IMPROVED THERMAL CONTACT FOR SEMICONDUCTORS AND RELATED METHODS

Abstract

A semiconductor apparatus with improved heat removal and improved heat flow to a heat sink is provided. The semiconductor apparatus includes a p-type semiconductor. An n-p tunnel junction is positioned within an epitaxial structure of the p-type semiconductor. A metal contact layer is connected to the n-p tunnel junction through an alloyed n-type contact interface. The n-p tunnel junction improves heat flow from the semiconductor through an alloyed contact interface formed between the tunnel junction and the metal contact layer which has lower thermal and electrical resistance in comparison to a conventional metallurgically abrupt interface of a p-type contact.

Claims

1. A semiconductor apparatus comprising: a p-type semiconductor; an n-p tunnel junction positioned within an epitaxial structure of the p-type semiconductor; and a metal contact layer connected to the n-p tunnel junction through an alloyed n-type contact interface.

2. The semiconductor apparatus of claim 1, wherein the p-type semiconductor further comprises: an n-type guide layer; a p-type guide layer; an n-cladding layer formed in contact with the n-type layer; and a p-cladding layer formed in contact with the p-type layer.

3. The semiconductor apparatus of claim 2, wherein the n-type guide layer and the p-type guide layer have a higher refractive index than p-cladding layer and the n-cladding layer.

4. The semiconductor apparatus of claim 1, wherein the n-p tunnel junction further comprises: a p+ layer; a heavily doped n++ layer; and a thin, very heavily doped p++ layer positioned between the p+ layer and the heavily doped n++ layer.

5. The semiconductor apparatus of claim 5, wherein the thin, very heavily doped p++ layer has a lower bandgap than the p+ layer.

6. The semiconductor apparatus of claim 1, wherein the alloyed n-type contact interface has a lower thermal and electrical resistance than a metallurgically abrupt interface of a p-type contact.

7. The semiconductor apparatus of claim 1, further comprising at least one of: a spacer and a heat sink connected to the metal contact layer.

8. A laser diode apparatus comprising: n-type and p-type waveguide layers having an active layer therebetween; a tunnel junction formed on a p-side of the n-type and p-type waveguide layers; and a metal contact layer in contact with the tunnel junction, wherein an alloyed contact interface is formed between the tunnel junction and the metal contact layer.

9. The laser diode apparatus of claim 8, further comprising an n-cladding layer formed in contact with the n-type waveguide layer and a p-cladding layer formed between with the p-type waveguide layer and the tunnel junction.

10. The laser diode apparatus of claim 9, wherein the n-type and p-type waveguide layers have higher refractive index than p-cladding layer and the n-cladding layer.

11. The laser diode apparatus of claim 8, wherein the tunnel junction further comprises an n-p tunnel junction having: a p+ layer; a heavily doped n++ layer; and a thin, very heavily doped p++ layer positioned between the p-type layer and the heavily doped n++ layer.

12. The laser diode apparatus of claim 11, wherein the thin, very heavily doped p++ layer has a lower bandgap than the p+ layer.

13. The laser diode apparatus of claim 8, wherein the alloyed contact interface is an alloyed n-type contact interface.

14. The laser diode apparatus of claim 13, wherein the alloyed n-type contact interface has a lower thermal and electrical resistance than a metallurgically abrupt interface of a p-type contact.

15. The laser diode apparatus of claim 8, wherein, when an electrical current is injected in the n-type and p-type waveguide layers, the active layer provides optical gain by stimulated emission, wherein the injected electrical current is converted to coherent optical power.

16. The laser diode apparatus of claim 8, further comprising at least one of: a spacer and a heat sink connected to the metal contact layer.

17. A method of heat removal from a high powered semiconductor device, the method comprising the steps of: providing a p-type semiconductor having an n-p tunnel junction positioned within an epitaxial structure of the p-type semiconductor; injecting an electrical current through the p-type semiconductor, thereby generating heat within the p-type semiconductor; and transferring at least a portion of the generated heat from the p-type semiconductor, through the n-p tunnel junction, and to a metal contact layer formed on the n-p contact layer, wherein an alloyed contact interface is formed between the n-p tunnel junction and the metal contact layer.

18. The method of claim 17, wherein the n-p tunnel junction further comprises: a p+ layer; a heavily doped n++ layer; and a thin, very heavily doped p++ layer positioned between the p+ layer and the heavily doped n++ layer.

19. The method of claim 17, wherein the alloyed contact interface further comprises an alloyed n-type contact interface having a lower thermal and electrical resistance than a metallurgically abrupt interface of a p-type contact.

20. The method of claim 17, further comprising conducting the heat transferred to the metal contact layer to at least one of: a spacer and a heat sink.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Many aspects of the disclosure can be better understood with reference to the following drawings. The components in the drawings are not necessarily to scale, emphasis instead being placed upon clearly illustrating the principles of the present disclosure. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.

[0020] FIG. 1 is a schematic diagram of an edge emitting laser diode bar with multiple emitters representative of the current state of the art, in accordance with the prior art.

