RECORDING MEDIUM, METHOD OF MANUFACTURING FULLERENE THIN FILM, RECORDING REPRODUCING APPARATUS, INFORMATION RECORDING METHOD, AND INFORMATION READING METHOD
20180336924 ยท 2018-11-22
Assignee
Inventors
Cpc classification
G11B9/14
PHYSICS
G11B9/04
PHYSICS
International classification
G11B9/04
PHYSICS
G11B9/14
PHYSICS
Abstract
According to the present invention, there is provided a recording medium comprising a substrate, a platinum layer formed on the substrate and having a (111) plane preferentially oriented, and a fullerene single crystal thin film formed on the platinum layer, and configured to be a recording layer, wherein an average value of average surface roughness Ra's with respect to four or more visual fields measured by using an atomic force microscope in a surface of the fullerene thin film is 0.5 nm or less.
Claims
1. A method of manufacturing a fullerene thin film, comprising: a step of forming a platinum layer by sputtering on a substrate; and a step of forming a fullerene layer by vacuum evaporation on the platinum layer.
2. The method of manufacturing a fullerene thin film according to claim 1, wherein the fullerene layer is a single crystal thin film.
3. The method of manufacturing a fullerene thin film according to claim 1, wherein a temperature of the substrate is 400? C. to 900? C. in the step of forming the platinum layer.
4. The method of manufacturing a fullerene thin film according to claim 1, wherein the temperature of the substrate is 400? C. to 900? C., and annealing is performed after the step of forming the platinum layer.
5. The method of manufacturing a fullerene thin film according to claim 1, wherein the substrate is a sapphire substrate.
6. The method of manufacturing a fullerene thin film according to claim 1, wherein the temperature of the substrate is 100? C. to 200? C. in the step of forming the fullerene layer.
7. The method of manufacturing a fullerene thin film according to claim 1, wherein the temperature of the substrate is 100? C. to 200? C., and annealing is performed after the step of forming the fullerene layer.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0036]
[0037]
[0038]
[0039]
[0040]
[0041]
[0042]
[0043]
[0044]
DETAILED DESCRIPTION OF THE INVENTION
[0045] Hereinafter, embodiments for carrying out the present invention will be described.
[0046] In the drawings used for the following description, there is a case where characteristic portions are illustrated by being enlarged for the sake of convenience in order to easily understand the characteristics, and a dimensional ratio or the like of each component is not limited to be the same as an actual value. A material, a dimension or the like exemplified in the following description is merely an example, and the present invention is not limited thereto, and can be carried out by being appropriately modified within a range where effects of the present invention are achieved. A configuration indicated by one embodiment can be applied to other embodiments.
[0047] Either of layer and thin film is used to mean a thin layer or a thin film.
[0048] (Recording Medium)
[0049] A recording medium 100 according to the embodiment includes a substrate 1, a platinum layer 2 formed on the substrate 1 and in which a (111) plane is preferentially oriented, and a fullerene thin film 3 formed on the platinum layer and configured to be a recording layer, wherein an average value of average surface roughness Ra's with respect to four or more visual fields measured by using an atomic force microscope (AFM) in a fullerene thin film surface 3a is 0.5 nm or less.
[0050] Here, measuring of the average value is performed as follows. The visual field where the average surface roughness Ra is measured by the atomic force microscope is 1 ?m?1 ?m. The measurement is performed with respect to four or more visual fields on the surface of the fullerene thin film, and the average value thereof is calculated. For example, in the case of a disk shaped recording medium, the four or more visual fields are set at positions on a same circumference substantially equally dividing the circumferential length. The position in a radial direction of the same circumference is in the middle of the maximum radius and the minimum radius of a region where the fullerene thin film is formed. If the average value of the average surface roughness Ra's with respect to four or more visual fields by the atomic force microscope is 0.5 nm or less, a head used in a head flight test of the current hard disk can fly. Specifically, in the head flight test which is performed by rotating the recording medium, and using a DFH (Dynamic Flying Height) head, an AE (Acoustic Emission) output voltage is 0.1 V or less at the time of seeking the DFH head in the radial direction on the surface of the fullerene thin film.
[0051] It is preferable that the fullerene thin film is a single crystal thin film. A crystal grain boundary is not present by being the single crystal thin film, and it is possible to easily obtain a flatness by which the head used in the head flight test can fly.
[0052] An example of a result obtained by measuring the surface roughness of the fullerene thin film in the recording medium of the present invention by using the atomic force microscope (product name: Nanoscope, manufactured by Digital Instruments Company) is indicated below.
