Methods for Depositing Films with Organoaminodisilane Precursors

Abstract

Described herein are precursors and methods for forming silicon-containing films. In one aspect, there is provided a precursor of Formula I:

##STR00001##

wherein R.sup.1 is selected from linear or branched C.sub.3 to C.sub.10 alkyl group, linear or branched C.sub.3 to C.sub.10 alkenyl group, linear or branched C.sub.3 to C.sub.10 alkynyl group, C.sub.1 to C.sub.6 dialkylamino group, electron withdrawing group, and C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, linear or branched C.sub.1 to C.sub.10 alkyl group, linear or branched C.sub.3 to C.sub.6 alkenyl group, linear or branched C.sub.3 to C.sub.6 alkynyl group, C.sub.1 to C.sub.6 dialkylamino group, C.sub.6 to C.sub.10 aryl group, linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, electron withdrawing group, and C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form ring selected from substituted or unsubstituted aromatic ring or substituted or unsubstituted aliphatic ring; and n=1 or 2.

Claims

1. A composition comprising greater than 99.5% by weight pure organoaminodisilane wherein the organoaminodisilane is made by a process comprising reacting disilane with a secondary amine with Formula II: ##STR00064## in the presence of a catalyst, wherein R.sup.1 and R.sup.2 are each independently selected from the group consisting of isopropyl, isobutyl, sec-butyl, tert-butyl, pentyl, iso-pentyl, tert-pentyl, hexyl, iso-hexyl, and neo-hexyl, provided that both R.sup.1 and R.sup.2 are not di-iso-propyl.

2. The composition of claim 1 wherein R.sup.1 and R.sup.2 are linked to form a ring selected from the group consisting of a. pyrrolidino wherein R.sup.1=propyl and R=Me, b. piperidino wherein R.sup.1=propyl and R.sup.2=Et, c. 2,6-dimethylpiperidino wherein R.sup.1=iso-propyl and R.sup.2=sec-butyl, and d. 2,5-dimethylpyrrolidino wherein R.sup.1=R.sup.2=iso-propyl.

3. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is isobutyl.

4. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is sec-butyl.

5. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is tert-butyl.

6. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is pentyl.

7. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is iso-pentyl.

8. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is tert-pentyl.

9. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is hexyl.

10. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is iso-pentyl.

11. The composition of claim 1 wherein at least one of R.sup.1 and R.sup.2 is neo-pentyl.

12. The composition of claim 2 wherein R.sup.1 and R.sup.2 are linked to form a pyrrolidino moiety.

13. The composition of claim 2 wherein R.sup.1 and R.sup.2 are linked to form a piperidino moiety.

14. The composition of claim 2 wherein R.sup.1 and R.sup.2 are linked to form a 2, 6-dimethylpiperidino moiety.

15. The composition of claim 2 wherein R.sup.1 and R.sup.2 are linked to form a 2, 5-dimethylpyrrolidino moiety.

Description

BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS

[0050] FIG. 1 shows the TGA/DSC graph of di-iso-propylaminodisilane, wherein the TGA demonstrates that the compound is volatile and the DSC shows it has a boiling point of about 157 C.

[0051] FIG. 2 shows Raman spectrum of amorphous Si film deposited on borosilicate glass described in working example 3 using PMADS.

[0052] FIG. 3 shows the relationship between deposition rate and pulse time of DIPADS for forming silicon oxide films using DIPADS and ozone at a temperature of 300 C.

[0053] FIG. 4 shows the relationship between thicknesses and the number of cycles for silicon oxide films using DIPADS and ozone at a temperature of 300 C.

