Wire saw device, and processing method and processing device for workpiece

Abstract

In order to respond flexibly to various processing modes, such as forming curved surface shapes, when cutting a workpiece using a wire saw, this wire saw device (1) is provided with: a single robot arm (2) that is capable of moving freely by means of multi-axis control; a wire saw unit (3) that is detachably connected to the robot arm (2) via a tool changer (7); a wire (8) that spans a plurality of pulleys supported within the wire saw unit (3); and a workpiece cutting zone (20) that is established between the pulleys. The workpiece is cut to a prescribed shape by moving the robot arm (2) in a preset direction while running the wire (8) of the wire saw unit (3) and pressing the wire (8) against the supported workpiece.

Claims

1. A processing device of a workpiece that processes the workpiece by a processing unit in a state in which the workpiece is held on a table, wherein the table includes: an inner table having a placement surface for the workpiece and a plurality of suction holes provided in the placement surface; an outer casing that is provided so as to surround an outer side of the inner table and forms a suction chamber by fitting with the inner table; and a plurality of ascending/descending pins capable of projecting and retracting provided in the outer casing and inserted in the suction holes of the inner table, the inner table is provided to be relatively and vertically movable with respect to the outer casing, and configured to be positioned at a raised position when placing the workpiece and descend to a lowered position when negative pressure acts in the suction chamber, and the ascending/descending pins are urged toward the placement surface by elastic members, and are configured to be positioned in the suction holes of the inner table when the inner table is at the raised position and project from the placement surface of the inner table when the inner table is at the lowered position.

2. The processing device of a workpiece according to claim 1, wherein the processing unit is a wire saw provided at a tip end of a freely movable robot arm.

3. The processing device of a workpiece according to claim 1, wherein a plurality of openings are defined on at least one surface of the workpiece, and at least one of the ascending/descending pins is inserted in an opening of the workpiece and the workpiece is fixed to the table by suction and the ascending/descending pin by placing the workpiece on the inner table, generating a suction force on the placement surface of the inner table to suck and hold the workpiece, thus causing the inner table to descend to the lowered position, and causing the ascending/descending pins to project.

4. The processing device of a workpiece according to claim 1, wherein the workpiece is a honeycomb core member formed by assembling tubular cells, and a suction force is generated on the placement surface of the table by placing an air-impermeable member over the honeycomb core member.

5. The processing device of a workpiece according to claim 1, wherein the ascending/descending pins are urged toward the placement surface by the elastic members, and only the ascending/descending pins corresponding to an opening portion of the workpiece project from the placement surface of the table.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a partially broken overall view of a wire saw device according to a first embodiment of the present invention.

(2) FIG. 2 is an enlarged plan view of the wire saw unit according to the first embodiment of the present invention.

(3) FIG. 3 is an enlarged front view of the first embodiment according to the present invention taken along an A-A direction in FIG. 2.

(4) FIG. 4 is an enlarged front view of the first embodiment according to the present invention taken along the A-A direction in FIG. 2 showing a cutting operation.

(5) FIG. 5 is an enlarged front view of the first embodiment according to the present invention taken along the A-A direction in FIG. 2 showing a swinging operation.

(6) FIG. 6 is an enlarged sectional view of a tool changer according to the first embodiment of the present invention.

(7) FIG. 7 is a partially broken overall view of a wire saw device according to a second embodiment of the present invention.

(8) FIG. 8 is an enlarged plan view of the wire saw unit according to the second embodiment of the present invention.

(9) FIG. 9 is an enlarged front view of the second embodiment according to the present invention taken along an A-A direction in FIG. 8.

(10) FIG. 10 is an explanatory diagram of an enlarged front view of the second embodiment according to the present invention taken along the A-A direction in FIG. 8 showing a cutting processing operation.

(11) FIGS. 11(a) and 11(b) are operation diagrams of jetting and suction of air according to a traveling direction of a wire according to the second embodiment of the present invention.

(12) FIG. 12 is a partially broken overall view of a wire saw device according to a third embodiment of the present invention.

(13) FIG. 13 is an enlarged plan view of the wire saw unit according to the third embodiment of the present invention.

(14) FIG. 14 is an enlarged front view of the third embodiment according to the present invention taken along an A-A direction in FIG. 13.

(15) FIG. 15 is an explanatory diagram of an enlarged front view of the third embodiment according to the present invention taken along the A-A direction in FIG. 13 showing a cutting processing operation.

(16) FIG. 16 is an enlarged view of a portion in the vicinity of a guide pulley in which a load cell according to the third embodiment of the present invention is disposed.

(17) FIG. 17 is an explanatory diagram of a deflection control method according to the third embodiment of the present invention.

(18) FIG. 18(a) is an explanatory diagram showing a method of holding an air-permeable member that is a workpiece according to the present invention, and FIG. 18(b) is an explanatory diagram showing a method of cutting a workpiece that is a honeycomb member while swinging the wire saw unit according to the present invention.

(19) FIG. 19 is an overall perspective view of a processing device according to an embodiment of the present invention.

(20) FIG. 20 is a partial cutaway plan view of a processing unit portion in the case where a wire saw is used as the processing unit of the present invention.

(21) FIG. 21 is an explanatory diagram of the cutting processing operation in a front direction of FIG. 20.

(22) FIG. 22 is a partial cutaway plan view of a processing unit portion in the case where a band saw is used as the processing unit of the present invention.

(23) FIG. 23 is a partially cutaway explanatory diagram in a front direction of FIG. 22.

(24) FIGS. 24(a) and 24(b) are explanatory diagrams of a processing method according to the first embodiment concerning the method of holding the workpiece of the present invention.

(25) FIGS. 25(a) and 25(b) are explanatory diagrams of a processing method according to the second embodiment concerning the method of holding the workpiece of the present invention.

(26) FIG. 26 is an explanatory diagram of a table according to the second embodiment concerning the method of holding the workpiece of the present invention.

(27) FIG. 27(a) is an explanatory diagram of a processing method according to the third embodiment concerning the method of holding the workpiece of the present invention.

(28) FIGS. 28(b) and 28(c) are explanatory diagrams of the processing method according to the third embodiment concerning the method of holding the workpiece of the present invention.

(29) FIG. 29(d) is an explanatory diagram of the processing method according to the third embodiment concerning the method of holding the workpiece of the present invention.

(30) FIGS. 30(a) and 30(b) are explanatory diagrams of a processing method according to a fourth embodiment concerning the method of holding the workpiece of the present invention.

(31) FIGS. 31(a) and 31(b) are explanatory diagrams of another processing method according to the fourth embodiment concerning the method of holding the workpiece of the present invention.

(32) FIGS. 32(a) and 32(b) are explanatory diagrams of a processing method according to a fifth embodiment concerning the method of holding the workpiece of the present invention.

(33) FIG. 33(a) is an explanatory diagram of a processing method according to a sixth embodiment concerning the method of holding the workpiece of the present invention.

(34) FIGS. 34(b) and 34(c) are explanatory diagrams of the processing method according to the sixth embodiment concerning the method of holding the workpiece of the present invention.

(35) FIG. 35(a) is an explanatory diagram of a processing method according to a seventh embodiment concerning the method of holding the workpiece of the present invention.

(36) FIG. 36(b) is an explanatory diagram of the processing method according to the seventh embodiment concerning the method of holding the workpiece of the present invention.

(37) FIG. 37 is an explanatory diagram of a processing method, in the case of using a band saw as a processing unit, concerning the method of holding the workpiece of the present invention.

(38) FIG. 38 is an explanatory diagram of another processing method, in the case of using a band saw as a processing unit, concerning the method of holding the workpiece of the present invention.

(39) FIG. 39 is an overall perspective view of a processing device including a wire saw according to an eighth embodiment concerning the method of holding the workpiece of the present invention.

(40) FIG. 40 is a plan view of a table portion of the processing device according to the eighth embodiment.

(41) FIG. 41 is an arrow section view taken along an A-A direction in FIG. 40.

(42) FIGS. 42(a) and 42(b) are explanatory diagrams of a state in which the workpiece is fixed to the table according to the eighth embodiment.

