Method for producing wired circuit board

Abstract

The method for producing a wired circuit board including an insulating layer and a conductive pattern provided on the insulating layer includes the steps of the following: a step (1), in which the insulating layer is provided; a step (2), in which a metal thin film is provided on an inclined face of the insulating layer; a step (3), in which a photoresist is provided on the metal thin film; a step (4), in which a photomask is disposed so that in the photoresist, a portion where the conductive pattern is to be provided is shielded from light, and the photoresist is exposed to light through the photomask; a step (5), in which the portion of the photoresist shielded from light by the photomask is removed to expose the metal thin film corresponding to the portion; and a step (6), in which the conductive pattern is provided on the metal thin film exposed from the photoresist. When exposing the photoresist, reflection is caused by the metal thin film positioned on the inclined face to reduce light projected to the portion.

Claims

1. A method for producing a wired circuit board including an insulating layer and a conductive pattern provided on one side face in a thickness direction of the insulating layer, the method including the steps of: a step (1), in which the insulating layer is provided, the insulating layer having the one side face including a flat face and an inclined face, the inclined face being inclined from the flat face toward the one side in the thickness direction, a step (2), in which a metal thin film is provided on the flat face and the inclined face of the insulating layer, a step (3), in which a photoresist is provided on the metal thin film, a step (4), in which a photomask is disposed so that in the photoresist, a to-be-portion where the conductive pattern is to be provided and which is provided on the flat face is shielded from light and a portion other than the to-be-portion in the photoresist is not shielded, wherein the portion other than the to-be-portion in the photoresist includes, when projected in the thickness direction, the inclined face, and the photoresist is exposed to light through the photomask, a step (5), in which the to-be-portion of the photoresist shielded from light by the photomask is removed to expose the metal thin film corresponding to the to-be-portion, and a step (6), in which the conductive pattern is provided on the metal thin film exposed from the photoresist, wherein when exposing the photoresist in the step (4), reflection is caused by the metal thin film positioned above the inclined face to reduce light toward the to-be-portion on the flat face.

2. The method for producing a wired circuit board according to claim 1, wherein a supplementary angle y to an angle formed by the inclined face and the flat face is more than 0 degree and 20 degrees or less.

3. The method for producing a wired circuit board according to claim 1, further including, after the step (1) and before the step (2), a step (7), in which at least the inclined face is roughened.

4. The method for producing a wired circuit board according to claim 1, further including, after the step (2) and before the step (3), a step (8), in which the reflectance of the metal thin film for light having a wavelength of 365 nm is set to 25% or less.

5. The method for producing a wired circuit board according to claim 1, wherein in the step (3), the supplementary angle y (degrees) to the angle formed by the inclined face and the flat face and a thickness x (m) of the photoresist satisfy the following formula:
y3x+70.

6. The method for producing a wired circuit board according to claim 1, wherein in the step (4), a distance between the to-be-portion and the inclined face is in a range of 1 m to 300 m.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1A to FIG. 1D show process diagrams for a method for producing a suspension board with circuits in a first embodiment of the method for producing a wired circuit board of the present invention,

(2) FIG. 1A illustrating a step (i), in which a metal supporting board is prepared,

(3) FIG. 1B illustrating a step (ii), in which an insulating base layer is provided,

(4) FIG. 1C illustrating a step (iii), in which a first conductive pattern is provided, and

(5) FIG. 1D illustrating a step (1), in which an intermediate insulating layer is provided.

(6) FIG. 2E to FIG. 2G show, following FIG. 1D, process diagrams for a method for producing a suspension board with circuits of the first embodiment,

(7) FIG. 2E illustrating a step (2), in which a metal thin film is provided,

(8) FIG. 2F illustrating a step (3), in which a photoresist is provided, and

(9) FIG. 2G illustrating a step (4), in which a photoresist is exposed to light.

(10) FIG. 3H to FIG. 3J show, following FIG. 2G, process diagrams for a method for producing a suspension board with circuits of the first embodiment,

(11) FIG. 3H illustrating a step (4), in which a to-be-portion in the photoresist is developed,

(12) FIG. 3I illustrating a step (5), in which a second conductive pattern is provided, and

(13) FIG. 3J illustrating a step (iv), in which the photoresist is removed.

(14) FIG. 4K and FIG. 4L show, following FIG. 3J, process diagrams for a method for producing a suspension board with circuits of the first embodiment,

(15) FIG. 4K illustrating a step (v), in which the metal thin film corresponding to the photoresist is removed, and

(16) FIG. 4L illustrating a step (vi), in which an insulating cover layer is provided.

(17) FIG. 5 shows a partial plan view (in which the insulating base layer, intermediate insulating layer, and insulating cover layer are omitted) of the suspension board with circuits of the first embodiment.

(18) FIG. 6A and FIG. 6B are enlarged views of the step (4),

(19) FIG. 6A illustrating an enlarged view of FIG. 2G, and

(20) FIG. 6B illustrating an enlarged view of FIG. 3H.

(21) FIG. 7A and FIG. 7B are enlarged cross-sectional views of a suspension board with circuits of Comparative Example 1,

(22) FIG. 7A illustrating an enlarged view corresponding to FIG. 2G, and

(23) FIG. 7B illustrating an enlarged view corresponding to FIG. 3H.

(24) FIG. 8A and FIG. 8B show enlarged cross-sectional views of a modified example of the suspension board with circuits in the first embodiment,

(25) FIG. 8A illustrating an enlarged view corresponding to FIG. 2G, and

(26) FIG. 8B illustrating an enlarged view corresponding to FIG. 3H.

(27) FIG. 9A and FIG. 9B show enlarged cross-sectional views of the suspension board with circuits in a second embodiment,

(28) FIG. 9A illustrating an enlarged view corresponding to FIG. 2G, and

(29) FIG. 9B illustrating an enlarged view corresponding to FIG. 3H.

(30) FIG. 10A to FIG. 10B show enlarged cross-sectional views of the suspension board with circuits in a third embodiment,

(31) FIG. 10A illustrating an enlarged view corresponding to FIG. 2G, and

(32) FIG. 10B illustrating an enlarged view corresponding to FIG. 3H.

(33) FIG. 11 is a graph illustrating relationships between the thickness of the metal oxide layer of the third embodiment and the reflectivity for light.