DETAILED DESCRIPTION OF THE INVENTION

[0054] The organoaminodisilanes described herein are used as precursors to form stoichiometric and non-stoichiometric silicon containing films such as, but not limited to, amorphous silicon, crystalline silicon, silicon oxide, silicon oxycarbide, silicon nitride, silicon oxynitride, and silicon oxycarbonitride. These precursors can also be used, for example, as dopants for metal containing films. The organoaminodisilane precursors used in semiconductor processes are typically high purity volatile liquid precursor chemical that are vaporized and delivered to a deposition chamber or reactor as a gas to deposit a silicon containing film via CVD or ALD processes for semiconductor devices. The selection of precursor materials for deposition depends upon the desired resultant silicon-containing material or film. For example, a precursor material may be chosen for its content of chemical elements, its stoichiometric ratios of the chemical elements, and/or the resultant silicon containing film or coating that are formed under CVD. The precursor material may also be chosen for various other characteristics such as cost, relatively low toxicity, handling characteristics, ability to maintain liquid phase at room temperature, volatility, molecular weight, and/or other considerations. In certain embodiments, the precursors described herein can be delivered to the reactor system by any number of means, preferably using a pressurizable stainless steel vessel fitted with the proper valves and fittings, to allow the delivery of liquid phase precursor to the deposition chamber or reactor.

[0055] The organoaminodisilane precursors described herein exhibit a balance of reactivity and stability that makes them ideally suitable as CVD or ALD precursors in microelectronic device manufacturing processes. With regard to reactivity, certain precursors may have boiling points that are too high to be vaporized and delivered to the reactor to be deposited as a film on a substrate. Precursors having higher relative boiling points require that the delivery container and lines need to be heated at or above the boiling point of the precursor under a given vacuum to prevent condensation or particles from forming in the container, lines, or both. With regard to stability, other precursors may form silane (SiH.sub.4) or disilane (Si.sub.2H.sub.6) as they degrade. Silane is pyrophoric at room temperature or it can spontaneously combust which presents safety and handling issues. Moreover, the formation of silane or disilane and other by-products decreases the purity level of the precursor and changes as small as 1-2% in chemical purity may be considered unacceptable for reliable semiconductor manufacture. In certain embodiments, the organoaminodisilane precursors having Formula I described herein comprise 2% or less by weight, or 1% or less by weight, or 0.5% or less by weight of by-product (such as the corresponding bis-disilane byproduct) after being stored for a time period of 6 months or greater, or one year or greater which is indicative of being shelf stable. In addition to the foregoing advantages, in certain embodiments, such as for depositing a silicon oxide or silicon nitride or silicon film using an ALD, ALD-like, PEALD, or CCVD deposition method, the organoaminodisilane precursor described herein may be able to deposit high density materials at relatively low deposition temperatures, e.g., 500 C. or less, or 400 C. or less, 300 C. or less, 200 C. or less, 100 C. or less, or 50 C. or less. In one particular embodiment, the organoaminodisilane precursor, such as di-iso-propylaminodisilane or di-sec-butylaminodisilane or 2,6-dimethylpiperidinodisilane can be used to deposit a silicon-containing film via ALD or PEALD at a temperature as low as 50 C. or less or at ambient or room temperature (e.g., 25 C.).

[0056] In one embodiment, described herein is a composition for forming a silicon-containing film comprising: an organoaminodisilane having Formula I described herein and a solvent(s). Without being bound by any theory, it is believed that composition described herein may provide one or more advantages compared to pure organoaminodisilane. These advantages include: better usage of the organoaminodisilane in semiconductor processes, better stability over long term storage, cleaner evaporation by flash vaporization, and/or overall more stable direct liquid injection (DLI) chemical vapor deposition process. The weight percentage of the organoaminodisilane in the composition can range from 1 to 99% with the balance being solvent(s) wherein the solvent(s) does not react with the organoaminodisilane and has a boiling point similar to the organoaminodisilane. With regard to the latter, the difference between the boiling points of the organoaminodisilane and solvent(s) in the composition is 40 C. or less, more preferably 20 C. or less, or 10 C. or less. Exemplary compositions include, but not limited to, a mixture of di-iso-propylaminodisilane (b.p. about 157 C.) and octane (b.p. 125 to 126 C.), a mixture of di-iso-propylaminodisilane (b.p. about 157 C.) and ethylcyclohexane (b.p. 130-132 C.), di-iso-propylaminodisilane (b.p. about 157 C.) and toluene (b.p. 115 C.), a mixture of di-sec-butylaminodisilane and decane (b.p. 174 C.), a mixture of di-sec-butylaminodisilane and decane, and a mixture of di-sec-butylaminodisilane and 2,2-oxybis(N,N-dimethylethanamine (b.p., 189 C.).

