THERMOELECTRIC BODY, THERMOELECTRIC GENERATION ELEMENT, MULTILAYER THERMOELECTRIC BODY, MULTILAYER THERMOELECTRIC GENERATION ELEMENT, THERMOELECTRIC GENERATOR, AND HEAT FLOW SENSOR

Abstract

[Object] To provide a thermoelectric body that can be deposited on any substrate, which is not limited to a single crystal bulk material or an epitaxially grown thin film, and is capable of exhibiting high coercive force and residual magnetization with respect to in-plane magnetization.

[Solving Means] A thermoelectric body that is a magnetic film for use in a thermoelectric generation element utilizing an anomalous Nernst effect, characterized by having an easy axis of magnetization in an in-plane direction and an amorphous structure. Favorably, the thermoelectric body is characterized in that Sm.sub.pCo.sub.100-p (0<p?50) or Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p (0<p?50, 0?q?100) is included.

Claims

1. A thermoelectric body that is a magnetic film for use in a thermoelectric generation element utilizing an anomalous Nernst effect, having an easy axis of magnetization in an in-plane direction and an amorphous structure.

2. The thermoelectric body according to claim 1, wherein Sm.sub.pCo.sub.100-p (0<p?50) is included.

3. The thermoelectric body according to claim 2, wherein in the Sm.sub.pCo.sub.100-p, a relationship of 15?p?35 is satisfied.

4. The thermoelectric body according to claim 1, wherein Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p (0<p?50, 0?q?100) is included.

5. The thermoelectric body according to claim 4, wherein in the Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p, relationships of 15?p?35 and 5?q?45 are satisfied.

6. A thermoelectric generation element, comprising: a thermoelectric body according to claim 1, and a substrate that supports the thermoelectric body.

7. A multilayer thermoelectric body, having a stacked structure comprising: a first magnetic material layer that has an easy axis of magnetization exhibiting large coercive force and a large ratio of residual magnetization to saturation magnetization in an in-plane direction, exhibits a large anomalous Nernst effect, and is formed of a rare earth intermetallic amorphous magnetic alloy, and a second magnetic material layer that exhibits a huge anomalous Nernst effect and is formed of a magnetic material different from the rare earth intermetallic amorphous magnetic alloy material.

8. The multilayer thermoelectric body according to claim 7, wherein the large coercive force is coercive force of 10 mT or more, the large ratio of residual magnetization to saturation magnetization is 0.3 or more, the large anomalous Nernst effect is thermoelectric power of 1 ?V/K or more, and the huge anomalous Nernst effect thermoelectric power of 5 ?V/K or more.

9. A multilayer thermoelectric generation element, comprising: the multilayer thermoelectric body according to claim 7; and a substrate that supports the thermoelectric body.

10. A bendable thermoelectric generator comprising the thermoelectric generation element according to claim 6.

11. A bendable heat flow sensor comprising the thermoelectric generation element according to claim 6.

12. A bendable thermoelectric generator comprising the multilayer thermoelectric generation element according to claim 9.

13. A bendable heat flow sensor comprising the multilayer thermoelectric generation element according to claim 9.

14. The thermoelectric body according to claim 2, wherein in the Sm.sub.pCo.sub.100-p, a relationship of 20?p?30 is satisfied.

15. The thermoelectric body according to claim 4, wherein in the Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p, relationships of 20?p?30 and 10?q?35 are satisfied.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0036] FIGS. 1(a) and 1(b) are configuration diagrams showing a typical anomalous Nernst thermopile structure for thermoelectric conversion that generates an electromotive force in a perpendicular direction with respect to a heat flow direction, showing an embodiment of the present invention.

[0037] FIG. 2A shows a deposition example for examining the optimal composition ratio of a rare earth intermetallic amorphous magnetic alloy showing an embodiment of the present invention, and is a plan view schematically showing a structure of an amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film.

[0038] FIG. 2B shows a deposition example for examining the optimal composition ratio of a rare earth intermetallic amorphous magnetic alloy showing an embodiment of the present invention, and is a cross-sectional view schematically showing the structure of the amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film.

[0039] FIG. 2C is a diagram showing an XRD pattern of the amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film at different p values.

[0040] FIG. 2D shows a cross-sectional bright field (BF)-STEM image and a microbeam electron diffraction pattern of a region where the Sm composition ratio is high on the right side shown by (A) in FIG. 2A.

[0041] FIG. 2E shows a cross-sectional bright field (BF)-STEM image and a microbeam electron diffraction pattern of a region where the Co and Sm composition ratios are roughly equal near the approximate center shown by (B) in FIG. 2A.

[0042] FIG. 2F shows a cross-sectional bright field (BF)-STEM image and an a microbeam electron diffraction pattern of a region where the Co composition ratio is high on the left side shown by (C) in FIG. 2A.

[0043] FIG. 3 is a graph showing the composition dependence of a temperature change per unit current density due to the anomalous Ettingshausen effect (reciprocal phenomenon of the anomalous Nernst effect) in the amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film on an MgO substrate.

[0044] FIG. 4(a) is a schematic cross-sectional view showing a stacked structure for preparing an amorphous Sm.sub.20Co.sub.80 film.

[0045] FIG. 4(b) shows the magnetic field dependence curve (black symbol) of in-plane magnetization of the deposited amorphous Sm.sub.20Co.sub.80 film.