(34) FIG. 12A and FIG. 12B show enlarged cross-sectional views of the suspension board with circuits of a fourth embodiment,

(35) FIG. 12A illustrating an enlarged view corresponding to FIG. 2G, and

(36) FIG. 12B illustrating an enlarged view corresponding to FIG. 3H.

(37) FIG. 13 is a graph illustrating a formula and region illustrating relationships between the photoresist thickness and the supplementary angle in the fourth embodiment.

DETAILED DESCRIPTION OF THE INVENTION

(38) In FIG. 1A to FIG. 1D, up-down direction in the plane of the paper is referred to as up-down direction (first direction, thickness direction), the upper side in the plane of the sheet is upper side (one side in the first direction, one side in the thickness direction), lower side in the plane of the paper is lower side (the other side in the first direction, the other side in the thickness direction). Left-right direction in the plane of the paper is width direction (surface direction, second direction perpendicular to first direction), left side in the plane of the sheet is one side in the width direction (one side in the second direction), right side in the plane of the sheet is the other side in the width direction (the other side in the second direction). To be specific, the directions are based on the direction arrows shown in the figures.

(39) In the following, a method for producing a suspension board with a circuit of the first embodiment of the method for producing a wired circuit board of the present invention is described.

(40) 1. First Embodiment

(41) The method for producing a suspension board with circuits 1 includes a step (i) (ref: FIG. 1A) in which a metal supporting board 2 is prepared, a step (ii) (ref: FIG. 1B) in which an insulating base layer 3 is provided on the metal supporting board 2, a step (iii) (ref: FIG. 1C) in which a first conductive pattern 4 is provided on the insulating base layer 3, and a step (1) (ref: FIG. 1D) in which an intermediate insulating layer 5 as an example of the insulating layer is provided on the insulating base layer 3 so as to cover the first conductive pattern 4. The method for producing a suspension board with circuits 1 also includes a step (2) (ref: FIG. 2E) in which a metal thin film 6 is provided on at least an inclined face 18 of the intermediate insulating layer 5, a step (3) (ref: FIG. 2F) in which a photoresist 10 is provided on the metal thin film 6, and a step (4) (ref: FIG. 2G and FIG. 6A) in which a photomask 13 is disposed so that a to-be-portion 12 (as an example of a portion where a second conductive pattern 7 as an example of the conductive pattern is to be provided) in the photoresist 10 is shielded from light, and the photoresist 10 is exposed to light through the photomask 13. The method for producing a suspension board with circuits 1 also includes a step (5) (ref: FIG. 3H and FIG. 6B) in which the to-be-portion 12 of the photoresist 10 shielded from light by the photomask 13 is removed and the to-be-portion 12 corresponding to the metal thin film 6 is exposed, and a step (6) (ref: phantom line in FIG. 3I and FIG. 6B) in which the second conductive pattern 7 is provided on the metal thin film 6 exposed from the photoresist 10. The method for producing a suspension board with circuits 1 also includes a step (iv) (ref: FIG. 3J) in which the photoresist 10 is removed, a step (v) (ref: FIG. 4K) in which the metal thin film 6 corresponding to the photoresist 10 is removed, and a step (vi) (ref: FIG. 4 L) in which the insulating cover layer 9 is provided on the intermediate insulating layer 5 so as to cover the second conductive pattern 7.

(42) In the method for producing a suspension board with circuits 1, the step (i) to step (iii), step (1) to step (6), and step (iv) to step (vi) are performed sequentially. In the following, the above-described steps are described in detail.

(43) 1-1. Step (i)

(44) As shown in FIG. 1A, in the step (i), a metal supporting board 2 is prepared.

(45) The metal supporting board 2 has a generally flat plate (sheet) shape extending in front-back direction. The metal supporting board 2 is made of a metal material. Examples of the metal material include stainless steel, 42 alloy, aluminum, copper-beryllium, and phosphor bronze, and preferably, stainless steel is used. The metal supporting board 2 has a thickness of, for example, 10 m or more, preferably 15 m or more, and for example, 35 m or less, preferably 25 m or less.

(46) 1-2. Step (ii)

(47) As shown in FIG. 1B, in the step (ii), the insulating base layer 3 is provided on the metal supporting board 2.

(48) The insulating base layer 3 is disposed on the entire top face of the metal supporting board 2. The insulating base layer 3 has a generally flat plate (sheet) shape extending in front-back direction. The insulating base layer 3 is made of an insulating material. Examples of the insulating material include synthetic resins such as polyimide resin, polyamide-imide resin, acrylic resin, polyether resin, nitrile resin, polyether sulfone resin, polyethylene terephthalate resin, polyethylenenaphthalate resin, and polyvinyl chloride resin, and preferably, polyimide resin is used. The insulating base layer 3 has a thickness of, for example, 1 m or more, preferably 3 m or more, and for example, 25 m or less, preferably 15 m or less.

(49) To provide the insulating base layer 3 on the metal supporting board 2, a known method is used.

(50) 1-3. Step (iii)

(51) As shown in FIG. 1C, in the step (iii), the first conductive pattern 4 is provided on the insulating base layer 3.

(52) The first conductive pattern 4 is disposed on the upper face of the insulating base layer 3.

(53) The first conductive pattern 4 integrally includes, as shown in FIG. 5, a plurality of first wires 21 (only single wire is shown in FIG. 1C and in FIG. 5) extending in front-back direction, and first terminals (not shown) connected to both front and rear end portions of the plurality of first wires 21. As shown in FIG. 1C, the first wire 21 has, for example, when viewed in cross section, a generally rectangular shape having a width direction length (width) that is longer than an up-down direction length (thickness). The first wire 21 has two ridgeline portions 23 at the upper end portions. The first conductive pattern 4 is made of a conductive material. For the conductive material, for example, copper, nickel, gold, solder, or alloys thereof are used, and preferably, copper is used.

(54) The size of the first conductive pattern 4 is set suitably. The first conductive pattern 4 has a thickness T0 of, for example, 1 m or more, preferably 3 m or more, and for example, 20 m or less, preferably 12 m or less. The first wire 21 has a width of, for example, 5 m or more, preferably 8 m or more, and for example, 200 m or less, preferably 100 m or less. The interval between the first wires 21 that are adjacent to each other is, for example, 5 m or more, preferably 8 m or more, and for example, 200 m or less, preferably 100 m or less.