[0057] In one aspect, there is provided at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00012##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2. Further in embodiments wherein n=2, any one or all of R.sup.1 and R.sup.1, R.sup.1 and R.sup.2, or R.sup.2 and R.sup.2 can be linked to form a ring. In certain embodiments of Formula I, R.sup.1 and R.sup.2 are the same with the proviso that they cannot both be iso-propyl. In other embodiments, R.sup.1 and R.sup.2 are different. In one embodiment, R.sup.1 and R.sup.2 are selected from a linear or branched C.sub.3 to C.sub.6 alkyl group and are linked to form a cyclic ring. In the yet further embodiments, R.sup.1 and R.sup.2 are not linked together to form a ring.

[0058] For the organoaminodisilane precursors of Formula A wherein n=1, the organoaminodisilane precursor has the following Formula IA wherein R.sup.1 and R.sup.2 are as described herein and are optionally linked to form a ring structure.

##STR00013##

The organoaminodisilane precursors of Formula A wherein n=2, the organoaminodisilane precursor has the following Formula IB wherein R is equivalent to R.sup.2 defined aforementioned and R.sup.1 and R.sup.2 are as described herein and are optionally linked to form a ring structure:

##STR00014##

[0059] In the formulae and throughout the description, the term alkyl denotes a linear, or branched functional group having from 1 to 10 or 1 to 6 carbon atoms. Exemplary alkyl groups include, but are not limited to, methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, tert-butyl, pentyl, iso-pentyl, tert-pentyl, hexyl, iso-hexyl, and neo-hexyl. In certain embodiments, the alkyl group may have one or more functional groups such as, but not limited to, an alkoxy group, a dialkylamino group or combinations thereof, attached thereto. In other embodiments, the alkyl group does not have one or more functional groups attached thereto.

[0060] In the formulae and throughout the description, the term cyclic alkyl denotes a cyclic functional group having from 3 to 10 or from 4 to 10 carbon atoms or from 5 to 10 carbon atoms. Exemplary cyclic alkyl groups include, but are not limited to, cyclobutyl, cyclopentyl, cyclohexyl, and cyclooctyl groups.

[0061] In the formulae and throughout the description, the term aryl denotes an aromatic cyclic functional group having from 5 to 12 carbon atoms or from 6 to 10 carbon atoms. Exemplary aryl groups include, but are not limited to, phenyl, benzyl, chlorobenzyl, tolyl, and o-xylyl.

[0062] In the formulae and throughout the description, the term alkenyl group denotes a group which has one or more carbon-carbon double bonds and has from 3 to 10 or from 3 to 6 or from 3 to 4 carbon atoms.

[0063] In the formulae and throughout the description, the term alkynyl group denotes a group which has one or more carbon-carbon triple bonds and has from 3 to 10 or from 3 to 6 or from 3 to 4 carbon atoms.

[0064] In the formulae and throughout the description, the term alkoxy denotes an alkyl group which has is linked to an oxygen atom (e.g., RO) and may have from 1 to 10, or from 1 to 6, or from 1 to 4 carbon atoms. Exemplary alkoxy groups include, but are not limited to, methoxy (OCH.sub.3), ethoxy(OCH.sub.2CH.sub.3), n-propoxy (OCH.sub.2CH.sub.2CH.sub.3), and iso-propoxy (OCHMe.sub.2).

[0065] In the formulae and throughout the description, the term dialkylamino group denotes a group which has two alkyl groups attached to a nitrogen atom and has from 1 to 10 or from 2 to 6 or from 2 to 4 carbon atoms.

