METHOD OF MANUFACTURING A HEAT DISSIPATION DEVICE

Abstract

A method of manufacturing a heat dissipation device is disclosed. The heat dissipation device manufactured with the method includes two titanium metal sheets, which are subjected to a heat treatment before undergoing mechanical processing, plastic working and surface modification. With these arrangements, the titanium metal sheets can be freely plastically deformed and possess a capillary force, and can therefore be used in place of the conventional copper material to serve as a material for making heat dissipation devices, and the heat dissipation devices so produced can have largely reduced weight and largely improved heat dissipation performance.

Claims

1. A method of manufacturing a heat dissipation device, comprising the following steps: preparing a first titanium metal sheet and a second titanium metal sheet, and carrying out a pre-cleaning operation for the first and second titanium metal sheets; performing a heat treatment on the cleaned first and second titanium metal sheets; stamping the first titanium metal sheet to form a plurality of raised sections thereon; bonding a metal mesh to one surface of the second titanium metal sheet; and closing a surface of the first titanium metal sheet having the raised sections onto the surface of the second titanium metal sheet having the metal mesh bonded thereto, and carrying out subsequent operations, including seam welding, working fluid filling, vacuuming and sealing.

2. The method of manufacturing a heat dissipation device as claimed in claim 1, wherein, in the pre-cleaning operation, the prepared first and second titanium metal sheets are wiped with acetone and then washed with de-ionized water in an ultrasonic cleaning machine; and, finally, surfaces of the first and second titanium metal sheets are dried with nitrogen gas.

3. The method of manufacturing a heat dissipation device as claimed in claim 1, wherein, in the heat treatment step, the first and the second titanium metal sheet are positioned in an atmosphere furnace and argon gas is supplied into the atmosphere furnace; and the atmosphere furnace is then heated to 400 C.700 C. for 3090 minutes.

4. The method of manufacturing a heat dissipation device as claimed in claim 1, further comprising a step after the metal mesh bonding step to perform a surface modification treatment on the first and the second titanium metal sheet, so that at least one coating is formed on a surface of each of the first titanium metal sheet, the second titanium metal sheet and the metal mesh.

5. The method of manufacturing a heat dissipation device as claimed in claim 4, wherein the at least one coating is selected from the group consisting of a hydrophilic coating and a hydrophobic coating.

6. The method of manufacturing a heat dissipation device as claimed in claim 4, wherein the at least one coating is selected from the group consisting of a titanium dioxide (TiO.sub.2) coating and a silicon dioxide (SiO.sub.2) coating.

7. The method of manufacturing a heat dissipation device as claimed in claim 1, wherein the metal mesh is bonded to the second titanium metal sheet by means of diffusion bonding.

8. The method of manufacturing a heat dissipation device as claimed in claim 7, wherein the metal mesh is bonded to the second titanium metal sheet at a diffusion bonding temperature of 650 C.850 C. for a process time of 3090 minutes.

9. The method of manufacturing a heat dissipation device as claimed in claim 4, wherein, in the surface modification treatment performed on the first and the second titanium metal sheet, the first and the second titanium metal sheet are positioned in an atmosphere furnace and argon gas is supplied into the atmosphere furnace, the atmosphere furnace is then heated to 400 C.700 C. for 3090 minutes, so that a reduction reaction due to overheating occurs on the surfaces of the first and the second titanium metal sheet.

10. The method of manufacturing a heat dissipation device as claimed in claim 4, wherein, in the surface modification treatment performed on the first and the second titanium metal sheet, the first and the second titanium metal sheet are positioned in an atmosphere furnace, the atmosphere furnace is then vacuumed and heated to 400 C.700 C. for 3090 minutes, so that a reduction reaction due to overheating occurs on the surfaces of the first and the second titanium metal sheet.

11. The method of manufacturing a heat dissipation device as claimed in claim 4, wherein the surface modification treatment is performed on the first and the second titanium metal sheet via a sol-gel coating process, in which the first and the second titanium metal sheet are positioned in an atmosphere furnace, the atmosphere furnace is then vacuumed and heated to 400 C.700 C. for 3090 minutes, so that a coating is formed on the surfaces of the first and the second titanium metal sheet.

