Methods of defect inspection of plated through hole structures utilizing fluorescent conductive fill material
10123431 ยท 2018-11-06
Assignee
Inventors
Cpc classification
H05K3/0011
ELECTRICITY
H05K3/426
ELECTRICITY
H05K2201/0326
ELECTRICITY
G01N21/95684
PHYSICS
H05K2201/0329
ELECTRICITY
H05K1/0274
ELECTRICITY
H05K1/115
ELECTRICITY
H05K3/4644
ELECTRICITY
Y10T29/49165
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G01N2021/646
PHYSICS
H05K1/09
ELECTRICITY
International classification
G01N21/95
PHYSICS
H05K3/00
ELECTRICITY
Abstract
A microelectronic substrate may be fabricated having a substrate core with at least one plated through hole extending therethrough, wherein the plated through hole includes a fluorescent conductive fill material which can be utilized to detect defects during the fabrication process. In one embodiment, the microelectronic substrate may be fabricated by forming a substrate core, forming a hole to extend from a first surface to an opposing second surface of the substrate core, forming a conductive material layer on a sidewall(s) of the substrate core hole, disposing a fluorescent conductive fill material to abut the conductive material layer and fill the remaining substrate core hole, illuminating an exposed portion of the fluorescent conductive fill material, and detecting anomalies in the light fluoresced by the exposed portion of the fluorescent conductive fill material.
Claims
1. A method of fabricating a microelectronic substrate, comprising: forming a substrate core having a first surface and an opposing second surface; forming a hole to extend from the substrate core first surface to the substrate core second surface defining at least one sidewall; forming a conductive material layer on the at least one substrate core hole sidewall; disposing a fluorescent conductive fill material to abut the conductive material layer and substantially fill the substrate core hole; illuminating an exposed portion of the fluorescent conductive fill material; and detecting anomalies in the light fluoresced by the exposed portion of the fluorescent conductive fill material.
2. The method of claim 1, wherein disposing the fluorescent conductive fill material comprises disposing a fluorescent conductive fill material comprising an epoxy resin having a fluorescent component dispersed therein.
3. The method of claim 1, wherein disposing the fluorescent conductive fill material comprises disposing a fluorescent conductive fill material including a fluorescent component selected from the group consisting of rhodamine, fluorescein, cyanine, and inorganic quantum dots.
4. The method of claim 1, wherein disposing the fluorescent conductive fill material includes disposing a fluorescent conductive fill material having a fluorescent component comprising between about 0.5% and 50% by weight of the fluorescent conductive fill material.
5. The method of claim 1, forming a conductive material layer on the at least one substrate core hole sidewall comprising depositing a conductive material layer on the substrate core first surface, the substrate core second surface, and the at least one substrate core hole sidewall.
6. The method of claim 5, wherein depositing the conductive material layer comprises depositing a substantially uniform layer of conductive material layer on the substrate core first surface, the substrate core second surface, and the at least one substrate core hole sidewall.
7. The method of claim 5, wherein depositing the conductive material layer comprises plating a metal material.
8. The method of claim 5, wherein plating a metal material comprises plating a metal material selected from the group consisting of copper, silver, gold, nickel, titanium, tungsten, and alloys thereof.
9. The method of claim 5, wherein disposing the fluorescent conductive fill material comprises disposing the fluorescent conductive fill material into the substrate core hole and over the conductive material layer proximate the substrate core first surface; and further including removing a portion of the fluorescent conductive fill material over the conductive material layer proximate the substrate core first surface.
10. The method of claim 5, wherein illuminating the exposed portion of the fluorescent conductive fill material comprises transmitting electromagnetic radiation toward the exposed portion of the fluorescent conductive fill material.
11. The method of claim 5, further including forming a first capping conductive material layer on the fluorescent conductive fill material and the conductive material layer proximate the substrate core first surface, forming a second capping conductive material layer on the fluorescent conductive fill material and the conductive material layer proximate the substrate core second surface, removing a portion of the first capping conductive material layer and the conductive material layer proximate on the substrate core first surface, and removing a portion of the second capping conductive material layer and the conductive material layer proximate to substrate core second surface to separate the conductive material layer into individual conductive material liners within each of substrate core holes and form first capping layers on the fluorescent conductive fill material proximate the substrate core first surface and second capping layers on the fluorescent conductive fill material proximate the substrate core second surface.