[0066] The term electron withdrawing group as used herein describes an atom or group thereof that acts to draw electrons away from the SiN bond. Examples of suitable electron withdrawing groups or substituents include, but are not limited to, nitriles (CN). In certain embodiments, electron withdrawing substituent can be adjacent to or proximal to N in any one of Formula I. Further non-limiting examples of an electron withdrawing group includes F, Cl, Br, I, CN, NO.sub.2, RSO, and/or RSO.sub.2 wherein R can be a C.sub.1 to C.sub.10 alkyl group such as, but not limited to, a methyl group or another group.

[0067] In certain embodiments, one or more of the alkyl group, alkenyl group, alkynyl group, alkoxy group, dialkylamino group, aryl group, and/or electron withdrawing group in Formula I may be substituted or have one or more atoms or group of atoms substituted in place of, for example, a hydrogen atom. Exemplary substituents include, but are not limited to, oxygen, sulfur, halogen atoms (e.g., F, Cl, I, or Br), nitrogen, and phosphorous. In other embodiments, one or more of the alkyl group, alkenyl group, alkynyl group, alkoxy group, dialkylamino aryl group, and/or electron withdrawing group in Formula I may be unsubstituted.

[0068] In certain embodiments, R.sup.1 is selected from a C.sub.1 to C.sub.10 alkyl group, preferably a branched C.sub.3 to C.sub.6 alkyl group such as iso-propyl, sec-butyl, tert-butyl, tert-pentyl (amyl) whereas R.sup.2 is hydrogen and n=2. Exemplary of these particular embodiments include, but are not limited to:

##STR00015##

[0069] In certain embodiments, R.sup.1 and R.sup.2 are linked in Formula I to form a ring structure. In these embodiments, R.sup.2 is not hydrogen. For example, in an embodiment where R.sup.1 and R.sup.2 are linked together to form a ring, R.sup.2 may include a bond (instead of a hydrogen substituent) for linking to R.sup.1. Thus, in this particular embodiment, R.sup.2 may be selected from for example, a C.sub.1 to C.sub.10 alkyl moiety, a C.sub.3 to C.sub.10 alkenyl moiety or a linear or branched C.sub.3 to C.sub.10 alkynyl moiety. In these or other embodiments, the ring structure can be unsaturated such as, for example, a cyclic alkyl ring, or saturated, for example, an aryl ring. Further, in these or other embodiments, the ring structure can also be substituted or substituted. In one particular embodiment, the organoaminodisilane comprises an aliphatic, substituted ring such as a heteratomic cyclic functional group having from 5 to 10 carbon atoms and at least one nitrogen atom. Exemplary of these particular embodiments include, but are not limited to, 1,2-bis(pyrrolidino)disilane wherein R.sup.1=propyl and R.sup.2=Me, 1,2-bis(piperidino)disilane wherein R.sup.1=propyl and R.sup.2=Et, 2, 6-dimethylpiperidinodisilane wherein R.sup.1=iso-propyl and R.sup.2=sec-butyl, and 2, 5-dimethylpyrrolidinodilane wherein R.sup.1=R.sup.2=iso-propyl.

[0070] In certain embodiments of Formula I, R.sup.1 is selected from a C.sub.3 to C.sub.10 alkyl group, preferably a branched C.sub.3 to C.sub.6 alkyl group such as iso-propyl, sec-butyl, tert-butyl, tert-pentyl (amyl) whereas R.sup.2 is selected from a C.sub.1 to C.sub.10 alkyl group, preferably C.sub.1 to C.sub.6 alkyl group, and n=2. Exemplary of these particular embodiments include, but are not limited to:

##STR00016##

[0071] In one particular embodiment of Formula I, n=2 and R.sup.1 and R.sup.1 are linked to form an aliphatic ring which can further be substituted or unsubstituted. Exemplary structures of these embodiments of Formula I are shown below:

##STR00017##

[0072] In another particular embodiment of Formula I, n=2 and R.sup.1 and R.sup.2 are linked to form an aliphatic ring which can further be substituted or unsubstituted. Exemplary structures of these embodiments of Formula I are shown below:

##STR00018##

[0073] In other embodiments, R.sup.1 and R.sup.2 are not linked in Formula I.

