MICROELECTROMECHANICAL SYSTEM AND CONTROL METHOD

Abstract

A microelectromechanical system includes a piezoelectric drive and a control unit coupled to the piezoelectric drive and designed to control the piezoelectric drive based on a change of the admittance and/or the impedance of the piezoelectric drive.

Claims

1-14. (canceled)

15. A microelectromechanical system comprising: a piezoelectric drive; and a control unit coupled to the piezoelectric drive, wherein the control unit is configured to control the piezoelectric drive based on a change of at least one of an admittance and an impedance of the piezoelectric drive.

16. The microelectromechanical system of claim 15, wherein the control unit is configured to provide a control voltage, which includes a DC voltage component and an AC voltage component overlaid on the DC voltage component, to the piezoelectric drive in normal operation.

17. The microelectromechanical system of claim 16, further comprising a current measuring device, wherein: the current measuring device is configured to detect a current flowing through the piezoelectric drive and provide an indication of the detected current to the control unit; and the control unit is configured to, in a calibration phase: exclusively excite the piezoelectric drive using the AC voltage component, whose frequency is outside a resonance frequency of the piezoelectric drive; and determine, based on the indicated detected current, a first impedance of the piezoelectric drive during the excitation.

18. The microelectromechanical system of claim 17, wherein the control unit is configured to, in a normal operation of the microelectromechanical system, determine an amplitude of a vibration of the piezoelectric drive based on the first impedance and the indicated detected current in the normal operation.

19. The microelectromechanical system of claim 18, wherein the control unit includes a controller configured to carry out an amplitude regulation of the piezoelectric drive based on the determined amplitude and a predefined setpoint amplitude.

20. The microelectromechanical system of claim 18, wherein the control unit includes a PI controller configured to carry out an amplitude regulation of the piezoelectric drive based on the determined amplitude and a predefined setpoint amplitude.

21. The microelectromechanical system of claim 17, wherein the control unit is configured to, in a normal operation, determine a phase of a vibration of the piezoelectric drive based on the first impedance and the indicated detected current in the normal operation.

22. The microelectromechanical system of claim 21, wherein the control unit includes a controller configured to carry out a phase regulation of the piezoelectric drive based on the determined phase and a predefined setpoint phase.

23. The microelectromechanical system of claim 21, wherein the control unit includes a PI controller configured to carry out a phase regulation of the piezoelectric drive based on the determined phase and a predefined setpoint phase.

24. A control method for a microelectromechanical system, the method comprising: detecting a change of at least one of an admittance and an impedance of a piezoelectric drive of the microelectromechanical system; and controlling, by a control unit, the piezoelectric drive based on the detected change.

25. The control method of claim 24, further comprising providing a control voltage for the piezoelectric drive in a normal operation, the provided voltage including a DC voltage component and an AC voltage component overlaid on the DC voltage component.

26. The control method of claim 25, further comprising: detecting a current flowing through the piezoelectric drive, wherein, in a calibration phase, the piezoelectric drive is exclusively excited using the AC voltage component, whose frequency is outside a resonance frequency of the piezoelectric drive; and detecting a first impedance of the piezoelectric drive based on the current during the excitation.

27. The control method of claim 26, further comprising: during the controlling, in a normal operation of the microelectromechanical system, determining an amplitude of a vibration of the piezoelectric drive based on the first impedance and an electric current that flows through the piezoelectric drive as detected in the normal operation.

28. The control method of claim 27, wherein the controlling includes regulating an amplitude of the piezoelectric drive based on the determined amplitude and a predefined setpoint amplitude.

29. The control method of claim 28, wherein the regulating is performed using a PI controller.

30. The control method of claim 27, wherein the controlling includes, in the normal operation, determining a phase of the vibration of the piezoelectric drive based on the first impedance and the electric current as detected in the normal operation.

31. The control method of claim 30, wherein the controlling includes regulating a phase of the piezoelectric drive based on the determined phase and a predefined setpoint phase.

32. The control method of claim 31, wherein the regulating is performed using a PI controller.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0033] FIG. 1 is a block diagram of a microelectromechanical system according to an example embodiment of the present invention.

[0034] FIG. 2 is a flowchart of a method according to an example embodiment of the present invention.

[0035] FIG. 3 is a block diagram of a microelectromechanical system according to another example embodiment of the present invention.

[0036] FIG. 4 is a flowchart of a method according to an example embodiment of the present invention.

[0037] FIG. 5 shows diagrams including current measurements to illustrate subject matter of the present invention.

DETAILED DESCRIPTION

[0038] FIG. 1 is a block diagram of a microelectromechanical system 1 according to an example embodiment of the present invention including a piezoelectric drive 2 and a control unit 3, which drives piezoelectric drive 2.

[0039] For this purpose, control unit 3 generates a control voltage 4. Control voltage 4 has a DC voltage component 5 and an AC voltage component 6 overlaid on DC voltage component 5 (see FIG. 3). Piezoelectric drive 2 can thus be more or less pre-tensioned in the positive or negative direction by the DC voltage component. The actual vibration of piezoelectric drive 2 is induced by overlaid DC voltage component 6 of control voltage 4. A permanent polarity reversal of the piezoelectric drive may thus be avoided.

[0040] To generate control voltage 4, control unit 3 detects admittance 10 of piezoelectric drive 2 and sets control voltage 4 based on this variable.

