MULTICHANNEL PHOTOCONDUCTIVE TERAHERTZ RECEIVING ANTENNA, RE-CEIVER, TERAHERTZ SYSTEM AND TERAHERTZ METHOD

Abstract

Receiving antenna (1) for terahertz radiation (30), comprising an antenna conductor (2) and a first photoconductor (3) connected to the antenna conductor (2) and activatable by light (9), the first photoconductor (3) allowing, in an activated state, an antenna current (28) flowing through the antenna conductor (2) and the first photoconductor (3), characterized in that the receiving antenna (1) comprises at least one second photoconductor (4) connected to the antenna conductor (2) and activatable by light (9), the second photoconductor connected in parallel with the first photoconductor (3) and, in an activated state, allowing an antenna current (28) flowing through the antenna conductor (2) and the second photoconductor (4), wherein at least one respective high-pass filter (8) is connected between each of the photoconductors (3, 4) and the antenna conductor (2). The invention further relates to a receiver for terahertz radiation (30), a terahertz system, and a method for generating and detecting terahertz radiation (30) using such a terahertz system.

Claims

1. A receiving antenna for terahertz radiation, the receiving antenna comprising: an antenna conductor; and a first photoconductor connected to the antenna conductor, wherein the first photoconductor is activatable by light, wherein the first photoconductor when, in an activated state, allows an antenna current to flow through the antenna conductor and the first photoconductor; wherein the receiving antenna comprises at least one second photoconductor connected to the antenna conductor, wherein the at least one second photoconductor is activatable by light, wherein the at least one second photoconductor is connected in parallel with the first photoconductor and when the at least one second photoconductor is in an activated state, allows the antenna current to flow through the antenna conductor and the second photoconductor, and wherein at least one high-pass filter is connected between at least one of: the first photoconductor and the antenna conductor, or the at least one second photoconductor and the antenna conductor.

2. The receiving antenna according to claim 1, further comprising: a contact for detecting a measurement signal located between the at least one high pass filter and at least one of the first photoconductor or the at least one second photoconductor.

3. The receiving antenna according to claim 1, wherein at least one of the at least one high pass filter includes at least one of: a capacitor connected in series with at least one of the first photoconductor or the at least one second photoconductor, or an inductor connected between at least one of the first photoconductor or the at least one second photoconductor and a reference potential.

4. The receiving antenna according to claim 1, wherein at least one of the at least one high pass filter has a transmission edge between 50 GHz and 100 GHz, inclusive and/or wherein the first photoconductor and the second photoconductor have a distance of less than 300 μm therebetween.

5. Receiver A receiver for terahertz radiation, comprising: a receiving antenna for terahertz radiation, the receiving antenna comprising: an antenna conductor; and a first photoconductor connected to the antenna conductor, wherein the first photoconductor is activatable by light, wherein the first photoconductor when, in an activated state, allows an antenna current to flow through the antenna conductor and the first photoconductor; wherein the receiving antenna comprises at least one second photoconductor connected to the antenna conductor, wherein the at least one second photoconductor is activatable by light, wherein the at least one second photoconductor is connected in parallel with the first photoconductor and when the at least one second photoconductor is in an activated state, allows the antenna current to flow through the antenna conductor and the second photoconductor, and wherein at least one high-pass filter is connected between at least one of: the first photoconductor and the antenna conductor, or the at least one second photoconductor and the antenna conductor; and at least one light source to generate at least one light signal for activating the first photoconductor and the at least one second photoconductor of the receiving antenna, wherein the at least one light source is optically coupled to at least one of the first photoconductor or to the at least one second photoconductor of the receiving antenna for applying light from the at least one light signal to the first photoconductor and the second photoconductor.

6. Receiver The receiver according to claim 5, further comprising: at least one beam splitter configurable to split the light signal generated by the light source into a first component and a second component, such as to allow the first component of the light signal to be applied to the first photoconductor and to allow the second component of the light signal to be applied to the second photoconductor, so that the second component of the light signal reaches the second photoconductor with at least one of a defined phase shift or a defined transit-time difference with respect to the first component of the light signal reaching the first photoconductor.

7. Receiver The receiver according to claim 6, further comprising: an adjustable optical delay unit, configurable to make at least one of the defined phase shift or the defined transit-time difference of the second component of the light signal at the at least one second photoconductor adjustable with respect to the first component of the light signal at the first photoconductor.

8. The receiver according to claim 5, wherein the at least one light source comprises at least one of: at least two mutually detuned or detunable continuous wave lasers for generating at least one optical beat signal or a pulsed laser for generating a light pulse.

