SELECTIVE NON-VOLATILE MEMORY DEVICE AND ASSOCIATED READING METHOD
20220366981 · 2022-11-17
Inventors
Cpc classification
H10N70/882
ELECTRICITY
H10N70/826
ELECTRICITY
H10B63/80
ELECTRICITY
G11C2013/0092
PHYSICS
International classification
Abstract
A selective non-volatile memory device includes a first electrode, a second electrode and at least one layer made of an active material. The device has at least two programmable memory states associated with two voltage thresholds and also provides a selective role when it is in a highly resistive state.
Claims
1 A selective non-volatile memory device comprising: a first electrode; a second electrode; at least one layer made of an active material, forming an active memory layer, disposed between the first and the second electrode; said selective non-volatile memory device having at least two programmable memory states: a first programmable non-volatile memory state associated with a first threshold voltage V.sub.th1 for the active memory layer, said selective non-volatile memory device having in said first memory state a characteristic voltage current such that said selective non-volatile memory device switches from a highly resistive state to a state that is less resistive than the highly resistive state as soon as a voltage greater than or equal to V.sub.th1 is applied between the first and second electrodes and returns to its highly resistive state when the voltage applied is strictly less than V.sub.th1, an intensity of the current passing through said selective non-volatile memory device in its highly resistive state being strictly less than 10.sup.−7 A; a second non-volatile memory state associated with a second threshold voltage V.sub.th2 strictly greater than the first threshold voltage V.sub.th1, said selective non-volatile memory device having in said second memory state a characteristic voltage current such that said selective non-volatile memory device switches from a highly resistive state to a state that is less resistive than the highly resistive state as soon as a voltage greater than or equal to V.sub.th2 is applied between the first and second electrodes and returns to its highly resistive state when the voltage applied is strictly less than V.sub.th2, the intensity of the current passing through said selective non-volatile memory device in its highly resistive state being strictly less than 10.sup.−7 A; the material of the active memory layer being made of a mixture of an As.sub.2Te.sub.3 alloy and of a Ge.sub.3Se.sub.7 alloy.
2. The selective non-volatile memory device according to claim 1, wherein the mixture comprises a percentage greater than 15% and strictly less than 60% by weight of the As.sub.2Te.sub.3 alloy.
3. The selective non-volatile memory device according to claim 2, wherein the mixture comprises a percentage substantially equal to 20% by weight of the As.sub.2Te.sub.3 alloy.
4. The selective non-volatile memory device according to claim 1, wherein a thickness of the active memory layer is chosen according to the difference desired between the first threshold voltage V.sub.th1 and the second threshold voltage V.sub.th2.
5. The selective non-volatile memory device according to claim 1, wherein the active memory layer is constituted by a single active layer made of a mixture of an As.sub.2Te.sub.3 alloy and of a Ge.sub.3Se.sub.7 alloy.
6. The selective non-volatile memory device according to claim 1, wherein the active memory layer is constituted by a stack of layers wherein each layer has a thickness less than or equal to 5 nm.
7. A method for writing the second memory state in a selective non-volatile memory device according to claim 1, comprising programming said second non-volatile memory state by applying a given programming current and a current pulse comprised between V.sub.th1 and V.sub.th2 with a descending flank of a predetermined duration.
8. A method for writing the first memory state in a selective non-volatile memory device according to claim 1, comprising programming 6 the first non-volatile memory state by applying a voltage pulse greater than V.sub.th2 with a predetermined descending flank of a predetermined non-zero duration and greater than a duration of the descending flank of the programming voltage pulse of the second memory state.
9. The method according to claim 8, wherein the descending flank of a predetermined non-zero duration of the voltage pulse greater than V.sub.th2 has a slope preferably comprised between 10.sup.6 V/s and 10.sup.8 V/s
10. A method for reading the memory state of the selective non-volatile memory device according to claim 1, comprising applying a pulse with a voltage strictly greater than V.sub.th1 and strictly less than V.sub.th2 with a predetermined descending flank of a predetermined non-zero duration and greater than a duration of a descending flank of a programming voltage pulse of the second memory state.
Description
BRIEF DESCRIPTION OF THE FIGURES
[0053] The figures are shown for the purposes of information and in no way limit the invention.
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DETAILED DESCRIPTION OF AN EMBODIMENT OF THE INVENTION
[0065] Unless mentioned otherwise, the same element that appears on different figures has a unique reference.
