INSPECTION SYSTEM FOR OPTICAL SURFACE INSPECTION OF A TEST SPECIMEN

Abstract

An inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen includes an illumination system, an optical detection system, and a detection filer system. The illumination system is for illuminating the test specimen and the fluorescent agent with illuminating radiation, and includes one or more illuminating means. The optical detection system is for detecting fluorescent radiation emitted by the test specimen with the fluorescent agent. The detection filter system is set up to filter illumination radiation of the illumination system in the inspection system in such a way that the optical detection system only detects fluorescence radiation from the fluorescence agent.

Claims

1. An inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, comprising an illumination system for illuminating the test specimen and the fluorescent agent with illuminating radiation, with one or more illuminating mean; an optical detection system for detecting fluorescent radiation emitted by the test specimen with the fluorescent agent; a detection filter system which is set up to filter illumination radiation of the illumination system in the inspection system in such a way that the optical detection system only detects fluorescence radiation from the fluorescence agent.

2. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen according to claim 1, wherein the inspection system has an illumination filter system for spectrum filtering the illumination radiation, with one or more illumination filter elements, and each illumination filter element is arranged in the inspection system in such a way that it is arranged between a respective illumination means and the test specimen to be tested with the fluorescent agent.

3. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen according to claim 2, wherein the illumination filter system spectrum filters the illumination radiation in such a way that the illumination radiation, including plus/minus 10 nanometers, deviates from the specified wavelength.

4. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to at claim 1, wherein the fluorescent agent and the illuminating radiation of the illumination system are selected interactively in such a way that the fluorescent radiation lies in a green wavelength range between 560 and 490 nanometers inclusive.

5. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 1, wherein the illumination radiation of the illumination system is in an ultraviolet wavelength range, between 380 and 100 nanometers inclusive, UV-A between 380 and 315 nanometers inclusive, UV-B between 315 and 280 nanometers inclusive or UV-C between 280 and 100 nanometers inclusive.

6. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 1, wherein one or more illumination means of the illumination system is or are LED illumination means.

7. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 6, wherein the detection system is a camera, the camera having an objective, and the detection filter system being arranged in front of, on, in or behind the objective.

8. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 7, wherein an illumination means of the illumination system is arranged as spot illumination, or several illumination means of the illumination system are arranged as a ring light or dome illumination, the illumination means in the ring light or dome illumination being evenly spaced from one another.

9. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 8, wherein one or more illumination means of the illumination system are movably arranged in the inspection system.

10. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to the inspection system has a 3D detection device to detect surface contamination on the test specimen.

11. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 10, wherein the 3D detection device is designed for the function of a detection principle according to shape from shading, deflectometry, stereo cameras, laser triangulation or strip light.

12. The inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged on the test specimen, according to claim 10, wherein the test specimen or the 3D detection device is movable to detect surface contamination by means of the 3D detection device.

13. (canceled)

14. An inspection system for optical surface inspection of a test specimen having a fluorescent agent arranged thereon, comprising: an illumination system comprising an illuminating means for illuminating the test specimen with an illumination radiation; an optical detection system for detecting a fluorescent radiation emitted by the test specimen; and a detection filter system arranged to filter the illumination radiation such that the optical detection system only detects the fluorescent radiation.

15. The inspection system of claim 14, further comprising an illumination filter system for spectrum filtering the illumination radiation, the illumination filter system comprising a filter element.

16. The inspection system of claim 15 wherein the filter element is arranged between the illuminating means and the test specimen.

17. The inspection system of claim 15, wherein the illumination filter system spectrum filters the illumination radiation that deviates from a specified wavelength by more than 10 nanometers

18. The inspection system of claim 14 wherein the fluorescent agent and the illuminating radiation are selected interactively so that the fluorescent radiation lies in a green wavelength range

19. The inspection system of claim 18 wherein the green wavelength range is between 560 and 490 nanometers inclusive.

20. The inspection system of claim 14 wherein the illumination radiation is in an ultraviolet wavelength range between 380 and 100 nanometers inclusive.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In the following, the disclosure is explained by way of example with reference to the accompanying drawings using exemplary embodiments. The features shown below can represent an aspect of the disclosure both individually and in combination. In the figures:

[0052] FIG. 1 shows a symbolic view of an inspection system according to the disclosure for optical surface inspection of a test specimen according to a first exemplary embodiment; and

[0053] FIG. 2 shows a symbolic view of an inspection system according to the disclosure for optical surface inspection of a test specimen according to a second exemplary embodiment.

[0054] FIG. 3 shows a symbolic view of an inspection system according to the disclosure for optical surface inspection of a test specimen, also with regard to surface contamination, according to a third exemplary embodiment.

DETAILED DESCRIPTION

[0055] FIGS. 1 and 2 each show, in separate exemplary embodiments, an inspection system 10 for optical surface inspection of a test specimen 12 with a fluorescent agent arranged on the test specimen 12, including

[0056] an illumination system 14, for illuminating the test specimen 12 and the fluorescent means with illuminating radiation, with one or more illumination means 14a, 14b, 14c, 14d, 14e;

[0057] an optical detection system 16 for detecting fluorescent radiation emitted from the test specimen 12 with the fluorescent agent; and

[0058] a detection filter system 18 which is set up to filter illumination radiation from the illumination system 14 in the inspection system 10 such that the optical detection system 16 only detects fluorescence radiation from the fluorescence agent. The fluorescent agent is not explicitly shown, but surrounds the test specimen 12. According to the two figures, the number of illumination means is only shown as an example and is not limiting.