9. Receiver The receiver according to claim 5, further comprising: an analysis unit configurable to analyze a first measurement signal, corresponding to a low-frequency component of the antenna current flowing through the first photoconductor, and a second measurement signal, corresponding to a low-frequency component of the antenna current flowing through the second photoconductor, for determining at least one of an amplitude or a phase of a received terahertz radiation.

10. A terahertz system comprising: a transmitter to generate terahertz radiation; and a receiver for terahertz radiation to receive the terahertz radiation generated by the transmitter, the receiver comprising: a receiving antenna comprising: an antenna conductor; and a first photoconductor connected to the antenna conductor, wherein the first photoconductor is activatable by light, wherein the first photoconductor when, in an activated state, allows an antenna current to flow through the antenna conductor and the first photoconductor; wherein the receiving antenna comprises at least one second photoconductor connected to the antenna conductor, wherein the at least one second photoconductor is activatable by light, wherein the at least one second photoconductor is connected in parallel with the first photoconductor and when the at least one second photoconductor is in an activated state, allows the antenna current to flow through the antenna conductor and the second photoconductor, and wherein at least one high-pass filter is connected between at least one of: the first photoconductor and the antenna conductor, or the at least one second photoconductor and the antenna conductor, and at least one light source to generate at least one light signal for activating the first photoconductor and the at least one second photoconductor of the receiving antenna, wherein the at least one light source is optically coupled to at least one of the first photoconductor or to the at least one second photoconductor of the receiving antenna for applying light from the at least one light signal to the first photoconductor and the second photoconductor.

11. The terahertz system according to claim 10, wherein the transmitter comprises an antenna conductor and a photosensitive element, the photosensitive element being optically coupled to the antenna conductor such as to cause, in an activated state and when a bias voltage is applied, an antenna current flowing through the antenna conductor and the photosensitive element.

12. The terahertz system according to claim 11, wherein the at least one light source of the receiver is further optically coupled to the photosensitive element of the transmitter such that the photosensitive element of the transmitter is activatable by a component of the light signal generated by the light source.

13. The terahertz system according to claim 10, wherein the transmitter comprises a modulator configurable to encode, by at least one of phase modulation or amplitude modulation, information in the terahertz radiation generated by the transmitter.

14. A method of generating and detecting terahertz radiation, the method comprising: generating a terahertz signal using a transmitter; receiving the terahertz signal generated by the transmitter by a receiver activating a first photoconductor of a receiving antenna of the receiver by a first component of a light signal generated by at least one light source of the receiver; activating at least one second photoconductor of the receiving antenna of the receiver by a second component of the light signal generated by the at least one light source of the receiver; concurrently measuring a first measurement signal corresponding to a low-frequency component of an antenna current flowing through the first photoconductor and a second measurement signal corresponding to a low-frequency component of the antenna current flowing through the at least one second photoconductor while the first photoconductor and the at least one second photoconductor are activated; and determining at least one of an amplitude or a phase of the received terahertz signal from the first measurement signal and the second measurement signal using at least one of a defined phase shift or a defined transit-time difference between the first component and the second component of the light signal.

15. The method according to claim 14, further comprising: encoding information in the terahertz signal generated by the transmitter by modulating at least one of the phase or the amplitude of the terahertz signal using a modulator, and registering the information encoded in the terahertz signal.

16. The method according to claim 15, wherein, in encoding information in the terahertz signal generated by the transmitter, both the phase and the amplitude of the terahertz signal are modulated using quadrature amplitude modulation and wherein, in registering the information encoded in the terahertz signal, the first measurement signal and the second measurement signal are respectively used as a corresponding in-phase component and a quadrature component.

17. The method according to claim 14, further comprising: arranging a sample in a beam path between the transmitter 0 and the receiver, wherein a component of the terahertz signal generated by the transmitter is subjected, by interacting with the sample , to at least one of an altered phase, an altered amplitude, or a second transit-time difference, detecting at least one of the altered phase, the altered amplitude, or the second transit-time difference of the terahertz signal received by the receiver caused by the interacting with the sample, and determining one or more properties of the sample from at least one of the altered phase, the altered amplitude, and/or a frequency, or the second transit-time difference so detected.

18. The method according to claim 14, wherein the receiver includes at least one beam splitter to split a light signal generated by the light source into the first component and the second component to allow the first component of the light signal to be applied to the first photoconductor and to allow the second component of the light signal to be applied to the at least one second photoconductor.