[0046] FIG. 4(c) shows the external magnetic field dependence of the ANE electric field when the heat output is changed.

[0047] FIG. 4(d) shows the temperature gradient dependence of the ANE electric field.

[0048] FIG. 5(a) is a diagram showing a schematic structure of a thermopile for heat flux detection using an amorphous Sm.sub.20Co.sub.80 thin film.

[0049] FIG. 5(b) is a diagram showing a schematic experimental apparatus for heat flux sensing.

[0050] FIG. 5(c) is a diagram showing observation results of the ANE voltage signal using the above experimental configuration of an amorphous Sm.sub.20Co.sub.80 film deposited on a polyethylene naphthalate (PEN) substrate, and the horizontal axis indicates a strength H of the magnetic field.

[0051] FIG. 5(d) is similar to FIG. 5(c), and the horizontal axis indicates heat flow density J.sub.Q in a direction perpendicular to the sample plane.

[0052] FIG. 6(a) is a cross-sectional view schematically showing a structure of an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film.

[0053] FIG. 6(b) is a diagram showing an XRD pattern at different q values in FIG. 6(a).

[0054] FIG. 6(c) shows a cross-sectional bright field (BF)-STEM image and a microbeam electron diffraction pattern for checking the results obtained by XRD.

[0055] FIG. 7 shows the composition dependence of a temperature change per unit current density by the anomalous Ettingshausen effect in an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film on an MgO substrate.

[0056] FIG. 8(a) is a schematic diagram of a process of producing an amorphous Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film.

[0057] FIG. 8(b) shows the magnetic field dependence curve of in-plane magnetization of the deposited an Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film, FIG. 8(c) shows the external magnetic field dependence of the ANE electric field when the heat output is changed, and FIG. 8(d) shows the temperature gradient dependence of the ANE electric field.

[0058] FIGS. 9(a) and 9(b) show a schematic multilayer thermopile structure using a rare earth intermetallic amorphous magnetic alloy and a magnetic material that is different from this and has a huge anomalous Nernst effect, showing a multilayer thermopile structure according to the present invention.

MODE(S) FOR CARRYING OUT THE INVENTION

[0059] Definitions of technical terms used in the present specification are as follows.

[0060] The thermoelectric conversion material is a substance capable of converting heat into electricity, is used in, for example, a power generation module or a temperature control element, and is useful for producing environmentally friendly energy and further increasing the efficiency of energy saving.

[0061] The Nernst effect is a phenomenon reported by E. Nernst et al. in 1886, and is a phenomenon in which when an external magnetic field H is applied to a conductive substance subjected to a temperature gradient v T, an electric field is generated in the cross product direction of H and v T (see Non-Patent Literature 1).

[0062] The anomalous Nernst effect is a phenomenon unique to magnetic materials, and is a phenomenon in which an electric field is generated in the cross-product direction of magnetization M of the magnetic material and the temperature gradient v T without applying an external magnetic field (see Non-Patent Literature 1). Hereinafter, the anomalous Nernst effect will be abbreviated as anomalous Nernst effect (ANE) in some cases.

[0063] A thermopile is a structure in which multiple thermoelectric conversion materials are connected in series or in parallel, and is used to boost the thermoelectromotive force.

First Embodiment

[0064] Embodiments of the present invention will be described below with reference to the drawings.

[0065] FIGS. 1(a) and 1(b) are diagrams describing a typical Nernst thermopile structure for transverse thermoelectric conversion in which input heat flow and an output current are orthogonal to each other. FIG. 1(a) shows a case where the direction of the magnetization M is uniform with respect to the substrate, and FIG. 1(b) shows the case where the direction of magnetization M alternates between rightward and leftward directions between adjacent thermoelectric bodies.

[0066] The thermoelectric body according to the present invention is a magnetic film for use in a thermoelectric generation element utilizing an anomalous Nernst effect. A thermoelectric body 11 according to the present invention is characterized by having an easy axis of magnetization in an in-plane direction and an amorphous structure. By using this, it is possible to obtain a transverse thermoelectric conversion element that is free from an external magnetic field and is capable of generating an electromotive force in the in-plane direction.

[Thermoelectric Generation Element 10]

[0067] FIG. 1(a) is a diagram describing a thermoelectric generation element 10 using a thermoelectric conversion material according to the present invention. The thermoelectric generation element 10 shown in FIG. 1(a) includes a substrate 13, the thermoelectric body 11 and a connector 12 arranged (supported) on this substrate 13, and a connection terminal 14. In FIG. 1(a), the material of the thermoelectric body 11 is indicated as a Material A and the material of the connector 12 is indicated as a Material B.

[0068] The thermoelectric body 11 typically includes a rare earth intermetallic amorphous magnetic alloy film (magnetic film) such as an amorphous Sm.sub.20Co.sub.80 thin film. The rare earth intermetallic amorphous magnetic alloy film has strong magnetic anisotropy in the in-plane direction and has easy axis of magnetization in the in-plane direction. For this reason, the rare earth intermetallic amorphous magnetic alloy film exhibits large coercive force and large residual magnetization with respect to saturation magnetization, and maintains magnetization even if an external magnetic field is applied and then the magnetic field is returned to a zero magnetic field.