12. The method of manufacturing a heat dissipation device as claimed in claim 11, wherein the coating formed on the surfaces of the first and the second titanium metal sheet in the surface modification treatment can be any one of a titanium dioxide coating and a silicon dioxide coating.

13. The method of manufacturing a heat dissipation device as claimed in claim 4, wherein the surface modification treatment is performed on the first and the second titanium metal sheet via a sol-gel coating process, in which the first and the second titanium metal sheet are positioned in an atmosphere furnace and argon gas is supplied into the atmosphere furnace, the atmosphere furnace is then heated to 400 C.700 C. for 3090 minutes, so that a coating is formed on the surfaces of the first and the second titanium metal sheet.

14. The method of manufacturing a heat dissipation device as claimed in claim 1, wherein, in the step of closing the first and second titanium metal sheets to each other and welding seams between them, the seam welding operation is performed by means of laser beam welding technique using a laser beam having a wavelength of 1030 nm and a laser power of 100-500 W; and the seam welding operation can be performed in a working environment having a protective gas supplied thereinto or in a vacuum environment of 10.sup.2 torr; and the protective gas can be helium or argon with a helium leak rate smaller than 1.010.sup.8 mbar-L/sec.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The structure and the technical means adopted by the present invention to achieve the above and other objects can be best understood by referring to the following detailed description of the preferred embodiments and the accompanying drawings, wherein

[0018] FIG. 1 is an exploded perspective view of a first embodiment of a heat dissipation device according to the present invention;

[0019] FIG. 2 is an assembled sectional view of the heat dissipation device of FIG. 1;

[0020] FIG. 3 is an assembled sectional view of a second embodiment of the heat dissipation device according to the present invention;

[0021] FIG. 4 is an assembled sectional view of a third embodiment of the heat dissipation device according to the present invention;

[0022] FIG. 5 is an electron microscopic image of a metal mesh adopted by the heat dissipation device of the present invention;

[0023] FIG. 6 is a first electron microscopic image of a first, a second and a third coating formed on the heat dissipation device of the present invention;

[0024] FIG. 7 is a second electron microscopic image of the first, the second and the third coating formed on the heat dissipation device of the present invention;

[0025] FIG. 8 is a third electron microscopic image of the first, the second and the third coating formed on the heat dissipation device of the present invention;

[0026] FIG. 9 is a flowchart showing the steps included in a first embodiment of a method of manufacturing the heat dissipation device of the present invention; and

[0027] FIG. 10 is a flowchart showing the steps included in a second embodiment of the method of manufacturing the heat dissipation device of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] The present invention will now be described with some preferred embodiments thereof and by referring to the accompanying drawings. For the purpose of easy to understand, elements that are the same in the preferred embodiments are denoted by the same reference numerals.

[0029] Please refer to FIGS. 1 and 2, which are exploded perspective and assembled sectional views, respectively, of a first embodiment of a heat dissipation device 1 according to the present invention. As shown, the illustrated first embodiment of the heat dissipation device 1 includes a first titanium metal sheet 11 and a second titanium metal sheet 12.

[0030] The first titanium metal sheet 11 has a first surface 111 and an opposite second surface 112. The first surface 111 has a plurality of raised sections 113 formed thereon by means of stamping. In the present invention, the second surface 112 serves as a condensing side of the heat dissipation device 1.

[0031] The second titanium metal sheet 12 has a third surface 121 and an opposite fourth surface 122. As can be seen in FIG. 2, a metal mesh 123 is disposed on a top of the third surface 121. The first and the second titanium metal sheet 11, 12 are correspondingly closed to each other to together define a sealed chamber 13, in which a working fluid (not shown) is filled. In the present invention, the fourth surface 122 serves as a heat-absorbing side of the heat dissipation device 1.