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[0077] As shall be seen in what follows, the device 1 is a device that serves as a non-volatile memory and selector, with the two functions being integrated into the same device 1 which comprises: [0078] a first electrode or bottom electrode 3; [0079] a second electrode or top electrode 4; [0080] a layer 2 made of an active material, referred to as active memory layer, disposed between the first and the second electrode.
[0081] A top electrode of a device is defined as the electrode located above this device and the bottom electrode of a device as the electrode located under this device, the electrodes being located on either side of the device. Of course, the adjectives “top” and “bottom” are here relative to the orientation of the assembly including the top electrode, the device and the bottom electrode to the extent that when turning over this assembly, the electrode previously qualified as top becomes the bottom electrode and the electrode previously qualified as bottom becomes the top electrode. Likewise, a vertical disposition of the electrodes can also be provided with the active layer 2 disposed between the two electrodes 3 and 4.
[0082] The bottom 3 and top 4 electrodes are each carried out a conductive material that can be different or the same for the two electrodes 3 and 4. Such a conductive material is for example TiN, TaN, W, TiWN, TiSiN or WN.
[0083] The active layer 2 is for example a layer of active material of the chalcogenide type carried out by mixing (by co-sputtering for example) from As.sub.2Te.sub.3 and Ge.sub.3Se.sub.7 alloys. Advantageously, the mixture forming the active material comprises a percentage greater than 15% and strictly less than 60% by weight of As.sub.2Te.sub.3. As a preferred example, the mixture forming the active material here comprises 20% by weight of As.sub.2Te.sub.3. The principle of co-sputtering is to use the energy of a plasma on the surface of one or more sputtering targets (here As.sub.2Te.sub.3 and Ge.sub.3Se.sub.7 targets), to pull off one-by-one the atoms of the material of the target or targets and deposit them, for example on the bottom electrode 3.
[0084] The material of the active layer 2 is chosen to allow the device 1 to have a very strong resistivity in its amorphous stationary state (so-called “OFF” state) and a strong conductivity once subjected to a voltage greater than a threshold voltage. The particularity of the material chosen is to allow for a modulation of this threshold voltage that can have several values (at least two threshold voltages V.sub.th1 and V.sub.th2) thanks to the control of the descending flank of the electrical programming pulse which shall be further covered in what follows. The presence of these two threshold voltages V.sub.th1 and V.sub.th2 (with the understanding that it is entirely possible to consider more than two threshold voltages with an ad hoc programming) is shown in
[0085] Thus, when the device 1 has a threshold voltage Vth1, the intensity of the current passing through it (designated by I.sub.Leak or sub-threshold current) is very low (the device is therefore very resistive) as long as the voltage at the terminals of the device 1 is strictly less than V.sub.th1. As soon as the threshold voltage Vth1 is reached, the current rapidly increases and the device 1 becomes very conductive. As soon as the voltage is reduced again under V.sub.th1, the device 1 becomes a low conductor again. Note that the material of the active layer is here chosen so that the sub-threshold current has a particularly low intensity; in other terms, the intensity of the sub-threshold current is strictly less than 10.sup.−7 A.
[0086] The behaviour of the device 1 is similar when it has a second threshold voltage V.sub.th2 strictly greater than the first threshold voltage V.sub.th1. In this case, the intensity of the current passing through it (I.sub.Leak or sub-threshold current) is very low as long as the voltage at the terminals of the device 1 is strictly less than V.sub.th2. As soon as the threshold voltage V.sub.th2 is reached, the current rapidly increases and the device 1 becomes very conductive. As soon as the voltage is reduced again below V.sub.th2, the device 1 becomes a low conductor again. Here again, the intensity of the sub-threshold current is strictly less than 10.sup.−7 A.
[0087] The particularity of the materials chosen for the active layer 2 is to be able to provide a modulation of the threshold voltage V.sub.th according to the type of electrical programming pulse of the device 1. In other terms, the device 1 has at least two different voltage thresholds (a first threshold voltage V.sub.th1 and a second threshold voltage V.sub.th2) due to the material of the active layer that will react differently according to the shape of the electrical programming pulse, and in particular according to the descending flank of the electrical programming pulse. This operation will be explained in more details hereinafter.