19. The method according to claim 18, wherein the second component of the light signal reaches the at least one second photoconductor with at least one of the defined phase shift or the defined transit time difference with respect to the first component of the light signal reaching the first photoconductor.

20. The method according to claim 19, wherein the receiver includes an adjustable optical delay unit configurable to make at least one of the defined phase shift or the defined transit time difference of the second component of the light signal at the at least one second photoconductor adjustable with respect to the first component of the light signal at the first photoconductor.

Description

[0061] Embodiment of the invention will be explained hereinafter with reference to FIG. 1A to FIG. 6. The figures show, schematically:

[0062] FIG. 1A a receiving antenna for terahertz radiation,

[0063] FIG. 1B a top view and a side view of a receiving antenna of the type shown in FIG. 1A, the antenna being implemented as an optoelectronic chip,

[0064] FIG. 2 a detailed view of a receiver for terahertz radiation with a receiving antenna of the type shown in FIG. 1B,

[0065] FIG. 3 a detailed view of a receiver for terahertz radiation with a receiving antenna of the type shown in FIG. 1A or 1B,

[0066] FIG. 4 a homodyne terahertz system with continuous wave lasers comprising an IQ receiver of the type outlined in FIG. 3,

[0067] FIG. 5 a homodyne terahertz system with a pulsed laser comprising a further example of a receiver for terahertz radiation with a receiving antenna of the type shown in FIG. 1A or 1B,

[0068] FIG. 6 a heterodyne terahertz system with a receiver as in FIG. 4, but with a different embodiment of a transmitter.

[0069] The receiving antenna 1 for terahertz radiation 30 outlined in FIG. 1A, like the specific embodiment of FIG. 1B, comprises a two-part antenna conductor 2 and a first photoconductor 3 connected to the antenna conductor 2 and activatable by light 9, which in an activated state allows an antenna current 28 flowing through the antenna conductor 2 and the first photoconductor 3.

[0070] Furthermore, the receiving antenna 1 comprises a second photoconductor 4 also connected to the antenna conductor 2 and activatable by light 9, the second photoconductor 4 connected in parallel with the first photoconductor 3 and allowing an antenna current 28 flowing through the antenna conductor 2 and the second photoconductor 4 in an activated state. A respective high-pass filter 8 is connected between each of the photoconductors 3, 4 and each of the two parts of the two-part antenna conductor 2 by means of electrical contacts 6.

[0071] By means of the contacts 6, each of the photoconductors 3, 4 is connected to a respective measuring amplifier 10. The contacting means 6 enable a respective measurement signal, such as a low-frequency component 29 of the antenna current 28 flowing through the respective photoconductor 3, 4, to be picked up by means of the measurement amplifiers 10.

[0072] Recurring features are provided with the same reference signs in the figures. The receiving antenna 1 shown in FIG. 1B is implemented as an optoelectronic chip on a substrate 5 consisting of InP or GaAs.

[0073] The following are arranged on the substrate 5: the first photoconductor 3 and the second photoconductor 4; the contacts 6, which are electrically connected to the photoconductors 3 and 4; the two-part antenna conductor 2, designed as a metallic layer and separated from the electrical contacts 6 by a dielectric layer 7, the dielectric layer 7 forming, together with an overlying part of the antenna conductor 2 and a respective one of the contacts 6, in each case a capacitor which acts as a high-pass filter 8 between the antenna conductor 2 and the respective photoconductor 3 or 4. The two photoconductors 3 and 4 are connected in parallel in this arrangement.

[0074] The capacitors, formed by the dielectric layer 7, the contacts 6 and the antenna conductor 2, are dimensioned in such a way that a transmission edge between 50 GHz and 100 GHz is obtained for the high-pass filter 8.

[0075] The photoconductors 3 and 4 are implemented as epitaxial layers using the material system In—Ga—Al—As—P. The distance between the photoconductors 3 and 4 is less than 50 μm. The photoconductors 3 and 4 are activatable by light 9 (indicated as arrows), allowing a respective antenna current 28 flowing through the antenna conductor 2 and an activated photoconductor 3 or 4 in an activated state. The photoconductors 3 and 4 are arranged such that there is a distance between them of less than 50 μm, possibly even less than 20 μm or 10 μm.