[0053] The measured recording medium is a recording medium in which a substrate is sapphire (diameter 65 mm), a platinum layer (film thickness: 10 nm) is formed thereon by sputtering, and a C.sub.60 layer (film thickness: 3 nm) is formed on the platinum layer by vacuum evaporation.
[0054] Manufacturing conditions of the recording medium are as follows;
[0055] The sputtering in the forming of the platinum layer is performed under the conditions of 100 W, 20 seconds, Ar gas 0.27 Pa, and a substrate temperature 500? C. Moreover, the vacuum evaporation in the forming of the C.sub.60 layer is performed under the conditions of 400? C., 20 seconds, and the substrate temperature 190? C.
[0056] The results obtained by measuring the average surface roughness Ra's with respect to four visual fields (1 ?m?1 ?m) at the positions equally dividing the circumference having the diameter of approximately 40 mm into quarters in the surface of the manufactured recording medium, are respectively 0.38 nm, 0.44 nm, 0.40 nm, and 0.50 nm, and the average value thereof is 0.43 nm.
[0057] (Substrate)
[0058] For example, a single crystal substrate such as sapphire, silicon, MgO(111), SrTiO.sub.3(111), and LaAlO.sub.3(111) can be used as a substrate. The sapphire is preferable in order to enhance crystallinity of the fullerene single crystal thin film.
[0059] If the film of the platinum is formed on the sapphire single crystal substrate, the platinum thin film (platinum layer) whose (111) plane is preferentially oriented is formed. It is important that the above thin film is single crystal throughout the entire surface. If the substrate is a single crystal substrate, it is possible to grow monocrystals of a platinum (111) layer, but sapphire is preferable from the viewpoint of lattice matching properties.
[0060] In the viewpoint of epitaxially growing the platinum (111) layer, the single crystal substrate whose (0006) plane of the sapphire is exposed on the surface is more preferable.
[0061] If C.sub.60 is evaporated directly on the sapphire single crystal substrate, C.sub.60 moves on the substrate, and an island-shaped structure is easily formed. However, if C.sub.60 is evaporated on platinum, C.sub.60 can grow as a layer since platinum has a strong interaction with C.sub.60.
[0062] If the platinum layer is a single crystal thin film, it is possible to form a C.sub.60 film which is formed thereon into the single crystal thin film. If there is a large grain boundary, the grain boundary becomes a step difference, and the flight of the head may be hindered in a case where the C.sub.60 film is used as a recording layer of the recording medium.
[0063] The shape of the substrate is not limited, but in a case of being used in replacement of the current magnetic recording medium, the substrate is required to have a disk shape to rotate it, and has a hole for fixing a spindle at a central portion of the disk.
[0064]
[0065] From X-ray diffraction, it is confirmed that the Pt layer whose (111) plane is preferentially oriented, and is grown on the sapphire.
[0066]
[0067]
[0068] From the photograph of
[0069] On the contrary, in the example, the DFH head could be sought by stably floating without colliding with the surface of the C.sub.60 single crystal thin film, as seen from the fact that a peeled off portion is not found in the photograph of
[0070] The result indicates that the surface of the C.sub.60 single crystal thin film formed on the platinum layer whose (111) plane is preferentially oriented is so flat that the DFH head does not collide with the surface in the flight test, in the wide range referred to as the ring-shaped region of an outer diameter of 27 mm from an inner diameter of 15 mm, in comparison with the C.sub.60 single crystal thin film that does not have the platinum layer of which the (111) plane is preferentially oriented, and is formed on the CrTi layer.
[0071] The fact that the head used in the current rotating disk shaped magnetic recording medium stably flew above the recording medium of the present invention, indicates that the same means for recording (writing)?reproducing (reading) as that of the current rotating disk shaped magnetic recording medium can be used in the recording medium of the present invention. That is, it is indicated that moving a head attached to a tip of a swing arm in the substantially radial direction on the surface of the recording medium while rotating the disk shaped recording medium by using a spindle motor, positioning the head at a desired track of a track group formed into a concentric shape in the surface of the recording medium, recording information, and reading the information are possible.
[0072] (Platinum Layer)
[0073] The platinum layer is a layer whose (111) plane is preferentially oriented (that is, so that a [111] axis is parallel to a normal direction to the surface of the substrate), and is grown on the substrate.
[0074] Platinum is exceedingly stable in air, and does not have polarity.