[0069] The magnetization direction of the rare earth intermetallic amorphous magnetic alloy faces the direction of the applied external magnetic field and can be controlled in an arbitrary direction, which is suitable for controlling the output of the anomalous Nernst effect. As the material forming the thermoelectric body 11 (Material A), the rare earth intermetallic amorphous magnetic alloy favorably includes Sm.sub.pCo.sub.100-p (0<p?50) or Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p (0<p?50, 0?q?100), more favorably includes Sm.sub.pCo.sub.100-p (15?p?35) or Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p (15?p?50, 5?q?45), and still more favorably includes Sm.sub.pCo.sub.100-p (20?p?30) or Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p (20?p?30, 10?q?35).

[0070] Further, the thermoelectric body 11 may be a uniform alloy film or have, for example, a multilayer structure in which different types of single metal layers are alternately stacked on a nanoscale, and is not limited thereto.

[0071] Note that the thickness of the magnetic film can be, for example, approximately 10 nm to 1 ?m, but is not particularly limited thereto.

[0072] The connector 12 is formed of a non-magnetic material that does not exhibit an anomalous Nernst effect (e.g., copper (Cu), chromium (Cr), gold (Au), silver (Ag), or platinum (Pt)) as the Material B. Alternatively, the connector 12 may be formed of a ferromagnetic material having an anomalous Nernst coefficient of the sign opposite to that of the thermoelectric body 11 (e.g., Fe, NdFeB, MnGa) or a ferromagnetic material Sm.sub.nFe.sub.1-n(0?n?100) having an anomalous Nernst coefficient lower than that of the thermoelectric body 11, as the Material B.

[0073] The substrate 13 is formed of MgO, SiSiO.sub.2, Al.sub.2O.sub.3, AlN, glass, diamond, PEN, a polyimide film (Kapton (registered trademark of DuPont)), a polymer, or the like.

[0074] The connection terminals 14 are formed of the same material as that of the connector 12 (Material B) here, and are provided at both ends of the thermoelectric body 11. Note that the connection terminal 14 may be formed of the same material as that of the thermoelectric body 11 (Material A), and the arrangement of the thermoelectric body 11 and the connector 12 may be exchanged in FIGS. 1(a) and 1(b).

[0075] The thermoelectric body 11 is formed by making a rare earth intermetallic amorphous magnetic alloy film such as an amorphous Sm.sub.20Co.sub.80 thin film deposited on the substrate 13 into a thin wire, and is magnetized in a direction M shown in FIG. 1(a). The thermoelectric body 11 is configured to generate electricity in the direction of the electric field shown in FIG. 1(a) (longitudinal direction of the thermoelectric body 11 and the connector 12) with respect to the temperature difference in the direction (direction J.sub.Q of heat flow shown in FIG. 1(a)) perpendicular to the direction of the magnetization M by the anomalous Nernst effect.

[0076] The connectors 12 are arranged on the surface of the substrate 13 in parallel to the thermoelectric bodies 11, 11, . . . . One connector 12 is arranged between a pair of thermoelectric bodies 11, 11 adjacent to each other, and the connector 12 electrically connects one end side of one thermoelectric body 11 and the other end side of the other thermoelectric body 11. As a result, the thermoelectric bodies 11 are electrically connected in series by the connectors 12.

[0077] As described above, the thermoelectric generation element 10 includes the thermoelectric body 11 that includes a rare earth intermetallic amorphous magnetic alloy film such as an amorphous Sm.sub.20Co.sub.80 thin film. In accordance with the thermoelectric body 11 that includes a rare earth intermetallic amorphous magnetic alloy film such as an amorphous Sm.sub.20Co.sub.80 thin film, it is possible to increase the thermoelectromotive force by increasing the effective length in the electric field direction. Therefore, according to this embodiment, by using such a thermoelectric element 11, it is possible to provide the thermoelectric power generation element 10 in a form that is easy to put into practical use.

[Thermoelectric Generation Element 20]

[0078] FIG. 1(b) is a diagram describing a thermoelectric generation element 20 using a thermoelectric conversion material according to the present invention. The thermoelectric generation element 20 shown in FIG. 1(b) includes a substrate 23, a thermoelectric body 21 and a reverse magnetization connector 22 arranged (supported) on this substrate 23, and a connection terminal 24. In FIG. 1(b), the material of each of the thermoelectric body 21 and the reverse magnetization connector 22 is indicated as the Material A and the material of the connection terminal 24 is indicated as the Material B.

[0079] The thermoelectric body 21 and the reverse magnetization connector 22 each include a rare earth intermetallic amorphous magnetic alloy film such as an amorphous Sm.sub.20Co.sub.80 thin film, similarly to the above thermoelectric body 11.

[0080] Even when the thermoelectric body 21 and the reverse magnetization connector 22 are formed of the same material, by alternately arranging the thermoelectric body 21 and the reverse magnetization connector 22 having the magnetization directions M in opposite directions, the ANE electric field is boosted without canceling each other out.

[0081] The substrate 23 is formed of silicon, magnesium oxide, or the like, similarly to the above-mentioned substrate 13.