(55) To provide the first conductive pattern 4 on the insulating base layer 3, a known method is used.

(56) 1-4. Step (1)

(57) As shown in FIG. 1D, in the step (1), the intermediate insulating layer 5 is provided on the insulating base layer 3 so as to cover the first conductive pattern 4.

(58) The intermediate insulating layer 5 covers the first wire 21, and has a pattern that allows the first terminal, which is not shown, to expose. The intermediate insulating layer 5 is made of the insulating material that is the same as that of the insulating base layer 3.

(59) The intermediate insulating layer 5 has, as shown in FIG. 6A, a top face including a flat face 17 and an inclined face 18. The flat face 17 is a face that is parallel to the surface direction (direction along the surface of the insulating base layer 3), and is a face that faces the top face of the insulating base layer 3 exposed from the first conductive pattern 4 in the thickness direction.

(60) Meanwhile, the inclined face 18 is a top face corresponding to the first wire 21 and continued from the flat face 17, and is a face that is inclined relative to the surface direction. To be specific, the inclined face 18 is a face that corresponds to the two ridgeline portions 23 of the first wire 21, and that inclines (swells) upward from the flat face 17.

(61) The supplementary angle y to angle a formed with the inclined face 18 and the flat face 17, that is, the gradient of the inclined face 18 relative to the flat face 17 is, more than 0 degree, and furthermore, 5 degrees or more. The supplementary angle y is, for example, 20 degrees or less, preferably less than 20 degrees, more preferably 15 degrees or less, further preferably 12 degrees or less.

(62) The angle is, when the inclined face 18 is curved, an angle formed with the flat face 17 and the face of the portion of the inclined face 18 rising from the flat face 17.

(63) When the supplementary angle y is below the above-described upper limit, light projected to the to-be-portion 12 can be reliably reduced in the step (4) (ref: FIG. 2G and FIG. 6A) described later.

(64) The thickness T1 of the intermediate insulating layer 5 is a distance between the top face of the insulating base layer 3 and the top face of the intermediate insulating layer 5, and for example, more than 6 m, preferably 9 m or more, more preferably 12 m or more, and 20 m or less. In the intermediate insulating layer 5, the thickness T2 of the portion above the first wire 21 is a distance between the top face of the first wire 21 and the top face of the intermediate insulating layer 5, and for example, more than 5 m, preferably 8 m or more, more preferably 10 m or more, and 15 m or less.

(65) The ratio of the thickness T1 of the intermediate insulating layer 5 relative to the thickness T0 of the first conductive pattern 4 (T1/T0) is, for example, 1.0 or more, preferably 1.2 or more, more preferably 1.5 or more, more preferably 1.6 or more, and 5 or less.

(66) When the ratio (T1/T0) is the above-described lower limit or more, the above-described supplementary angle y can be made reliably below the above-described upper limit.

(67) To provide the intermediate insulating layer 5 on the insulating base layer 3, for example, varnish of the insulating material of the photosensitive is applied to the top face of the insulating base layer 3, exposed to light and developed, and thereafter, as necessary, heated. Alternatively, an intermediate insulating layer 5 preformed into a pattern which allows a first terminal, which is not shown, to be exposed is allowed to adhere onto the insulating base layer 3 with an adhesive, which is not shown, interposed therebetween.

(68) 1-5. Step (2)

(69) As shown in FIG. 2E, in the step (2), the metal thin film 6 is provided on at least the inclined face 17 of the intermediate insulating layer 5.

(70) The metal thin film 6 can serve as a seed film for the additive method in the step (6) (described later, ref: FIG. 3I). The metal thin film 6 is a layer that can be integrated with the second conductive pattern 7 when the second conductive pattern 7 is produced by the additive method.

(71) The metal thin film 6 is provided, for example, on the entire top face of the intermediate insulating layer 5 (including the flat face 17 and the inclined face 18). The metal thin film 6 is made of a metal material. Examples of the metal material include copper, chromium, nickel, and alloys thereof, and preferably, copper and chromium are used. The metal thin film 6 can be made of a single layer or multiple layers (not shown in FIG. 2E). Preferably, the metal thin film 6 is made of two layers of a first thin film (to be specific, chromium thin film) and a second thin film (copper thin film) provided thereon.

(72) The metal thin film 6 is in conformity with the top face of the intermediate insulating layer 5. Therefore, in the metal thin film 6, the top face of a portion corresponding to the flat face 17 is parallel to the flat face 17 of the intermediate insulating layer 5, that is, along the surface direction. Also, in the metal thin film 6, the top face of a portion corresponding to the inclined face 18 is parallel to the inclined face 18 of the intermediate insulating layer 5, that is, is inclined relative to the surface direction.

(73) The metal thin film 6 has a thickness of, for example, 50 nm or more, preferably 100 nm or more, and for example, 300 nm or less, preferably 200 nm or less. When the metal thin film 6 is made of two layers of the first thin film and the second thin film, the first thin film has a thickness of, for example, 10 or more and 60 nm or less, and the second thin film has a thickness of, for example, 50 nm or more and 200 nm or less.

(74) To provide the metal thin film 6 on the intermediate insulating layer 5, for example, sputtering method, or plating method is used, and preferably, sputtering method is used.

(75) 1-6. Step (3)

(76) As shown in FIG. 2F, in the step (3), the photoresist 10 is provided on the metal thin film 6.

(77) Examples of the photoresist 10 include negative or positive photoresist, and preferably, a negative photoresist is used. Examples of the photoresist 10 also include a dry film photoresist (DFR).

(78) The photoresist 10 allows the light in the step (4) (ref: FIG. 2G) (e.g., ultraviolet ray, etc.) to partially pass through. To be specific, the photoresist 10 has a transmissivity for ultraviolet ray of, for example, 10% or more, preferably 20% or more, and for example, 60% or less, preferably 50% or less.

(79) The above-described photoresist 10 is disposed on the metal thin film 6.

(80) At that time, the dry film photoresist is pressed (pushed against), for example, by using a flat plate. Therefore, the photoresist 10 has a flat top face.

(81) The thickness x of the photoresist 10 is not particularly limited, and for example, the thickness x of the photoresist 10 is 10 m or more, and for example, 50 m or less, preferably 30 m or less.

