CLOSURE OR LOCK DEVICE FOR A VACUUM CHAMBER

Abstract

Closure device or lock device for a vacuum chamber comprising a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate, at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

Claims

1. Closure device or lock device for a vacuum chamber, comprising a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate; at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

2. Closure or lock device according to claim 1, wherein the closure cover has a level top surface and wherein the closure cover can be slid in a direction parallel to a surface normal of the top surface on the frame.

3. Closure or lock device claim 1, wherein the closure cover is connected to the frame via at least one restoring element and wherein the restoring element is configured to exert a restoring force directed against the closing force onto the closure cover.

4. Closure or lock device according to any one of the preceding claim 1, wherein the at least one restoring element has at least one restoring spring.

5. Closure or lock device according to claim 1, wherein the closure cover is arranged via a plurality of restoring elements on the frame which are spaced apart from each other and wherein a sum of all the restoring forces from all of the restoring elements acting on the closure cover is greater than the weight force of the closure cover.

6. Closure or lock device according to claim 1, wherein the frame is arranged between an open position and a contact position on the counter plate or on the vacuum chamber in a swivelling or slidable manner, wherein in the open position, the frame and the closure cover arranged on it release the opening and wherein the frame abuts the counter plate or the vacuum chamber and the closure cover substantially covers the entire opening in the contact position.

7. Closure lock device according to claim 6, wherein the closure cover, where the frame in the contact position can be transferred from a rest position into the sealing closed position relative to the frame by means of the magnet device.

8. Closure or lock device according to claim 1, wherein, in the contact position of the frame, at the sides of the frame and the counter plate facing each other, at least one spacer is arranged, the extension of which, perpendicular to the level of the frame or perpendicular to the level of the counter plate, is at least just as large as the sum of an adjustment range of the closure cover between the rest position and the closed position on the frame plus the thickness of the closure cover.

9. Closure or lock device according to claim 1, wherein the magnet device has at least one electromagnetic actuator arranged on one of the closure cover and counter plate and at least one counterpart arranged on the other closure cover and counter plate, which magnetically interacts with the electromagnetic actuator.

10. Closure or lock device according to claim 1, wherein an elastically compressible seal is arranged on the closure cover or on the counter plate in an intermediate space between the sides of the closure cover and the counter plate facing each other in a closed position of the closure cover, which surrounds the opening.

11. Closure or lock device according to claim 1, furthermore with: at least one distance measuring device to measure a distance between the closure cover and the counter plate, wherein the magnet device can be regulated depending on the distance measured by the distance measuring device between the counter plate and the closure cover.

12. Closure or lock device according to claim 11, furthermore with at least one electronic control circuit, which is coupled with the distance measuring device and with the magnet device and is configured to do at least one of maintaining and setting a predetermined distance between the counter plate and the closure cover.

13. Closure or lock device according to claim 1, wherein a plurality of magnet devices are arranged in a distributed manner, each provided with its own distance measuring device in across the extent of the opening.

14. Closure or lock device according to claim 1, wherein the closure cover can be mounted to a guide in a non-contact manner by means of one or a plurality of magnetic bearings.

15. Closure or lock device according to claim 2, wherein the closure cover is connected to the frame via at least one restoring element and wherein the restoring element is configured to exert a restoring force directed against the closing force onto the closure cover.

16. Closure or lock device according to claim 2, wherein the at least one restoring element has at least one restoring spring.

17. Closure or lock device according to claim 3, wherein the at least one restoring element has at least one restoring spring.

18. Closure or lock device according to claim 2, wherein the closure cover is arranged via a plurality of restoring elements on the frame which are spaced apart from each other and wherein a sum of all the restoring forces from all of the restoring elements acting on the closure cover is greater than the weight force of the closure cover.

19. Closure or lock device according to claim 3, wherein the closure cover is arranged via a plurality of restoring elements on the frame which are spaced apart from each other and wherein a sum of all the restoring forces from all of the restoring elements acting on the closure cover is greater than the weight force of the closure cover.

20. Closure or lock device according to claim 2, wherein the frame is arranged between an open position and a contact position on the counter plate or on the vacuum chamber in a swivelling or slidable manner, wherein in the open position, the frame and the closure cover arranged on it release the opening; and wherein the frame abuts the counter plate or the vacuum chamber and the closure cover substantially covers the entire opening in the contact position.

