 1725.

[0098] The lens L1712 is the sole lens in the second partial objective 1715. Both the front surface and the back surface of the lens L1712 are configured as aspherical surfaces. The distance between the lens L1712 and the concave mirror 1721 is 33.4 mm. The first paraxial intermediate image has a distance of 188.92 mm from the concave mirror 1721, the second paraxial intermediate image has a distance of 189.59 mm from the concave mirror 1721. The lens L1712 is thus arranged nearer to the concave mirror 1721 than to the first intermediate image 1713 or to the second intermediate image 1717.

[0099] That lens surface of the lens L1712 which faces the concave mirror 1721, that is to say the back surface of the lens L1712, has a marginal ray concentricity of 38.6, and the front surface has a marginal ray concentricity of 20.0. Both surfaces thus deviate from the marginal ray concentricity. In comparison with the lenses L1111 in the projection objectives 1101 and L1611 in the projection objective 1601, the lens bending of the lens L1712 is opposite to that of the lenses L1111 or L1611. While in the case of the front surfaces of the lenses L1111 or L1611 the surface normal at the intersection point of the fictitious marginal ray run between marginal ray and optical axis 1127 and 1627, respectively, in the case of the front surface of the lens L1712 the fictitious marginal ray runs between surface normal at the intersection point of the marginal ray and the optical axis 1727. Consequently, the front surface of the lens L1712 is convexly curved with respect to the marginal ray incident from the first intermediate image 1713.

[0100] FIG. 18 schematically shows a projection exposure apparatus 1801 for microlithography that serves for producing semiconductor components or other finely structured components. The projection exposure apparatus 1801 has an excimer laser 1803 as light source having an operating wavelength of 193 nm, although other excimer lasers for example having operating wavelengths of 157 nm or 248 nm are also possible. An illumination system 1805, disposed downstream of the laser, generates a sharply bounded, homogeneously illuminated illumination field that is simultaneously adapted with regard to its angular distribution to the requirements of the projection objective 1813, disposed downstream of the illumination system. The illumination system 1805 has devices for selecting the illumination mode and can thereby generate for example in the exit pupil of the illumination system 1805, or in the entrance pupil of the projection objective 1813, a conventional illumination with a variable pupil filling factor a, an annular illumination, dipole illumination or quadrupole illumination.

[0101] A device 1809 for holding and manipulating a reticle 1807 is arranged in the light direction downstream of the illumination system 1805. The reticle 1807, also referred to as a mask, has the structure to be imaged. The device 1809 is used to move the reticle 1807 in a scanning direction for scanning purposes in the object plane 1811.

[0102] The projection objective 1813 is a catadioptric projection objective, as described with reference to FIGS. 1, 11, 16 and 17. The catadioptric projection objective 1813 images that part of the reticle 1807 which is illuminated by the illumination system 1805 onto the wafer 1815 in demagnified fashion. The wafer 1815 has a light-sensitive layer that is exposed upon irradiation with the projection light.

[0103] The wafer 1815 is held by a device 1819 that permits a corresponding movement of the wafer 1815 synchronized with the scanning movement of the reticle. The device 1819 also has manipulators that position the wafer 1815 optimally in the image plane 1817 of the projection objective 1813. The device 1819 is designed for the immersion use of the projection objective. It has a holding unit 1821 having a shallow depression or recess for holding the wafer 1815. The holding unit 1821 has a peripheral edge 1823 in order to prevent the immersion medium 1825 from flowing away.

[0104] The projection exposure apparatus is controlled by a central computer unit 1827.

[0105] In order to produce semiconductor components and other finely structured components with the projection exposure apparatus 1801, therefore, provision is made of a reticle 1807 having a predetermined pattern in the object plane 1811 of the catadioptric projection objective 1813, provision is made of a wafer 1815 having a light-sensitive layer in the image plane of the catadioptric projection objective 1813, the reticle 1807 is illuminated with the illumination system 1805 and, finally, the illuminated region of the reticle 1807 is imaged onto the wafer 1815 by the catadioptric projection objective 1813.

[0106] The above description of the preferred embodiments has been given by way of example. From the disclosure given, those skilled in the art will not only understand the present invention and its attendant advantages, but will also find apparent various changes and modifications to the structures and methods disclosed. The applicant seeks, therefore, to cover all such changes and modifications as fall within the spirit and scope of the invention, as defined by the appended claims, and equivalents thereof.