(82) 1-7. Step (4)

(83) As shown in FIG. 2G and FIG. 6A, in the step (4), the photomask 13 is disposed so that the to-be-portion 12 of the photoresist 10 is shielded from light, and the photoresist 10 is exposed to light through the photomask 13.

(84) The to-be-portion 12 is a portion that is to be shielded from light in the step (4). The to-be-portion 12 is, as shown in FIG. 3H and FIG. 6B, a portion to be removed in the step (5). Furthermore, the to-be-portion 12 is also a portion, as shown in FIG. 3I and FIG. 6B in the phantom line, where the second conductive pattern 7 should be provided (charged with the second conductive pattern 7) in the opening 16 (described later) of the photoresist 10 in the step (6).

(85) The to-be-portion 12 is included in the flat face 17 when projected in the thickness direction. Meanwhile, the portion other than the to-be-portion 12 in the photoresist 10 includes, when projected in the thickness direction, the inclined face 18. The to-be-portion 12 includes a portion that is not matching the first conductive pattern 4 when projected in the thickness direction, and the portion is displaced from the first conductive pattern 4 by (interval in left-right direction is), for example, 1 m or more, preferably 5 m or more, and for example, 300 m or less, preferably 100 m or less.

(86) The photomask 13 has a translucent portion 14 that allows light from above to pass through below and a light shield portion 15 that allows light from above to be shielded to below.

(87) In the step (4), the photomask 13 is disposed so that the light shield portion 15 faces the to-be-portion 12 and the translucent portion 14 faces the portion other than the to-be-portion 12 in the photoresist 10. The light shield portion 15 is included in the flat face 17 when projected in the thickness direction. The translucent portion 14 includes the inclined face 18 when projected in the thickness direction.

(88) The photomask 13 is disposed above the photoresist 10 to face the photoresist 10 in spaced-apart relation. Alternatively, although not shown in FIG. 2G and FIG. 6A, the photomask 13 can be made to contact the top face of the photoresist 10.

(89) In this manner, the photomask 13 is disposed so that the to-be-portion 12 in the photoresist 10 is shielded from light. Furthermore, the photomask 13 is disposed so that the portion other than the to-be-portion 12 in the photoresist 10 is not shielded from light.

(90) Then, in the step (4), the photoresist 10 is exposed to light through the photomask 13.

(91) To expose the photoresist 10 to light, light is applied to the photomask 13 from the light source disposed above the photomask 13. The wavelength of the light is, for example, 100 nm or more, preferably 350 nm or more, and for example, 800 nm or less, preferably 450 nm or less. The application amount (exposure) is, for example, 100 mJ/cm.sup.2 or more, and 800mJ/cm.sup.2 or less.

(92) [1] Then, light A applied to the light shield portion 15 is shielded from light by the light shield portion 15, and does not reach the to-be-portion 12.

(93) [2] Meanwhile, light B applied to the translucent portion 14 facing the flat face 17 in the thickness direction passes through the translucent portion 14 downward, reaches the top face of the photoresist 10, and then enters into the photoresist 10. Then, a portion of the light B passes through the photoresist 10 downward, and reflects at the top face of the metal thin film 6. That is, reflected light B is produced. At that time, the reflected light B aims upward, and therefore passes through the photoresist 10 upward.

(94) [3] Meanwhile, the light C applied to the translucent portion 14 facing the inclined face 18 in the thickness direction passes through the translucent portion 14 downward, reaches the top face of the photoresist 10, and then enters into the photoresist 10. Then, a portion of the light C passes through the photoresist 10 downward, and is reflected at the top face of the metal thin film 6. That is, reflected light C is produced. At that time, the reflected light C aims obliquely one side in the width direction. The angle of the reflected light C corresponds to the above-described supplementary angle y, and therefore the angle 1 formed by the incident light C and the reflected light C can be made small. Therefore, the reflected light C is suppressed from aiming toward the to-be-portion 12, and most of the reflected light C substantially aims upward. Therefore, the reflected light C passes through the portion other than the to-be-portion 12 in the photoresist 10.

(95) [4] In this manner, when the photoresist 10 is exposed to light in the step (4), the light is reflected by the metal thin film 6 positioned above the inclined face 18, reducing the light projected to the to-be-portion 12.

(96) 1-8. Step (5)

(97) As shown in FIG. 3H and FIG. 6B, in the step (5), the to-be-portion 12 of the photoresist 10 shielded from light by the photomask 13 is removed.

(98) To be specific, first, as necessary, the photoresist 10 after being exposed to light is heated (heating after exposure).

(99) Then, the photoresist 10 is developed with a developer. In this manner, while retaining the portion other than the to-be-portion 12 in the photoresist 10, only the to-be-portion 12 is removed. That is, in the photoresist 10, an opening 16 corresponding to the to-be-portion 12 is formed. The opening 16 penetrates the photoresist 10 in the thickness direction.

(100) In this manner, the metal thin film 6 corresponding to the to-be-portion 12, that is, the metal thin film 6 confronting with the opening 16 is exposed.

(101) Thereafter, as necessary, the photoresist 10 is cured by heating.

(102) 1-9. Step (6)

(103) As shown in the phantom line of FIG. 3I and FIG. 6B, in the step (6), the second conductive pattern 7 is provided on the metal thin film 6 exposed from the photoresist 10.

(104) The second conductive pattern 7 integrally includes a plurality of second wires 26 (only a single wire is shown in FIG. 3I) extending in front-back direction, and second terminals (not shown) connected to both front and rear end portions of the plurality of second wires 26. The second wire 26 has, for example, when viewed in cross section, a generally rectangular shape having a left-right direction length (width) that is longer than an up-down direction length (thickness).

(105) The second conductive pattern 7 includes a portion that is not matching the first conductive pattern 4 when projected in the thickness direction, and the amount of displacement of the portion (interval in left-right direction) is, for example, 1 m or more, preferably 5 m or more, and for example, 300 m or less, preferably 100 m or less.

(106) The second conductive pattern 7 is made of a conductive material that is the same as that of the first conductive pattern 4.