(43) FIG. 43 is an enlarged explanatory view of the table portion in a sectional direction in a state in which the workpiece is fixed to the table in the processing device according to the eighth embodiment.

(44) FIG. 44 is an explanatory view in a plane direction in a state in which the workpiece is placed on the table in the processing device according to the eighth embodiment.

(45) FIG. 45 is a partial enlarged explanatory view in a state in which the workpiece is placed on the table in the processing device according to the eighth embodiment.

(46) FIG. 46 is an explanatory diagram showing a state in which the workpiece is processed by the processing device according to the eighth embodiment.

DESCRIPTION OF EMBODIMENTS

(47) Hereinafter, embodiments of the present invention will be described with reference to drawings, but the present invention is not limited to the following embodiments.

(48) FIGS. 1 to 6 show a first embodiment of a wire saw device of the present invention, and FIG. 1 is a partially broken overall view of this wire saw device 1.

(49) The wire saw device 1 includes a wire saw unit 3 detachably connected thereto via a tool changer 7 connected to a tip end portion of a robot arm 2.

(50) The wire saw unit 3 shown in FIGS. 2, 3, 4, and 5 is detachably attached to the robot arm 2 by engagement between a male portion 18 of the tool changer 7 (shown in FIG. 6) on the robot arm 2 side and a female portion 19 of the tool changer 7 on the wire saw unit 3 side via appropriate means such as a plunger (not shown). By operating an internal motor (not shown) of the robot arm 2, a rotary shaft 15 is driven and rotation of a rotatable body 12 is appropriately controlled by a drive control device (not shown), whereby the tool changer 7 can rotate. In accordance with movement of the rotatable body 12, the wire saw unit 3 can also rotate by 360 degrees via the tool changer 7. However, actually, in the case of cutting processing, a rotation angle is controlled by the drive control device. The inside of the wire saw unit 3 is provided with two guide pulleys 4a and 4b, a plurality of rotary pulleys 5, and a drive source (not shown) that rotates the rotary pulleys 5. Here, at least one of the plurality of rotary pulleys 5 is a tension pulley for adjusting tension. Further, a wire 8 passes over V grooves of the guide pulleys 4a and 4b provided at a tip end portion of the wire saw unit 3, and thus a cutting processing region 20 is formed between the guide pulleys 4a and 4b. The entire wire saw unit 3 can also be covered with a covering of a member (for example, carbon fiber) that is lightweight and excellent in durability.

(51) The wire 8 wound around the rotary pulleys 5 inside the wire saw unit 3 is formed in an endless shape. It is preferable to use a fixed abrasive type wire in which abrasive grains such as diamond are fixed to a surface of the wire by electrodeposition, resin, or the like.

(52) Further, instead of forming the wire 8 in an endless loop shape, a configuration may be adopted in which a supply reel and a recovery reel for the wire are provided inside the wire saw unit 3, both ends of the wire are wound around the respective reels, the wire fed from the reel on the supply side is wound up by the recovery reel on the recovery side, and, meanwhile, the wire 8 is fed and wound up by reversing the supply side and the recovery side when a traveling direction of the wire 8 is switched.

(53) A base end of the robot arm 2 is attached to a base 9. The robot arm 2 is an articulated multi-axis controllable robot arm, and is capable of freely ascending, descending, rotating, and moving. The robot arm 2 is moved by an internal motor (not shown) of the robot arm 2 with the base 9 serving as a fulcrum, and a movement path of the robot arm 2 is controlled by a drive control device (not shown). Due to the controlled movement of the robot arm 2, the wire 8 is pressed in not a thrust direction but a radial direction of the V grooves of the guide pulleys 4a and 4b, and thus a workpiece 6 is cut.

(54) FIG. 6 shows one embodiment of attachment and detachment of the robot arm 2 and the wire saw unit 3. A substrate 17a of the tool changer 7 is mounted on the rotatable body 12 that is rotatable and disposed on the robot arm 2 side. Meanwhile, a substrate 17b of the tool changer 7 is mounted on a connection bracket 11 disposed on the wire saw unit 3 side. The substrate 17a includes the male portion 18 and the substrate 17b includes the female portion 19, and when the substrate 17a and the substrate 17b are brought into contact with each other, the male portion 18 is engaged with the female portion 19. As a result, the robot arm 2 and the wire saw unit 3 can be attached and detached. A connecting portion of the tool changer 7 on the wire saw unit 3 side is formed in the connection bracket 11. That is, connection of the tool changer 7 is performed in the connection bracket 11, and the robot arm 2 and the wire saw unit 3 are brought into contact and engaged with each other. Therefore, even if the wire saw unit 3 rotatably moves, a load applied to the connecting portion of the tool changer 7 becomes small.

(55) In addition, the substrates 17a and 17b of the tool changer 7 are provided with a plurality of connectors facing each other. Among these, connectors 13a and 13b are connectors for supplying power to the wire saw unit 3, and connectors 14a and 14b are connectors for supplying air to nozzles. Simultaneously with the engagement of the male portion 18 and the female portion 19, the opposing connectors 14a and 14b are engaged with each other.

(56) Nozzles 10 are disposed on an upper surface of a main body of the wire saw unit 3, and blow air onto a cut surface of the workpiece to blow off and remove cutting waste. In order to prevent deviation of a range where air is discharged, it is desirable to provide a pair of nozzles substantially symmetrically with a center line of the wire saw unit 3 therebetween. As a preferable disposing position of the nozzles 10, it is desirable that air discharge ports of the nozzles 10 do not project further than the wire 8 suspended in the cutting processing region 20 of the wire saw unit 3 such that the nozzles 10 do not come into contact with the workpiece when cutting the workpiece, and that the nozzles 10 are provided within a range in which the air sufficiently reaches the cut surface of the workpiece, that is, in the vicinity of the tip end of the wire saw unit 3. Further, supply of air to the nozzles 10 is performed by an air supply source (not shown) inside the robot arm 2 discharging air. The air discharged from the air supply source passes through an air supply hose 16 in the robot arm 2, and reaches the nozzles 10 through the air supply hose 16 disposed on the upper part of the main body of the wire saw unit 3 connected to the connector via air supply connectors 14a and 14b of the tool changer 7. In this case, a suitable cooling mechanism may be provided in the wire saw device 1 and air for cooling the cut surface of the workpiece may be discharged. Further, a function to separately collect dust of cutting waste may be additionally provided. For example, a suction source (not shown) is disposed in the wire saw device 1 so that one of the nozzles 10 can suck in the cutting waste, or a suction blower device is combined with the wire saw device 1 separately from the nozzles 10. By doing so, it becomes possible to suppress scattering of cutting waste to the surroundings and to reduce contamination.

(57) With the series of configurations described above, the wire saw device 1 of the present invention can flexibly deal with various processing modes. The wire saw unit 3 is moved to a position of the workpiece 6 held by appropriate means by an operation of the robot arm 2 in a predetermined direction. The wire 8 suspended in the wire saw unit 3 circularly travels in accordance with rotation of the rotary pulleys 5. According to the movement of the robot arm 2, in the example shown in FIG. 4, the cutting processing region 20 of the wire 8 is pressed against the workpiece 6, and in the example shown in FIG. 5, the cutting processing region 20 of the wire 8 is pressed against the workpiece 6, the rotatable wire saw unit 3 is appropriately cut while adjusting a swing angle, and thus the workpiece 6 is cut into a desired shape while removing the cutting waste with air discharged from the nozzles 10.

(58) In the wire saw device 1 of the present invention, the articulated robot arm 2 capable of freely ascending, descending, rotating and moving can freely move, and in conjunction with movement of the rotatable wire saw unit 3, the workpiece can be cut into not only a planar shape but also a curved surface shape. Besides such flexible cutting processing performance, the wire saw device 1 is also excellent in an aspect of cooperativeness with external devices. Support can be received from an external device in the movable range regardless of direction and orientation thereof as long as the external device is in the movable range of the robot arm 2. Therefore, it is unnecessary to add an extra mechanism to the present device, and thus mobility thereof is not degraded. For example, a device capable of detecting a wire diameter of the wire 8 at a high speed is installed within the movable range of the robot arm 2. If the wire 8 is periodically moved to the device by the movement of the robot arm 2, even if the wire saw device 1 itself of the present invention does not include a mechanism for detecting wear of the wire 8, wire replacement can be performed spontaneously before the wire 8 is disconnected by the wear in accordance with detection data of the external device.