Description

SHORT DESCRIPTION OF THE FIGURES

[0056] Other objectives, features as well as favourable embodiments of the invention are explained in the following description of the exemplary embodiments taking the drawings into consideration. In the figures:

[0057] FIG. 1 a simplified schematic illustration of the closure or lock device with the frame supporting the closure cover in the contact position and a closure cover in the rest position on the frame;

[0058] FIG. 2 a perspective representation of the closure or lock device with an open closure cover;

[0059] FIG. 3 the closure or lock device in accordance with FIG. 2 in the closed position;

[0060] FIG. 4 another embodiment of the closure or lock device with a slidable frame mounted to the counter plate or the vacuum chamber in the open position;

[0061] FIG. 5 the closure or lock device in accordance with FIG. 4 with the frame and with the closure cover in the closed position;

[0062] FIG. 6 a cross-section of the closure or lock device according to FIG. 2 in the open position;

[0063] FIG. 7 a representation in accordance with FIG. 6, however, with the frame in the contact position and the closure cover in the rest position on the frame; and

[0064] FIG. 8 a representation in accordance with FIG. 7, however, with the closure cover in the closed position with respect to the frame.

DETAILED DESCRIPTION

[0065] The closure and lock device 10 shown as a cross-section in FIG. 1 is provided for arrangement at an opening 14 of a vacuum chamber 12. The closure or lock device 10 has a counter plate 16, which is typically connected to the wall 11 of the vacuum chamber 12 schematically indicated in FIG. 1. The counter plate 16 can be arranged flush with the opening 14 of the vacuum chamber 12 on the wall 11 or as an integral component of the vacuum chamber 12. In this respect, the counter plate 16 can also have an opening 14, which can typically coincide with the opening of the vacuum chamber 12.

[0066] As is evident in the overview in FIG. 2, 3, as well as 6 to 8, the considerably level closure cover 18 in this embodiment is mounted to a frame 15 by means of a plurality of restoring elements 82 in a slidable manner. Thereby, the slidability and the deflection of the restoring elements 82 result from a comparison of FIGS. 7 and 8. The frame 15 itself is, for example, swivel-mounted to the counter plate 16. In FIGS. 2 and 3, a corresponding swivel or hinge axis 80 is shown. In the embodiment in FIGS. 4 and 5, the frame 15 is linearly mounted to the counter plate 16 in a sliding manner.

[0067] The side 19 facing the counter plate 16 of the closure cover, consequently the inner top surface 81 is substantially level. In the rest position U of the closure cover 18 relative to the frame 15 shown as an example in FIG. 7 and in the case of the frame 15 in the contact position K located on the counter plate 16, the top surface 81 is aligned substantially parallel to a level of the seal 22, which is located in the groove 20 on the side 17 of the counter plate 16 facing the closure cover 18.

[0068] In a closed position 28 shown in FIG. 8, the closure cover 18 seals the opening 14 in a gas-tight and vacuum-tight manner. Furthermore, the counter plate 16 and the closure cover 18 are provided with at least one magnet device 30, by means of which a closing force (C) can be exerted on the closure cover 18.

[0069] The counter plate 16 can have a flange-like geometry and, in particular, have a seal 22 on a side 17 facing the closure cover 18 and acting as a contact surface, which extends around the opening 14, typically in the area of an opening boundary of the counter plate 16. In the present disclosure, the seal 22 made of an elastic and deformable material is arranged in a surrounding groove 20 of the counter plate 16. However, it can also be arranged within a corresponding groove of the closure cover 18 or in an intermediate space 25 between the closure cover 18 in the counter plate 16.

[0070] Upon reaching a closed position S shown in FIG. 8, the seal 22 is deformed between the closure cover 18 in the counter plate 16 and squashed in such a way that the opening 14 is sealed in a gas-tight manner.

[0071] By means of the magnet device 30, a closing force (C) on the closure cover 18 can be exerted in the insertion direction or closing direction (z). The closing force (C) is typically aligned perpendicular to the level (x, y) or perpendicular to the contact surface or to the side 17 of the counter plate 16. The closure cover 18 also has a side 19 facing the counter plate 16, which also acts as a contact surface. The sides 17, 19 facing each other in the closed position 28 of the counter plate 18 and the closure cover 19 are aligned parallel to each other, at least in sections.