(107) The size of the second conductive pattern 7 is set suitably. The second conductive pattern 7 has a thickness of, for example, 1 m or more, preferably 3 m or more, and for example, 20 m or less, preferably 12 m or less. The second wire 26 has a width of, for example, 5 m or more, preferably 8 m or more, and for example, 200 m or less, preferably 100 m or less. The interval between the second wire 26 adjacent to each other is, for example, 5 m or more, preferably 8 m or more, and for example, 200 m or less, preferably 100 m or less.

(108) To provide the second conductive pattern 7 on the metal thin film 6, electrolytic plating in which electricity is supplied from the metal thin film 6 is used.

(109) The second conductive pattern 7 can be integrated with the metal thin film 6 positioned below the second conductive pattern 7.

(110) 1-10. Step (iv)

(111) As shown in FIG. 3J, in the step (iv), the photoresist 10 is removed.

(112) To be specific, the photoresist 10 is removed, for example, by wet etching.

(113) 1-11. Step (v)

(114) As shown in FIG. 4K, in the step (v), the metal thin film 6 corresponding to the photoresist 10 is removed.

(115) To be specific, the metal thin film 6 positioned below the photoresist 10 is removed, for example, by peeling.

(116) 1-12. Step (vi)

(117) As shown in FIG. 4 L, in the step (vi), the insulating cover layer 9 is provided in a pattern by which the second wire 26 of the second conductive pattern 7 is covered and the second terminal (not shown) is exposed.

(118) The suspension board with circuits 1 including the following is produced in this manner: the metal supporting board 2, the insulating base layer 3 provided on the metal supporting board 2, the first conductive pattern 4 provided on the insulating base layer 3, the intermediate insulating layer 5 provided on the insulating base layer 3 and covering the first conductive pattern 4, the metal thin film 6 and the second conductive pattern 7 disposed on the intermediate insulating layer 5, and the insulating cover layer 9 provided on the intermediate insulating layer 5 and covering the metal thin film 6 and the second conductive pattern 7. In the suspension board with circuits 1, the metal thin film 6 is integrated with the second conductive pattern 7. To be specific, the metal thin film 6 can be integrated as a portion of the second conductive pattern 7.

(119) 1-13. Operations and Effects of First Embodiment

(120) With the method for producing a suspension board with circuits 1 of Comparative Example 1 shown in FIG. 7A, in the step (1), when the ratio of the thickness T1 of the intermediate insulating layer 5 relative to the thickness T0 of the first conductive pattern 4 (T1/T0) is set to less than the above-described lower limit, the supplementary angle y exceeds the above-described range. Therefore, in the step (4), as shown in FIG. 7A, angle 2 formed by light C (incident light C) that is applied to the translucent portion 14 and that faces the inclined face 18 in the thickness direction, and reflected light C produced therein becomes relatively large. Therefore, the reflected light C is projected toward obliquely above one side in the width direction, the projection to the to-be-portion 12 cannot be suppressed, and the to-be-portion 12 receives light (exposed to light). In such a case, as shown in FIG. 7B, in the step (5), the to-be-portion 12 cannot be removed, and therefore the metal thin film 6 cannot be exposed. Thus, in the electrolytic plating of the step (6), the second conductive pattern 7 cannot be provided reliably, and therefore, deformation such as breakage of the second conductive pattern 7 is generated.

(121) Meanwhile, with the method for producing a suspension board with circuits 1, in the step (4), as shown in FIG. 2G and FIG. 6A, when the photoresist 10 is exposed to light, reflection is caused by the metal thin film 6 positioned above the inclined face 18 to reduce the light projected to the to-be-portion 12, and therefore in the step (5), as shown in FIG. 3H and FIG. 6B, the to-be-portion 12 of the photoresist 10 is removed reliably, and in the step (6), as shown in the phantom line in FIG. 3I and FIG. 6B, the second conductive pattern 7 can be formed reliably. That is, unlike Japanese Unexamined Patent Publication No. 2014-127216, the layout of the provided second conductive pattern 7 can be made with high flexibility, and inadequate formation of the second conductive pattern 7 can be suppressed.

(122) As a result, the suspension board with circuits 1 with excellent connection reliability can be produced.

(123) With the method for producing a suspension board with circuits 1, when the ratio (T1/T0) is the above-described lower limit or more, the above-described supplementary angle y is the above-described upper limit value or less, and therefore the angle 1 formed by the incident light C and the reflected light C that is reflected at the metal thin film 6 corresponding to the inclined face 18 can be made small. Therefore, reflected light C can be substantially projected upward, and as a result, in the step (4), as shown in FIG. 2G and FIG. 6A, the reflected light C projected toward the to-be-portion 12 can be can be reliably reduced.

(124) 1-14. Modified Example

(125) The inclined face 18 of the intermediate insulating layer 5 corresponds to the ridgeline portion 23 of the first conductive pattern 4. But as shown in FIG. 8A, the insulating base layer 3 can also form the inclined face 18 by the following method: the inclined face 18 does not correspond to the first conductive pattern 4, and simply the insulating base layer 3 as an example of the insulating layer has a plurality of thicknesses T3 and T4.

(126) That is, the suspension board with circuits 1 includes, as shown in FIG. 8B, the metal supporting board 2, the insulating base layer 3, the metal thin film 6 and second conductive pattern 7, and the insulating cover layer 9 (ref: FIG. 4K) sequentially, and does not include the first conductive pattern 4 and the intermediate insulating layer 5.

(127) This Modified example also achieves the same operations and effects as in the first embodiment.

(128) Although the description is given using the suspension board with circuits 1 as the first embodiment of the wired circuit board of the present invention, for example, a flexible wired circuit board having no metal supporting board 2 can also be used. In such a case, the flexible wired circuit board includes, although not shown, the metal supporting board 2, the insulating base layer 3, the first conductive pattern 4, the intermediate insulating layer 5, the metal thin film 6, the second conductive pattern 7, and the insulating cover layer 9.

(129) 2. Second Embodiment

(130) In the second embodiment, for those members and steps as those in the first embodiment, the same reference numerals are given and detailed descriptions thereof are omitted.

(131) Production method in the second embodiment further includes, in addition to the steps in the production method of the first embodiment, as shown in FIG. 9A and FIG. 9B, a step (7) in which at least the inclined face 18 is roughened.