[0041] FIG. 2 is a flowchart of a method according to an example embodiment of the present invention for a microelectromechanical system 1, 11.

[0042] The method begins with detection S1 of a change of admittance 10 and/or the impedance of a piezoelectric drive 2 of microelectromechanical system 1, 11. The amplitude and the phase of the piezoelectric drive can be computed based on the change of admittance 10 and/or the impedance, as described above.

[0043] In a second step S2, piezoelectric drive 2 is therefore controlled based on the detected change of admittance 10 and/or the impedance of piezoelectric drive 2.

[0044] FIG. 3 is a block diagram of another example embodiment of a microelectromechanical system 11 according to the present invention. Microelectromechanical system 11 is based on microelectromechanical system 1 of FIG. 1 and expands it with a current measuring device 7, which detects current 9 flowing through piezoelectric drive 2 and provides it to control unit 13. The detection of admittance 10 and/or the impedance can therefore also be designed as a current measurement.

[0045] Control unit 13 differs from control unit 3 in that it includes a controller 12, which controls a DC voltage source 16 and an AC voltage source 17, whose output voltages are combined to form control voltage 4. In FIG. 3, DC voltage source 16 and an AC voltage source 17 are shown solely by way of example in control unit 13. DC voltage source 16 and AC voltage sources 17 outside control unit 13, which are controlled thereby, are also possible.

[0046] Furthermore, a changeover switch 15 is provided in control unit 13. In an example embodiment, changeover switch 15 can also simply be a software query in an operating program of control unit 13. Changeover switch 15 can switch over control unit 13 in a calibration phase of microelectromechanical system 11 in such a way that it detects and stores impedance 8 of piezoelectric drive 2. Control unit 13 can also extract features of piezoelectric drive 2 from impedance 8, which are required for the later control in normal operation. For example, control unit 13 can determine the above-mentioned capacitance change per length change dCdx based on impedance 8 in the calibration phase.

[0047] If control unit 13 is in normal operation, i.e., outside the calibration phase, current 9 is provided directly to controller 12, which computes the amplitude and the phase of piezoelectric drive 2 therefrom and carries out a corresponding regulation, as described above.

[0048] FIG. 4 is a flowchart of an example embodiment of a method according to the present invention.

[0049] The method branches at the beginning either into normal operation S1, S3, S2 or into calibration phase S5, S4, S6. The calibration phase can be carried out automatically, for example, upon the start of microelectromechanical system 1, 11, if this was not yet the case.

[0050] In the calibration phase, piezoelectric drive 2 is exclusively excited S5 using an AC voltage component 6. In step S4, the current flowing through piezoelectric drive 2 is detected and a first impedance 8 of piezoelectric drive 2 is determined therefrom in step S6. Capacitance change per length change dCdx, which is necessary to later compute the amplitude and phase of the movement of piezoelectric drive 2, may be determined from impedance 8 as described above.

[0051] After completion of the calibration phase, the method is continued at step S1. In step S1, as already explained, the change of admittance 10 and/or impedance 8 of a piezoelectric drive 2 is detected.

[0052] In step S3, a control voltage 4, which includes a DC voltage component 5 and an AC voltage component 6 overlaid on DC voltage component 5, is provided to operate piezoelectric actuator 2.

[0053] Step S2 of FIG. 4 has a series of substeps S7 through S10. Step S7 provides that, based on first impedance 8 and a detected electric current 9 which flows through piezoelectric drive 2, the amplitude of the vibration of piezoelectric drive 2 is determined. Subsequently, based on the determined amplitude and a predefined setpoint amplitude, an amplitude regulation of piezoelectric drive 2 is carried out, S8. For this purpose, for example, DC voltage component 5 and/or AC voltage component 6 of control voltage 4 can be controlled.

[0054] To not only be able to regulate the amplitude, but rather also be able to regulate the phase of piezoelectric drive 2, the phase of the vibration of piezoelectric drive 2 is determined in step S9 based on first impedance 8 and detected electric current 9. This can take place as already described above. Subsequently, based on the determined phase and a predefined setpoint phase, a phase regulation of piezoelectric drive 2 is carried out, S10. For this purpose, for example, DC voltage component 5 and/or AC voltage component 6 of control voltage 4 can also be controlled.

[0055] FIG. 5 shows four diagrams having current measurements to illustrate the subject matter of the invention. In each of the diagrams, the abscissa axes show the frequency in kilohertz. In the upper two diagrams, the ordinate axes each show the current in milliamps and in the lower two diagrams, the ordinate axes each show the current in microamps.

[0056] The two upper diagrams show the current component of the above-mentioned equation (3), which is dependent on the excitation frequency, i.e., the frequency of AC voltage component 6. The lower two diagrams show the current component of above-mentioned equation (3), which is proportional to double the excitation frequency. The left two diagrams each show in-phase component Y of the current and the right two diagrams each show corresponding out-of-phase component X.

[0057] In all four diagrams, the frequency at which microelectromechanical system 1, 11 is in resonant operation is clearly apparent.

[0058] It is clear from these diagrams and the above description how an amplitude and phase regulation of microelectromechanical system 1, 11 can be carried out solely by a current measurement or an impedance or admittance determination.

[0059] Although the present invention was described above on the basis of preferred exemplary embodiments, it is not restricted thereto, but is rather modifiable in a variety of ways. In particular, the present invention can be changed or modified in manifold ways, without departing from the core of the present invention.