(59) Further, by not providing an extra mechanism to the wire saw device 1 of the present invention, the main body of the device is simplified, increase in size is prevented, and an extra space for the installing place becomes unnecessary. For example, two of the present devices are arranged side by side and operated simultaneously, and a dimension detection device of the wire 8 is installed between the two devices. By doing so, it is also possible for two of the present devices to share the one detection device, which increases operation efficiency in a limited installation space.

(60) Next, a second embodiment of the wire saw device shown in FIGS. 7 to 11 will be described. FIG. 7 is a partially broken overall view of the wire saw device 1 of this embodiment.

(61) The main configurations of the robot arm 2 and the tool changer 7 of this embodiment are the same as those of the first embodiment, and therefore detailed description thereof will be omitted. Also in the wire saw unit 3, parts that perform the same actions as those of the first embodiment are denoted by the same reference signs, and description thereof will be omitted.

(62) As shown in FIG. 8, air jetting nozzles 10a and air suction nozzles 10b at both ends of the wire saw unit 3 are provided as pairs adjacent to each other. The air jetting nozzles 10a blow air onto the cut surface of the workpiece to blow off and remove cutting waste. The air suction nozzles 10b suck air to collect the cutting waste. In order to prevent deviation of the range where air is jetted or sucked, for the both nozzles, it is desirable to provide pairs of nozzles substantially symmetrically with a center line of the wire saw unit 3 therebetween. As a preferable arrangement of the nozzles, a configuration is adopted in which air jetting ports and air suction ports of the nozzles are oriented toward the cut surface of the workpiece and the wire 8 of the cutting processing region 20 at a position that does not interfere with cutting of the workpiece in the tip end of the wire saw unit 3.

(63) It is preferable that the entire wire saw unit 3 is covered with a covering of a member (for example, carbon fiber) that is lightweight and excellent in durability. Then, interior of the wire saw unit 3 is pressurized so as to prevent entering of cutting waste. For example, the air discharged from the air supply source (not shown) in the robot arm 2 passes through pressurizing hoses 16c in the robot arm 2, and is supplied to the inside of the wire saw unit 3 through the pressurizing hoses 16c disposed on the upper part of the main body wire saw unit 3 connected to the connector via the air supply connectors 14a and 14b of the tool changer 7, and thus pressurization of the inside of the wire saw unit 3 is achieved. Connection between the wire saw unit 3 and the pressurizing hoses 16c is performed via nipples 21 provided in the wire saw unit 3. There is an entrance/exit of the wire 8 as a relief port for air from the pressurized state of the wire saw unit 3, but it is also possible to provide a relief port for air by appropriately attaching a filter to a part of a cover of the wire saw unit 3.

(64) In this second embodiment, as an example, a mode in which fans 22 are attached to tip ends of rotary shafts of the guide pulleys 4a and 4b extending toward the tip end portion that are disposed at the tip end of the wire saw unit 3 is illustrated. When the wire 8 travels, the guide pulleys 4a and 4b rotate, and the fans 22 also turn together. As a result, an air flow is generated around the wire 8 and plays an auxiliary role in removal of cutting waste, dust collection effect, and cooling effect. In particular, if the purpose is to alleviate the rise in frictional heat of the wire 8 with respect to the workpiece, it is preferable that the fans 22 are arranged as described above. The shape of the fans 22 is not particularly limited as long as the rotation of the guide pulleys 4a and 4b between which the wire 8 is suspended is not hindered and the air flow can be generated.

(65) Regarding the supply of air to the air jetting nozzles 10a, air is discharged from an air supply source (not shown) disposed in the vicinity of the wire saw device 1, and reaches the air jetting nozzle 10a via air supply hoses 16a. The air suction function to the air suction nozzles 10b is achieved via air suction hoses 16b from an air suction source (not shown) also installed externally. In this respect, a compressor may be used as the air supply source, and a ring blower may be used as the air suction source. In addition, it is possible to use air supply and suction sources by adjusting the amount of air by opening/closing a damper using only a ring blower. The supply and suction sources of air and are controlled by an external control device.

(66) FIGS. 11(a) and 11(b) show a mode in which, when the wire 8 travels, an air jetting nozzle 10a is operated among the nozzles provided on the feeding side of the wire 8, and at the same time, an air suction nozzle 10b is operated among the nozzles provided on the recovery side of the wire. Switching of air jetting and suction directions according to the traveling direction of the wire is also performed by the control device described above. By these jetting and suction of air, a flow of air occurs around the traveling wire 8, and a cooling effect is also generated. Furthermore, the fans 22 provided at the tip ends of the rotary shafts of the guide pulleys 4a and 4b extending toward the tip end portion that are disposed at the tip end of the wire saw unit 3 plays an auxiliary role for the effect described above. With the series of configurations described above, the wire saw device 1 of the present invention can flexibly deal with various processing modes.

(67) Next, a third embodiment of the wire saw device shown in FIGS. 12 to 17 will be described. FIG. 12 is a partially broken overall view of the wire saw device 1 of this embodiment.

(68) The main configurations of the robot arm 2 and the tool changer 7 of this third embodiment are the same as those of the first embodiment and the second embodiment, and therefore detailed description thereof will be omitted. Also in the wire saw unit 3, parts that perform the same actions as those of the first embodiment and the second embodiment are denoted by the same reference signs, and description thereof will be omitted.

(69) In FIG. 13, actions of the guide pulleys 4a and 4b, the rotary pulleys 5, the wire 8, and the nozzles 10 are the same as those of the guide pulleys 4a and 4b, the rotary pulleys 5, the wire 8, and the nozzles 10 shown in FIG. 2 of the first embodiment, and thus detailed description thereof will be omitted.

(70) In this embodiment, a load cell 23 is provided on a rotary shaft 24 of the guide pulleys 4a and 4b for deflection control of the wire, and FIG. 16 is an enlarged view of that portion. The load cell 23 is rotatably supported by the rotary shaft 24 of the guide pulley 4a, and the rotary shaft 24 is fixed to the wire saw unit 3 by a bracket 25. The load cell 23 may be provided at such a position as shown in FIG. 16(a) or 16(b) as long as the load cell 23 is rotatably supported by the rotary shaft 24 and provided near the wire 8. In FIG. 16(a), a configuration in which the rotary shaft 24 extends from the inner side of the wire saw unit 3, and the guide pulley 4a is provided at the tip end of the wire saw unit 3 is adopted. In this case, the load cell 23 is rotatably supported by the rotary shaft 24 from the inner side of the wire saw unit 3. In FIG. 16(b), a configuration in which the rotary shaft 24 extends from the outer side of the wire saw unit 3, and the guide pulley 4a is provided at the tip end is adopted. In this case, the load cell 23 is rotatably supported by the rotary shaft 24 from the outer side of the wire saw unit 3.

(71) FIG. 17 complements a method of deflection control of the wire described below.

(72) For example, as a first method (FIG. 17(a)), a load applied to the wire 8 in the case of cutting the workpiece may be detected by a load cell 23 provided on one or both of the guide pulleys 4a and 4b, a speed at which the wire 8 is pressed against the workpiece by movement of the robot arm 2 or the traveling speed of the wire 8 may be adjusted by a drive control device (not shown) to reduce the cutting speed for cutting the workpiece of the wire 8 until the load is eliminated, and thus deflection control of the wire 8 may be performed.

(73) As a second method (FIG. 17(b)), the load cell 23 is provided on any one of the guide pulleys 4a and 4b, and first, an arbitrary pressing force is determined. The wire 8 is pressed against the workpiece by the movement of the robot arm 2 by the drive control device (not shown), and an analog value of the pressing force is registered in the load cell 23. When cutting the workpiece, a deflection amount is calculated from a state of load applied to the load cell 23 based on the value. The speed at which the wire 8 is pressed against the workpiece 6 by the movement of the robot arm 2 or the traveling speed of the wire 8 may be adjusted based on the deflection amount, and thus the deflection control of the wire 8 may be performed.