[0075] On the (111) plane of the platinum layer, the fullerene thin film is formed so flat that the DFH head does not collide with the surface in the flight test (AE output voltage is 0.1 V or less) in the wide range on the order of 10 mm. If a large grain boundary is present in the fullerene thin film, stable flight of the head becomes difficult. Therefore, it is necessary that a large grain boundary does not exist in the fullerene thin film, and it is preferable that the fullerene thin film is a single crystal film (single crystal thin film). Here, single crystal thin film in the fullerene single crystal thin film means a case where the crystal grain boundary substantially present, and this can be evaluated by a half-value width of a rocking curve in an in-plane direction in the X-ray diffraction of the thin film as described later.
[0076] In the platinum layer, it is preferable that the film thickness is 5 nm to 30 nm. The reason is because the thin film that achieves both of crystallinity and flat properties is unlikely to be manufactured in a case of being too thin or too thick.
[0077] In the platinum layer, a half-value width of a rocking curve at a (111) diffraction peak in the X-ray diffraction is preferably 0.1? or less, and more preferably 0.01? or less.
[0078] Moreover, in the platinum layer, oscillation in a low angle side can be observed preferably over 10? or more, more preferably 15? or more, and further preferably 20? or more in the X-ray diffraction. The fact that the mirror plane oscillation of the low angle side can be observed indicates that the film thickness is very uniform.
[0079] (Fullerene Thin Film)
[0080] As a fullerene thin film, higher fullerenes such as C.sub.70, C.sub.76, C.sub.78 and C.sub.82 can be used, in addition to C.sub.60. But C.sub.60 is particularly preferable, because high crystallinity is easy to be obtained due to a sphere shape. In a case where the C.sub.60 thin film is used, it is preferable that purity of C.sub.60 is as high as possible. But a fullerene other than C.sub.60 may be included in the C.sub.60 thin film as long as the effects of the present invention are exhibited. It is preferable that the fullerene thin film is a single crystal thin film.
[0081] In order to consider the fullerene thin film as a single crystal thin film, a rocking curve half-value width of a (220) diffraction peak in X-ray diffraction is preferably 4? or less, and more preferably 3? or less.
[0082] In the fullerene thin film, it is preferable that the film thickness is 2 nm to 5 nm. The reason is because there is a need for the thickness of two molecules or more of C.sub.60 since the recording uses a polymerization reaction. If the film thickness is too large, insulation is made, and tunnel current is unlikely to flow even if voltage is applied.
[0083] (Method of Manufacturing Fullerene Thin Film) In a method of manufacturing a fullerene thin film of the present invention, the fullerene thin film is manufactured by forming a platinum layer on a substrate by sputtering, and forming a film of the fullerene on the platinum layer by vacuum evaporation method.
[0084] The substrate described above can be used as a substrate.
[0085] (Forming of Platinum Layer)
[0086] First, a platinum layer is formed on a substrate. The platinum layer is formed on the substrate by sputtering method. The substrate temperature in a step of the sputtering is appropriately controlled to be a certain temperature preferably in a range of 400? C. to 900? C., and more preferably in a range of 750? C. to 850? C. If being within the range, the platinum layer of fine crystallinity can be formed. That is, if the substrate temperature in the step of the sputtering is set in a range of 400? C. to 900? C., it is possible to form the platinum layer whose (111) plane where the rocking curve half-value width of the (111) diffraction peak is 0.1? or less in X-ray diffraction is preferentially oriented. And if the substrate temperature is set in a range of 750? C. to 850? C., it is possible to form the platinum layer whose (111) plane where the rocking curve half-value width of the (111) diffraction peak is 0.01? or less in X-ray diffraction is preferentially oriented (see
[0087] After the above step, annealing is preferably performed in order to form the platinum layer of fine crystallinity.
[0088] The annealing is performed by appropriately controlling the substrate temperature in a range of 400? C. to 900? C., and more preferably in a range of 750? C. to 850? C. The annealing time is preferably 5 minutes to 30 minutes.
[0089] (Forming of Fullerene Thin Film)
[0090] The fullerene thin film is formed on the platinum layer by vacuum evaporation method with fullerene as an evaporation source.
[0091] In order to form the fullerene single crystal thin film of finer crystallinity, the substrate temperature in a step of forming the fullerene thin film is appropriately controlled preferably in a range of 100? C. to 200? C., and more preferably in a range of 160? C. to 200? C. That is, if the substrate temperature in the step of forming the fullerene thin film is set in a range of 100? C. to 200? C., it is possible to form the fullerene single crystal thin film in which the rocking curve half-value width of the (220) diffraction peak is 4? or less in X-ray diffraction. And if the substrate temperature is set in a range of 160? C. to 200? C., it is possible to form the fullerene single crystal thin film in which the rocking curve half-value width of the (220) diffraction peak is 3? or less in X-ray diffraction (see
[0092] After the above step, annealing is preferably performed in order to form the fullerene thin film of finer crystallinity. The annealing is performed by appropriately controlling the substrate temperature in a range of 100? C. to 200? C., and more preferably 1 in a range of 60? C. to 200? C. The annealing time is preferably 5 minutes to 30 minutes.