[0088] It is understood that as soon as, contrary to resistive memories of the PCRAM or CBRAM type, the memory state does not depend on the resistivity of the device 1 but on the value of the threshold voltage, V.sub.th1 or V.sub.th2, which can be programmed and written in a non-volatile manner in the device 1. The device 1 according to the invention can thus be designated by the terminology “NVTS” or “non-volatile threshold switching” (device with a non-volatile switching threshold). The memory information is here given by the value of the threshold voltage.
[0089] Furthermore, having an intensity of sub-threshold current strictly less than 10.sup.−7 A and a volatile behaviour of the resistivity of the device 1 (i.e. according to whether the voltage is above or below the threshold voltage, the device respectively switches to the conductive or resistive state) makes it possible to have a device 1 that also acts as a selector; in a configuration of the crossbar type, in the absence of a polarisation voltage greater than the threshold voltage at the terminals of the device, the current passing through the device is very low and makes it possible to prevent a parasitic leakage current of the “sneak pass” type.
[0090] The device 1 is therefore both a non-volatile memory device (with the threshold voltage as memory information) and a selector (with a very low leakage current).
[0091] The programming and the reading of the device 1 according to the invention in reference to
[0092] The pulse 100 (referred to as RESET) is a programming pulse to bring the device 1 to the programming state represented by the second threshold voltage V.sub.th2. This pulse has an intensity in voltage that is comprised between the first threshold voltage V.sub.th1 and the second threshold voltage V.sub.th2.
[0093] According to a first configuration, the device 1 is already in a programming state represented by the second threshold voltage V.sub.th2. In this case, the device 1 will remain in this state. Indeed, in order for a change in the threshold voltage to occur, a sufficient programming current has to flow in the device 1. Here, in accordance with
[0094] The link between the descending duration of the programming pulse and the threshold voltage is shown in
[0095] The active material Mat1 is a mixture of As.sub.2Te.sub.3 and Ge.sub.3Se.sub.7 alloys with 20% by weight of As.sub.2Te.sub.3.
[0096] The active material Mat2 is a mixture of As.sub.2Te.sub.3 and Ge.sub.3Se.sub.7 alloys with 40% by weight of As.sub.2Te.sub.3.
[0097] The active material Mat3 is a mixture of As.sub.2Te.sub.3 and Ge.sub.3Se.sub.7 alloys with 60% by weight of As.sub.2Te.sub.3.
[0098] The slope of the descending flank (“Ramp rate”) is defined in
[0099] It is observed in
[0100] Thus, if the device is in the programming state represented by the threshold voltage V.sub.th1 and a very short duration of the descending flank of the pulse 100 is used with a device 1 in a conductive state, the value of the threshold voltage will be modified thanks to the duration of the flank and will change the threshold voltage to the value V.sub.th2 by choosing the suitable duration of the descending flank.
[0101] The pulse 101 (referred to as SET) is a programming pulse to bring the device 1 to the programming state represented by the first threshold voltage V.sub.th1. This pulse has an intensity in voltage greater than the second threshold voltage V.sub.th2 and a descending flank that has a duration greater than the duration of the descending flank of the pulse 100.
[0102] Here, contrary to the RESET programming, the effect of the pulse 101 is independent of the starting memory state. As the programming pulse 101 has a voltage intensity that exceeds the second threshold voltage V.sub.th2 (and therefore a fortiori the threshold voltage V.sub.th1), the device 1 will become conductive as soon as its threshold voltage is exceeded (whether it is V.sub.th1 or V.sub.th2). The current will therefore reach a level of current that is substantial enough. Then, the invention resides in the choice of the material of the active layer 2 so that the duration of the descending flank makes it possible to pass to the first threshold voltage V.sub.th1. Here, the slope of the descending flank (“ramp rate”) is advantageously comprised between 10.sup.7 V/s and 10.sup.6 V/s, which can result for example in a pulse of 3.5V for a descending flank duration comprised between 350 ns and 3.5 μs. By applying such a descending duration, the first threshold voltage V.sub.th1 is “written” in the device 1.
[0103] It is observed in
[0104] Advantageously, the alloys used for the active layer 2 do not have any crystallisation during the operation of the device 1 as NVTS.