12. The method of claim 11, further including forming a top trace network proximate the substrate core first surface.
13. The method of claim 12, wherein the top trace network comprises a plurality of dielectric layers and a plurality of conductive traces formed on and extending through at least one of the plurality of dielectric layers.
14. The method of claim 11, further including forming a bottom trace network proximate the substrate core second surface.
15. The method of claim 14, wherein the bottom trace network comprises a plurality of dielectric layers and a plurality of conductive traces formed on and extending through at least one of the plurality of dielectric layers.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The subject matter of the present disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. The foregoing and other features of the present disclosure will become more fully apparent from the following description and appended claims, taken in conjunction with the accompanying drawings. It is understood that the accompanying drawings depict only several embodiments in accordance with the present disclosure and are, therefore, not to be considered limiting of its scope. The disclosure will be described with additional specificity and detail through use of the accompanying drawings, such that the advantages of the present disclosure can be more readily ascertained, in which:
(2)
(3)
(4)
(5)
(6)
DESCRIPTION OF EMBODIMENTS
(7) In the following detailed description, reference is made to the accompanying drawings that show, by way of illustration, specific embodiments in which the claimed subject matter may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the subject matter. It is to be understood that the various embodiments, although different, are not necessarily mutually exclusive. For example, a particular feature, structure, or characteristic described herein, in connection with one embodiment, may be implemented within other embodiments without departing from the spirit and scope of the claimed subject matter. References within this specification to one embodiment or an embodiment mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one implementation encompassed within the present description. Therefore, the use of the phrase one embodiment or in an embodiment does not necessarily refer to the same embodiment. In addition, it is to be understood that the location or arrangement of individual elements within each disclosed embodiment may be modified without departing from the spirit and scope of the claimed subject matter. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the subject matter is defined only by the appended claims, appropriately interpreted, along with the full range of equivalents to which the appended claims are entitled. In the drawings, like numerals refer to the same or similar elements or functionality throughout the several views, and that elements depicted therein are not necessarily to scale with one another, rather individual elements may be enlarged or reduced in order to more easily comprehend the elements in the context of the present description.
(8) The terms over, to, between and on as used herein may refer to a relative position of one layer with respect to other layers. One layer over or on another layer or bonded to another layer may be directly in contact with the other layer or may have one or more intervening layers. One layer between layers may be directly in contact with the layers or may have one or more intervening layers.
(9) Embodiments of the present description include a microelectronic substrate having a substrate core with at least one plated through hole extending therethrough, wherein the plated through hole includes a fluorescent conductive fill material. In one embodiment, the plated through hole may comprise a hole defined to extend from a first surface to an opposing second surface of the substrate core, wherein a conductive material layer is formed on a sidewall(s) of the substrate core hole and a conductive fill material, having a fluorescent component, is disposed to fill the remaining substrate core hole after forming the conductive material layer. In another embodiment, the fluorescent conductive fill material is used for the detection of defects.
(10)
(11)
(12) As shown in
(13) As shown in
(14) In one embodiment, the fluorescent conductive fill material 128 may comprise epoxy resin, silicon dioxide, epoxy hardener, and the like, having a fluorescent component dispersed therein. The fluorescent component may include, but is not limited to rhodamine, fluorescein, cyanine, and inorganic quantum dots. The fluorescent component may comprise between about 0.5% and 50% by weight of the fluorescent conductive fill material 128.
(15) As shown in
(16) As will be understood to those skilled in the art, a fluorescent material is a substance the absorbs electromagnetic radiation (such a light), usually short-wavelength light (such as ultraviolet light), and re-emits it almost instantaneously at a different wavelength (usually longer) than the absorbed electromagnetic radiation. As further shown in
(17) As shown in
(18) As shown in
(19) The dielectric layers 152.sub.1, 152.sub.2, 162.sub.1, and 162.sub.2 may comprise any appropriate dielectric material, including, by not limited to, liquid crystal polymer, epoxy resin, bismaleimide triazine resin, polybenzoxazole, polyimide material, silica-filled epoxy (such as materials available from Ajinomoto Fine-Techno Co., Inc., 1-2 Suzuki-cho, Kawasaki-ku, Kawasaki-shi, 210-0801, Japan (e.g. Ajinomoto ABF-GX13, and Ajinomoto GX92)), and the like. The conductive traces 154.sub.1, 154.sub.2, 164.sub.1, and 164.sub.2 may be formed of any appropriate conductive material, including, but not limited to, copper, silver, gold, nickel, titanium, tungsten, and alloys thereof. The processes used for forming the top and bottom trace networks 150, 160 are well known to those skilled in the art, and for the sake of brevity and conciseness will not be described or illustrated herein. It is understood that the top and bottom trace networks 150, 160 may be formed from any number of dielectric layers and conductive traces.