[0093] (Method of Manufacturing Recording Medium)
[0094] A method of manufacturing the recording medium of the present invention can be performed by using the method of manufacturing the fullerene thin film of the present invention described above.
[0095] (Recording Apparatus)
[0096] A recording reproducing apparatus of the present invention includes the recording medium of the present invention.
[0097]
[0098] A recording reproducing apparatus 100 according to the embodiment includes the recording medium 11 of the present invention, a medium driving unit 12 that rotatably drives the recording medium 11, a reading/writing head (flying head) 13 that performs writing of information with respect to the recording medium 11, and reading of the recorded information by an electrical method, a head driving unit 14 that moves the reading/writing head 13 relatively to the recording medium 11, and a recording reproducing signal processing system 15 that performs processing of an electrical signal in order to perform reading/writing of information with respect to the recording medium 11 by the reading/writing head 13.
[0099] The recording reproducing signal processing system 15 can send a recording signal to the reading/writing head 13 by processing data input from the outside, and can send data to the outside by processing a reproducing signal from the reading/writing head 13.
[0100] Here, the reading/writing head is a head in which the reading head and the writing head are integrated. Moreover, the reading/writing head is preferably a DFH (Dynamic Flying Height) type head having a control function of a head flying height due to thermal expansion.
[0101] (Information Recording Method)
[0102] An information recording method of the present invention is a method of recording information in the fullerene thin film by using the recording medium which is the recording medium of the present invention, that is a disk shaped recording medium, wherein the information is recorded in the fullerene thin film by, while the recording medium is rotating, making a writing head approach the surface of the fullerene thin film of the recording medium, moving the writing head in an approximately radial direction of the recording medium, positioning the writing head at a desired track of concentric tracks, and locally applying a voltage of a predetermined intensity to the fullerene thin film with the writing head.
[0103] In the information recording method of the present invention, the method of PTL 1 can be used as an example of a principle of the information recording.
[0104] (Information Reading Method)
[0105] An information reading method of the present invention is a method of reading the information which is recorded in the fullerene thin film by using the information recording method of the present invention, in which the recorded information is read by making a reading head approach the surface of the fullerene thin film of the recording medium while rotating the recording medium, moving the reading head in an approximately radial direction of the recording medium, positioning the reading head at a desired track of concentric tracks, and detecting the difference of current between a spot where the information is recorded and a spot where the information is not recorded with the reading head.
[0106] In the information reading method of the present invention, the method of PTL 1 can be used as an example of a principle of the information reading.
[0107] The recording (writing) of information is possible by applying the voltage, and making the tunnel current flow. Since the fullerene single crystal thin film is an insulator, the current does not flow. However, if the voltage of a fixed level or more is applied, the tunnel current flows due to a tunnel effect. At that time, the fullerene molecules are polymerized to form a polymer, and have metallic electrical conductivity. Here, if tunnel resistance is measured in the polymerized place and the non-polymerized place, a difference is detected. Therefore it is possible to perform the recording of the information by using tunnel current. It is possible to distinguish a place where the tunnel current flows from a place where the tunnel current does not flow in the fullerene single crystal thin film. That is, if, at the place where the tunnel current flows once by applying voltage, the same voltage is applied once more, the tunnel current which is larger than that of the first time flows. In this manner, it is possible to perform the recording of information by applying a voltage to flow tunnel current, and making difference in magnitude of the flowing tunnel current.
[0108] On the other hand, it is possible to read (reproduce) the recorded information by detecting the difference in magnitude of the flowing tunnel current. Furthermore, if the voltage is applied to a reverse direction, the tunnel current returns to a value of the tunnel current which flows at the first time. Therefore, deleting is possible.