TABLE-US-00004 TABLE 4 NA 1.2 Object height 60 Wavelength 193.306 Surface Radius Thickness Material Refractive index Half diameter 0 0.000000 50.000000 60.0 1 0.000000 8.000000 SiO2 1.560326 75.8 2 0.000000 59.610620 77.4 3 1439.380884 32.013517 SiO2 1.560326 97.3 4 271.207483 2.110453 99.0 5 583.614042 16.197420 SiO2 1.560326 100.5 6 1991.428343 3.396948 100.2 7 137.148931 46.192632 SiO2 1.560326 99.4 8 1990.872673 35.955682 95.9 9 71.140440 46.083036 SiO2 1.560326 64.8 10 74.802466 57.285100 47.1 11 67.442491 36.623983 SiO2 1.560326 45.5 12 120.009774 0.999896 67.8 13 316.440706 21.841425 SiO2 1.560326 76.2 14 166.255801 36.560578 81.2 15 182.509454 38.166255 SiO2 1.560326 94.7 16 116.928613 0.999888 100.2 17 2344.762362 37.265639 SiO2 1.560326 108.4 18 253.120036 0.999878 109.2 19 208.087128 40.064181 SiO2 1.560326 102.3 20 744.545556 61.091342 99.6 21 0.000000 287.184726 Mirror 70.8 22 100.735080 15.000002 SiO2 1.560326 77.3 23 1546.908367 32.735719 95.3 24 154.868408 32.735719 Mirror 97.4 25 1546.908367 15.000002 SiO2 1.560326 95.3 26 100.735080 287.184726 77.3 27 0.000000 67.470410 Mirror 71.5 28 1166.218905 26.117540 SiO2 1.560326 89.9 29 228.675901 0.999977 92.6 30 229.673150 62.112757 SiO2 1.560326 102.2 31 1651.573796 4.139282 101.4 32 168.631918 115.053946 SiO2 1.560326 98.5 33 494.607195 10.890377 72.1 34 2693.637221 9.999917 SiO2 1.560326 71.0 35 182.034682 26.163167 66.3 36 458.881180 9.999883 SiO2 1.560326 66.6 37 150.000000 53.839743 70.5 38 116.341201 37.590742 SiO2 1.560326 73.3 39 158.311181 1.000526 96.0 40 540.901698 31.553546 SiO2 1.560326 112.9 41 236.220218 0.999904 117.3 42 344.717958 65.184212 SiO2 1.560326 139.6 43 282.807945 3.863222 140.0 44 254.540028 48.998341 SiO2 1.560326 136.3 45 13988.972761 24.472967 133.8 46 0.000000 10.645713 124.2 47 159.621355 50.079617 SiO2 1.560326 115.6 48 320.728784 20.982865 106.5 49 125.755069 48.738034 SiO2 1.560326 87.2 50 767.843186 0.999622 74.0 51 57.414214 57.012850 SiO2 1.560326 50.1 52 0.000000 1.000000 H2O 1.470000 16.4 53 0.000000 0.000000 Surface Aspherical Constants 8 15 20 23 25 K 0 0 0 0 0 C1 6.212168E08 2.065631E08 3.954655E08 4.109750E08 4.109750E08 C2 2.284725E12 1.154467E12 1.975939E13 2.014598E12 2.014598E12 C3 4.919789E17 1.754944E16 2.888308E17 1.434330E16 1.434330E16 C4 1.170467E20 1.439257E21 1.773508E21 1.120664E20 1.120664E20 C5 1.050170E24 4.255683E25 5.791298E26 6.611410E25 6.611410E25 C6 2.860117E29 2.463045E29 9.438651E31 1.801493E29 1.801493E29 Surface 33 35 37 40 43 K 0 0 0 0 0 C1 8.304509E08 1.571447E07 1.854475E07 5.368234E09 2.403621E08 C2 3.027151E12 1.893541E11 1.105850E11 9.295068E13 1.650116E13 C3 1.487997E15 2.354878E15 3.337902E15 4.764400E17 1.675626E17 C4 1.391498E19 3.277504E19 5.695337E19 6.981458E22 7.042709E22 C5 5.936943E24 3.740597E24 5.380116E23 5.210284E26 7.079479E27 C6 3.355570E28 3.816347E27 2.436028E27 1.403914E30 9.754026E32 Surface 48 50 K 0 0 C1 3.410190E08 1.004308E07 C2 6.659776E12 4.830886E12 C3 4.814964E16 1.220533E15 C4 2.364870E20 1.499788E19 C5 7.232487E25 1.105452E23 C6 9.143981E30 2.727683E28 Decentering and tilt Surface x y z alpha beta 21 0 0 0 45 0 27 0 0 0 45 0