[0082] The connection terminal 24 is favorably formed of the same material as that of the connector 12 as the Material B here, and is formed of, for example, a non-magnetic material that does not exhibit an anomalous Nernst effect (e.g., copper (Cu), chromium (Cr), gold (Au), silver (Ag), or platinum (Pt)). The connection terminals 24 are provided at both ends of the thermoelectric body 21. Note that the connection terminal 24 may be formed of the same material (Material A) as those of the thermoelectric body 21 and the reverse magnetization connector 22.

[0083] The reverse magnetization connectors 22 are arranged on the surface of the substrate 23 in parallel to the thermoelectric bodies 21, 21, . . . . One reverse magnetization connector 22 is arranged between a pair of thermoelectric bodies 21, 21 adjacent to each other, and the reverse magnetization connector 22 connects one end side of one thermoelectric body 21 and the other end side of the other thermoelectric body 21. As a result, the thermoelectric bodies 21 are electrically connected in series by the reverse magnetization connectors 22.

[0084] As described above, the thermoelectric generation element 20 includes the thermoelectric body 21 and the reverse magnetization connector 22 that include a rare earth intermetallic amorphous magnetic alloy film such as an amorphous Sm.sub.20Co.sub.80 thin film. In accordance with the thermoelectric body 21 and the reverse magnetization connector 22 that include an amorphous Sm.sub.20Co.sub.80 thin film, it is possible to increase the thermoelectromotive force by increasing the effective length in the electric field direction. Therefore, in accordance with this embodiment, it is possible to provide the thermoelectric generation element 20 that is easy to put to practical use by using such a thermoelectric body 21 and a reverse magnetization connector 22.

[0085] Since the magnetic film formed of a material such as a rare earth intermetallic amorphous magnetic alloy to be used as the thermoelectric bodies 11, 21, the connector 12, and the reverse magnetization connector 22 has a strong easy axis of magnetization in the in-plane direction and exhibits high coercive force and a large ratio of residual magnetization to saturation magnetization even in a thickened or thinned shape, it is possible to exhibit a voltage by a large anomalous Nernst effect even in the zero magnetic field, individually control the magnetization direction of each wire (the thermoelectric bodies 11, 21, the connector 12, the reverse magnetization connector 22), and create a thermopile element using a single material. Since thickening and thinning are possible while maintaining a large ratio of residual magnetization to saturation magnetization, it is possible to increase the thermoelectric output per unit area by reducing the width of thin lines while suppressing the increase in internal electric resistance of the entire thermopile structure by the thickening. The magnetization of each layer can also be controlled by using a local magnetic field or adding a pinning layer such as Cr and using an exchange bias effect.

[0086] Here, in order to examine the optimal composition ratio of Sm.sub.pCo.sub.100-p as a rare earth intermetallic amorphous magnetic alloy, a film containing an amorphous gradient-composition material in which p of Sm.sub.pCo.sub.100-p was changed from 0 to 100 was prepared (hereinafter, referred to simply also as amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film), and the physical properties (structure and thermoelectric performance) thereof were evaluated.

(Amorphous Sm.sub.pCo.sub.100-p (0?p?100) Gradient-Composition Film and its Structural Evaluation)

[0087] FIG. 2A schematically shows a structure of an amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film, and is a plan view. FIG. 2B shows a cross-sectional view thereof. One hundred stacked bodies that are each formed of a gradient-composition material of Sm and Co with a total thickness of 1 nm of Sm and Co per layer are stacked on an MgO substrate, and a thin aluminum film for oxidation prevention is deposited on the top layer thereof. The stacked body having a thickness of 1 nm is a gradient-composition layer in which the Sm composition ratio increases from 0 at % to 100 at % in the x-axis direction in FIG. 2A and FIG. 2B, the right side shown by (A) in FIG. 2A is a region where the Sm composition ratio is high, the approximate center area shown by (B) in FIG. 2A is a region where the Co and Sm composition ratios are roughly equal, and the left side shown by (C) in FIG. 2A is a region where the Co composition ratio is high.

[0088] FIG. 2C shows an XRD pattern of an amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film at different p values. The XRD pattern confirmed that most of the SmCo binary alloy phase was an amorphous phase except for a region where pure Sm and Co are rich.

[0089] FIG. 2D shows a cross-sectional bright field (BF)-STEM image and a microbeam electron diffraction pattern of a region, where the Sm composition ratio is high on the right side shown by (A) in FIG. 2A. The TEM image corroborates the results obtained by XRD. In a region where Sm is rich, a diffraction image showing a crystal structure has been obtained.

[0090] FIG. 2E shows a cross-sectional bright field (BF)-STEM image and a microbeam electron diffraction pattern of a region where the Co and Sm composition ratios are roughly equal near the approximate center shown by (B) in FIG. 2A. It was confirmed that most of the SmCo binary alloy phase was an amorphous phase.

[0091] FIG. 2F shows a cross-sectional bright field (BF)-STEM image and a microbeam electron diffraction pattern of a region where the Co composition ratio is high on the left side shown by (C) in FIG. 2A. In a region where Co is rich, a diffraction image showing a crystal structure has been obtained.