[0021] FIG. 2 is a schematic diagram of a laser diode array consisting of stacked laser diode bars from FIG. 1 connected in series by thermally and electrically conducting spacers, in accordance with the prior art.

[0022] FIG. 3 is a detailed schematic diagram of epitaxial semiconductor layers that comprise laser diode bars of FIG. 1, in accordance with the prior art.

[0023] FIG. 4 is a schematic diagram of a single laser diode emitter depicting epitaxial layers in the laser diode along with the contact and features defining the lateral waveguide, in accordance with the prior art.

[0024] FIG. 5 is a schematic diagram of a laser diode bar with the p-side mounted to a thermally and electrically conducting spacer, in accordance with the prior art.

[0025] FIG. 6 depicts a corresponding temperature profile at the p-type contact with the thermal barrier, in accordance with the prior art.

[0026] FIG. 7 is a detailed cross-sectional view diagram of a semiconductor implemented as a laser diode having a tunnel junction, in accordance with a first exemplary embodiment of the present disclosure.

[0027] FIG. 8 is a detailed cross-sectional view diagram of the semiconductor implemented as a laser diode having a tunnel junction of FIG. 7 with features defining the lateral waveguide, in accordance with the first exemplary embodiment of the present disclosure.

[0028] FIG. 9 is a schematic diagram of layers of the semiconductor implemented as a laser diode having a tunnel junction of FIGS. 7-8 and the corresponding energy band alignment for the contact from the epitaxial layers of the p-type semiconductor to the tunnel junction and contact metal, in accordance with the first exemplary embodiment of the present disclosure.

[0029] FIG. 10 is a flowchart illustrating a method of heat removal from a high powered semiconductor device, in accordance with the first exemplary embodiment of the disclosure.

DETAILED DESCRIPTION

[0030] With the understanding of the conventional heat removal and heat flow to a heat sink, as presented in the Background, the inventors of the present disclosure identified that the thermal barrier is a fundamental property of the p-contact interface. The thermal barrier was not, however, identified at the contact to the n-type semiconductor. The observed difference between n-type and p-type contacts is consistent with the fact that the n-type contact is comprised of a thin alloy layer at the semiconductor metal interface while the p-type contact is metallurgically abrupt. Accordingly, these findings demonstrate that thermal performance of high power semiconductor devices requiring both p-type and n-type contacts could be greatly improved if the thermal barrier at the p-type contact were reduced or eliminated. This disclosure describes devices and methods by which this thermal barrier can be eliminated, thereby reducing the thermal resistance for heat flow through the p-type contact leading to significantly improved performance and reliability.

[0031] In particular, to overcome the deficiencies of the conventional art, the subject disclosure provides devices and methods which utilize a tunnel junction as part of the epitaxial structure in high power semiconductor devices to improve cooling efficiency. Applications employing edge emitting laser diodes exemplify a scenario that benefits from improved cooling efficiency. Laser diode bars can be stacked to achieve very high optical power density in a compact, modular form factor, similar to the form shown in FIG. 2. Due to the very high power density significant heat is generated inside the laser diode bars. Performance and reliability rely on efficient removal of heat form the semiconductor, which is accomplished through the use of spacers placed between the laser diode bars which conduct heat to the heat sink.

[0032] Tunnel junctions are commonly used in solar cells to improve conversion efficiency by stacking multiple p-n junctions within the epitaxial layers between detectors. In accordance with the present disclosure, edge-emitting laser diodes require both p-type and n-type semiconductors. The inherent thermal boundary between the p-type semiconductor and metal poses a fundamental limit to the heat transport from the semiconductor, as described by Rieprich et al. The thermal barrier results from the heat transport mechanism transition from predominantly phonon propagation in the semiconductor to electron transport in the metal. The thermal barrier does not exist at the barrier between the n-type semiconductor and metal contact, most likely due to the fact that this transition consists of an alloy rather than a metallurgically abrupt interface as is the case for the p-type contact. The present disclosure eliminates the thermal barrier at the p-type contact by placing a tunnel junction between the p-type semiconductor and the contact, thereby replacing the abrupt interface between the metal and p-type semiconductor with the alloyed n-type contact.

[0033] FIG. 7 is a detailed cross-sectional view diagram of a semiconductor 110 implemented as a laser diode having a tunnel junction, in accordance with a first exemplary embodiment of the present disclosure. While the semiconductor 110 is shown in a laser diode implementation, the disclosed structure may be used for other types of semiconductors beyond laser diodes, such as for LEDs. As shown, the semiconductor 110 includes a metal contact 120 positioned in abutment with an n+ substrate 122. An n-type cladding layer 124 may be positioned on the n+ substrate 122. The vertical waveguide for the semiconductor 110 may be formed by growing the waveguide layers, n-guide layer 126 and p-guide layer 128, which have larger refractive index than the surrounding p-type cladding layer 130 and n-type cladding layer 124. The electrical current injected from the cladding layers 124, 130 is converted to coherent optical power in the active region 132 (quantum well) positioned between the n-guide and p-guide layers 124, 126.