[0032] FIG. 3 is an assembled sectional view of a second embodiment of the heat dissipation device 1 according to the present invention. As shown, the second embodiment is different from the first embodiment in including a first coating 114 formed on surfaces of the raised sections 113, a second coating 124 formed on the third surface 121 and located between the metal mesh 123 and the third surface 121, and a third coating 125 formed on a surface of the metal mesh 123 opposite to the second coating 124. Since all other structural features of the second embodiment are similar to those of the first embodiment, they are not repeatedly described herein. The first, second and third coatings 114, 124, 125 can be respectively a hydrophilic coating or a hydrophobic coating. In the case of the hydrophilic coating, it can be a titanium dioxide (TiO.sub.2) coating or a silicon dioxide (SiO.sub.2) coating. FIG. 5 is an electron microscopic image of the metal mesh 123, and FIGS. 6, 7 8 are electro microscopic images of different types of the first, second and third coatings 114, 124, 125.

[0033] The selection of hydrophilic or hydrophobic first, second and third coatings 114, 124, 125 is determined mainly according to the position and the usage of the coatings. For instance, the first coating 114 on the first surface 111 can be a hydrophilic or a hydrophobic coating; the second coating 124 on the third surface 121 is preferably a hydrophilic coating for the purpose of providing an increased water-absorbing capacity and enabling an increased bonding strength between the third surface 121 and the metal mesh 123; and the third coating 125 on the metal mesh 123 is preferably a hydrophilic coating for the purpose of providing an increased water-bearing capacity and an enhanced back flowing of the working fluid.

[0034] The first and the second titanium metal sheet 11, 12 for use in the present invention are selected from commercially pure titanium materials, and are subjected to a pre-heat treatment before they can undergo a plastic working.

[0035] FIG. 4 is an assembled sectional view of a third embodiment of the heat dissipation device 1 according to the present invention. As shown, the third embodiment is different from the first embodiment in that the first titanium metal sheet 11 is provided on the second surface 112 with a plurality of sunken sections 115, which are located in one-to-one correspondence to the raised sections 113 formed on the first surface 111. The raised sections 113 and sunken sections 115 can be correspondingly formed on the first and second surfaces 111, 112, respectively, of the first titanium metal sheet 11 by means of embossing.

[0036] FIG. 9 is a flowchart showing the steps included in a first embodiment of a method of manufacturing the heat dissipation device of the present invention. Please refer to FIG. 9 along with FIGS. 1 through 8. As shown, according to the first embodiment thereof, the method of manufacturing the heat dissipation device of the present invention includes the following steps:

[0037] Step S1: Prepare a first titanium metal sheet and a second titanium metal sheet, and carry out a pre-cleaning operation for the first and second titanium metal sheets.

[0038] More specifically, a pre-cleaning operation is carried out for the first and the second titanium metal sheet 11, 12 to be further processed. In the pre-cleaning operation, the prepared first and second titanium metal sheets are wiped with acetone and then washed with de-ionized water in an ultrasonic cleaning machine. Finally, surfaces of the first and second titanium metal sheets 11, 12 are dried with nitrogen gas. The first and second titanium metal sheets 11, 12 are selected from commercially pure titanium material instead of general titanium alloys. The pure titanium material has the advantage of higher specific strength, i.e. higher tensile strength/density. Copper (Cu) has a density of 8.96 g/cm.sup.3 and pure titanium (Ti) has a density of 4.54 g/cm.sup.3, which is about one-half of the density of copper. Therefore, compared to copper of the same volume, pure titanium with higher specific strength has higher strength but lower weight.

[0039] A layer of oxidized film of TiO.sub.2, TiO.sub.3 or TiO having a thickness of several hundreds of (1 =10.sup.10 meter), high stability and strong adhesion force will form on the surface of pure titanium at room temperature. The oxidized film formed on the surface of the pure titanium has the ability of self-repairing after a surface damage, which proves titanium is a metal showing a strong tendency of passivation. Therefore, titanium has a corrosion resistance much better than that of copper to facilitate the application of a vapor chamber in various environmental conditions. Titanium shows excellent corrosion resistance in humid environments, seawater, chlorine-containing solutions, hypochlorite, nitric acid, chromic acid and general oxidizing acidic environments.