[0076] The receiving antenna 1 further comprises two measurement amplifiers 10, each of the measurement amplifiers being connected to the contacts 6 of one of the photoconductors 3 and 4 via leads 11. The measurement amplifier 10 connected to the first photoconductor 3 is arranged to detect a first measurement signal corresponding to the low frequency component of the antenna current flowing through the first photoconductor 3; the measurement amplifier 10 connected to the second photoconductor 4 is arranged to detect a second measurement signal corresponding to the low frequency component of the antenna current flowing through the second photoconductor 4. Transimpedance amplifiers (TIAs), which are characterized by their good suitability for measuring small currents, are used as measurement amplifiers.

[0077] In another embodiment of the receiving antenna 1 (not shown), the dielectric layer 7 may be omitted, thus the contacts 6 may be electrically connected directly to the antenna conductor 2. The high-pass filters 8 can then be implemented by conductor paths shaped in a meandering pattern as inductors, which branch off from the contacts 6 and are connected to a reference potential.

[0078] An application of the receiving antenna of FIG. 1A or 1B is shown in FIG. 4, which illustrates a receiver 12 for terahertz radiation in the context of a terahertz system 21. In addition to the receiving antenna 1, the receiver 12 comprises a light source 13, two beam splitters 14 and two couplers 14′. The light source 13 is configured to generate a light signal to activate the first photoconductor 3 and the second photoconductor 4.

[0079] The light source 13 includes two continuous wave lasers of the same kind, L1 and L2, which are detuned or detunable with respect to each other such that an optical beat signal can be generated by combining light from the two lasers L1 and L2.

[0080] For this purpose, the continuous wave lasers L1 and L2 are coupled to beam splitters 14. Light components of the light generated by the lasers L1 and L2 intended for activating the receiving antenna are first divided into two components each by means of the beam splitters 14. One of these components is subjected to a phase shift ACP. By means of the couplers 14′, one of the components originating from laser L1 and one of the components originating from laser L2 are now superimposed, whereby two separate components of the same beat signal generated by means of the two lasers L1 and L2 of the light source are formed.

[0081] In this or a similar way, a first component of a light signal may be supplied to the first photoconductor 3 and a second component of the same light signal, which is subjected to a defined phase shift and/or transit time difference with respect to the first component, can be directed to the second photoconductor 4. Through waveguides 15, a first one of these components of the beat signal is directed to the first photoconductor 3 and a second one of these components is guided to the second photoconductor 4.

[0082] As shown in FIG. 2, the waveguides 15 may be implemented by a planar integrated waveguide chip 18. In this embodiment, the light signal components are coupled into the waveguides 15 via optical fibers 24. That waveguide 15 or optical fiber 24 which directs the second component of the light signal to the second photoconductor 4 is configured, by virtue of a length difference with respect to the waveguide 15 or optical fiber 24 which directs the first component of the light signal to the first photoconductor 3, to apply a fixed phase shift of 90° to the second component of the light signal. The integrated waveguide chip 18 allows the dimension of the fibers 24 to be matched to the dimension and distance of the photoconductors 3 and 4.

[0083] The receiver 12 further comprises a digital processor (not shown) as an analysis unit, which analyses the measurement signals detected by the measurement amplifiers 10 and determines therefrom—by exploiting the known phase shift—the amplitude and the phase of the received terahertz radiation.

[0084] In the example shown in FIG. 2, the integrated waveguide chip 18 is a separate element. Instead, the waveguides 15 may also be integrated on the substrate 5 of the optoelectronic chip of the receiving antenna 1 in the same way as the light source 13.

[0085] Further, as shown in FIG. 2, the receiver 12 may include an adjustable optical delay unit 17 integrated into one of the waveguides 15 and configured to apply an adjustable phase shift to the second component of the light signal.

[0086] In a further embodiment of the receiver 12, illustrated in FIG. 5 in the context of a further terahertz system 21′, the two continuous wave lasers L1 and L2 are replaced by a pulse laser L arranged to generate an optical light pulse. This receiver 12 also comprises an adjustable optical delay unit 17, the latter being configured to apply an adjustable transit-time difference to the second component of the light signal.

[0087] The receiver 12 shown in FIG. 4 as part of the terahertz system 21 may be used as an IQ receiver, as described further above. The corresponding operating principle is shown in FIG. 3. As described above, the antenna conductor 2 of the receiver 12 is connected to the first photoconductor 3 and the second photoconductor 4 via the high pass filters 8 (not shown here). These are activated by the periodic beat signal 9′, the second component of the beat signal 9′ having a phase shift of 90′ relative to the first component. The light 9 for exciting or activating the photoconductors 3 and 4 illustrated in FIGS. 1A and 1B corresponds in this case to the two components of the beat signal 9′. The terahertz signal 19, which at a given frequency is determined by its phase and amplitude, can be decomposed in a pointer diagram into an I-component 19′ and a Q-component 19″ orthogonal thereto, as shown. Due to the phase shift of 90° between the two components of the beat signal 9′, the currents flowing through the corresponding photoconductors 3 and 4 can be identified with the components 19′ and 19″, which allows the phase and amplitude of the terahertz signal 19 to be determined.