(132) The step (7) is performed after the step (1), in which the intermediate insulating layer 5 is provided, and before the step (2), in which the metal thin film 6 is provided. That is, in the second embodiment, the step (i) to step (1), step (7), and step (2) to step (vi) are performed sequentially.

(133) That is, in this method, with the step (i) to step (1), the metal supporting board 2, insulating base layer 3, first conductive pattern 4, and intermediate insulating layer 5 are provided.

(134) Meanwhile, in the second embodiment, in the step (1), the supplementary angle y of the intermediate insulating layer 5 is not limited unlike the first embodiment. The thickness T1 and thickness T2 of the intermediate insulating layer 5 are also not limited to these in the first embodiment. To be specific, the intermediate insulating layer 5 can have a thickness T1 of, for example, 1 m or more, preferably 3 m or more, and for example, 20 m or less, preferably 15 m or less.

(135) In the step (7) after the step (1), as shown in FIG. 9A, the entire top face of the intermediate insulating layer 5 including the inclined face 18, or only the inclined face 18 is roughened.

(136) To roughen at least the inclined face 18, for example, plasma treatment, for example, chemical etching treatment using an alkaline solution, for example, abrasive treatment such as sand-blasting, wet-blasting, brush abrasion, and buffing, and for example, irregularity treatment such as embossing are used. Preferably, plasma treatment is used.

(137) The inclined face 18 has an arithmetic average roughness Ra (JIS B 0601-1994) of, for example, 0.05 m or more, preferably 0.2 m or more, and for example, 1 m or less, preferably 0.6 m or less. The arithmetic average roughness Ra of the inclined face 18 is calculated, for example, by surface observation using a laser microscope.

(138) When the inclined face 18 has an arithmetic average roughness Ra of the above-described lower limit or more, the amount of light projected to the to-be-portion 12 from the reflected light C reflected at the metal thin film 6 corresponding to the inclined face 18 can be reduced. Meanwhile, the inclined face 18 with an arithmetic average roughness Ra of the upper limit or less allows for stable plating formation.

(139) In the step (2) after step (7), as shown in FIG. 9A, the metal thin film 6 is provided on the top face including the roughened inclined face 18 in the intermediate insulating layer 5.

(140) In the metal thin film 6 facing the inclined face 18, the lower face corresponds to the roughened face (irregular face) of the inclined face 18, and the top face corresponds to the roughened face (irregular face) that is the same as the roughened face (irregular face) of the inclined face 18. That is, the metal thin film 6 facing the inclined face 18 has a very thin thickness as described above, and therefore has the roughened face (irregular face) that is the same as the inclined face 18, to be specific, an arithmetic average roughness Ra that is the same as that of the inclined face 18.

(141) As shown in FIG. 9B, after the step (2), with the step (3) to step (6) and step (iv) to step (vi), the photoresist 10 is provided, and then the photoresist 10 is exposed to light through the photomask 13, and then the to-be-portion 12 is exposed, and then the second conductive pattern 7 is provided, the photoresist 10 and the metal thin film 6 corresponding to the photoresist 10 is removed, and thereafter, the insulating cover layer 9 is provided.

(142) Then, in the step (4), as shown in FIG. 9A, light C diffuses (scatters) at the metal thin film 6, and therefore the amount of light to the to-be-portion 12 from the reflected light C decreases relatively. Therefore, the amount of light projected to the to-be-portion 12 decreases.

(143) The suspension board with circuits 1 includes, as shown in FIG. 9B and FIG. 4L, the metal supporting board 2, the insulating base layer 3, the first conductive pattern 4, the intermediate insulating layer 5, the metal thin film 6, the second conductive pattern 7, and the insulating cover layer 9, and at least the inclined face 18 in the intermediate insulating layer 5 has a roughened face (irregular face).

(144) The second embodiment further includes, after the step (1) and before the step (2), a step (7), in which at least the inclined face is roughened, and therefore light can be scattered at the metal thin film 6 corresponding to the roughened inclined face 18. Therefore, as shown in FIG. 9A, light projected to the to-be-portion 12 can be reliably reduced.

(145) 3. Third Embodiment

(146) In the third embodiment, for the same members and the steps as in the first embodiment and the second embodiment, the same reference numerals are given and detailed descriptions thereof are omitted.

(147) The production method of the third embodiment further includes, in addition to the steps in the production method of the first embodiment, a step (8), in which the metal thin film 6 is allowed to have a reflectivity for light having a wavelength of 365 nm of 25% or less.

(148) The step (8) is performed, after the step (2) and before the step (3). That is, in the third embodiment, step (i) to step (2), step (8), and step (3) to step (vi) are performed sequentially.

(149) That is, in this method, with the step (i) to step (2), the metal supporting board 2, insulating base layer 3, first conductive pattern 4, intermediate insulating layer 5, and metal thin film 6 are provided, respectively.

(150) Meanwhile, in the third embodiment, in the step (1), the supplementary angle y of the intermediate insulating layer 5 is not limited unlike the first embodiment. The thickness T1 and thickness T2 of the intermediate insulating layer 5 are also not limited to these in the first embodiment. To be specific, the intermediate insulating layer 5 can have a thickness T1 of, for example, 1 m or more, preferably 3 m or more, and for example, 20 m or less, preferably 15 m or less.

(151) In the step (8) after step (2), to allow the metal thin film 6 to have a reflectivity for light of 25% or less, the metal thin film 6 is oxidized by heating. In this manner, as shown in FIG. 10A, the metal oxide layer 19 is formed on the surface of the metal thin film 6. When the metal thin film 6 is made of copper, by heating the metal thin film 6, the metal oxide layer 19 made of copper oxide is formed on the surface of the metal thin film 6 (copper thin film). Then, the metal oxide layer 19 is black, and therefore the metal thin film 6 can be allowed to have a reflectivity for light of 25% or less.

(152) The metal thin film 6 is heated at, for example, 150 C. or more, preferably 170 C. or more, and for example, 300 C. or less, preferably 190 C. or less.

(153) The metal oxide layer 19 has a thickness of, for example, 1 nm or more, preferably 5 nm or more, and for example, 100 nm or less, preferably 30 nm or less.