[0040] Step S2: Perform a heat treatment on the cleaned first and second titanium metal sheets.

[0041] More specifically, the cleaned first and second titanium metal sheets 11, 12 are positioned in an atmosphere furnace (not shown) and argon gas is supplied into the atmosphere furnace. The atmosphere furnace is then heated to 400 C.700 C. for 3090 minutes. The main purpose of the heat treatment is to facilitate subsequent plastic working of the first and second titanium metal sheets 11, 12.

[0042] Step S3: Stamp the first titanium metal sheet to form a plurality of raised sections thereon.

[0043] More specifically, the first titanium metal sheet 11 is subjected to stamping, which is a type of mechanical processing, so that a plurality of raised sections 113 is formed on a first surface 111 of the first titanium metal sheet 11. The raised sections 113 provide an effect of condensing the working fluid and can serve as a supporting structure.

[0044] Step S4: Bond a metal mesh to one surface of the second titanium metal sheet.

[0045] More specifically, a metal mesh 123 is bonded to a third surface 121 of the second titanium metal sheet 12 by means of diffusion bonding. The second titanium metal sheet 12 is used as a heat dissipating sheet in a pure titanium vapor chamber (Ti-VC), and the metal mesh 123 is bonded to the second titanium metal sheet 12 at a diffusion bonding temperature of 650 C.850 C. The diffusion bonding must be conducted in a process atmosphere of positive-pressure highly pure argon gas (Ar) or in a high vacuum environment of 10.sup.410.sup.6 torr at a process pressure of 1 kg5 kg for a process time of 3090 minutes. Pure titanium is a metal with very active chemical properties and has a phase transformation temperature of 883 C. That is, pure titanium is in a -phase at a temperature higher than 883 C. and in an -phase at a temperature lower than 883 C. Pure titanium in the -phase has a body-centered cubic (BCC) crystalline structure, and pure titanium in the -phase has a hexagonal close packed (HCP) crystalline structure.

[0046] Pure titanium in a high-temperature environment can react with many elements and compounds and undergo a material phase change. For example, titanium starts absorbing hydrogen in the air at 250 C.; starts absorbing oxygen in the air at 500 C.; and starts absorbing nitrogen in the air at 600 C. The ability of titanium to absorb gases is increased with the rising of temperature. Hydrogen (H), oxygen (O), carbon (C) and Nitrogen (N) can react with titanium to form interstitial slid solutions to cause changes or even defects in the mechanical properties of titanium material and form related compounds, such as TiO.sub.2, TiC, TiN and TiH.sub.2, which would have an adverse influence on the material's properties, such as rendering the material to be hard but brittle. Therefore, process temperature and process atmosphere (i.e. process environment control) are very important in related thermal processes when manufacturing a titanium heat spreader.

[0047] For a conventional copper vapor chamber (Cu-VC), a metal mesh can be bonded thereto at a diffusion bonding temperature of 750 C.950 C. in a process atmosphere of 15% H.sub.2+85% N.sub.2 at a process pressure of 1 kg5 kg for a process time of 4060 minutes, and no phase change behavior will occur during the high-temperature process. However, copper crystalline grains tend to grow and become coarse when being heated, which would cause largely worsened mechanical properties of the copper material.

[0048] Step S5: Close a surface of the first titanium metal sheet having the raised sections onto the surface of the second titanium metal sheet having the metal mesh bonded thereto, and carry out subsequent operations, including seam welding, working fluid filling, vacuuming and sealing.

[0049] More specifically, after completion of the above steps S1 to S4, the processed first and the second titanium metal sheet 11, 12 are subjected to the operations of seam welding, working fluid filling, vacuuming and sealing. First, close the first surface 111, which has the raised sections 113 formed thereon, of the first titanium metal sheet 11 onto to the third surface 121, which has the metal mesh 123 bonded thereto, of the second titanium metal sheet 12. Then, seams between the first and the second titanium metal sheet 11, 12 are sealed by means of laser beam welding technique. Finally, the operations of working fluid filling, vacuuming and sealing are sequentially performed.