(74) Furthermore, as a third method (FIG. 17(c)), the deflection of the wire 8 may be controlled by providing the load cell 23 (two component forces load cell) capable of measuring forces in two directions (X-axis direction and Y-axis direction) on any one of the guide pulleys 4a and 4b, and adjusting the speed at which the wire 8 is pressed against the workpiece by movement of the robot arm 2 or the traveling speed of the wire 8 by the drive control device (not shown) while calculating a deflection state by measuring the forces applied in the X-axis direction and the Y-axis direction (tan θ=Y/X) when the wire 8 is pressed against the workpiece 6.

(75) In the case of adjusting the traveling speed of the wire 8 as the method of deflection control described above, for example, control may be performed such that when the amount of occurrence of deflection of the wire 8 is small, the wire 8 is caused to travel slowly, and when the amount of occurrence of deflection of the wire 8 is large, cutting is progressed by increasing the traveling speed of the wire 8.

(76) Next, an embodiment of the present invention as an embodiment of cutting processing according to the type of the workpiece using the wire saw device of the first to third embodiments will be shown with reference to FIGS. 18(a) and 18(b). For example, a method of cutting a honeycomb member that is lightweight, high in strength, and excellent in a shock absorption property will be mentioned.

(77) In the honeycomb member, a large number of through holes are arranged in parallel in a longitudinal direction with cell walls therebetween. Because of the through hole shape, the honeycomb member has air permeability. When cutting a workpiece that is the honeycomb member, a table 26 as shown in FIG. 18(a) is used. The table 26 has suction holes 27, and the workpiece 6 is placed on a holding surface 26a thereof in a vertical direction. Incidentally, a material of the honeycomb member of the workpiece 6 is made of, for example, aramid fiber, aluminum or the like. Further, the workpiece 6 may be formed by sandwiching a honeycomb-shaped member by carbon fiber reinforced resin (CFRP), or may be one of various air-permeable members instead of having a honeycomb shape. The workpiece 6 is formed to be larger than the table 26. The table 26 does not interfere with the wire saw unit 3 at the time of cutting processing when a part to be processed protrudes from the table 26.

(78) After placing the workpiece 6 on the table 26, an upper surface of the table 26 is covered with an air-impermeable member 28. In this case, a nylon sheet, a resin plate, or the like is used as the air-impermeable member 28. When a suction mechanism (not shown) inside the table 26 is operated, the air-impermeable member 28 is sucked via the suction holes 27 of the table 26 and is attracted to the table 26. Since the workpiece 6 has air permeability, the suction force acting on the air-impermeable member 28 covering the upper surface of the workpiece 6 presses the entire workpiece 6 against the table 26. In this manner, the workpiece 6 fixed to the table 26 can be stably cut.

(79) Further, when the cutting processing is progressed, in the case where the workpiece 6 is a honeycomb member, a load is applied to the cell walls having a hollow shape that is unique to the honeycomb member. In the wire saw device 1 according to the first to third embodiments of the present invention, the cutting processing accuracy of the wire 8 is stabilized by the removal of the cutting waste and possibly further the suction and the cooling effect, and thus excessive load is not applied to the workpiece 6 and an effect of not deforming the hollow shape is achieved. Also, generated burr may be sometimes removed by an action of air.

(80) FIGS. 4, 10, and 15 of the first, second, and third embodiments show a mode in which the wire 8 traveling on the front side of the guide pulleys 4a and 4b is pressed against the workpiece 6 to be opposed to a lower surface of the workpiece 6 to cut the workpiece 6. If the cutting processing is progressed in this state, in the case where the workpiece 6 is a honeycomb member, an excessive load is applied to the cell walls having a unique hollow shape, and the hollow shape is deformed. In order to prevent the hollow shape from being deformed, it is preferable to perform the cutting processing while swinging the wire saw unit 3 to a predetermined angle. That is, cutting the workpiece 6 by angling the wire 8 with respect to the workpiece 6 while swinging the wire saw unit 3 in addition to simply pressing to cut leads to a reduction in deflection of the wire 8.

(81) Depending on different cutting processing conditions, the robot arm 2 may be swung without swinging the wire saw unit 3. The wire 8 comes into point contact with the workpiece 6, a pressure is concentrated on the processing point, thus the contact surface of the wire 8 becomes small, and the processing accuracy increases. Further, by performing the swinging cutting processing, occurrence of burrs can be suppressed. Meanwhile, also in the swinging cutting processing described above, the characteristic point contact of the wire 8 with the workpiece becomes difficult when the wire 8 is excessively deflected. Therefore, it is necessary to control the deflection of the wire 8, and thus the technique using the load cell shown in the third embodiment of the present invention is useful.

(82) In the case of swinging the wire saw unit 3, for example, as shown in FIG. 5 of the first embodiment, the guide pulleys 4a and 4b are arranged vertically with respect to the tip end and front surface of the wire saw unit 3, and the drive source (not shown) is provided in the wire saw unit 3. In this way, swinging can be performed with the rotary shaft 15 as a fulcrum, and thus the control can be simplified. A swing angle can be controlled by the drive control device (not shown). In FIG. 5, the tip end of a U-shape of the wire saw unit 3 is vertically swung. Since the guide pulleys 4a and 4b are vertically arranged, a load is applied in the vertical direction of the V groove, and thus the wire is less likely to be disconnected. In contrast, in the case where the wire saw unit 3 is caused to reciprocally swing in a left-right parallel direction with the rotary shaft 15 as a fulcrum, it is preferable that the guide pulleys 4a and 4b are provided horizontally with respect to the tip end and front surface of the wire saw unit 3 such that the load is applied in the vertical direction of the V groove of the guide pulleys 4a and 4b. The direction in which the guide pulleys 4a and 4b are placed can be appropriately adjusted depending on the manner of swinging. In accordance therewith, the arrangement of the rotary pulleys 5 provided in the vicinity of the guide pulleys 4a and 4b may be appropriately adjusted.

(83) Meanwhile, in the case of swinging the robot arm 2, there is no particular limitation as long as a swingable mechanism is adopted. For example, swinging may be realized by providing an actuator in at least one joint among a plurality of joints interconnecting a plurality of links.

(84) As a result, the swing of the wire 8 is generated, a contact length of the wire 8 with the workpiece 6 is shortened, the load on both the workpiece 6 and the wire 8 is reduced, burden on the hollow cell walls of the workpiece 6 is reduced, and the processing accuracy is stabilized.

(85) Next, a processing device 31 according to the present invention will be described. An embodiment will be described below with reference to FIGS. 19 to 21.

(86) As shown in FIG. 19, the processing device 31 of the present invention includes a machine base 32, a movable robot arm 33 erected on the machine base 32, a tool changer 34 provided on an arm tip end shaft 33a of the robot arm 33, processing unit 35 detachably provided via the tool changer 34, and a table 50 for placing and fixing a workpiece W to be processed thereon.

(87) The machine base 32 is fixed to an appropriate floor surface, wall surface, or the like. The robot arm 33 is provided on the machine base 32, and the arm is movably controlled by a control mechanism (not shown). Further, the tip end shaft 33a of the arm of the robot arm 33 can be freely rotated by an appropriate drive source (not shown).

(88) A tool changer 34 is provided at a tip end of the tip end shaft 33a. The tool changer 34 includes, for example, a ball plunger, and the processing unit 35 is detachably supported. As the tool changer 34, appropriate means such as an engageable engaging pin or an electromagnet can be used.

(89) In the present embodiment, a wire saw is used as the processing unit 35. The processing unit 35 includes a U-shaped frame 38, a plurality of guide pulleys 39 accommodated in the frame 38, an endless wire 36 suspended between the guide pulleys 39, and gas jetting nozzles 37 for cooling the wire 36 and blowing off processing waste that are provided in the vicinity of the wire 36.