(154) The reflectivity of the metal thin film 6 is, as shown in FIG. 11, decreased with increase in the thickness of the metal thin film 6, becomes the minimum around the thickness of 10 nm, and thereafter, as the thickness increases, reflectivity for light also increases. Furthermore, the reflectivity for light of the metal thin film 6 becomes the maximum at around the thickness of 50 nm, and thereafter, as the thickness increases, reflectivity for light also decreases gradually.

(155) As shown in FIG. 10A, after the step (8), in the step (3), the photoresist 10 is provided on the top face of the metal oxide layer 19.

(156) Thereafter, in the step (4), as shown in FIG. 10A, the photomask 13 is disposed at the photoresist 10 so that the to-be-portion 12 is shielded from light, and the photoresist 10 is exposed to light through the photomask 13.

(157) At that time, the light passed the translucent portion 14 and the photoresist 10 sequentially becomes reflected light having a relatively small amount of light (production of reflected light is reduced), because the reflectivity for light of the metal thin film 6 is the above-described upper limit or less. Therefore, the light projected to the to-be-portion 12 can be reliably reduced.

(158) As shown in FIG. 10B, thereafter, in the step (5), the metal oxide layer 19 is exposed.

(159) Thereafter, the metal oxide layer 19 is removed. To remove the metal oxide layer 19, for example, the surface of the metal thin film 6 is washed with an acidic aqueous solution. In this manner, only the metal oxide layer 19 is removed. That is, the surface resistance value of the metal thin film 6 is made small.

(160) Thereafter, with the step (6) to step (vi), the second conductive pattern 7 is provided, and the photoresist 10 and the metal thin film 6 corresponding to the photoresist 10 are removed, and thereafter, the insulating cover layer 9 is provided.

(161) In the suspension board with circuits 1, the metal oxide layer 19 is not remained.

(162) With the third embodiment, after the step (2), before the step (3), a step (8), in which the reflectance of the metal thin film for light having a wavelength of 365 nm is allowed to be 25% or less, is further included, and therefore reflected light projected to the to-be-portion 12 can be reliably reduced.

(163) 4. Fourth Embodiment

(164) In the fourth embodiment, for the same members and the steps as those in the first embodiment to third embodiment, the same reference numerals are given and detailed descriptions thereof are omitted.

(165) In the fourth embodiment, as shown in FIG. 12A, in the step (3), the supplementary angle y (degrees) to the angle a formed with the inclined face 18 and the flat face 17 and the thickness x (m) of the photoresist 10 satisfy the following formula.
y3x+70

(166) The range for the supplementary angle y and thickness x that satisfies the above-described formula is shown in FIG. 13.

(167) The thickness x of the photoresist 10 is the distance between the top face of the metal thin film 6 facing the flat face 17 of the intermediate insulating layer 5 and the top face of the photoresist 10.

(168) As in the first embodiment, when the photoresist 10 has a relatively thick thickness x, the supplementary angle y is set so that it becomes relatively small. Meanwhile, unlike the first embodiment, the supplementary angle y is allowed to be relatively large when the photoresist 10 has a relatively thin thickness x.

(169) To be specific, when the photoresist 10 has a thickness x of 15 m, the supplementary angle y is, for example, 30 degrees or less, preferably 28 degrees or less, more preferably 25 degrees or less. When the photoresist 10 has a thickness x of 10 m, the supplementary angle y is, for example, 40 degrees or less, preferably 38 degrees or less, more preferably 35 degrees or less. When the photoresist 10 has a thickness x of 5 m, the supplementary angle y is, for example, 60 degrees or less, preferably 57 degrees or less, more preferably 55 degrees or less.

(170) Then, as shown in FIG. 12A, in the step (4), for example, even if the reflected light C aiming obliquely and upwardly one side in the width direction is generated at the metal thin film 6 corresponding to the inclined face 18, the reflected light C only aims an upper portion (space) Z positioned above the to-be-portion 12 of the photoresist 10, and aiming toward the to-be-portion 12 of the photoresist 10 is suppressed.

(171) Therefore, as shown in FIG. 12B, in the step (5), the to-be-portion 12 can be reliably removed.

(172) Then, in the fourth embodiment, the supplementary angle y (degrees) and the thickness x (m) of the photoresist satisfy the above-described formula, and therefore the reflected light C from the metal thin film 6 can be projected to the upper portion (space) Z positioned above the to-be-portion 12. As a result, the reflected light C projected to the to-be-portion 12 can be reliably reduced.

(173) The thickness T1 and thickness T2 of the intermediate insulating layer 5 are not limited to those in the first embodiment. To be specific, the intermediate insulating layer 5 can have a thickness T1 of, for example, 1 m or more, preferably 3 m or more, and for example, 20 m or less, preferably 15 m or less.

(174) 5. Modified Example

(175) The above-described first to fourth embodiments can be suitably combined.

EXAMPLES

(176) In the following, the present invention is described further in detail based on Experimental Examples, Examples, and Comparative Examples. However, the present invention is not limited to these Experimental Examples, Examples, and Comparative Examples by any means. The specific numeral values used in the description below such as mixing ratios (contents), physical property values, and parameters can be replaced with the upper limit (numeral values defined with or less, less than) or the lower limit (numeral values defined with or more, more than) of corresponding mixing ratios (contents), physical property values, and parameters in the above-described Description of Embodiments.

Example 1 (Example Corresponding to First Embodiment)

(177) As shown in FIG. 1A, first, a metal supporting board 2 made of stainless steel and having a thickness of 20 m was prepared (step (i)).

(178) As shown in FIG. 1B, then, an insulating base layer 3 made of polyimide and having a thickness of 10 m was provided on the metal supporting board 2 (step (ii)).

(179) As shown in FIG. 1C, then, a first conductive pattern 4 made of copper was provided on the insulating base layer 3 (step (iii)). The first conductive pattern 4 had a thickness of 9 m. The first wire 21 had a width of 20 m.

(180) As shown in FIG. 1D, then, an intermediate insulating layer 5 made of polyimide was provided on the insulating base layer 3 so as to cover the first conductive pattern 4 (step (1)). The thickness T1 was 15 m, and the thickness T2 was 12 m. The angle a formed with the inclined face 18 and the flat face 17 was 168 degrees, and the supplementary angle y was 12 degrees.

(181) As shown in FIG. 2E, then, the metal thin film 6 made of the chromium thin film having a thickness of 30 nm and the copper thin film having a thickness of 70 m was provided on the intermediate insulating layer 5 by sputtering method (step (2)).