[0050] In the seam welding process using laser beam welding technique, a solid-state thin-disk Yb:YAG laser material is pumped to produce a laser beam having a wavelength of 1030 nm and a laser power of 100-500 W, depending on a thickness of the material. Further, a protective gas, such as helium or argon, must be supplied into the working environment with a helium leak rate smaller than 1.010.sup.8 mbar-L/sec. Or, the laser beam welding should be performed in a vacuum environment of 10.sup.2 torr.

[0051] Laser beam welding has the advantages of concentrated heat energy source that allows for welding in a narrow area without affecting nearby materials; short working time that won't easily change the mechanical properties of the whole workpiece; ultra-clean welding that does not require any solder; and allowing for easy realization of efficient automated production.

[0052] Please refer to FIG. 10, which is a flowchart showing the steps included in a second embodiment of the method of manufacturing the heat dissipation device of the present invention. Please refer to FIG. 10 along with FIGS. 1 through 8. As shown, according to the second embodiment thereof, the method of manufacturing the heat dissipation device of the present invention includes the following steps:

[0053] Step S1: Prepare a first titanium metal sheet and a second titanium metal sheet, and carry out a pre-cleaning operation for the first and second titanium metal sheets;

[0054] Step S2: Perform a heat treatment on the cleaned first and second titanium metal sheets;

[0055] Step S3: Stamp the first titanium metal sheet to form a plurality of raised sections thereon;

[0056] Step S4: Bond a metal mesh to one surface of the second titanium metal sheet;

[0057] Step S6: Perform a surface modification treatment on the first and the second titanium metal sheet, so that at least one coating is formed on a surface of each of the first titanium metal sheet, the second titanium metal sheet and the metal mesh; and

[0058] Step S5: Close a surface of the first titanium metal sheet having the raised sections onto the surface of the second titanium metal sheet having the metal mesh bonded thereto, and carry out subsequent operations, including seam welding, working fluid filling, vacuuming and sealing.

[0059] The second embodiment of the heat dissipation device manufacturing method is different from the first embodiment in further including a Step S6 after the Step S4.

[0060] More specifically, in the Step S6, the surface modification treatment can be performed on the first and the second titanium metal sheet 11, 12 in one of four manners, which are described in details below.

[0061] In the first manner of surface modification treatment, the first and the second titanium metal sheet 11, 12 are positioned in an atmosphere furnace (not shown in the drawings); the atmosphere furnace is filled with a process atmosphere of positive-pressure pure argon (Ar) and heated to 400 C.700 C. for 3090 minutes, so that a reduction reaction due to overheating occurs on the surfaces of the first and the second titanium metal sheet 11, 12. In this process, a trace amount of oxygen in the process atmosphere is controlled to form very fine anatase TiO.sub.2 nanorods on the surface of the titanium material. Anatase TiO.sub.2 nanorods are highly hydrophilic structures and can maintain the hydrophilic property for a relatively long time about 1 to 2 weeks. However, the hydrophilic property gradually weakens with time and influences from surrounding environments, such as moisture. In this case, the product can be irradiated with ultraviolet (UV) light to regain the hydrophilic property due to a photocatalytic effect of TiO.sub.2 material. The length of UV irradiation time is about 20 to 60 minutes, depending on the intensity of UV light.

[0062] In the second manner of surface modification treatment, the first and the second titanium metal sheet 11, 12 are positioned in an atmosphere furnace; the atmosphere furnace is then vacuumed and heated to 400 C.700 C. for 3090 minutes, so that a reduction reaction due to overheating occurs on the surfaces of the first and the second titanium metal sheet 11, 12. In this process, a trace amount of oxygen in the process atmosphere is controlled to form very fine anatase TiO.sub.2 nanorods on the surface of the titanium material. Anatase TiO.sub.2 nanorods are highly hydrophilic structures and can maintain the hydrophilic property for a relatively long time about 1 to 2 weeks. However, the hydrophilic property gradually weakens with time and influences from surrounding environments, such as moisture. In this case, the product can be irradiated with ultraviolet (UV) light to regain the hydrophilic property due to a photocatalytic effect of TiO.sub.2 material. The length of UV irradiation time is about 20 to 60 minutes, depending on the intensity of UV light.