(90) The guide pulleys 39 are rotatably supported on an inner wall of the frame 38, and at least one guide pulley 39 is provided with an appropriate drive source (not shown). In addition, the wire 36 in a cutting region for processing the workpiece W is provided such that shafts of the guide pulleys 39a on both sides are perpendicular to a processing direction of the workpiece W and resistance at the time of processing the workpiece W is received by grooves of the guide pulleys 39a. Therefore, as the tip end shaft 33a of the robot arm 33 rotates, the wire 36 in the cutting region swings arcuately along the processing direction of the workpiece W. By causing the wire 36 to swing arcuately, the contact between the wire 36 and the workpiece W becomes closer to point contact, the cutting load is reduced, thus the processing speed is improved, shaking of the wire 36 due to an excessive load is reduced, and thus the processing accuracy is improved. Furthermore, discharge of processing waste becomes easier, the processing speed improves, and the processing accuracy is improved as well. Note that the robot arm 33 may be controlled in accordance with a cutting load by providing a load sensor such as a load cell on at least one pulley shaft of the guide pulleys 39a.

(91) In addition, as described above, since the shafts of the guide pulleys 39a on both sides are provided so as to be perpendicular to the processing direction of the workpiece W such that the resistance at the time of processing the workpiece W is received by the grooves of the guide pulleys 39a, processing can be performed independently of a pocket portion of the frame 38 of the processing unit 35. That is, interference of the processing unit 35 with the table and the like can be reduced, and thus the workpiece W can be easily processed into an arbitrary shape.

(92) Although the wire 36 is configured to swing arcuately only by the rotation of the tip end shaft 33a of the robot arm 33 in the present embodiment, the wire 36 may be configured to swing in a predetermined direction by moving the robot arm 33 itself. However, it is preferable that the wire 36 is configured to swing arcuately only by the rotation of the tip end shaft 33a of the robot arm 33 in view of ease of control and narrowing a movable range of the robot arm 33.

(93) In the present embodiment, a fixed abrasive wire which is endless and in which diamond abrasive grains are fixed to a core wire of the wire 36 by electrodeposition, resin, or the like is used as the wire 36. Note that suitable abrasive grains such as silicon carbide, boron, and alumina may be used in accordance with a material to be processed. Further, in the case of using a single long wire instead of an endless type, a supply reel and a recovery reel may be provided, and processing may be performed while supplying the wire from the supply reel. Further, the wire 36 is driven to travel by a drive source (not shown) and provided on the guide pulleys 39, and thus the wire 36 is capable of traveling in one direction or traveling reciprocally. Further, a tension mechanism for applying a predetermined tension to the wire 36 may be provided.

(94) The jetting nozzles 37 are provided in the vicinity of the cutting region of the wire 36 for cutting the workpiece W. Cooling air is blown from an appropriate pump (not shown) to the jetting nozzles 37 and is jetted from tip ends of the jetting nozzles 37. The cooling air may be appropriately cooled by a cooling mechanism in accordance with the material of the workpiece W.

(95) Since the processing is performed while performing cooling with the cooling air as described above, it is possible to perform cutting in a dry environment, and thus the present embodiment can be also preferably applied to the workpiece W that is weak against a processing liquid (for example, one which causes chemical change or one which dissolves in a liquid). In the case of processing the workpiece W to which applying a processing liquid does not cause a problem, a processing liquid can be also used instead of the cooling air.

(96) The table 50 is provided in the vicinity of the processing unit 35 and erected on a base (not shown). A large number of suction holes 51 are bored in the upper surface of the table 50. A suction pump (not shown) is connected to the suction holes 51 so as to generate a negative pressure on a holding surface 50a of the table 50.

(97) In the embodiment of the present invention, a member having air permeability in a holding direction on the table 50 is used as the workpiece W. As the workpiece W, one in which a large number of hexagonal tubular bodies are arranged in a honeycomb shape along the holding direction is used. The workpiece W is used as, for example, a structural member of an aircraft. Since the workpiece W has air permeability, even if an attempt is made to hold the workpiece W on the table 50 as it is, a suction failure occurs and the workpiece W cannot be held. Therefore, in the embodiment of the present invention, the workpiece W is placed on the table 50, and an air-impermeable sheet S is placed over the upper surface of the workpiece W. The air-impermeable sheet S may have a size at least to cover a position facing the suction holes 51 of the table 50. Thereafter, by applying a vacuum pump to the suction holes 51 to generate a negative pressure, the workpiece W is sucked and held on the holding surface 50a of the table 50.

(98) Another embodiment of the processing unit 35 will be described below with reference to FIGS. 22 and 23. The same reference signs are denoted to members common to those described above.

(99) As shown in FIGS. 22 and 23, a band saw is used instead of a wire saw in the processing unit 35 in the present embodiment. Similarly to the case of a wire saw, the processing unit 35 includes a U-shaped frame 38, a plurality of guide pulleys 40 that are accommodated in the frame 38 and are rotatably supported, an endless band saw 41 suspended between the guide pulleys 40, and a cylinder 42 for applying a tension to the band saw 41.

(100) The band saw 41 is formed by fixing diamond abrasive grains by electrodeposition, resin, or the like on a surface of an endless belt made of resin or metal. In addition, at least one of the guide pulleys 40 is provided with a drive source (not shown). By driving the guide pulleys 40, the band saw 41 can travel in one direction or travel reciprocally. Further, in the band saw 41, a processing region to be used can be a front surface of the belt or a side surface of the belt.

(101) Since the jetting nozzles 37 are the same as described above, the description thereof will be omitted.

(102) Next, various embodiments of the processing device 31 will be described below with reference to FIGS. 24 to 38. The same reference signs are given to the common members in the respective embodiments. In addition, the jetting nozzles 37 in the processing unit 35 are omitted in the illustration for the sake of convenience.

(103) FIGS. 24(a) and 24(b) show a first embodiment of a method of holding a workpiece on the table on which the workpiece is placed in the processing device 31. As shown in FIG. 24(a), a large number of suction holes 51 are bored in the holding surface 50a for the workpiece W in the table 50. A honeycomb-shaped workpiece W having air permeability in a direction perpendicular to the holding surface 50a is placed on the holding surface 50a. In addition, the workpiece W may be one in which a honeycomb-shaped member is sandwiched between carbon fiber reinforced resin (hereinafter referred to as CFRP). Further, various air-permeable members which are not in the shape of a honeycomb can be processed. Further, the workpiece W is formed to be larger than the table 50, and thus interference with the processing device 31 at the time of processing becomes less likely to occur in the case where a part to be processed protrudes from the table 50.

(104) Subsequently, the air-impermeable sheet S is placed over an air-permeable portion of the workpiece W so as to cover the air-permeable portion. The air-impermeable sheet S may have a size at least covering only a portion of the table 50 opposed to the suction holes 51.

(105) Next, by generating a negative pressure in the suction holes 51 as shown in FIG. 24(b), the workpiece W is held on the table 50. Subsequently, the processing unit 35 is caused to approach a processed portion of the workpiece W by controlling the robot arm 33. In the present embodiment, a wire saw is used for the processing unit 35.

(106) In the wire saw, the wire 36 is caused to travel in one direction or travel reciprocally by driving the guide pulleys 39 with a drive source (not shown). Further, the tip end shaft 33a of the robot arm 33 is rotationally driven at a predetermined angle by a suitable drive source (not shown) in forward and backward directions, and thus the processing unit 35 is caused to swing arcuately. By pressing the wire 36 of the processing unit 35 against the workpiece W, the workpiece W is cut. At this time, the robot arm 33 is controlled to drive in an appropriate direction so that curved surface processing or the like can be performed freely.

(107) Next, a second embodiment of the processing device of the present invention will be described with reference to FIGS. 25(a), 25(b) and 26.

(108) As shown in FIG. 25(a), in the present embodiment, the holding surface 50a of the table 50 is divided into a plurality of suction regions 52. Further, in the suction regions 52, a plurality of suction holes 51 are bored. Each suction region 52 is connected to a vacuum pump 54 via a switching valve 53 (see FIG. 26). Therefore, negative pressure can be generated independently in each suction region 52.