[0105] This type of behaviour is linked to a reorganisation of the structure of the material that takes place during the application of a pulse with a sufficiently long descending flank, giving rise to a reduction in the threshold voltage of the device. It is to be underlined that even if a crystalline phase exists for As.sub.2Te.sub.3 and a crystalline phase for Ge.sub.3Se.sub.7, in the case of a mixture of the As.sub.2Te.sub.3 and Ge.sub.3Se.sub.7 alloys considered there is no corresponding crystalline phase. Only a phase segregation could give rise to the formation of a crystalline phase or phases (i.e. reached for example after an excessive rise in temperature, after excessive Resistive state/Conductive state cycling of the device, etc.). However, the behaviour of the NVTS type could be obtained through the preservation of an amorphous phase in the device in parallel with a partially or completely crystalline phase. This configuration is also compatible with the memory and selective functionalities of the device 1 object of the present invention.
[0106] Generally, the method for programming the device according to the invention comprises: [0107] a RESET step consisting of applying a voltage pulse comprised between V.sub.th1 and V.sub.th2 with a descending flank of a predetermined duration according to the material of the active layer of the device 1, to bring the device 1 to the programming state represented by the first threshold voltage V.sub.th2; [0108] a SET step consisting of applying a voltage pulse greater than V.sub.th2 with a predetermined descending flank of a predetermined non-zero duration according to the material of the active layer of the device 1 and greater than the duration of the descending flank of the RESET programming voltage pulse, to bring the device 1 to the programming state represented by the second threshold voltage V.sub.th1.
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[0110] The pulse 102 shown in
[0111] Generally, the method for reading the memory state of the device according to the invention comprises a step of applying a voltage pulse strictly greater than V.sub.th1 and strictly less than V.sub.th2 with a predetermined descending flank of a predetermined non-zero duration and greater than the duration of the descending flank of the programming voltage pulse of the second memory state V.sub.th2 (advantageously substantially identical to the duration of the descending flank of the programming voltage pulse of the first memory state V.sub.th1, i.e. with a slope of the descending flank advantageously comprised between 10.sup.7 V/s and 10.sup.6 V/s).
[0112] In light of the effect of the slope of the programming pulse on the material of the active layer 2, intermediate programming state between V.sub.th1 and V.sub.th2 can be considered in order to obtain a multi-level programming of the MLC (“multi-level cell”) type.
[0113] It should also be noted that the thickness of the active layer is advantageously chosen according to the difference desired between the first threshold voltage V.sub.th1 and the second threshold voltage V.sub.th2. This choice is in particular shown in
[0114] Although the invention was more specifically described in the case of a mixture of d′As.sub.2Te.sub.3 and of Ge.sub.3Se.sub.7 other alloys could be used, for example with a base of Si, Ge, As, Sb, Bi, S, Se, Te combined together but also with the introduction of elements (i.e. dopants) such as C, N or O. In particular the AsSe, AsTe, GeSe, GeS alloys with different stoichiometries are among those that could be combined in order to obtain the mechanism sought. Advantageously, the combination between an alloy of the IV-VI type (for example with a Ge and Se base) and an alloy of the VI-V type (for example with a As and Te base) can be used, the gap energy of the alloy of the IV-VI type being more substantial than that of the VI-V alloy. Note moreover that although the active layer 2 was described as a layer of material (mixture of As.sub.2Te.sub.3 and of Ge.sub.3Se.sub.7 alloys), a configuration of the active layer in the form of multi-layers of materials providing the memory behaviour and NVTS selector is also applicable to device according to the invention.
[0115] The deposition techniques of the different layers (electrodes, active layer) are well known to those skilled in the art. These can be techniques of the physical vapour deposition (PVD), chemical vapour deposition (CVD) or atomic layer deposition (ALD) type for example.
[0116] Of course, the programming proposed hereinabove is given solely for the purposes of illustration; an intelligent programming can be considered where the pulses can depend on the initial programming state of the device. This is the case for example when the device according to the invention has just been read and the state to be programmed corresponds to the state that has just been read: in this case, it is possible to overcome a programming pulse.
[0117] Likewise, any form of pulses that makes it possible to obtain the structural reorganisation of the material in the memory state V.sub.th1, of course constitutes a possible alternative. In particular, the descending flank of the pulse can be further reduced by considering the portion of the same flank that has an effective impact on the change in the threshold voltage V.sub.th. This type of pulse 200 is shown in
[0118] The global duration of each pulse of