(Amorphous Sm.sub.pCo.sub.100-p (0?p?100) Gradient-Composition Film and its Thermoelectric Effect)

[0092] FIG. 3 is a graph showing the composition dependence of a temperature change per unit charge current density due to the anomalous Ettingshausen effect in the amorphous Sm.sub.pCo.sub.100-p (0?p?100) gradient-composition film on an MgO substrate. In the region of 0 at %<Sm?40 at %, when a current is caused to flow, heat flow was generated in a direction perpendicular to both the current and magnetization, and a temperature change was observed. In particular, in the region of Sm=15 to 35 at %, a large temperature change was observed, and the temperature change is maximum in the range of 20 to 30 at %. The alloy composition range suitable for thermoelectric applications only needs to be 0<p?50, which exhibits at least a large anomalous Nernst effect. However, from the above results, the range of 0<p?40, which indicates the presence of a sufficiently large anomalous Nernst effect, is favorable, the range of 15?p?35 is more favorable, and the range of 20?p?30 is still more favorable, on the basis of the reciprocal relationship between the anomalous Ettingshausen effect and the anomalous Nernst effect

[0093] Next, a thermoelectric body that includes an amorphous Sm.sub.20Co.sub.80 film was prepared as an amorphous Sm.sub.pCo.sub.100-p (0<p?50) film in a favorable composition range, and the thermoelectric performance thereof was evaluated.

(Evaluation of Thermoelectric Performance of Amorphous Sm.sub.20Co.sub.80 Film)

[0094] FIG. 4(a) is a schematic cross-sectional view showing a stacked state of an amorphous Sm.sub.20Co.sub.80 film. One hundred stacked bodies with a total thickness of 1 nm of an Sm layer and a Co layer per layer are stacked on an MgO substrate, and aluminum is deposited on the top layer as a cap layer.

[0095] FIG. 4(b) is a diagram showing the magnetic field dependence curve (black data points) of the in-plane magnetization of the deposited amorphous Sm.sub.20Co.sub.80 film. From FIG. 4(b), it can be seen that the amorphous Sm.sub.20Co.sub.80 film exhibits large coercive force and a large ratio of residual magnetization to saturation magnetization when applying a magnetic field in the plane. Further, the magnetic field dependence curve (white data points) of the in-plane magnetization after the same film is heated to 100? C. for 1 hour at an atmospheric pressure is also shown. The substantially overlapping magnetization process corroborates the stability of these alloys.

[0096] FIG. 4(c) is a diagram showing the external magnetic field dependence of the ANE electric field when the heat output is changed. In the case where heat flow is applied in a direction perpendicular to the plane to magnetize in the in-plane direction as in actual usage, quantification is difficult because there is a temperature gradient in the thickness direction of the film. In FIGS. 4(c) and 4(d), in order to quantitatively measure the temperature gradient, the amorphous Sm.sub.20Co.sub.80 film was magnetized by applying a magnetic field to a direction perpendicular to the film plane, creating a temperature gradient in the in-plane direction. Since the quantification of the in-plane temperature gradient is easy and the electron transport properties of the Sm.sub.20Co.sub.80 film exhibits isotropic properties because it is amorphous, the anomalous Nernst coefficient can be estimated with this arrangement. From FIG. 4(c), it can be seen that the ANE electric field exhibits an odd dependence on the magnetic field and an electric field is saturated when the magnetization of the amorphous Sm.sub.20Co.sub.80 film is saturated. Further, the electric field increased as the heat output was increased (in FIG. 4(c), the lightest colored line shows the result in the case where the heat output is high, and the darkest line shows the result in the case where the heat output is low). These behaviors are consistent with ANE. However, since the magnetic field is applied in a direction perpendicular to the film plane, no coercive force or residual magnetization appears.

[0097] FIG. 4(d) is a diagram showing the temperature gradient dependence of the ANE electric field. The amorphous Sm.sub.20Co.sub.80 film exhibits an anomalous Nernst coefficient of 1.07 V/K at the Sm.sub.20Co.sub.80 composition. As described above, in the thermoelectric body that includes an amorphous Sm.sub.pCo.sub.100-p (0<p?50) film according to the present invention, thermoelectric power by a relatively high anomalous Nernst effect can be achieved.

[0098] Next, thermoelectric performance when the prepared thermoelectric body that includes an amorphous Sm.sub.20Co.sub.80 film was used in a thermopile for heat flux detection (thermoelectric generation element 10) was evaluated.

(Evaluation of Thermoelectric Performance of Thermopile for Heat Flux Detection)

[0099] FIG. 5(a) is a diagram showing a schematic structure of a thermopile for heat flux detection using an amorphous Sm.sub.20Co.sub.80 thin film, and is similar to that shown in FIG. 1(a).

[0100] FIG. 5(b) is a diagram showing a schematic experimental apparatus for heat flux sensing. An amorphous Sm.sub.20Co.sub.80 thin film and a heat flow sensor are stacked between a heat source and a heat sink.

[0101] FIG. 5(c) is a diagram showing observation results of the ANE voltage signal using the above experimental configuration of an amorphous Sm.sub.20Co.sub.80 film deposited on a PEN substrate, and the horizontal axis indicates a strength H of the magnetic field to be applied in the in-plane direction. As shown in FIG. 5(c), a signal exhibiting an odd dependence on the magnetic field, which is a characteristic of the ANE electric field, is obtained, and the results reflect large coercive force and residual magnetization of the amorphous Sm.sub.20Co.sub.80 film because a magnetic field is applied in the in-plane direction. That is, a finite ANE electric field is observed in in the zero magnetic field.