[0074] In certain embodiments, the at least one organoaminodisilane precursor having Formula I has one or more substituents comprising oxygen or nitrogen atoms. In this or other embodiments, substituents R.sup.1 and R.sup.2 are linked via an oxygen or a nitrogen atom in Formula I to form a ring structure.

[0075] Without being bound by theory, it is believed that organoaminodisilane precursors such as those organoaminodisilanes having Formula I described herein comprising a SiN bond, a SiSi bond and a SiH.sub.3 group are advantageous over known organoaminodisilane precursors containing only SiN and SiSi bonds or only SiCl and SiSi bonds. In this regard, it is believed that the organoaminodisilanes described herein having four or five SiH groups, one SiN bond and one SiSi bond make them more reactive than other organoaminodisilane precursors, allowing deposition temperatures to be lower than other known organoaminodisilanes, such as, for example, hexachlorodisilane. It is believed that the unique structures of the Formula 1 precursors described herein allow for deposition temperatures of 400 C. or less, 300 C. or less, 200 C. or less, 100 C. or less, or 25 C.

[0076] In certain embodiments, the organoaminodisilanes having Formula I can be prepared by reacting a monochlorodisilane (MCDS) or monobromodisilane (MBDS) or lower molecular dialkylaminodisilane such as di-iso-propylaminodisilane or di-sec-butylaminodisilane with an amine having the following Formula II in an organic solvent or solvent mixture.

##STR00019##

In Formula II, R.sup.1 and R.sup.2 are the same as in the substituents described in Formula I. The following Equation 1 provide a non-limiting example of a reaction schemes or synthesis route which may be used to make the organoaminodisilanes having Formula I as described herein. The reaction in Equation (1) can be conducted with (e.g., in the presence of) or without (e.g., in the absence of) organic solvents. In embodiments wherein an organic solvent is used, examples of suitable organic solvents include, but are not limited to, hydrocarbon such as hexanes, octane, toluene, and ethers such as diethylether and tetrahydrofuran (THF). In these or other embodiments, the reaction temperature is in the range of from about 70 C. to the boiling point of the solvent employed if a solvent is used. The resulting organoaminodisilane can be purified, for example, via vacuum distillation after removing all by-products as well as any solvent(s) if present.

##STR00020##

[0077] Equation 1 is one synthetic route to make the organoaminodisilanes having Formula I involving a reaction between monohalidodisilane (XSiH.sub.2SiH.sub.3 wherein X=Cl, Br, I) and a secondary amine presented in Formula II. Other synthetic routes may be also employed to make these organoaminodisilanes as disclosed in the prior art, for example reducing monoaminochlorodisilanes with metal hydride or disproportionation of monoaminocholordisilane or reacting disilane with secondary amine in presence of catalyst.

[0078] The method used to form the silicon-containing films or coatings are deposition processes. Examples of suitable deposition processes for the method disclosed herein include, but are not limited to, cyclic CVD (CCVD), MOCVD (Metal Organic CVD), thermal chemical vapor deposition, plasma enhanced chemical vapor deposition (PECVD), high density PECVD, photon assisted CVD, plasma-photon assisted (PPECVD), cryogenic chemical vapor deposition, chemical assisted vapor deposition, hot-filament chemical vapor deposition, CVD of a liquid polymer precursor, deposition from supercritical fluids, and low energy CVD (LECVD). In certain embodiments, the metal containing films are deposited via atomic layer deposition (ALD), plasma enhanced ALD (PEALD) or plasma enhanced cyclic CVD (PECCVD) process. As used herein, the term chemical vapor deposition processes refers to any process wherein a substrate is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposition. As used herein, the term atomic layer deposition process refers to a self-limiting (e.g., the amount of film material deposited in each reaction cycle is constant), sequential surface chemistry that deposits films of materials onto substrates of varying compositions. Although the precursors, reagents and sources used herein may be sometimes described as gaseous, it is understood that the precursors can be either liquid or solid which are transported with or without an inert gas into the reactor via direct vaporization, bubbling or sublimation. In some case, the vaporized precursors can pass through a plasma generator. In one embodiment, the silicon-containing film is deposited using an ALD process. In another embodiment, the silicon-containing film is deposited using a CCVD process. In a further embodiment, the silicon-containing film is deposited using a thermal CVD process. The term reactor as used herein, includes without limitation, reaction chamber or deposition chamber.