[0109] In order to apply the above principle to the writing, the reading and the deleting of a hard disk system, a head tip must be always controlled at a fixed flying height from the surface of the recording medium. Since the tunnel current is very small, a mechanism that reads the change of the tunnel current must be incorporated into the head. The current flowing through the fullerene single crystal thin film which is an insulating layer flows through the platinum layer in the in-plane direction, passes through an external circuit once through the spindle, and returns to the head thereafter. For example, in a case of the recording medium of a sapphire substrate/a platinum layer/a fullerene single crystal thin film, the sapphire substrate, and the fullerene single crystal thin film are also in contact with the spindle, but the current does not flow in these substrate and film in the in-plane direction due to high resistance in comparison with the platinum layer. In order to perform the writing and the reading with respect to the recording medium in the hard disk system, a sensor that detects the tunnel current must be incorporated into the head. As a mechanism for allowing the head to fly, a mechanism that is the same type of a mechanism used in the current hard disk head can be used. Since the current hard disk already achieves the flying height of 10 ? (which is substantially the same as the distance between the recording medium and the probe in the information recording using the probe of the STM of PTL 1) by using the DFH head at the time of the reading and writing, it is possible to use the similar mechanism thereto.
Examples
[0110] Hereinafter, the present invention will be described in more detail with reference to examples, but the following examples are for easily making understanding of the present invention, and the present invention is not at all limited by the examples.
[0111] (Forming of Platinum Layer)
[0112] A sapphire substrate having a diameter of 2 inches (approximately 50 mm) whose (0001) surface was polished flat was prepared, and a substrate temperature was retained at 800? C. for approximately 10 minutes. Thereby, it is possible to remove impurities, and to expose a clean surface.
[0113] Next, a film of platinum was formed on the substrate at the substrate temperature of 800? C. by sputtering. Conditions of the sputtering were chamber ultimate vacuum of 1?10.sup.?5 Pa, film forming Ar pressure of 0.2 Pa, film forming power of 80 W, and film forming time of 20 seconds. Next, the substrate temperature was retained at 800? C., and annealing was performed for 10 minutes in a vacuum. The sputtering was performed by a DC magnetron sputtering apparatus.
[0114] (Forming of Fullerene Single Crystal Layer)
[0115] Next, fullerene C.sub.60 was put into a resistance heating type evaporation source crucible, the crucible was heated, C.sub.60 was sublimated, and a C.sub.60 single crystal thin film was formed on the platinum layer by the vacuum evaporation. A vacuum degree at the time of forming the film was 1?10.sup.?5 Pa, the temperature of the evaporation source was approximately 380? C., the film forming time was 30 seconds, and the substrate temperature was 180? C.
[0116] Next, the substrate temperature was retained at 180? C. for 5 minutes, and the annealing was performed in a vacuum. Crystallinity of C.sub.60 was further improved by the annealing.
[0117] A result of X-ray diffraction in an interplanar direction of the C.sub.60 single crystal thin film is illustrated in
[0118]
[0119]
[0120] Since the diffraction peak of C.sub.60 (111) was buried in the mirror plane oscillation of the platinum layer, the temperature dependence of the crystallinity of C.sub.60 was evaluated by the rocking curve of (220) diffraction peak.
[0121]
[0122] Manufacturing conditions of the recording medium are as follows;
[0123] Substrate: Sapphire 2.5 inches, and plane orientation (0001)
[0124] Pt sputtering: 100 W, 20 seconds, Ar gas 0.27 Pa, and substrate temperature of 500? C.
[0125] C.sub.60 evaporation: 400? C., 20 seconds, and substrate temperature of 190? C.
[0126] A probe made of tungsten is used as a probe of the STM, and scanning conditions for the observation, and voltage applying conditions for the recording are as follows;
[0127] Normal scanning conditions: 2 V, and 0.2 nA
[0128] Recording voltage conditions: ?3.5 V, 1 nA (constant current mode), and 1 second
[0129] In each of
[0130] The voltage for the recording was applied immediately above the C.sub.60 molecular image indicated by an arrow in
[0131] The C.sub.60 molecular image indicated by the left-side arrow of two arrows in
[0132] When the voltage for the recording is applied immediately above the C.sub.60 molecular image indicated by the left-side arrow, it is found that the luminescent point of the C.sub.60 molecular image adjacent to the C.sub.60 molecular image becomes weak.
[0133] The observation of the STM image illustrated in
REFERENCE SIGNS LIST
[0134] 1 SUBSTRATE [0135] 2 PLATINUM LAYER [0136] 3 FULLERENE SINGLE CRYSTAL THIN FILM [0137] 11 RECORDING MEDIUM [0138] 12 MEDIUM DRIVING UNIT [0139] 13 READING/WRITING HEAD [0140] 14 HEAD DRIVING UNIT [0141] 15 RECORDING REPRODUCING SIGNAL PROCESSING SYSTEM [0142] 100 RECORDING MEDIUM [0143] 200 RECORDING REPRODUCING APPARATUS