[0088] The terahertz system 21 shown in FIG. 4 also includes a transmitter 20 configured to generate terahertz radiation, the receiver 12 being arranged to receive terahertz radiation generated by means of the transmitter 20.

[0089] The transmitter 20 includes an antenna conductor 2 and a photosensitive element 27 optically coupled to the antenna conductor 2, wherein the photosensitive element 27, in an activated state and when a bias voltage is applied, causes an antenna current to flow through the antenna conductor 2 and the photosensitive element 27. Thus, the transmitter 20 is substantially similar in structure to the receiver 12, with the transmitter 20 having only one photosensitive element 27. The bias voltage is supplied by a voltage source 22.

[0090] In this embodiment, the transmitter 20 and receiver 12 are further fed by the same light source 13, that is, the light source 13 of the receiver 12 is optically coupled to the photosensitive element 27 of the transmitter 20 and is arranged to generate a light signal for activating the photosensitive element 27 of the transmitter 20. For this reason, the terahertz system 21 is also referred to as a homodyne system.

[0091] At the receiver side, the optical beat signal 9′ is split by the beam splitter 14 into the first component and the second component, which are guided by the waveguides 15 to the photoconductors 3 and 4, the second component reaching the second photoconductor 4 having the phase shift ACP with respect to the first component reaching the first photoconductor 3.

[0092] The terahertz system 21 enables a method for generating and detecting terahertz radiation using the terahertz system 21. Here, a terahertz signal 19 is generated by means of the transmitter 20. For this purpose, a bias voltage is applied to the antenna conductor 2 of the transmitter 20 by means of the voltage source 22. The photosensitive element 27 of the transmitter 20 is activated by the light signal generated by the light source 13, causing an antenna current to flow through the photosensitive element 27 as an alternating current with the period of the beat signal, resulting in the radiation of the terahertz signal 19 by the antenna conductor 2.

[0093] The terahertz signal 19 generated by means of the transmitter 20 is received by means of the receiver 12. To this end, the first photoconductor 3 of the receiving antenna 1 of the receiver 12 is activated by the first component of the light signal generated by the light source 13 of the receiver 12. The second photoconductor 4 of the receiving antenna 2 of the receiver 12 is activated by the second component of the light signal generated by the light source 13 of the receiver 12, the second component having a phase shift ACP of 90′ with respect to the first component. Simultaneously with the activation of the photoconductors 3 and 4, the first measurement signal corresponding to the low-frequency component of the antenna current flowing through the first photoconductor 3 and the second measurement signal corresponding to the low-frequency component of the antenna current flowing through the second photoconductor 4 are measured by means of the measurement amplifiers 10.

[0094] By exploiting the known phase shift ACP, the amplitude and phase of the received terahertz signal 19 is determined from the first measurement signal and the second measurement signal using the analysis unit.

[0095] An exemplary application of the described method is particularly suitable for the analysis of a sample 23. The sample 23 is arranged in a beam path between the transmitter 20 and the receiver 12 (indicated by an arrow in FIG. 4). A component of the terahertz signal 19 generated by the transmitter 20 is subjected to an altered phase and/or amplitude by interacting with the sample 23.

[0096] The altered phase/and or amplitude of the terahertz signal 19 due to interacting with the sample 23 is detected by the analysis unit. From the phase and/or amplitude thus detected, one or more properties of the sample 23 are determined. Depending on the placement of the sample 23, terahertz radiation transmitted or reflected by the sample 23 may be detected.

[0097] The terahertz system 21′ shown in FIG. 5 corresponds in its structure in large parts to the terahertz system 21 in FIG. 4. Therefore, only the distinguishing features from the terahertz system 21 of FIG. 4 are described here. This terahertz system 21′ is also a homodyne system, i.e. the transmitter 20 and receiver 12 are fed by the same light source 13. Instead of the two continuous wave lasers L1 and L2, the light source 13 of the receiver 12 here comprises the pulsed laser L, which is set up to generate optical light pulses. When reaching the second photoconductor 4, the second component of the light pulse exhibits the transit time difference AT with respect to the first component reaching the first photoconductor 3.