[0102] FIG. 5(d) is a diagram showing observation results of the ANE voltage signal using the above experimental configuration of an amorphous Sm.sub.20Co.sub.80 film deposited on a PEN substrate, and the horizontal axis indicates the heat flow density J.sub.Q in a direction perpendicular to the sample plane. By narrowing the width of the wire of each thermoelectric body and the interval between adjacent wires, it is possible to increase the output voltage. FIG. 5(d) shows that an output voltage VANE increases in proportion to the heat flow density J.sub.Q, and VANE/J.sub.Q represents the sensitivity of the heat flow sensor. As a result, it was found that a heat flow sensor that has favorable sensitivity and operates in a zero magnetic field could be obtained.

[0103] Further, in order to examine the optimal composition ratio of Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p, a film that contains an amorphous gradient-composition material in which p of Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p was 20 and q was changed from 0 to 100 (hereinafter, referred to simply also as an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 gradient-composition film) was prepared as a rare earth intermetallic amorphous magnetic alloy and the physical properties (structure and thermoelectric performance) thereof were evaluated.

(Amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) Gradient-Composition Film and its Structure)

[0104] FIG. 6(a) is a schematic cross-sectional view showing a stacked state of an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film, showing an example of the present invention. One hundred stacked bodies each including an Sm layer and a gradient-composition layer are stacked on an MgO substrate, the Sm layer having a thickness of 0.37 nm, the gradient-composition layer being formed of a gradient-composition material of Fe and Co and having a thickness of 0.63 nm, each stacked body being stacked and having a total thickness of 1 nm, and a thin aluminum film for oxidation prevention is deposited on the top layer thereof. Note that in reality, the composition ratio of the amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film changed from Sm.sub.20Co.sub.80 to Sm.sub.17Fe.sub.83 due to manufacturing errors.

[0105] FIG. 6(b) shows an XRD pattern of an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film at different q values. The XRD pattern at different q values confirmed that all compositions were in an amorphous phase.

[0106] FIG. 6(c) shows a cross-sectional bright field (BF)-STEM image for checking the results obtained by XRD shown in FIG. 6(b).

[0107] FIG. 6(d) shows a microbeam electron diffraction pattern for checking the results obtained by XRD shown in FIG. 6(b).

[0108] It was also confirmed that from FIG. 6(c) and FIG. 6(d), all of the amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film was in an amorphous phase.

(Amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) Gradient-Composition Film and its Thermoelectric Effect)

[0109] FIG. 7 shows the composition dependence of a temperature change per unit current density by the anomalous Ettingshausen effect in an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) gradient-composition film on an MgO substrate. In the region of 0 at %?Fe?90 at %, when a current is caused to flow, heat flow is generated in a direction perpendicular to both the current and magnetization, and a temperature change is observed. Particularly, in the region of Fe=5 to 45 at %, a large temperature change is observed and is maximum in the range of 10 to 35 at %. The alloy composition range suitable for thermoelectric applications only needs to be 0?q?100, which exhibits at least a large anomalous Nernst effect. However, from the above results, the range of 0?q?90, which indicates the presence of a sufficiently large anomalous Nernst effect, is favorable, the range of 5?q?45 is more favorable, and the range of 10?q?35 is still more favorable, on the basis of the reciprocal relationship between the anomalous Ettingshausen effect and the anomalous Nernst effect.

[0110] Next, an amorphous Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film (thermoelectric body) was prepared as an amorphous Sm.sub.20(Fe.sub.qCo.sub.100-q).sub.80 (0?q?100) film included in a favorable composition range, and thermoelectric performance of a thermoelectric generation element using this was evaluated.

(Evaluation of Thermoelectric Performance of Amorphous Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 Film)

[0111] FIG. 8(a) shows a schematic diagram of a process of producing an amorphous Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film.

[0112] FIG. 8(b) shows the magnetic field dependence curve of the in-plane magnetization of the deposited Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film. From FIG. 8(b), it can be seen that the Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film also exhibits large coercive force and a large ratio of residual magnetization to saturation magnetization when applying a magnetic field in the plane.

[0113] FIG. 8(c) shows the external magnetic field dependence of the ANE voltage when the heat output is changed. In the experiment shown in FIGS. 8(c) and 8(d), a magnetic field was applied in a direction perpendicular to the film plane, creating a temperature gradient in the in-plane direction. The reason thereof is similar to that of FIGS. 4(c) and 4(d). From FIG. 8(c), it can be seen that the ANE electric field exhibits an odd dependence on the magnetic field, and an electric field is saturated when the magnetization of the amorphous Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 film is saturated. Further, when the heat output is increased, the electric field increased (In FIG. 8(c), the darkest line shows the result in the case where the heat output is high, and the lightest colored line shows the result in the case where the heat output is low). These behaviors are consistent with ANE. However, since the magnetic field is applied in a direction perpendicular to the film plane, no coercive force or residual magnetization appears.

[0114] FIG. 8(d) shows the temperature gradient dependence of the ANE voltage. The anomalous Nernst coefficient of a thin film having a Sm.sub.20(Fe.sub.23Co.sub.77).sub.80 composition is 1.55 V/K. From the above, it was found that high thermoelectric power could be achieved in a thermoelectric body that includes an amorphous Sm.sub.p(Fe.sub.qCo.sub.100-q).sub.100-p (0<p?50, 0?q?100) film according to the present invention.