[0072] The respective contact surfaces of the sides 17, 19 corresponding to each other extend in an x-y plane.

[0073] In the present disclosure, the magnet device 30 has at least an electromagnetic actuator 32 arranged on the counter plate 16 as well as a counterpart 34 arranged on the closure cover 18, which magnetically interacts with the electromagnetic actuator 32. The counterpart 34 is designed as a permanent magnetic or ferromagnetic component, which is either arranged on the closure cover 18 or embedded into the closure cover 18. It is also conceivable that the closure cover 18 itself includes a permanent magnetic or ferromagnetic material, at least in sections, or at least in areas or is completely made of such a material.

[0074] By powering or by applying electrical power to a coil 33 of the electromagnetic actuator 32, an attractive or repulsive force can be exerted on the closure cover 18. By regulating the current strengths or by varying the control signal, the closing force (C) generated by the magnet device 30 can be varied according to the requirements at hand.

[0075] Furthermore, the closure or lock device 10 optionally has a distance measuring device 40, by means of which a distance 41 between the closure cover 18 and the counter plate 16, in particular a distance between the sides 19, 17 of the closure cover 18 and the counter plate 16 facing each other can be measured in a determinable and quantitative manner. In the present disclosure, the distance measuring device 40 has a distance sensor 42 arranged on the counter plate 16, which measures a distance 41 in the closing direction (z) between the counter plate 16 and the closure cover 18. By means of the distance measuring device 40, thereby, the magnet device 30 can be regulated, in particular the closing force (C) generated by it, depending on the distance. In particular, it is provided that, by means of a distance-dependent regulation of the magnet device 30, the distance 41 between the closure cover 18 and the counter plate 16 can be set to a predetermined extent in a precise manner.

[0076] For the distance-dependent regulation, in particular, a control circuit 45 is provided, which couples the magnet device 30 with the distance measuring device 40. The control circuit 45 has a setpoint device 44, which is connected to the distance sensor 42 on a data/technical level. The setpoint device 44 receives the distance signals provided by the distance sensor 42 and compares these with a predefined or a variably specifiable target value from a central control system. The actual and target value are compared with each other in the setpoint device 44.

[0077] A comparison signal resulting from this is then supplied to a controller 46, which generates a control signal provided to control the electromagnetic actuator 32. That control signal that can be generated by the controller 46 can be supplied to the electromagnetic actuator 32 via an amplifier 48.

[0078] The amplified control signal, which can be supplied to the coil 33 of the electromagnetic actuator 32 is calculated and determined in such a way that a predetermined distance 41 between the counter plate 16 and the closure cover 18 is maintained and that, in the case of deviations of a required distance, the force generated by the magnet device 30 can be dynamically adapted to maintain the distance 41.

[0079] All electronic components of the control circuit, meaning the amplifier 48, the controller 46, the setpoint device 44, and, if applicable, also the distance sensor 42 can be accommodated altogether on a single PCB, for example, in the form of an integrated control circuit. The space required for a corresponding electronic unit and the wiring effort associated therewith can be minimized in this respect.

[0080] In addition to the coil 30, to which electrical signals can be applied, the electromagnetic actuator 32 typically has a ferromagnetic core, for example an iron core. The electromagnetic actuator 32 can be designed as an electromagnet, however in a variety of different ways, for example, also as a Lorentz or voice-coil actuator. In contrast to an electromagnet, the latter can generate not only attractive, but also repulsive forces between the electromagnetic actuator and the counterpart.