[0079] In certain embodiments, the method disclosed herein avoids pre-reaction of the precursors by using ALD or CCVD methods that separate the precursors prior to and/or during the introduction to the reactor. In this connection, deposition techniques such as ALD or CCVD processes are used to deposit the silicon-containing film. In one embodiment, the film is deposited via an ALD process by exposing the substrate surface alternatively to the one or more the silicon-containing precursor, oxygen-containing source, nitrogen-containing source, or other precursor or reagent. Film growth proceeds by self-limiting control of surface reaction, the pulse length of each precursor or reagent, and the deposition temperature. However, once the surface of the substrate is saturated, the film growth ceases.

[0080] In certain embodiments, the method described herein further comprises one or more additional silicon-containing precursors other than the organoaminodisilane precursor having the above Formula I. Examples of additional silicon-containing precursors include, but are not limited to, monoaminosilane (e.g., di-iso-propylaminosilane, di-sec-butylaminosilane, phenylmethylaminosilane; organo-silicon compounds such as trisilylamine (TSA); monoaminosilane (di-iso-propylaminosilane, di-sec-butylaminosilane, phenylmethylaminosilane); siloxanes (e.g., hexamethyl disiloxane (HMDSO) and dimethyl siloxane (DMSO)); organosilanes (e.g., methylsilane, dimethylsilane, diethylsilane, vinyl trimethylsilane, trimethylsilane, tetramethylsilane, ethylsilane, disilylmethane, 2,4-disilapentane, 1,4-disilabutane, 2,5-disilahexane, 2,2-disilylpropane, 1,3,5-trisilacyclohexane and fluorinated derivatives of these compounds); phenyl-containing organo-silicon compounds (e.g., dimethylphenylsilane and diphenylmethylsilane); oxygen-containing organo-silicon compounds, e.g., dimethyldimethoxysilane; 1,3,5,7-tetramethylcyclotetrasiloxane; 1,1,3,3-tetramethyldisiloxane; 1,3,5,7-tetrasila-4-oxo-heptane; 2,4,6,8-tetrasila-3,7-dioxo-nonane; 2,2-dimethyl-2,4,6,8-tetrasila-3,7-dioxo-nonane; octamethylcyclotetrasiloxane; [1,3,5,7,9]-pentamethylcyclopentasiloxane; 1,3,5,7-tetrasila-2,6-dioxo-cyclooctane; hexamethylcyclotrisiloxane; 1,3-dimethyldisiloxane; 1,3,5,7,9-pentamethylcyclopentasiloxane; hexamethoxydisiloxane, and fluorinated derivatives of these compounds.

[0081] Depending upon the deposition method, in certain embodiments, the one or more silicon-containing precursors may be introduced into the reactor at a predetermined molar volume, or from about 0.1 to about 1000 micromoles. In this or other embodiments, the silicon-containing and/or organoaminodisilane precursor may be introduced into the reactor for a predetermined time period. In certain embodiments, the time period ranges from about 0.001 to about 500 seconds.