(109) Further, in the present embodiment, a honeycomb-shaped member in which a part of the workpiece W is cut off is processed. In the honeycomb-shaped member in which a part of the workpiece W is cut off as described above, it is not possible to use the table 50 that generates the negative pressure on the entire surface as in the first embodiment. Therefore, only the suction holes 51 in the suction regions 52 where the workpiece W is present is caused to act by opening and closing the switching valves 53. As a result, the holding force can be maintained even with the irregularly shaped workpiece W. By operating the processing device 31 in this state, the workpiece W is cut into a predetermined shape.

(110) Next, a third embodiment of the processing device of the present invention will be described with reference to FIGS. 27 to 29.

(111) As shown in FIG. 27(a), suction holes 51 are bored not only in the holding surface 50a that is the upper surface of the table 50 but also in side surfaces of the table 50 to form a side surface holding portion 50b. Note that a switching valve may be provided for each suction region similarly to the second embodiment if necessary, and the suction region may be switched.

(112) In the present embodiment, the size of the workpiece W is approximately the same as the size of the table 50. Also, an air-permeable member is used for the workpiece W. The air-impermeable sheet S is formed to be larger than the workpiece W, and is thus formed to have a size reaching side surfaces of the workpiece W and the side surfaces of the table 50.

(113) As shown in FIG. 28(b), the air-impermeable sheet S is placed over the workpiece W, and the air-impermeable sheet S protruding from the workpiece W is bent by the workpiece W to be sucked and held on the side surface holding portion 50b of the table 50.

(114) As shown in FIG. 28(c), a wire saw is used as the processing unit 35 in the present embodiment. The processing unit 35 approaches the workpiece W, and the workpiece W is cut into a predetermined shape by pressing the wire 36 against the workpiece W while causing the wire 36 to travel and swing. At this time, since the air-impermeable sheet S is sucked and held on the side surface holding portion 50b as shown in FIG. 29(d), the air-impermeable sheet S is not entangled or interfered with the wire 36. In the swinging of the wire 36, a swing angle, a swing speed, and whether to swing or not may be appropriately selected in accordance with the material to be cut or the like.

(115) Next, a fourth embodiment of the processing device will be described with reference to FIGS. 30(a) and 30(b). In the present embodiment, a case where a wire saw, for example, is used for the processing unit 35 will be shown.

(116) As shown in FIG. 30(a), a table unit 55 includes a support frame 56 provided with an opening along a horizontal direction on one side, a plurality of movable shafts 57 movably supported at an opening portion of the support frame 56, tables 58 fixed to ends of the movable shafts 57, and the like.

(117) A large number of suction holes 51 are bored in a surface of each of the plurality of tables 58. Further, a vacuum pump (not shown) is connected to a holding surface 58a of each of the tables 58 through a switching valve (not shown) such that a negative pressure acts independently.

(118) The other end side of the movable shafts 57 to which the tables 58 are not connected is movably supported on a rail (not shown), and are each controlled to be independently movable by an appropriate drive source (not shown) and a control device (not shown).

(119) In the present embodiment, a state in which the workpiece W having a width of the tables 58 combined is processed is shown. The workpiece W having a size so as to protrude from the tables 58 in a longitudinal direction is processed.

(120) First, the tables 58 are brought close to and into contact with one another. In the case of processing a workpiece W having a large width, the plurality of tables 58 may be separated as appropriate. In this state, the workpiece W is placed on the tables 58, and when the workpiece W has air permeability, the air-impermeable sheet S is placed over the upper surface of the workpiece W, and a region opposing the suction holes 51 of the tables 58 is covered with the air-impermeable sheet S.

(121) As shown in FIG. 30(b), the processing unit 35 is brought close to the workpiece W, and is caused to act on the part of the workpiece W protruding from the tables 58. As a result, the workpiece W is cut. At this time, since the processing unit 35 acts on the part of the workpiece W protruding from the tables 58, the processing unit 35 and the tables 58 do not interfere with each other. Note that, if necessary, a cut off piece of the workpiece W after cutting may be held by appropriate fixing means.

(122) FIGS. 31(a) and 31(b) show an embodiment in the case of processing an intermediate portion of the workpiece Win a fourth embodiment. In the present embodiment, a state where a wire saw, for example, is used for the processing unit 35 will be shown.

(123) As shown in FIG. 31(a), the movable shafts 57 are driven such that the tables 58 are at predetermined intervals. Subsequently, the workpiece W is placed so as to bridge over the holding surfaces 58a of the tables 58. Next, in the case where the workpiece W has air permeability, the air-impermeable sheet S is placed over the workpiece W, and a region opposing the suction holes 51 of the tables 58 is covered with the air-impermeable sheet S.

(124) As shown in FIG. 31(b), in the present embodiment, processing is performed such that the processing region of the processing unit 35 pass through gaps between the tables 58. Further, in the present embodiment, the workpiece W is cut in an inclined state. Also in this case, since the processing unit 35 passes through the gaps between the tables 58, the processing unit 35 and the tables 58 do not interfere with each other.

(125) Next, a fifth embodiment of the processing device of the present invention will be described with reference to FIGS. 32(a) and 32(b). In the embodiment of the present invention, a case where a wire saw, for example, is used for the processing unit 35 is shown.

(126) As shown in FIG. 32(a), a table unit 60 of the processing device 31 of the present embodiment includes a support base 61, a rail 62 laid on the support base 61, a movable frame 63 that moves along the rail 62, a rotary shaft 65 rotatably supported on the movable frame 63, a table 66 fixed on the rotary shaft 65, and the like.

(127) A slider 64 provided on a lower surface of the movable frame 63 is slidably fitted on the rail 62, and can be moved along the rail 62 by a drive source (not shown). Further, the movable frame 63 is provided with a motor (not shown) and is connected to the rotary shaft 65. Therefore, by driving the motor, the rotary shaft 65 is rotated, and thus the table 66 is freely rotated.

(128) In addition, a plurality of suction holes 51 are provided on the table 66 and connected to a vacuum pump (not shown).

(129) In the case where the workpiece W is placed on the table 66 and the workpiece W is an air-permeable member, the air-impermeable sheet S is placed over the workpiece W similarly to the other embodiments.

(130) As shown in FIG. 32(b), the table 66 is horizontally moved and/or rotated by a control device (not shown), and thus the workpiece W is processed into an arbitrary shape. It should be noted that the present embodiment can be preferably used when it is difficult to move the robot arm 33. In the present embodiment, the processing unit 35 is fixed at a predetermined position, and the workpiece W can be processed into an arbitrary shape by horizontally moving and/or rotating the table 66. Further, by moving the processing unit 35 by moving the robot arm 33 and horizontally moving and/or rotating the table 66, processing into a more complicated shape can be easily performed.

(131) FIGS. 33(a), 34(b) and 34(c) are explanatory diagrams showing a sixth embodiment of the processing device of the present invention. Also in the present embodiment, a case where a wire saw is used for the processing unit 35 is shown.

(132) As shown in FIG. 33(a), a table unit 70 is constituted by a plurality of cylinders 71 arranged on a machine base (not shown), tables 72 fixed to upper ends of cylinder shafts of the cylinders 71, and the like.

(133) The tables 72 are provided with a plurality of suction holes 51 in upper surfaces thereof, an independent suction line is provided for each of the tables 72, and a vacuum pump (not shown) is connected to the suction line. In the present embodiment, when performing processing by the processing device 31, the cylinders 71 are controlled so that upper surfaces of the tables 72 are leveled.

(134) In processing, the workpiece W is first placed on the tables 72. The workpiece W is, for example, a member having air permeability, and an air-impermeable sheet S is placed over a surface of the workpiece W. Subsequently, the workpiece W is sucked and held on the tables 72 by operating the vacuum pump.

(135) As shown in FIG. 34(b), the processing unit 35 is brought close to the workpiece W. In the present embodiment, the wire 36 of the wire saw is positioned near a center of a short side of a rectangular workpiece W. As shown in FIG. 34(c), the tables 72 sequentially descend while releasing the suction, and thus a pocket portion of the frame 38 of the processing unit 35 passes over the tables 72 that have descended. Every time the frame 38 passes over a table 72, the table 72 ascends, and sucks and holds the workpiece W again. Accordingly, it is possible to continuously hold the workpiece W during processing by the processing device 31.