TABLE-US-00005 TABLE 5 NA 1.2 Object height 60 Wavelength 193.306 Surface Radius Thickness Material Refractive index Half diameter 0 0.000000 50.000000 60.0 1 0.000000 8.000000 SiO2 1.560326 75.8 2 0.000000 52.869064 77.4 3 1151.891547 30.208455 SiO2 1.560326 95.4 4 297.772920 3.256949 97.0 5 392.306364 20.384062 SiO2 1.560326 99.2 6 2065.429234 7.942304 98.7 7 127.761865 45.517258 SiO2 1.560326 96.0 8 969.751914 34.534602 92.1 9 72.468670 38.613055 SiO2 1.560326 62.1 10 73.543725 56.553595 46.3 11 68.108298 31.573318 SiO2 1.560326 46.0 12 109.674176 0.999866 65.2 13 328.152276 23.012797 SiO2 1.560326 74.4 14 156.396340 49.715086 79.2 15 201.140848 38.713984 SiO2 1.560326 98.1 16 122.640971 0.999882 103.2 17 2881.906041 35.379085 SiO2 1.560326 109.1 18 269.889474 0.999898 109.8 19 201.477991 40.395129 SiO2 1.560326 102.2 20 820.910555 64.207152 99.4 21 0.000000 272.609099 Mirror 68.5 22 95.391786 15.000002 SiO2 1.560326 75.6 23 1195.870422 32.735719 93.6 24 150.428374 32.735719 Mirror 95.7 25 1195.870422 15.000002 SiO2 1.560326 93.6 26 95.391786 272.609099 75.6 27 0.000000 66.033144 Mirror 69.5 28 1947.063451 26.673854 SiO2 1.560326 89.0 29 233.589947 0.999701 91.7 30 199.473771 82.749765 SiO2 1.560326 101.9 31 3119.046646 0.999910 98.4 32 163.659814 97.677532 SiO2 1.560326 94.7 33 539.497284 13.721631 71.9 34 641.496250 9.999860 SiO2 1.560326 70.4 35 263.409377 22.259722 65.3 36 545.844495 9.999869 SiO2 1.560326 65.6 37 150.000000 51.094164 69.1 38 122.880466 44.260917 SiO2 1.560326 72.0 39 175.327963 1.012444 98.0 40 452.453640 29.086710 SiO2 1.560326 112.9 41 252.725536 0.999886 117.1 42 302.044457 64.007583 SiO2 1.560326 139.9 43 305.246700 6.812911 140.0 44 260.892072 48.787934 SiO2 1.560326 137.1 45 63738.396409 13.368774 134.7 46 0.000000 12.334911 129.6 47 172.500300 51.001701 SiO2 1.560326 121.3 48 373.082563 16.645823 113.1 49 112.356012 65.439167 SiO2 1.560326 89.5 50 320.098458 1.015712 65.8 51 54.459312 52.887119 SiO2 1.560326 47.4 52 0.000000 1.000000 H2O 1.470000 16.4 53 0.000000 0.000000 15.0 Surface 8 15 20 23 25 K 0 0 0 0 0 C1 6.337290E08 2.289285E08 3.811590E08 1.408703E08 3.501090E08 C2 2.575433E12 1.432217E12 4.102034E14 1.345623E12 1.799694E12 C3 7.627829E17 1.580637E16 3.621641E17 1.762608E16 1.094631E16 C4 1.450407E20 5.394281E22 2.030758E21 3.325862E20 9.420105E21 C5 1.543958E24 3.014031E25 6.452103E26 2.817912E25 6.875122E25 C6 4.707930E29 1.444085E29 1.025805E30 4.961418E28 2.101511E29 Surface 25 26 33 35 37 K 0 0 0 0 0 C1 3.501090E08 1.408703E08 3.145690E08 2.578536E07 1.520597E07 C2 1.799694E12 1.345623E12 4.063324E12 2.457425E11 1.942927E11 C3 1.094631E16 1.762608E16 1.462751E15 2.999712E15 4.917419E15 C4 9.420105E21 3.325862E20 7.092121E20 3.983598E19 8.521190E19 C5 6.875122E25 2.817912E25 7.491721E24 1.456563E23 8.041405E23 C6 2.101511E29 4.961418E28 1.243101E27 5.238173E27 3.671590E27 Surface 40 43 48 50 K 0 0 0 0 C1 1.092116E08 3.583758E08 4.087867E08 1.635385E07 C2 9.361667E13 3.835468E14 5.710459E12 1.465150E12 C3 4.749385E17 2.007621E17 3.741501E16 2.027656E15 C4 4.357573E22 1.168203E21 1.621453E20 2.148610E19 C5 1.246971E25 2.521599E26 4.063636E25 1.061058E23 C6 1.486578E30 1.420584E31 4.118469E30 6.881746E28 Decentering and tilt Surface x y z alpha beta 21 0 0 0 45 0 27 0 0 0 45 0