[0034] In contrast to the use of a p-type cap layer abutting a metal contact in conventional semiconductors (e.g., p-type cap layer 62 and metal contact 16 in FIGS. 3-4 and 6), in the semiconductor 110 of the subject disclosure, the p-type contact is eliminated by placing a reverse biased tunnel junction 134 between a p-type semiconductor 136 and a heavily doped n-type semiconductor 138. Current transport between the p-type and n-type semiconductor 136, 138 through the reverse biased tunnel junction 134 is facilitated by placing a thin, very heavily doped p++ layer 140 having slightly lower bandgap than the adjacent p-type layer 136 next to a heavily doped, n++ layer 138. A metal contact 142 is located adjacent to the thin, very heavily doped p++ layer 140 such that a metal-to-n-semiconductor interface 144 is formed therebetween. The use of the reversed biased tunnel junction and the metal-to-n-semiconductor interface 144 replaces the abrupt interface between the conventional metal and p-type semiconductor with the alloyed n-type contact, which acts to significantly improve the heat transfer between the epitaxial layer 112 and a heat sink in contact with the metal contact 142.

[0035] FIG. 8 is a detailed cross-sectional view diagram of the semiconductor 110 implemented as a laser diode having a tunnel junction of FIG. 7 with features defining the lateral waveguide, in accordance with the first exemplary embodiment of the present disclosure. With reference to FIGS. 7-8, lasing operations require that light generated in the active region 132 be guided in both the vertical and lateral dimensions. Lateral guiding can be achieved by limiting the lateral extent of the current flow by etching a mesa 150 into the semiconductor 110. The lateral waveguide may be defined by the etched mesa 150 using standard wet chemical processing and photolithography. An electrically insulating layer 152 or an oxide layer helps confine the current to the lateral waveguide, thereby improving electrical to optical conversion efficiency. The mesa structure 150 also guides the optical power 160 which facilitates coupling of the emitted light at the output facet and improves electrical to optical conversion efficiency. The insulating layer 162 may typically have lower thermal conductivity than the epitaxial layers 112 and metal contact 142 so heat flows predominantly through the metal contact 142.

[0036] FIG. 9 is a schematic diagram of layers of the semiconductor 110 implemented as a laser diode having a tunnel junction of FIGS. 7-8 and the corresponding energy band alignment for the contact from the epitaxial layers 112 of the p-type semiconductor to the tunnel junction 134 and contact metal 142, in accordance with the first exemplary embodiment of the present disclosure. In particular, FIG. 9 illustrates the detailed layers of p-type and n-type semiconductor 136, 138 through the reverse biased tunnel junction 134 which is facilitated by the thin, very heavily doped p++ layer 140, which is used to improve heat flow from the epitaxial layers 112 of the semiconductor to the metal contact 142. A graph 114 is shown in alignment to the specific layers of the semiconductor 110 to depict the corresponding energy levels of the conduction band 179 and valence band 177. Current transport occurs as electrons 176 tunnel from the heavily doped p++ region 140 to the heavily doped n++ semiconductor 138, as indicated by the arrow in graph 114. The tunnel junction 134 does not present a thermal barrier since the thermal transport mechanisms on both sides of the tunnel junction 134 are identical and electrical current flows between the contact 142 and n++ semiconductor 138 through the alloy junction between the metal contact 142 and the heavily doped n-type semiconductor 138. In contrast to the conventional p-type contact, as discussed relative to FIGS. 1-6, the alloyed junction within the semiconductor 110 does not present a thermal barrier for heat transport. Therefore, the thermal barrier due the p-type contact of conventional semiconductors no longer limits heat transport from the semiconductor.

[0037] FIG. 10 is a flowchart 200 illustrating a method of heat removal from a high powered semiconductor device, in accordance with the first exemplary embodiment of the disclosure. It should be noted that any process descriptions or blocks in flow charts should be understood as representing modules, segments, portions of code, or steps that include one or more instructions for implementing specific logical functions in the process, and alternate implementations are included within the scope of the present disclosure in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present disclosure.

[0038] As is shown by block 202, a p-type semiconductor having an n-p tunnel junction positioned within an epitaxial structure of the p-type semiconductor is provided. An electrical current is injected through the p-type semiconductor, thereby generating heat within the p-type semiconductor (block 204). At least a portion of the generated heat is transferred from the p-type semiconductor, through the n-p tunnel junction, and to a metal contact layer formed on the n-p contact layer, wherein an alloyed contact interface is formed between the n-p tunnel junction and the metal contact layer (block 206). Many additional steps, features, and functions may be included in the method, including any of the steps, features, and functions disclosed elsewhere within this disclosure, all of which are considered within the scope of the disclosed method.

[0039] It should be emphasized that the above-described embodiments of the present disclosure, particularly, any preferred embodiments, are merely possible examples of implementations, merely set forth for a clear understanding of the principles of the disclosure. Many variations and modifications may be made to the above-described embodiment(s) of the disclosure without departing substantially from the spirit and principles of the disclosure. All such modifications and variations are intended to be included herein within the scope of this disclosure and the present disclosure and protected by the following claims.