[0098] In addition, a second adjustable optical delay unit 25 is optically connected between the light source 13 and the photosensitive element 27 of the transmitter 20, which allows adjustment of the relative timing/phase of the transmission and sampling pulses.

[0099] The terahertz system 21′ shown in FIG. 5 is suitable for a further example of the method described above. Also in this example, a sample 23 is arranged in a beam path between the transmitter 20 and the receiver 12 (indicated by arrow). The sample 23 may be arranged such that a transmitted component of the terahertz signal 19 impinges on the receiver 12, but may also be arranged such that at least a reflected component of the terahertz signal 19 impinges on the receiver 12, wherein at least a component of the terahertz signal 19 impinging on the receiver 12 is subjected to a second transit-time difference by interacting with the sample 23.

[0100] The second transit-time difference is detected by the analysis unit, for which purpose, in some method embodiments, the adjustable optical delay unit 17 and/or the second adjustable optical delay unit 25 is adjusted. A property or properties of the sample 23, such as a thickness, is determined from the second time-of-flight difference thus detected and/or an attenuation of the terahertz radiation caused by the sample 23.

[0101] FIG. 6 shows a further terahertz system 21″, implemented as a heterodyne system, i.e. in which the transmitter 20 and receiver 12 are fed by different light sources 13′ and 13. The receiver 12, which is fed by the light source 13, is here completely analogous to the receiver 12 in FIG. 4, to the description of which reference is therefore made. In the terahertz system, the transmitter 20 is fed by the light source 13′, wherein the light source 13′ comprises two continuous wave lasers L3 and L4 of the same kind, which are detuned with respect to each other such that an optical beat signal can be generated by combining light signals from the two lasers L3 and L4, wherein the beat frequency is identical to the frequency of the beat generated by combining the two lasers L1 and L2.

[0102] However, the beat frequency of the optical beat signal generated by combining the light signals of the two lasers L3 and L4 need not be equal to the beat frequency of the optical beat signal generated by combining the light signals of the two lasers L1 and L2. Two beat signals of different beat frequencies may be used instead. However, in this case, the difference of the two beat frequencies or—in case of additional modulation—the sum of the aforementioned difference and the modulation frequency—should be lower than the transmission edge of the high pass filters.

[0103] The transmitter 20 further comprises a modulator 26 adapted to encode information in a generated terahertz radiation by phase modulation and/or amplitude modulation. To this end, the modulator 26 is configured as an adjustable optical delay unit which applies an adjustable phase difference to the light signal generated by the laser L3 before combining it with the light signal generated by the laser L4. Additionally or alternatively, the modulator 26 may also be configured to modulate the amplitude of the generated terahertz radiation, for example by modulating the laser power of the lasers L3 and L4.

[0104] A further example of the method described above with reference to FIG. 4 is advantageously made possible using the heterodyne terahertz system 21″ shown in FIG. 6, this method being particularly suitable for communication. Here, the described method is modified in that information is encoded in the terahertz signal 19 generated by means of the transmitter 20 of the terahertz system 21″ by modulating the phase and/or the amplitude of the terahertz signal 19 by means of the modulator 26, and in that the information encoded in the terahertz signal 19 is detected.

[0105] A particular embodiment of this method is specifically configured for communication using the IQ method described above. In this case, when encoding information in the terahertz signal 19 generated by means of the transmitter 20 of the terahertz system 21″, both the phase and the amplitude of the terahertz signal 19 are modulated using quadrature amplitude modulation; when detecting the information encoded in the terahertz signal 19, the first measurement signal and the second measurement signal are used as the in-phase component and the quadrature component.

TABLE-US-00001 List of reference signs 1 Receiving antenna 2 Antenna conductor 3 First photoconductor 4 Second photoconductor 5 Substrate 6 Contact 7 dielectric layer 8 High-pass filter 9 Light  9′ Beat signal 10 Measurement amplifier 11 Leads 12 Receiver 13 Light source 14 Beam splitter 14′ Coupler 15 Waveguide 17 Adjustable optical delay unit L1, L2 continuous wave laser L Pulsed laser 18 Integrated waveguide chip 19 Terahertz signal 19′ I-component  19″ Q-Component 20 Transmitter 21, 21′, 21″ Terahertz system 22 Voltage source 23 Sample 24 Optical fibers 25 Second adjustable optical delay unit 26 Modulator 27 Photosensitive element 28 Antenna current 29 Low-frequency component 30 Terahertz radiation