TABLE-US-00006 TABLE 6 NA 1.2 Object height 60 Wavelength 193.306 Surface Radius Thickness Material Refractive index Half diameter 0 0.000000 50.000000 60.0 1 0.000000 8.000000 SiO2 1.560326 75.8 2 0.000000 50.933772 77.4 3 727.775952 25.801782 SiO2 1.560326 91.7 4 216.030845 0.999536 94.2 5 211.040976 39.710297 SiO2 1.560326 100.0 6 1076.869902 0.999021 98.8 7 112.711195 31.326403 SiO2 1.560326 87.5 8 214.295126 0.999021 82.2 9 66.802488 35.387213 SiO2 1.560326 65.6 10 66.108395 78.774319 54.5 11 55.465504 9.999279 SiO2 1.560326 46.8 12 298.251888 8.105868 72.0 13 253.844073 52.611973 SiO2 1.560326 80.0 14 100.868104 0.999465 90.1 15 254.089180 50.743218 SiO2 1.560326 105.4 16 122.616553 0.999454 113.0 17 325.389469 35.368071 SiO2 1.560326 127.5 18 192.299059 0.999384 130.8 19 857.924664 43.506291 SiO2 1.560326 134.2 20 402.182966 0.999406 133.9 21 176.032352 46.901034 SiO2 1.560326 117.2 22 891.737549 71.819796 112.8 23 0.000000 160.998496 Mirror 69.5 24 208.477853 20.000004 SiO2 1.560326 53.4 25 111.736857 23.422421 54.3 26 134.874404 23.422421 Mirror 55.0 27 111.736857 20.000004 SiO2 1.560326 54.3 28 208.477853 160.998496 53.4 29 0.000000 65.065512 Mirror 67.8 30 4804.317970 34.969769 SiO2 1.560326 101.2 31 223.557361 0.999140 104.7 32 647.576916 33.517562 SiO2 1.560326 114.7 33 511.971879 0.999339 115.8 34 182.695186 51.687095 SiO2 1.560326 118.0 35 4375.653897 0.999619 115.4 36 131.735101 46.203705 SiO2 1.560326 97.8 37 1809.243103 4.477930 91.6 38 573.465666 9.999876 SiO2 1.560326 88.1 39 83.272578 56.613234 66.8 40 99.102012 9.999038 SiO2 1.560326 66.0 41 124.605516 52.681306 67.0 42 96.638032 42.501820 SiO2 1.560326 69.1 43 143.757600 0.999495 94.1 44 589.601528 42.492551 SiO2 1.560326 123.1 45 416.503743 0.999625 125.6 46 393.581824 32.891473 SiO2 1.560326 135.3 47 929.275942 0.999694 135.2 48 239.988808 45.788842 SiO2 1.560326 138.8 49 1114.851901 57.991878 136.9 50 0.000000 35.538482 125.2 51 256.373888 39.977376 SiO2 1.560326 125.8 52 2489.189597 0.999817 122.9 53 112.292298 50.358269 SiO2 1.560326 100.7 54 179.732403 23.614201 86.6 55 186.994041 26.151602 SiO2 1.560326 79.8 56 2504.333895 0.998913 74.1 57 52.818237 54.338932 SiO2 1.560326 47.2 58 0.000000 1.000000 H2O 1.470000 16.4 59 0.000000 0.000000 Surface Aspherical Constants 8 15 22 24 25 K 0 0 0 0 0 C1 8.438429E08 1.014379E07 9.680776E10 4.589290E07 6.275710E07 C2 2.229236E12 2.468382E12 4.462665E13 3.839142E11 6.326297E11 C3 5.317063E16 1.792692E16 2.908499E18 3.043656E15 7.577756E15 C4 5.325798E20 4.554263E21 1.022012E21 6.631085E19 7.226551E20 C5 5.933879E24 1.724388E25 4.498781E26 2.125048E22 2.141074E22 C6 2.077845E28 5.778429E31 7.354023E31 2.274431E26 2.995536E26 Surface 27 28 37 39 40 K 0 0 0 0 0 C1 6.275710E07 4.589290E07 7.232518E08 3.945726E08 3.396052E07 C2 6.326297E11 3.839142E11 2.217467E13 3.426461E12 1.972920E11 C3 7.577756E15 3.043656E15 2.847604E16 1.874953E16 3.767085E15 C4 7.226551E20 6.631085E19 4.835319E20 1.321859E19 5.439776E19 C5 2.141074E22 2.125048E22 3.646996E24 1.333399E23 2.984282E23 C6 2.995536E26 2.274431E26 1.391467E28 5.465124E28 2.440112E27 Surface 44 47 54 56 K 0 0 0 0 C1 1.325605E08 4.372799E08 7.345028E08 7.547169E08 C2 1.550416E12 8.360768E13 1.135658E11 6.239064E12 C3 6.951071E17 3.668297E18 8.060461E16 1.564526E15 C4 1.294568E21 1.473145E21 1.202219E19 3.045032E19 C5 5.461199E26 7.932242E26 7.589632E24 2.788162E23 C6 2.663009E30 1.459442E30 3.785640E28 1.205165E27 Decentering and tilt Surface x y z alpha beta 23 0 0 0 45 0 29 0 0 0 45 0