(136) Next, a seventh embodiment of the processing device of the present invention will be described with reference to FIGS. 35(a) and 36(b). Also in the present embodiment, a case where a wire saw is used for the processing unit 35 is shown.

(137) A table unit 80 of the present embodiment includes a support base 81, two movable bases 84 and 84 movable on the support base 81 in a Y direction, a plurality of support frames 86 movable on the movable bases 84 in an X direction, tables 88 provided on the support frames 86, and the like.

(138) Two rails 82 and 82 are laid on an upper surface of the support base 81 along the Y direction. The two movable bases 84 and 84 are arranged in parallel along the X direction on the rails 82 and 82, and sliders 83 and 83 respectively provided on lower surfaces of the movable bases 84 and 84 are respectively fitted on the rails 82 and 82. The movable base 84 is movable in the Y direction by a drive source (not shown).

(139) A rail 85 is laid on the movable base 84 along the X direction. A series of two support frames 86 and 86 are provided on the movable base 84. A slider 87 is provided on a lower surface of the support frame 86 and is fitted on the rail 85. The support frame 86 is movable along the X direction by a drive source (not shown).

(140) The support frame 86 is provided with a cylinder, and a table 88 is fixed above a cylinder shaft. The table 88 can ascend and descend by driving the cylinder. Therefore, the table 88 is movable in X, Y, and Z directions.

(141) As shown in FIG. 36(b), by moving each table 88 in the X and Y directions in accordance with the size of the workpiece W, it is possible to deal with workpieces W of various sizes. In addition, tables 88 suck and hold the workpiece W with appropriate intervals therebetween, and thus the workpiece W can be processed into various shapes without interfering with the processing unit 35.

(142) Next, a processing example in the case of using a band saw as the processing unit 35 of the present invention will be described with reference to FIGS. 37 and 38.

(143) FIG. 37 shows a state in which a corner portion of the workpiece W is polished using the front surface of the belt of the band saw 41 of the processing unit 35. At this time, the processing region of the band saw 41 is pressed against the workpiece W while causing the band saw 41 to travel in one direction or travel reciprocally. Further, by blowing the cooling air by the jetting nozzles 37 (see FIGS. 22 and 23), it is possible to efficiently perform processing with high accuracy.

(144) FIG. 38 shows a state in which the workpiece W is cut using a side surface of the belt of the band saw 41 of the processing unit 35. At this time, the processing region of the band saw 41 is pressed against the workpiece W while causing the band saw 41 to travel in one direction or travel reciprocally. Further, by blowing the cooling air by the jetting nozzles 37, it is possible to efficiently perform processing with high accuracy. Not only the cooling air but also, for example, inert gas such as nitrogen gas or argon from the jetting nozzles 37 can be appropriately selected in accordance with the material of the workpiece W.

(145) Embodiments of the present invention have been described above, but the present invention is not limited to these embodiments and can be appropriately modified within the scope of the invention. For example, not only articulated robots as robot arms but also various industrial robots can be used. The workpiece is not limited to honeycomb members for aircraft, and can be widely applied to carbon fiber reinforced resin (CFRP), various resins, ceramics, various porous bodies, and the like. In addition to wire saws and band saws, various devices such as various cutting tools and polishing whetstones can be used for the processing device.

(146) Next, an eighth embodiment of the processing device of the present invention will be described below with reference to FIGS. 39 to 46.

(147) Details of the processing unit 35 in the processing device 31 of the present invention shown in FIG. 39 are the same as those in FIG. 19, and thus detailed description thereof will be omitted.

(148) A table 90 of this embodiment is provided in the vicinity of the processing unit 35 and is erected on a base (not shown). The table 90 includes an inner table 91 for placing and fixing the workpiece W on an upper surface thereof, and an outer casing 92 which is provided to surround an outer side of the inner table 91 and in which the inner table 91 is fitted.

(149) As shown in FIGS. 40 and 41, the inner table 91 has a plurality of suction holes 93 bored in a placement surface. In addition, the inner table 91 is supported by guide members 96 provided at four corners of the outer casing 92 and urged upward by elastic members 96a such as springs provided on the guide members 96.

(150) An air-impermeable cover 94 is attached along a side surface portion of the inner table 91, and the cover 94 is placed over the outer side of the outer casing 92. Therefore, the inner table 91 and the outer casing 92 form a suction chamber 100 via the cover 94. A suction adapter 95 is provided on the outer casing 92, and suction means such as a blower (not shown) is connected to the suction adapter 95. When suction is performed by the suction means when the suction holes 93 are blocked, negative pressure is generated in the suction chamber 100.

(151) When the suction chamber 100 is at atmospheric pressure or positive pressure, the inner table 91 is positioned at a raised position, and when the suction chamber 100 is depressurized to negative pressure, the inner table 91 descends against the elastic members 96a, and is positioned at a lowered position. Note that stoppers 97 are provided on inner walls of the outer casing 92 such that the inner table 91 stops at the lowered position when descending.

(152) Ascending/descending pins 98 are inserted in the respective suction holes 93, and tip ends of the ascending/descending pins 98 are provided so as to be flush with or slightly lower than the placement surface of the inner table 91 positioned at the raised position. Lower ends of the ascending/descending pins 98 are supported by guide members 99 erected on a bottom surface of the outer casing 92 so as to be capable of freely ascending and descending. Further, elastic members 99a such as springs are provided on the guide members 99, and the elastic members 99a urge the ascending/descending pins 98 upward.

(153) Therefore, by setting the suction chamber 100 to a negative pressure and lowering the inner table 91 to the lowered position, the ascending/descending pins 98 project from the placement surface of the inner table 91. Further, when the suction holes 93 are blocked by the workpiece W, the ascending/descending pins 98 receive resistance, and the elastic members 99a are compressed such that the ascending/descending pins 98 do not project. A projecting length of the ascending/descending pins 98 may be appropriately changed in accordance with a length of the opening of the workpiece W, and is preferably about 20% to 80% of the length of the opening, for example. However, the present invention is not limited to this, and it is also possible to fix the ascending/descending pins 98 without inserting the ascending/descending pins 98 with a balance with a suction holding force.

(154) In embodiments of the present invention, a honeycomb core member used for, for example, aircraft parts or automobile parts is used as the workpiece W.

(155) The honeycomb core member is formed by assembling a large number of hexagonal cells (tubular bodies) 45 in a honeycomb shape (honeycomb arrangement), and has air permeability along an axial direction of the cells 45. The cells 45 are formed of fiber reinforced resin such as aramid resin, a lightweight metal such as aluminum, or the like, and has high strength with respect to weight. Since the honeycomb core member has air permeability in the axial direction of the cells 45, even if an attempt is made to hold the honeycomb core member on the table 90 as it is, a suction failure occurs and the honeycomb core member cannot be held. Therefore, in the embodiment of the present invention, the honeycomb core member is placed on the table 90, and the air-impermeable sheet S is placed over the upper surface of honeycomb core member. Note that the air-impermeable sheet S may have a size at least to cover a position facing the suction holes 93 of the table 90.

(156) Although the honeycomb core member having air permeability is processed as the workpiece W in the present embodiment, air-permeable members other than the honeycomb core member can also be processed. In this case, as in the case of the honeycomb core member, the air-impermeable sheet S may be placed over the member. In addition, the honeycomb core member is not limited to hexagonal cells, and members formed of cells of various shapes such as rectangular and triangular can be also processed. Further, even an air-impermeable member having an opening through which the ascending/descending pins 98 can be inserted on the placement surface side of the workpiece W can be preferably processed. In this case, the workpiece W can be fixed by suction holding and the ascending/descending pins 98 without using the air-impermeable sheet S.

(157) A configuration of the processing device according to an embodiment of the present invention has been described above, and a method of sucking and holding the workpiece W using the processing device of the present invention will be described below with reference to FIGS. 42 to 45.