[0063] In the third manner of surface modification treatment, a sol-gel coating process is performed mainly on the metal mesh 123 bonded to the surface of the second titanium metal sheet 12. First, a layer of crystalline SiO.sub.2 is coated on the metal mesh 123 to service as a base layer. The SiO.sub.2-coated metal mesh 123 is then dried in an oven at 80 C. and subsequently coated with a layer of anatase TiO.sub.2. Thereafter, the thermal-treated coating is subjected to a densification sintering treatment to form a composite film of SiO.sub.2/TiO.sub.2 on the metal mesh 123. The densification sintering treatment is carried out at a temperature of 400 C.700 C. for 3090 minutes in a process atmosphere of positive-pressure pure argon (Ar). The composite film of SiO.sub.2/TiO.sub.2 so formed is a highly hydrophilic structure and can maintain the hydrophilic property for a relatively long time about 1 to 2 weeks. However, the hydrophilic property gradually weakens with time and influences from surrounding environments, such as moisture. In this case, the product can be irradiated with ultraviolet (UV) light to regain the hydrophilic property due to a photocatalytic effect on the surface of the composite film of SiO.sub.2/TiO.sub.2. The length of UV irradiation time is about 20 to 60 minutes, depending on the intensity of UV light.

[0064] In the fourth manner of surface modification treatment, a sol-gel coating process is performed mainly on the metal mesh 123 bonded to the surface of the second titanium metal sheet 12. First, a layer of crystalline SiO.sub.2 is coated on the metal mesh 123 to service as a base layer. The SiO.sub.2-coated metal mesh 123 is then dried in an oven at 80 C. and subsequently coated with a layer of anatase TiO.sub.2. Thereafter, the thermal-treated coating is subjected to a densification sintering treatment to form a composite film of SiO.sub.2/TiO.sub.2 on the metal mesh 123. The densification sintering treatment is carried out at a temperature of 400 C.700 C. for 3090 minutes in a vacuumed process environment. The composite film of SiO.sub.2/TiO.sub.2 so formed is a highly hydrophilic structure and can maintain the hydrophilic property for a relatively long time about 1 to 2 weeks. However, the hydrophilic property gradually weakens with time and influences from surrounding environments, such as moisture. In this case, the product can be irradiated with ultraviolet (UV) light to regain the hydrophilic property due to a photocatalytic effect on the surface of the composite film of SiO.sub.2/TiO.sub.2. The length of UV irradiation time is about 20 to 60 minutes, depending on the intensity of UV light.

[0065] In summary, according to the present invention, commercially pure titanium material is utilized as a substrate material to replace the conventional copper material for manufacturing a heat dissipation device, such as a vapor chamber. The present invention also provides a process for working pure titanium. With the present invention, it is possible to replace copper with pure titanium in the manufacturing of heat dissipation devices so as to overcome some disadvantages of copper. Pure titanium not only can replace copper, aluminum and stainless steel to serve as the material for manufacturing heat dissipation units but also has the advantages of light weight, high structural strength and high corrosion resistance, and is therefore very suitable for making a load-bearing base or a load-bearing bezel of a handheld device or a mobile device. In this case, the load-bearing structure and the heat dissipation device of the handheld or mobile device can be integrally manufactured to meet the present demands for low-profile or slim-type mobile devices or handheld devices and to achieve the effects of bearing load and dissipating heat at the same time.

[0066] Pure titanium material in the form of a thin sheet is a shape-memory metal. That is, when the pure titanium material is bent and deformed by an external force applied thereto, the deformed titanium material will return to its pre-deformed shape when the external force is removed. Therefore, thin-sheet pure titanium material can also be directly used with smart watches or be used to manufacture watchbands to provide the smart watches with heat-dissipating and supporting effects at the same time.

[0067] The present invention has been described with some preferred embodiments thereof and it is understood that many changes and modifications in the described embodiments can be carried out without departing from the scope and the spirit of the invention that is intended to be limited only by the appended claims.