ELECTRICAL CONNECTION PAD WITH ENHANCED SOLDERABILITY AND CORRESPONDING METHOD FOR LASER TREATING AN ELECTRICAL CONNECTION PAD
20220369455 · 2022-11-17
Inventors
Cpc classification
Y02P70/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01L21/4853
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/81022
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L2224/8185
ELECTRICITY
H01L2224/81895
ELECTRICITY
H01L2224/8185
ELECTRICITY
H01L2224/81895
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L23/49811
ELECTRICITY
H05K2201/0373
ELECTRICITY
H01L2224/16227
ELECTRICITY
International classification
H05K1/11
ELECTRICITY
Abstract
The invention concerns an electrical connection pad (10′) for providing an electrical connection between components of an electronic system, wherein the electrical connection pad comprises: a metallic layer (12); and a laser induced periodic surface structure (20), LIPSS, formed on an external surface (16) of the electrical connection pad (10) and exposing the metallic layer (12) and a method for correspondingly laser-treating an electrical connection pad (10).
Claims
1-22. (canceled)
23: An electrical connection pad for providing an electrical connection between electronic components, wherein the electrical connection pad comprises: a metallic layer; and a laser induced periodic surface structure formed on an external surface of the electrical connection pad and exposing the metallic layer.
24: The electrical connection pad of claim 1, wherein the laser induced periodic surface structure has a period from 100 nm to 10 μm.
25: The electrical connection pad of claim 1, wherein the laser induced periodic surface structure has a modulation amplitude from 10 nm to 100 μm.
26: The electrical connection pad of claim 1, wherein the metal layer has a thickness from 1 μm to 10 mm.
27: The electrical connection pad of claim 1, wherein the metal layer comprises copper, zinc, tin, lead, brass, platinum, gold, silver and/or aluminium or combinations, compounds and/or alloys thereof.
28: The electrical connection pad of one of claim 1, further comprising a dielectric layer arranged on the metallic layer, wherein the laser induced periodic surface structure is further formed in the dielectric layer.
29: The electrical connection pad of claim 6, wherein the dielectric layer comprises a metal oxide, carbon and/or an organic material.
30: The electrical connection pad of claim 7, wherein the dielectric layer is a metal oxide layer comprising copper oxide, zinc oxide, tin oxide, lead oxide, brass oxide, platinum oxide, gold oxide, silver oxide, and/or aluminium oxide.
31: The electrical connection pad of claim 6, wherein the dielectric layer has a thickness between 1 nm and 5 μm, preferably between 1 nm and 1 μm, more preferably between 5 nm and 30 nm.
32: The electrical connection pad of claim 1, wherein the electrical connection pad is a solder pad.
33: A circuit board comprising an electrical connection pad for providing an electrical connection between electronic components, wherein the electrical connection pad comprises: a metallic layer; and a laser induced periodic surface structure formed on an external surface of the electrical connection pad and exposing the metallic layer.
34: A method for laser-treating an electrical connection pad, wherein the electrical connection pad comprises: a metallic layer; and a dielectric layer arranged on the metallic layer forming an external surface of the electrical connection pad; wherein the method comprises: laser-treating the external surface with polarised ultrashort-pulse pulsed laser light, thereby forming a laser induced periodic surface structure exposing the metal layer.
35: The method of claim 12, wherein the external surface is laser-treated with laser light pulses having a pulse length from 30 fs to 100 ns.
36: The method of claim 12, wherein the external surface is laser-treated with laser light pulses having a wavelength from 193 nm to 10.6 μm.
37: The method of claim 12, wherein the laser light has a fluence from 0.01 J/cm2 to 10 J/cm.sup.2.
38: The method of claim 12, wherein laser-treating the external surface comprises laser-treating from 10% to 90% of the external surface.
39: The method of claim 12, wherein laser-treating the external surface comprises scanning at least a part of the external surface with the laser light using a laser light deflection system.
40: The method of claim 12, wherein the laser light is configured such that a modulation amplitude of the laser induced periodic surface structure is equal to or greater than a thickness of the dielectric layer.
41: The method of claim 12, wherein laser-treating the external surface comprises completely removing the dielectric layer.
42: The method of claim 12, wherein the external surface is laser-treated with an incidence angle from 0° to 45°.
Description
BRIEF DESCRIPTION OF THE FIGURES
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DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0050] For the purposes of promoting an understanding of the principles of the invention, reference will now be made to preferred embodiments illustrated in the drawings, and specific language will be used to describe the same. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended, alterations and further modifications in the illustrated devices and such further applications of the principles of the invention as illustrated therein being contemplated as would normally occur now or in the future to one skilled in the art to which the invention relates.
[0051]
[0052] The method of the invention comprises laser-treating the external surface 16 with a pulsed laser light 32 generated by a laser device 30. In the example shown, the laser device 30 is an ultrashort solid state laser device, for example a Ytterbium-doped fiber laser, configured to generate linearly polarised ultrashort-pulse laser light having a pulse length of about 200 fs, a wavelength of about 1030 nm and a fluence of about 0.5 J/cm.sup.2. However, any other values within the previously described ranges are possible within the context of the present invention.
[0053] As shown in
[0054] As a result of the laser treatment with the indicated parameters, an electrical connection pad 10′ with an enhanced solderability comprising a LIPSS 20 on the external surface 16 is formed.
[0055]
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[0058] As a result of the laser treatment, the metallic layer 12 of the electrical connection pad 10′ of
[0059] In the example shown, the thickness H1′ of the metallic layer 12 after the laser treatment is about 30 μm and the thickness H2′ of the dielectric layer 14 after the laser treatment is about 3 nm. The LIPSS 20 has an amplitude modulation A and a period P. In the example shown in
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[0064] Although preferred exemplary embodiments are shown and specified in detail in the drawings and the preceding specification, these should be viewed as purely exemplary and not as limiting the invention. It is noted in these regards that only the preferred exemplary embodiments are shown and specified and that all variations and modifications should be protected, which presently or in the future lie within the scope of protection of the invention as defined in the claims.
LIST OF REFERENCE SIGNS
[0065] 10 electrical connection pad (before laser treatment) [0066] 10′ electrical connection pad (after laser treatment) [0067] 12 metallic layer [0068] 14 dielectric layer [0069] 16 external surface [0070] 20 laser induced periodic surface structure [0071] 30 laser device [0072] 32 laser light [0073] 34 laser light deflection system [0074] 40 conductive wiring [0075] 42 solder material [0076] 50 circuit board [0077] 52 conductive substrate [0078] H1 thickness of the metallic layer (before laser treatment) [0079] H2 thickness of the dielectric layer (before laser treatment) [0080] H1′ thickness of the metallic layer (after laser treatment) [0081] H2′ thickness of the dielectric layer (after laser treatment) [0082] P period of the laser induced periodic surface structure [0083] A modulation amplitude of the laser induced periodic surface structure [0084] θ incidence angle of the laser [0085] x, y directions