(158) FIGS. 42(a) and 42(b) are explanatory diagrams showing a state in which the workpiece W (honeycomb core member) is fixed to the table 90.

(159) As shown in FIG. 42(a), the inner table 91 is positioned at the raised position, and the workpiece W is placed on the placement surface of the inner table 91. Next, the air-impermeable sheet S is placed over the workpiece W. The air-impermeable sheet S may have a size large enough to cover the plurality of suction holes 93 of the inner table 91 and corresponding cells 45 of the workpiece W.

(160) As shown in FIG. 42(b), depressurization is performed by suction means (not shown) connected to the suction adapter 95 to generate a negative pressure in the suction chamber 100, and thus the inner table 91 descends. When the inner table 91 abuts the stoppers 97, the descending of the inner table 91 is stopped and the inner table 91 is positioned at the lowered position.

(161) As the inner table 91 descends, the ascending/descending pins 98 project from the placement surface of the inner table 91. At this time, only ascending/descending pins 98 which do not interfere with the cell walls 46 of the workpiece W enter the cells 45 of the workpiece W. The ascending/descending pins 98 that have interfered with the cell walls 46 of the workpiece W do not project from the placement surface of the inner table 91 due to contraction of the elastic members 99a as shown in FIG. 42(b) and FIG. 43. In this manner, since the ascending/descending pins 98 are urged upward by the elastic members 99a such that the ascending/descending pins 98 interfering with the workpiece W do not project, the workpiece W not having an opening can be held by suction, and the workpiece W having an opening can be held by suction and the ascending/descending pins 98. Therefore, various workpieces W can be efficiently held on the table 90 independently of the air permeability and or air impermeability of the workpiece W.

(162) In addition, movement of the workpiece W in a direction perpendicular to the axes of the cells 45 is restricted as a result of the workpiece W being sucked and held on the inner table 91 by a suction force in the axial direction (vertical direction in the figure) of the cells 45 and a plurality of the ascending/descending pins 98 being inserted therein as indicated by arrows shown in FIG. 43. Note that, it is preferable that a tip end shape of the ascending/descending pins 98 is a curved surface or a flat surface so as not to damage the workpiece W even when contacting the cell walls 46 of the workpiece W. Further, it is preferable that the tip ends of the ascending/descending pins 98 are inclined in conical shapes such that the ascending/descending pins 98 smoothly enter the cells 45. Further, it is more preferable that the tip ends of the ascending/descending pins 98 are formed in conical shapes and end portions of the conical shapes are in spherical shapes in view of smoothly inserting the ascending/descending pins into the cells 45. Note that diameters of the ascending/descending pins 98 may be appropriately selected in accordance with the sizes of the cells 45 and may be any diameter as long as the ascending/descending pins 98 can be inserted in the cells 45.

(163) FIGS. 44 and 45 are explanatory diagrams schematically showing a relationship with the ascending/descending pins 98 when the workpiece W is placed on the table 90.

(164) As shown in FIG. 44, in the case where the workpiece W is placed on the table 90, there is a position where a plurality of the ascending/descending pins 98 interfere with the cells of the workpiece W and a position where the ascending/descending pins 98 are inserted in the cells 45 without interference. Since a large number of ascending/descending pins 98 are provided, a random plurality of ascending/descending pins 98 are inserted in the cells 45 of the workpiece W. Note that, the arrangement and diameters of the ascending/descending pins 98 can be appropriately changed in accordance with the shape of the workpiece W to be held. For example, the diameter of the ascending/descending pin 98 is about 2 to 3 mm, but the diameter can be appropriately changed in accordance with the size of the opening of the workpiece W, and any diameter can be preferably used as long as insertion in and pulling out from the opening of the workpiece W can be smoothly performed.

(165) As shown in FIG. 45, the ascending/descending pins 98 inserted in the workpiece W are represented by black dots, and the ascending/descending pins 98 indicated by dotted lines represent ones that interfere with the cell walls 46 of the workpiece W and do not project. Movement of the ascending/descending pins 98 represented by the black dots is restricted by the cell walls 46 indicated by arrows shown in the figure. Therefore, the workpiece W is firmly held on the table 90 due to the holding force by suction and the limitation of lateral displacement by the ascending/descending pins 98.

(166) Further, by releasing the suction and setting the inside of the suction chamber 100 to atmospheric pressure or positive pressure, the inner table 91 is raised to the raised position and the ascending/descending pins 98 are accommodated in the suction holes 93 of the inner table 91, and thus the workpiece W can be easily removed from the table 90.

(167) Next, a processing method using the fixing method of the workpiece W on the table 90 described above will be described with reference to FIG. 46.

(168) As described above, the workpiece W is placed on the placement surface of the table 90 and the air-impermeable sheet S is placed over the workpiece W. The air-impermeable sheet S may be a member of, for example, flexible vinyl or a hard thin plate of, for example, resin.

(169) Next, the inside of the suction chamber 100 of the table 90 is set to negative pressure, and thus the workpiece W is fixed on the table 90. Subsequently, the processing unit 35 (wire saw in the present embodiment) mounted on the robot arm 33 is controlled, and thus the traveling wire 36 of the processing unit 35 is pressed against the workpiece W held on the table 90. At this time, cooling air is jetted from the jetting nozzles 37 to cool the wire 36 and blow off the cutting waste. In addition, the processing unit 35 rotates the tip end shaft 33a of the robot arm 33 forward and backward as necessary, and thus the wire 36 is caused to swing arcuately.

(170) After the workpiece W is cut into a predetermined shape, the workpiece W whose cutting has been completed is detached by releasing the suction of the table 90.

(171) Embodiments of the processing device and the processing method of the workpiece of the present invention have been described above, but the embodiments can be appropriately modified within the scope of the invention.

(172) Although a wire saw is used as the processing unit in the present embodiment, various processing tools such as a band saw and a knife can be also used. Further, the shape of the table 90 may be not only a rectangle but also a circle, a triangle, or another polygon. Further, although the air-impermeable cover 94 is used on the outer side of the inner table 91 in the present embodiment, another sealing means such as a rubber ring may also be used. In the case of using a rubber ring, it is preferable that the inner table 91 and the outer casing 92 move smoothly.

(173) It should be noted that the present invention is not limited to the above-described illustrated examples, and various modifications can be made within the scope of each claim as long as the examples do not deviate from the gist of the present invention. That is, embodiments obtained by combining technical means appropriately modified within the scope indicated by the claims are also included in the technical scope of the present invention.

REFERENCE SIGNS LIST

(174) 1 wire saw device 2 robot arm 3 wire saw unit 4a guide pulley 4b guide pulley 5 rotary pulley 6 workpiece 7 tool changer 8 wire 9 base 10 nozzle 10a air jetting nozzle 10b air suction nozzle 11 connection bracket 12 rotatable body 13a power supply connector 13b power supply connector 14a air supply connector 14b air supply connector 15 rotary shaft 16a air supply hose 16b air suction hose 16c pressurizing hose 17a substrate 17b substrate 18 male portion 19 female portion 20 processed region 21 nipple 22 fan 23 load cell 24 rotary shaft 25 bracket 26 table 26a holding surface 27 suction hole 28 air-impermeable member W workpiece S air-impermeable sheet 31 processing device 32 machine base 33 robot arm 33a tip end shaft 34 tool changer 35 processing unit 36 wire 37 jetting nozzle 38 frame 39 guide pulley 40 guide pulley 41 band saw 42 cylinder 45 cell 46 cell wall 50 table 50a holding surface 50b side surface holding portion 51 suction hole 52 suction region 53 switching valve 54 vacuum pump 55 table unit 56 support frame 57 movable shaft 58 table 58a holding surface 60 table unit 61 support base 62 rail 63 movable frame 64 slider 65 rotary shaft 66 table 70 table unit 71 cylinder 72 table 80 table unit 81 support base 82 rail 83 slider 84 movable base 85 rail 86 support frame 87 slider 88 table 90 table 91 inner table 92 outer casing 93 suction hole 94 cover 95 suction adapter 96 guide member 96a elastic member 97 stopper 98 ascending/descending pin 99 guide member 99a elastic member 100 suction chamber