[0082] In certain embodiments, the silicon-containing films deposited using the methods described herein are formed in the presence of oxygen using an oxygen-containing source, reagent or precursor comprising oxygen. An oxygen-containing source may be introduced into the reactor in the form of at least one oxygen-containing source and/or may be present incidentally in the other precursors used in the deposition process. Suitable oxygen-containing source gases may include, for example, water (H.sub.2O) (e.g., deionized water, purifier water, and/or distilled water), oxygen (02), oxygen plasma, ozone (O.sub.3), NO, N.sub.2O, NO.sub.2, carbon monoxide (CO), carbon dioxide (CO.sub.2) and combinations thereof. In certain embodiments, the oxygen-containing source comprises an oxygen-containing source gas that is introduced into the reactor at a flow rate ranging from about 1 to about 2000 square cubic centimeters (sccm) or from about 1 to about 1000 sccm. The oxygen-containing source can be introduced for a time that ranges from about 0.1 to about 100 seconds. In one particular embodiment, the oxygen-containing source comprises water having a temperature of 10 C. or greater. In embodiments wherein the film is deposited by an ALD or a cyclic CVD process, the precursor pulse can have a pulse duration that is greater than 0.01 seconds, and the oxygen-containing source can have a pulse duration that is less than 0.01 seconds, while the water pulse duration can have a pulse duration that is less than 0.01 seconds. In yet another embodiment, the purge duration between the pulses that can be as low as 0 seconds or is continuously pulsed without a purge in-between. The oxygen-containing source or reagent is provided in a molecular amount less than a 1:1 ratio to the silicon precursor, so that at least some carbon is retained in the as deposited silicon-containing film.

[0083] In certain embodiments, the silicon-containing films comprise silicon and nitrogen. In these embodiments, the silicon-containing films deposited using the methods described herein are formed in the presence of nitrogen-containing source. A nitrogen-containing source may be introduced into the reactor in the form of at least one nitrogen-containing source and/or may be present incidentally in the other precursors used in the deposition process. Suitable nitrogen-containing source gases may include, for example, ammonia, hydrazine, monoalkylhydrazine, dialkylhydrazine, nitrogen, nitrogen/hydrogen, ammonia plasma, nitrogen plasma, nitrogen/hydrogen plasma, and mixture thereof. In certain embodiments, the nitrogen-containing source comprises an ammonia plasma or hydrogen/nitrogen plasma source gas that is introduced into the reactor at a flow rate ranging from about 1 to about 2000 square cubic centimeters (sccm) or from about 1 to about 1000 sccm. The nitrogen-containing source can be introduced for a time that ranges from about 0.1 to about 100 seconds. In embodiments wherein the film is deposited by an ALD or a cyclic CVD process, the precursor pulse can have a pulse duration that is greater than 0.01 seconds, and the nitrogen-containing source can have a pulse duration that is less than 0.01 seconds, while the water pulse duration can have a pulse duration that is less than 0.01 seconds. In yet another embodiment, the purge duration between the pulses that can be as low as 0 seconds or is continuously pulsed without a purge in-between.

[0084] The deposition methods disclosed herein may involve one or more purge gases. The purge gas, which is used to purge away unconsumed reactants and/or reaction byproducts, is an inert gas that does not react with the precursors. Exemplary purge gases include, but are not limited to, argon (Ar), nitrogen (N.sub.2), helium (He), neon, hydrogen (H.sub.2), and mixtures thereof. In certain embodiments, a purge gas such as Ar is supplied into the reactor at a flow rate ranging from about 10 to about 2000 sccm for about 0.1 to 1000 seconds, thereby purging the unreacted material and any byproduct that may remain in the reactor.

[0085] The respective step of supplying the precursors, oxygen-containing source, the nitrogen-containing source, and/or other precursors, source gases, and/or reagents may be performed by changing the time for supplying them to change the stoichiometric composition of the resulting silicon-containing film.

[0086] Energy is applied to the at least one of the precursor, nitrogen-containing source, reducing agent, other precursors or combination thereof to induce reaction and to form the silicon-containing film or coating on the substrate. Such energy can be provided by, but not limited to, thermal, plasma, pulsed plasma, helicon plasma, high density plasma, inductively coupled plasma, X-ray, e-beam, photon, remote plasma methods, and combinations thereof. In certain embodiments, a secondary RF frequency source can be used to modify the plasma characteristics at the substrate surface. In embodiments wherein the deposition involves plasma, the plasma-generated process may comprise a direct plasma-generated process in which plasma is directly generated in the reactor, or alternatively a remote plasma-generated process in which plasma is generated outside of the reactor and supplied into the reactor.