(20) Embodiments of the present description may have advantages over existing processes. As will be understood to those skilled in the art, embodiments of the present description may provide an inline inspection metrology which can quickly and accurately detect the defects in the conductive fill material without waiting for cross-section analysis after the completion of substrate core formation process. This may provide higher throughput (no need of time-consuming cross-section analysis), faster data turnaround (no need to wait for substrate core formation), higher inspection accuracy (no soft error due to other plating related defects). Furthermore, there is no need to change the process of depositing the conductive fill material or change the overall substrate core formation process.
(21)
(22)
(23) Depending on its applications, the computing device 300 may include other components that may or may not be physically and electrically coupled to the board 302. These other components include, but are not limited to, volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flash memory, a graphics processor, a digital signal processor, a crypto processor, a chipset, an antenna, a display, a touchscreen display, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, an accelerometer, a gyroscope, a speaker, a camera, and a mass storage device (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth).
(24) The communication chip 306A, 306B enables wireless communications for the transfer of data to and from the computing device 300. The term wireless and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not. The communication chip 306 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond. The computing device 300 may include a plurality of communication chips 306A, 306B. For instance, a first communication chip 306A may be dedicated to shorter range wireless communications such as Wi-Fi and Bluetooth and a second communication chip 306B may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.
(25) The processor 304 of the computing device 300 may include a microelectronic package having a microelectronic substrate having a fluorescent conductive fill material within a plated through hole, as described above. The term processor may refer to any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory.
(26) The communication chip 306A, 306B may include a microelectronic package having a microelectronic substrate having a fluorescent conductive fill material within a plated through hole, as described above.
(27) In various implementations, the computing device 300 may be a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder. In further implementations, the computing device 300 may be any other electronic device that processes data.
(28) It is understood that the subject matter of the present description is not necessarily limited to specific applications illustrated in
(29) The following examples pertain to further embodiments. Specifics in the examples may be used anywhere in one or more embodiments.
(30) In Example 1, a microelectronic substrate may comprise a substrate core having at least one plated through hole extending from a first surface of the substrate core to a second surface of the substrate core, wherein the plated through hole comprises a hole defined to extend from the substrate core first surface to the substrate core second surface forming at least one sidewall, a conductive material liner formed on the at least one substrate core hole sidewall, and a fluorescent conductive fill material disposed to abut the conductive material liner and substantially fill the substrate core hole.
(31) In Example 2, the subject matter of Example 1 can optionally include the fluorescent conductive fill material comprising an epoxy resin having a fluorescent component dispersed therein.
(32) In Example 3, the subject matter of Example 1 or 2 can optionally include the fluorescent conductive fill material including a fluorescent component selected from the group consisting of rhodamine, fluorescein, cyanine, and inorganic quantum dots.
(33) In Example 4, the subject matter of any of Examples 1 to 3 can optionally include the fluorescent conductive fill material including a fluorescent component comprising between about 0.5% and 50% by weight of the fluorescent conductive fill material.
(34) In Example 5, a method of fabricating a microelectronic substrate may comprise forming a substrate core having a first surface and an opposing second surface, forming a hole to extend from the substrate core first surface to the substrate core second surface defining at least one sidewall, forming a conductive material layer on the at least one substrate core hole sidewall, and disposing a fluorescent conductive fill material to abut the conductive material layer and substantially fill the substrate core hole.
(35) In Example 6, the subject matter of Example 5 can optionally include disposing the fluorescent conductive fill material comprising disposing a fluorescent conductive fill material comprising an epoxy resin having a fluorescent component dispersed therein.
(36) In Example 7, the subject matter of any of Examples 5 to 6 can optionally include disposing the fluorescent conductive fill material comprising disposing a fluorescent conductive fill material including a fluorescent component selected from the group consisting of rhodamine, fluorescein, cyanine, and inorganic quantum dots.