Second Embodiment

[0115] FIGS. 9(a) and 9(b) show a schematic multilayer thermopile structure using the present material and another magnetic material having a huge anomalous Nernst effect, showing a second embodiment of the present invention.

[0116] FIG. 9(a) is a diagram describing a multilayer thermoelectric generation element 30 using a thermoelectric conversion material according to the present invention. The multilayer thermoelectric generation element 30 shown in FIG. 9(a) includes a substrate 33, a multilayer thermoelectric body 31 and a connector 32 arranged on this substrate 33, and a connection terminal 34.

[0117] The multilayer thermoelectric body 31 has a stacked structure that includes a first magnetic material layer 311 formed of a rare earth intermetallic amorphous magnetic alloy that is the same material as that of the thermoelectric body 11, and a second magnetic material layer 312 formed of a magnetic material having an anomalous Nernst effect, which is different from the rare earth intermetallic amorphous magnetic alloy forming the thermoelectric body 11.

[0118] The first magnetic material layer 311 exhibits a large anomalous Nernst effect. The anomalous Nernst coefficient (thermoelectric power) of the first magnetic material layer 311 is favorably 1 V/K or more, and the anomalous Nernst coefficient does not necessarily need to be huge. Since the first magnetic material layer 311 has strong magnetic anisotropy in the in-plane direction of the thin film, it has an easy axis of magnetization that exhibits a large coercive force and a large ratio of residual magnetization with respect to the in-plane magnetic field. For this reason, the first magnetic material layer 311 is capable of generating thermoelectromotive force in the zero magnetic field. In such a first magnetic material layer 311, the coercive force is favorably 10 mT or more, and the ratio of residual magnetization is favorably 0.3 or more.

[0119] The second magnetic material layer 312 is formed of a magnetic material that exhibits a huge anomalous Nernst effect and has a huge anomalous Nernst coefficient. The anomalous Nernst coefficient (thermoelectric power) of the second magnetic material layer 312 is larger than the anomalous Nernst coefficient (thermoelectric power) of the first magnetic material layer 311, and is favorably 5 V/K or more, for example. Since the second magnetic material layer 312 has weak magnetic anisotropy in the in-plane direction, the residual magnetization significantly decreases when the second magnetic material layer 312 alone is thickened or thinned. For this reason, the second magnetic material layer 312 does not operate in the zero magnetic field.

[0120] In this regard, when both the first magnetic material layer 311 formed of a rare earth intermetallic amorphous magnetic alloy and the second magnetic material layer 312 are bonded to each other, the second magnetic material layer 312 exhibiting a huge anomalous Nernst coefficient can be magnetized in one direction even in the zero magnetic field due to exchange coupling, it is possible to achieve both the zero magnetic field operation and a large anomalous Nernst coefficient. Examples of the magnetic material of the second magnetic material layer 312 include an FeGa alloy, an FeAl alloy, a Heusler alloy such as Co.sub.2MnGa, and an antiferromagnetic material such as YbMnBi.sub.2.

[0121] Further, the same material as that of the connector 12 is used for the connector 32, but a rare earth intermetallic amorphous magnetic alloy such as Sm.sub.pCo.sub.100-p (0<p?50) may be used. If the magnetization direction of the connector 32 can be directed to be opposed to the magnetization direction of the multilayer thermoelectric body 31, the connector 32 may include the same stacked body as that of the multilayer thermoelectric body 31. Note that the arrangement of the multilayer thermoelectric body 31 and the connector 32 may be exchanged.

[0122] Meanwhile, the same material as that of the substrate 13 is used for the substrate 33.

[0123] The connection terminals 34 are formed of the same material as that of the connector 32 here, and are provided at both ends of the multilayer thermoelectric body 31. The connection terminal 34 may include the same stacked body as that of the multilayer thermoelectric body 31.

[0124] Note that in FIG. 9(a), the material of the first magnetic material layer 311 is indicated as the Material A, the material of the second magnetic material layer 312 is indicated as a Material C, and the material of the connector 32 is indicated as the Material B.

[0125] The multilayer thermoelectric body 31 is formed by making a film formed of a rare earth intermetallic amorphous magnetic alloy such as amorphous Sm.sub.20Co.sub.80 and a magnetic material different from this, which is deposited on the substrate 33, into a thin wire. In this regard, the apparatus shown in FIG. 9(a) is magnetized in the same direction as that shown in FIG. 1(a). In this regard, the multilayer thermoelectric body 31 is configured to generate electricity in the direction of the electric field shown in FIG. 1(a) (longitudinal direction of the multilayer thermoelectric body 31 and the connector 32) with respect to the temperature difference in a direction (direction of heat flow shown in FIG. 1(a)) perpendicular to the direction of magnetization by the anomalous Nernst effect.

[0126] The connectors 32 are arranged on the surface of the substrate 33 in parallel to the multilayer thermoelectric bodies 31, 31, . . . . One connector 32 is arranged between a pair of multilayer thermoelectric bodies 31, 31 adjacent to each other, and the connector 32 electrically connects one end side of one multilayer thermoelectric body 31 and the other end side of the other multilayer thermoelectric body 31. As a result, the multilayer thermoelectric bodies 31 are electrically connected in series by the connectors 32.