[0081] The groove 31 intended to hold the electromagnetic actuator 32 or its coil 33 has to be covered and/or sealed facing the counterpart 34 for reasons relating to vacuum suitability. A cover 21 provided for this is typically made of a magnetically permeable material or out of the non-magnetic or only weakly magnetic material. The cover 21 can act almost as a closure for the groove 31 and can be designed as such. By means of separate seals, which are not explicitly shown in the present disclosure, the cover 21 is arranged over or in the groove 31 in a sealing manner. The cover 21 can, in particular, be integrated into the side 17 facing the counterpart 34 in a flush manner, consequently into the contact surface of the counter plate 16 or the closure cover 18. For the sake of clear illustration, the cover 21 in FIG. 1 is only shown on the right side of the counter plate 16. Each of the magnet devices 30 arranged in a distributed manner across the extent of the opening 14 can be regulated according to the distance 41 predominant within their range between the counter plate 16 and the closure cover 18 so that a distance 41 remaining the same or maintained within slight tolerances can be set across the entire outer extent of the opening 14.

[0082] As is furthermore shown in FIG. 1, there is at least one spacer 24 between the side 17, 19 of the counter plate 16 and the closure cover 18 facing each other, which acts as an end-stop for the frame 15.

[0083] In the uncompressed state of the seal 22, as shown in FIG. 7, the seal 22 protrudes from the side 17 of the counter plate 16 at least slightly.

[0084] In the rest position U of the closure cover 18 relative to the frame 15 and the contact position K of the frame 15 relative to the counter plate 16 shown in FIG. 7, there is an air gap between the closure cover 18 and the counter plate 16 or between the closure cover 18 and the seal 22. It can also be provided that the closure cover 18 abuts the seal 22 in that rest position U without being compressed and therefore in a relatively loose manner.

[0085] Upon activating the magnet device 30, the components of which are only schematically shown in FIG. 6-8 in comparison to the illustration according to FIG. 1, the closure cover 18 experiences a shifting movement compressing the seal 22 according to a closing force C acting upon it. The compressed seal 22 is indicated in FIG. 8. In the present embodiment, the closing force C interacts with the weight force G of the closure cover 18. The closing force C acts against a restoring force R of individual restoring elements 82. The restoring elements 82 are, as is evident in FIG. 3, designed as leaf springs 83 in the present disclosure.

[0086] The frame 15 is designed as a circumferential closed frame. It has two longitudinally extending limbs 85, 86, which run substantially in parallel, which are connected to each other at their longitudinal ends via had sections 87, 88 on the end sides. Roughly centred between the head sections 87, 88 a connection bridge 89 is provided, which connects both limbs 85, 86 again on a structural level and, in this respect, increase the stability and the stiffness of the frame 15. The leaf springs 83 are arranged in pairs. Opposite ends of the leaf springs 82 are arranged on the opposite limbs 85, 86. The leaf springs 83 are connected to the closure cover 18 at approximately the centre between the limbs 85, 86. A deflection of the closure cover 18 perpendicular to the level of the frame 15, consequently parallel to the surface normal N of the closure cover 18 by means of the magnet device 30 therefore takes place against the restoring force R generated by the restoring springs 83.

[0087] As is best evident from FIGS. 6 and 7, a plurality of spacers 24 are arranged in a distributed manner across the extent of the opening 14 on the side 17 of the counter plate 16 facing the closure cover 18. The spacers 24 are typically made of plastic, in particular, made of a high temperature resistant plastic, for example, out of polyether ether ketone (PEEK), which has only a slight or unnoticeable tendency to outgas, even under vacuum conditions.

[0088] In the contact position K of the frame 15 on the counter plate 16, the frame 15 rests on the spacers 24 with its underside facing the opening 14. Thereby, the spacers 24 form a type of end-stop for the swivel movement of the frame 15. Corresponding to the arrangement of the spacers 24 on the counter plate 16, on the outer edge of the closure cover 18, corresponding recesses 23 are provided, which are interspersed with spacers 24 when assuming the contact position K. The recesses 23 allow for large-scale covering of the opening 14 by the closure cover 18 without obstructing a frame support arranged as close as possible on the opening 14, or the frame 15 resting on the counter plate 16.

[0089] As is evident from FIG. 7, there is a defined gap between the closure cover 18 in the seal 22 in the contact position of the frame 15 and the rest position U of the closure cover 18 shown there. By activating the magnet device 30, the closure cover 18 is pulled toward the counter plate 16 according to the closing force C. As a result, the restoring elements 82 are deflected toward the counter plate 16. They provide a restoring force R, which permanently acts on the closure cover 18. In the case of decreasing closing force or in the case of deactivating the magnet device 30, the restoring elements 82 and the restoring springs 83 lead the closure cover 18 out of the sealing closed position S, as is shown in FIG. 8, thereby compressing the seal 22, back into the rest position U again.