(37) In Example 8, the subject matter of any of Examples 5 to 7 can optionally include disposing the fluorescent conductive fill material including disposing a fluorescent conductive fill material having a fluorescent component comprising between about 0.5% and 50% by weight of the fluorescent conductive fill material.
(38) In Example 9, the subject matter of any of Examples 5 to 8 can optionally include forming a conductive material layer on the at least one substrate core hole sidewall comprising depositing a conductive material layer on the substrate core first surface, the substrate core second surface, and the at least one substrate core hole sidewall.
(39) In Example 10, the subject matter of any of Examples 5 to 9 can optionally include depositing the conductive material layer comprising depositing a substantially uniform layer of conductive material on the substrate core first surface, the substrate core second surface, and the at least one substrate core hole sidewall.
(40) In Example 11, the subject matter of any of Examples 5 to 10 can optionally include depositing the conductive material layer comprising plating a metal material.
(41) In Example 12, the subject matter of any of Examples 5 to 11 can optionally include disposing the fluorescent conductive fill material into the substrate core hole and over the conductive material layer proximate the substrate core first surface; and further including removing a portion of the fluorescent conductive fill material over the conductive material layer proximate the substrate core first surface.
(42) In Example 13, the subject matter of any of Examples 5 to 12 can optionally include forming a first capping conductive material layer on the fluorescent conductive fill material and the conductive material layer proximate the substrate core first surface, forming a second capping conductive material layer on the fluorescent conductive fill material and the conductive material layer proximate the substrate core second surface, removing a portion of the first capping conductive material layer and the conductive material layer proximate the substrate core first surface, and removing a portion of the second capping conductive material layer and the conductive material layer proximate to substrate core second surface to separate the conductive material layer into individual conductive material liners within each of substrate core holes and form first capping layers on the fluorescent conductive fill material proximate the substrate core first surface and second capping layers on the fluorescent conductive fill material proximate the substrate core second surface.
(43) In Example 14, a method of detecting a defect in a plated through hole may comprise forming a substrate core having a hole defined to extend from the substrate core first surface to the substrate core second surface forming at least one sidewall, a conductive material layer formed on the at least one substrate core hole sidewall; and a fluorescent conductive fill material disposed abutting the conductive material layer and substantially filling the substrate core hole, illuminating an exposed portion of the fluorescent conductive fill material, and detecting anomalies in the light fluoresced by the exposed portion of the fluorescent conductive fill material.
(44) In Example 15, the subject matter of Example 14 can optionally include forming the substrate core comprising forming the substrate core having the fluorescent conductive fill material comprising an epoxy resin having a fluorescent component dispersed therein.
(45) In Example 16, the subject matter of any of Examples 14 to 15 can optionally include forming the substrate core comprises forming the substrate core having the fluorescent conductive fill material comprising a fluorescent component selected from the group consisting of rhodamine, fluorescein, cyanine, and inorganic quantum dots.
(46) In Example 17, the subject matter of any of Examples 14 to 17 can optionally include forming the substrate core comprising forming the substrate core having the fluorescent conductive fill material comprising a fluorescent component comprising between about 0.5% and 50% by weight of the fluorescent conductive fill material.
(47) In Example 18, a computing device, comprising a board, and a microelectronic package attached to the board, wherein the microelectronic package comprising a microelectronic substrate, comprising a substrate core having at least one plated through hole extending from a first surface of the substrate core to a second surface of the substrate core, wherein the plated through hole comprises a hole defined to extend from the substrate core first surface to the substrate core second surface forming at least one sidewall, a conductive material liner is formed on the at least one substrate core hole sidewall, and a fluorescent conductive fill material disposed to abut the conductive material liner and substantially fill the substrate core hole.
(48) In Example 19, the subject matter of Example 18 can optionally include the fluorescent conductive fill material including a fluorescent component selected from the group consisting of rhodamine, fluorescein, cyanine, and inorganic quantum dots.
(49) In Example 20, the subject matter of Example 18 to 19 can optionally include the fluorescent conductive fill material including a fluorescent component comprising between about 0.5% and 50% by weight of the fluorescent conductive fill material.
(50) Having thus described in detail embodiments of the present description, it is understood that the present description defined by the appended claims is not to be limited by particular details set forth in the above description, as many apparent variations thereof are possible without departing from the spirit or scope thereof.