[0127] As described above, the multilayer thermoelectric generation element 30 includes the multilayer thermoelectric body 31 formed of a rare earth intermetallic amorphous magnetic alloy such as amorphous Sm.sub.20Co.sub.80 and a magnetic material different from this. In accordance with the multilayer thermoelectric body 31 formed of a rare earth intermetallic amorphous magnetic alloy such as amorphous Sm.sub.20Co.sub.80 and a magnetic material different from this, it is possible to increase the thermoelectromotive force by increasing the effective length in the electric field direction. Therefore, in accordance with this embodiment, it is possible to provide the multilayer thermoelectric generation element 30 that is easy to put to practical use, by using such a multilayer thermoelectric body 31.

[0128] FIG. 9(b) is a diagram describing a multilayer thermoelectric generation element 40 using a thermoelectric conversion material according to the present invention. The multilayer thermoelectric generation element 40 shown in FIG. 9(b) includes a substrate 43, a multilayer thermoelectric body 41 and a connector 42 arranged on this substrate 43, and a connection terminal 44.

[0129] The multilayer thermoelectric body 41 includes a first magnetic material layer 412 formed of the same material as that of the thermoelectric body 11, and a second magnetic material layer 411 formed of a magnetic material that is different from that of the thermoelectric body 11 and has a huge anomalous Nernst effect. In the example shown in FIG. 9(b), the stacking order of the first magnetic material layer 412 and the second magnetic material layer 411 is reversed as compared with the example shown in FIG. 9(a).

[0130] The same material as that of the connector 32 is used for the connector 42. The same material as that of the substrate 13 is used for the substrate 43. The connection terminal 44 are formed of the same material as that of the connector 42 here, and are provided at both ends of the multilayer thermoelectric body 41. The connection terminal 44 may include the same stacked body as that of the multilayer thermoelectric body 41.

[0131] The connectors 42 are arranged on the surface of the substrate 43 in parallel to the multilayer thermoelectric bodies 41, 41, . . . . One connector 42 is arranged between a pair of multilayer thermoelectric bodies 41, 41 adjacent to each other, and the connector 42 electrically connects one end side of one thermoelectric body 41 and the other end side of the other thermoelectric body 41. As a result, the multilayer thermoelectric bodies 41 are electrically connected in series by the connectors 42.

[0132] As described above, the multilayer thermoelectric generation element 40 includes the multilayer thermoelectric body 41 formed of a rare earth intermetallic amorphous magnetic alloy such as amorphous Sm.sub.20Co.sub.80 and a magnetic material different from this. In accordance with the multilayer thermoelectric body 41 formed of amorphous Sm.sub.20Co.sub.80 and a magnetic material different from this, it is possible to increase the thermoelectromotive force by increasing the effective length in the electric field direction. Therefore, in accordance with this embodiment, it is possible to provide the multilayer thermoelectric generation element 40 that is easy to put to practical use, by using such a multilayer thermoelectric body 41.

[0133] Since materials such as the rare earth intermetallic amorphous magnetic alloy used for the multilayer thermoelectric bodies 31, 41 and the connectors 32, 42 and the magnetic material different from this exhibit finite coercive force and residual magnetization, it is possible to individually control the magnetization direction of each wire, and realize a thermopile element formed of a single material. The magnetization of each layer can be controlled by utilizing a local magnetic field or an exchange bias effect by adding a pinning layer such as Cr.

INDUSTRIAL APPLICABILITY

[0134] The thermoelectric body according to the present invention is capable of increasing thermoelectromotive force by connecting magnetic materials exhibiting the anomalous Nernst effect and connectors in a zigzag pattern to increase the effective length in the electric field direction, and is suitable for use in a thermoelectric generation element utilizing the anomalous Nernst effect.

[0135] In accordance with the thermoelectric body according to the present invention, a rare earth intermetallic amorphous magnetic alloy that can be produced on any type of substrate including a flexible substrate using a magnetron sputtering method, a vapor deposition method, or the like at room temperature is used. For this reason, it can be used universally in various types of thermopile structures. The thermoelectric body according to the present invention can be used for realizing a bendable thermoelectric generator and a bendable heat flow sensor.

[0136] The multilayer thermoelectric body according to the present invention is capable of increasing thermoelectromotive force by connecting magnetic materials exhibiting the anomalous Nernst effect and second magnetic material layers in a zigzag pattern to increase the effective length in the electric field direction, and is suitable for use in a thermoelectric generation element and a heat flow sensor utilizing the anomalous Nernst effect.

REFERENCE SIGNS LIST

[0137] 10, 20 thermoelectric generation element [0138] 11, 21 thermoelectric body [0139] 12 connector [0140] 13, 23 substrate [0141] 14, 24 terminal [0142] 22 reverse magnetization connector [0143] 30, 40 multilayer thermoelectric generation element [0144] 31, 41 multilayer thermoelectric body [0145] 311, 412 first magnetic material layer [0146] 312, 411 second magnetic material layer [0147] 32, 42 connector [0148] 33, 43 substrate [0149] 34, 44 terminal