[0059] In both exemplary embodiments, it is provided that the inspection system 10 has an illumination filter system 20 for filtering the spectrum of the illumination radiation. According to FIG. 1, the illumination filter system 20 includes three illumination filter elements 20a, 20b, 20c, each illumination filter element 20a, 20b, 20c is arranged in the inspection system 10 such that it is between a respective illumination means 14a, 14b, 14c and the test specimen 12 to be tested with the fluorescent agent is arranged.

[0060] According to the two figures, the number of illumination filter elements is only shown as an example and is not limiting.

[0061] According to FIG. 2, the illumination filter system 20 includes five illumination filter elements 20a, 20b, 20c, 20d, 20e, each illumination filter element 20a, 20b, 20c, 20d, 20e being arranged in the inspection system 10 in such a way that it is between a respective illumination means 14a, 14b, 14c, 14d, 14e and the test specimen 12 to be tested with the fluorescent agent.

[0062] For example, it is provided for both exemplary embodiments that the illumination filter system 20 spectrum filters the illumination radiation in such a way that the illumination radiation, including plus/minus 10 nanometers, deviates from the default wavelength.

[0063] Furthermore, it is provided for both exemplary embodiments that the fluorescent agent and the illuminating radiation of the illumination system 14 are selected interactively in such a way that the fluorescent radiation lies in a green wavelength range, e.g., between 560 and 490 nanometers inclusive. The wavelength of the excitation depends on the fluorescent agent and can vary.

[0064] Furthermore, it is provided for both exemplary embodiments that the illumination radiation of the illumination system 14 is in an ultraviolet wavelength range, e.g., between 380 and 100 nanometers inclusive, UV-A between 380 and 315 nanometers inclusive, UV-B between 315 and 280 nanometers inclusive, or UV-C between 280 and 100 nanometers inclusive. The wavelength of the excitation depends on the fluorescent agent and can vary.

[0065] Furthermore, it is provided for both exemplary embodiments that one or more illumination means 14a, 14b, 14e, 14d, 14e of the illumination system 14 is or are LED illumination means.

[0066] Furthermore, it is provided for both exemplary embodiments that the detection system 16 is a camera, the camera having an objective 22, the detection filter system 18 being arranged in front of the objective 22.

[0067] According to FIG. 1 it is provided that three illumination means 14a, 14b, 14c of the illumination system 14 are arranged as spot illumination in such a way that they are arranged as ring light illumination, with the illumination means 14a, 14b, 14c being evenly spaced from one another in the ring light illumination are. The beam paths are shown symbolically with lines. Measured on the ring, the illumination means 14a, 14b, 14c are arranged one after the other at a distance of 120 degrees from one another.

[0068] According to FIG. 2 it is provided that the illumination means 14a, 14b, 14c, 14d, 14e of the illumination system 14 are arranged as spot illumination in such a way that they are arranged as dome illumination, with the illumination means 14a, 14b, 14c, 14d, 14e are evenly spaced from one another in the dome illumination. This is only shown symbolically. Some beam paths are shown symbolically with lines.

[0069] Basically, you get ring illumination if you increase the number of exemplary LED spots and their filters and arrange them on a circular band at equidistant intervals. If the number of equidistant rings is also extended upwards to a hemisphere, a dome illumination is obtained.

[0070] Optionally and independently of the exemplary embodiments, it is possible to use a semitransparent mirror in the upper area, in a complementary fashion or alone.

[0071] For example, it is provided that one or more illumination means 14a, 14b, 14c, 14d, 14e of the illumination system 14 are movably arranged in the inspection system 10.

[0072] According to FIG. 3, it is provided that the inspection system 10, in addition to the inspection system 10 according to FIG. 1, has a 3D detection device 24 to detect surface contamination on the test specimen 12. It is shown as an example that the 3D detection device 24 has a stereo camera structure. It is also possible for the 3D detection device 24 to use further detection principles. According to FIG. 3, it is possible for the test specimen 12 and/or the 3D detection device 24 to move or move to detect surface contamination with the 3D detection device 24.

REFERENCE NUMERALS

[0073] 10 inspection system

[0074] 12 Test specimens (with fluorescent agent)

[0075] 14 Illumination system

[0076] 14a First illumination means of the illumination system

[0077] 14b Second illumination means of the illumination system

[0078] 14c Third illumination means of the illumination system

[0079] 14d Fourth illumination means of the illumination system

[0080] 14e Fifth illumination means of the illumination system

[0081] 16 Detection system

[0082] 18 Detection filter system

[0083] 20 Illumination Filter System

[0084] 20a First illumination filter element of the illumination filter system

[0085] 20b Second illumination filter element of the illumination filter system

[0086] 20c Third illumination filter element of the illumination filter system

[0087] 20d Fourth illumination filter element of the illumination filter system

[0088] 20e Fifth illumination filter element of the illumination filter system

[0089] 22 Objective

[0090] 24 3D detection device