Apparatus and method for purging gaseous compounds

Abstract

A processing chamber is described having a gas evacuation flow path from the center to the edge of the chamber. Purge gas is introduced at an opening around a support shaft that supports a heater plate. A shaft wall around the opening directs the purge gas along the support shaft to an evacuation plenum. Gas flows from the evacuation plenum through an opening in a second plate near the shaft wall and along the chamber bottom to an opening coupled to a vacuum source. Purge gas is also directed to the slit valve.

Claims

1. An apparatus for processing a substrate, comprising: a chamber body with a side wall and a bottom wall; a heater plate disposed on a support stem extending through the bottom wall; a shaft wall surrounding the support stem, wherein the shaft wall has a first end coupled to the chamber bottom and a second end distal from the first end; a gas distribution showerhead opposite the heater plate; a processing area defined by the heater plate, the gas distribution showerhead, and the side wall; a second plate between the heater plate and the bottom wall, the second plate having an opening proximate to the shaft wall, wherein the opening is disposed between the heater plate and the bottom wall, wherein the second plate is directly attached to the side wall and directly attached to the shaft wall at an attachment location between the first end and the second end so that at least a portion of the shaft wall extends between the attachment location and the second end, and wherein the heater plate, the second plate, the shaft wall, and the sidewall define a precursor gas evacuation plenum which is in fluid communication with the processing area through a gap between the heater plate and the sidewall; a bottom plenum defined by the second plate, the shaft wall, the side wall, and the bottom wall, wherein the bottom plenum is in fluid communication with the precursor gas evacuation plenum through the opening in the second plate; and a pumping port disposed through the bottom wall, wherein the pumping port is located below the second plate and radially inward of the side wall, wherein the pumping port is in fluid communication with the bottom plenum, and wherein the shaft wall and the support stem define a purge gas flow pathway from a first purge gas inlet disposed through the bottom wall into the precursor gas evacuation plenum.

2. The apparatus of claim 1, wherein the pumping port is located near the side wall of the chamber body.

3. The apparatus of claim 1, wherein the gas flow pathway further comprises the opening near the shaft wall.

4. The apparatus of claim 1, further comprising a slit valve opening disposed through the sidewall, the slit valve opening having a second purge gas inlet.

5. The apparatus of claim 4, wherein the slit valve opening is located in the side wall of the chamber below the heater plate when the heater plate is in a processing position.

6. An apparatus for processing a substrate, comprising: a chamber body with a side wall and a bottom wall; a heater plate disposed on a support stem extending through the bottom wall; a shaft wall surrounding the support stem, wherein the shaft wall has a first end coupled to the chamber bottom and a second end distal from the first end; a gas distribution showerhead opposite the heater plate; a processing area defined by the heater plate, the gas distribution showerhead, and the side wall; a second plate between the heater plate and the bottom wall, the second plate having an opening proximate to the shaft wall, wherein the opening is disposed between the heater plate and the bottom wall, wherein the second plate is directly attached to the side wall and coupled to the shaft wall at a coupling location between the first end and the second end thereof so that at least a portion of the shaft wall extends between the coupling location and the second end, and wherein the heater plate, the second plate, the shaft wall, and the sidewall define a precursor gas evacuation plenum which is in fluid communication with the processing area through a gap between the heater plate and the sidewall; a bottom plenum defined by the second plate, the shaft wall, the side wall, and the bottom wall, wherein the bottom plenum is in fluid communication with the precursor gas evacuation plenum through the opening in the second plate; and a pumping port disposed through the bottom wall, wherein the pumping port is located below the second plate and radially inward of the side wall, wherein the pumping port is in fluid communication with the bottom plenum, and wherein the shaft wall and the support stem define a purge gas flow pathway from a first purge gas inlet disposed through the bottom wall directly into the precursor gas evacuation plenum.

7. The apparatus of claim 6, wherein the gap between the heater plate and the side wall forms a precursor gas flow pathway from the processing area to the evacuation plenum.

8. The apparatus of claim 6, wherein the heater plate, the shaft wall, the side wall, and the second plate define a first plenum, wherein the shaft wall, the side wall, the bottom, and the second plate define a second plenum, and wherein the first plenum is in fluid communication with the second plenum through the second opening.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.

(2) FIG. 1 is a schematic cross-sectional illustration of an apparatus according to one embodiment.

(3) FIG. 2 is a schematic illustration of the gas flow within the apparatus of FIG. 1 when introducing purging gas.

(4) FIG. 3 is a schematic illustration of the gas flow within the apparatus of FIG. 1 without the purge gas flow.

(5) While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.