[0090] Movably mounting the closure cover 18 to the frame 15 is of an advantage in this respect, thereby being able to exert relatively high closing forces onto the closure cover 18. Due to movably mounting the closure cover 18 against the frame 15, those forces are however not transferred to the frame 15. As a consequence, a hinge 90 formed by the swivel access 80 does not have to be able to absorb any of the closing forces generated by the magnet device 30. The mechanical stress on the frame 15 is primarily only present due to the restoring force R which is transferred from the deflected restoring elements 82 between the closure cover 18 in the closed position S onto the frame 15. Once the closure cover 18 is in the closed position S shown in FIG. 8, an increase of the closing force C only has slight or no mechanical effects on the frame 15. In FIGS. 4, and 5, an alternative embodiment of the present invention is shown. In contrast to the embodiment according to FIGS. 2, 3 and 6, the frame 15 there is mounted in a slidable manner against the counter plate 16 and against the vacuum chamber 12. FIG. 4 shows the frame 15 with the closure cover 18 arranged on it in an open position, while FIG. 5 shows the frame 15 and the closure cover 18 in the contact position K or the closed position S. The frame 15 is mounted in a slidable manner along the extended guides 62, 64 above and below, or on the opposite head sections 87, 88.

[0091] The guides 62, 64, which are designed as linear sliding guides, extend parallel to the level of the counter plate 16 of the frame 15 and/or of the closure cover 18. Due to the closing movement of the closure cover 18 the guides 62, 64 are arranged a sufficient distance away from the counter plate 16 in order to allow for a non-contact sliding of the closure cover 18 against the counter plate 16, in particular also against the seal 22 provided on the counter plate 16, which at least slightly protrudes from the level of the counter plate 16.

[0092] The linear guides 62, 64 can be designed as non-contact guides. A plurality of magnetic bearings 60 can be arranged in the area of the guides 62, 64.

[0093] Similar to the magnet devices 30, the individual magnetic bearings 60 can each have a distance sensor (not shown separately in the present disclosure), a control circuit, as well as an electromagnetic actuator 61, which can be controlled via the distance sensor and the control circuit which magnetically interact with a counterpart 63. In this way, a required suspended state of the closure cover 18 on the guides 62, 64 can be achieved. A non-contact mounting of the closure cover 18 on the guides 62, 64 is of a particular advantage in avoiding contamination and wear in the area of the vacuum chamber 12. In this case, a plurality of electromagnetic actuators 61 are provided along the guide 62, which successively engage with the counterparts 63 arranged on the frame 15 in the case of sliding the frame 15.

[0094] Thereby, reverse arrangements are both equally within the scope of the present invention. For example, one or a plurality of actuators 62 can be arranged on the frame 15 or on the closure cover 18 while counterpart 63 magnetically interacting therewith is arranged in a stationary manner on the linear guide 62, 64 designed as a guide rail.

[0095] In FIG. 4, the frame 15 and the closure cover 18 are shown in the open position O, in which the closure cover 18 is outside of the area of the opening 14 of the counter plate 16.

[0096] Thereby, the mounting of the closure cover 18 to the frame 15 has the effect of providing support for a type of parallel displacement of the closure cover 18 from the rest position U into the closed position S so that no relative movements of the closure cover 18 and the seal 22 occur in the plane of the closure cover (X, Y) to the furthest extent possible. Such shear movements could otherwise lead to the wear of the seal 22 and at least minor contamination of ambient environment of vacuum chambers 12.

[0097] The non-contact mounting of the closure cover 18 to the guide 62, 64 takes place via the frame 15 designed in a slide-like way and connected to the closure cover 18. One of the components of the respective magnetic bearing 60, i.e. a component of electromagnetic actuator 61 and a counterpart 63, is arranged on the guide 62, 64 in a stationary manner while the other component of the actuator 61 and the counterpart 63 is arranged on the frame 15. For example, a linear motor 68 is provided to shift the closure cover 18 and the frame 15 along the guide 62, 64, by means of which the closure cover 18 can be moved between the open position 0 and the contact position K against the counter plate 16.