(182) As shown in FIG. 2F, then, the photoresist 10 was provided on the metal thin film 6 (step (3)). The photoresist 10 had a thickness of 20 m.

(183) As shown in FIG. 2G and FIG. 6A, then, the photomask 13 was disposed so that the to-be-portion 12 in the photoresist 10 is shielded from light (step (4)). To be specific, the photomask 13 was disposed so that the light shield portion 15 faces the to-be-portion 12, and the translucent portion 14 faces the portion other than the to-be-portion 12 of the photoresist 10.

(184) Then, the photoresist 10 was exposed to light through the photomask 13 (step (4)).

(185) As shown in FIG. 3H and FIG. 6B, then, the to-be-portion 12 of the photomask 10 was removed by developing, thereby exposing the metal thin film 6 corresponding to the to-be-portion 12 (step (5)).

(186) As shown in the phantom line in FIG. 3I and FIG. 6B, then, a second conductive pattern 7 was provided on the metal thin film 6 exposed from the photoresist 10 by electrolytic copper plating with electricity supplied from the metal thin film 6 (step (6)). The second conductive pattern 7 had a thickness of 9 m. The second wire 26 had a width of 20 m.

(187) As shown in FIG. 3J, then, the photoresist 10 was removed by etching (step (iv)).

(188) As shown in FIG. 4K, then, the metal thin film 6 corresponding to the photoresist 10 was removed by peeling (step (v)).

(189) As shown in FIG. 4L, then, the insulating cover layer 9 made of polyimide and having a thickness of 5 m was provided on the intermediate insulating layer 5 so as to cover the second conductive pattern 7 (step (vi)).

(190) The suspension board with circuits 1 was produced in this manner

(191) No inadequate formation such as breakage was observed in the second conductive pattern 7.

Example 2 (Example Corresponding to First Embodiment)

(192) A suspension board with circuits 1 was produced in the same manner as in Example 1, except that in the step (1) shown in FIG. 1D, the thickness T1 of the intermediate insulating layer 5 was changed to 12 m, the thickness T2 was changed to 8 m, and furthermore, the angle a was changed to 160 degrees, and the supplementary angle y was changed to 20 degrees.

(193) Inadequate formation was observed a little in the second conductive pattern 7.

Comparative Example 1

(194) A suspension board with circuits 1 was produced in the same manner as in Example 1, except that in the step (1) shown in FIG. 1D, the thickness T1 of the intermediate insulating layer 5 was changed to 6 m, the thickness T2 was changed to 5 m, and furthermore, the angle was changed to 150 degrees, and the supplementary angle y was changed to 30 degrees.

(195) The second conductive pattern 7 was inadequately formed, and complete breakage portions were observed.

Experimental Example 1 (Example Corresponding to Third Embodiment)

(196) In Example 1, the metal thin film 6 after the step (2) was heated to form copper oxide having a thickness of 10 nm.

(197) A sample with a different copper oxide thickness was prepared as well.

(198) Furthermore, the ratio of the reflectivity for light of the above-described samples relative to the reflectivity for light having a wavelength of 365 nm of an unheated metal thin film 6 (blank) with no copper oxide formed (light reflectivity of sample/light reflectivity of blank) was calculated.

(199) The results are shown in FIG. 11.

Example 3 (Example Corresponding to Fourth Embodiment)

(200) A suspension board with circuits 1 was produced in the same manner as in Example 1, except that in the step (1) shown in FIG. 1D, the thickness T1 of the intermediate insulating layer 5 was changed to 8 m, the thickness T2 was changed to 6 m, and furthermore, the angle was changed to 152 degrees, and the supplementary angle y was changed to 28 degrees. Also, in the step (2) shown in FIG. 2F, the thickness of the photoresist 10 was changed to 15 m.

(201) No inadequate formation such as breakage was observed in the second conductive pattern 7.

Example 4 (Example Corresponding to Fourth Embodiment)

(202) A suspension board with circuits 1 was produced in the same manner as in Example 1, except that in the step (1) shown in FIG. 1D, the thickness T1 of the intermediate insulating layer 5 was changed to 5 m, the thickness T2 was changed to 3 m, and furthermore, the angle was changed to 142 degrees, and the supplementary angle y was changed to 38 degrees. Furthermore, in the step (2) shown in FIG. 2F, the thickness of the photoresist 10 was changed to 10 m.

(203) No inadequate formation such as breakage was observed in the second conductive pattern 7.

Example 5 (Example Corresponding to Fourth Embodiment)

(204) A suspension board with circuits 1 was produced in the same manner as in Example 1, except that in the step (1) shown in FIG. 1D, the thickness T1 of the intermediate insulating layer 5 was changed to 3 m, the thickness T2 was changed to 1 m, and furthermore, the angle was changed to 123 degrees, and the supplementary angle y was changed to 57 degrees. Furthermore, in the step (2) shown in FIG. 2F, the thickness of the photoresist 10 was changed to 5 m.

(205) No inadequate formation such as breakage was observed in the second conductive pattern 7.

(206) Table 1 shows the thickness and the angle of the intermediate insulating layer 5 of Examples 1 to 5 and Comparative Example 1, the thickness of the photoresist 10, and evaluation.

(207) TABLE-US-00001 TABLE 1 Intermediate insulation layer First Angle Evaluation conductive between Inadequate pattern Thick- Thick- Thick- inclined Comple- Photoresist formation Thickness ness ness ness face and mentary Thickness of second T0 ratio T1 T2 flat face angle y X conductive m (T1/T0) m m Degrees Degrees m pattern Example 1 9 1.7 15 12 168 12 20 Not observed Example 2 9 1.3 12 8 160 20 20 Observed slightly Comparative 9 0.7 6 5 150 30 20 Breakage Example 1 Example 3 9 0.9 8 6 152 28 15 Not observed Example 4 9 0.6 5 3 142 38 10 Not observed Example 5 9 0.3 3 1 123 57 5 Not observed

(208) While the illustrative embodiments of the present invention are provided in the above description, such is for illustrative purpose only and it is not to be construed as limiting the scope of the present invention. Modification and variation of the present invention that will be obvious to those skilled in the art is to be covered by the following claims.