[0087] The organoaminodisilane precursors and/or other silicon-containing precursors may be delivered to the reaction chamber such as a CVD or ALD reactor in a variety of ways. In one embodiment, a liquid delivery system may be utilized. In an alternative embodiment, a combined liquid delivery and flash vaporization process unit may be employed, such as, for example, the turbo vaporizer manufactured by MSP Corporation of Shoreview, Minn., to enable low volatility materials to be volumetrically delivered, which leads to reproducible transport and deposition without thermal decomposition of the precursor. In liquid delivery formulations, the precursors described herein may be delivered in neat liquid form, or alternatively, may be employed in solvent formulations or compositions comprising same. Thus, in certain embodiments the precursor formulations may include solvent component(s) of suitable character as may be desirable and advantageous in a given end use application to form a film on a substrate.

[0088] For those embodiments wherein the precursor(s) having Formula I is used in a composition comprising a solvent and an organoaminodisilane precursor having Formula I described herein, the solvent or mixture thereof selected does not react with the organoaminodisilane. The amount of solvent by weight percentage in the composition ranges from 0.5% by weight to 99.5% or from 10% by weight to 75%. In this or other embodiments, the solvent has a boiling point (b.p.) similar to the b.p. of the organoaminodisilane of Formula I or the difference between the b.p. of the solvent and the b.p. of the organoaminosilane of Formula I is 40 C. or less, 30 C. or less, or 20 C. or less, or 10 C. Alternatively, the difference between the boiling points ranges from any one or more of the following end-points: 0, 10, 20, 30, or 40 C. Examples of suitable ranges of b.p. difference include without limitation, 0 to 40 C., 20 to 30 C., or 10 to 30 C. Examples of suitable solvents in the compositions include, but are not limited to, an ether (such as 1,4-dioxane, dibutyl ether), a tertiary amine (such as pyridine, 1-methylpiperidine, 1-ethylpiperidine, N,N-Dimethylpiperazine, N,N,N,N-Tetramethylethylenediamine), a nitrile (such as benzonitrile), an alkyl hydrocarbon (such as octane, nonane, dodecane, ethylcyclohexane), an aromatic hydrocarbon (such as toluene, mesitylene), a tertiary aminoether (such as bis(2-dimethylaminoethyl) ether), or mixtures thereof. Some non-limiting exemplary compositions include, but not limited to, a composition comprising di-iso-propylaminodisilane (b.p. about 157 C.) and octane (b.p. 125 to 126 C.); a composition comprising di-iso-propylaminodisilane (b.p. about 157 C.) and ethylcyclohexane (b.p. 130-132 C.); a composition comprising di-iso-propylaminodisilane (b.p. about 157 C.) and toluene (b.p. 115 C.); a composition comprising di-sec-butylaminodisilane and decane (b.p. 174 C.); and a composition comprising di-sec-butylaminodisilane and 2,2-oxybis(N,N-dimethylethanamine) (b.p., 189 C.).

[0089] In another embodiment, a vessel for depositing a silicon-containing film comprising one or more organoaminodisilane precursor having Formula I is described herein. In one particular embodiment, the vessel comprises at least one pressurizable vessel (preferably of stainless steel) fitted with the proper valves and fittings to allow the delivery of one or more precursors to the reactor for a CVD or an ALD process. In this or other embodiments, the organoaminodisilane precursor having Formula I is provided in a pressurizable vessel comprised of stainless steel and the purity of the precursor is 98% by weight or greater or 99.5% or greater which is suitable for the majority of semiconductor applications. In certain embodiments, such vessels can also have means for mixing the precursors with one or more additional precursor if desired. In these or other embodiments, the contents of the vessel(s) can be premixed with an additional precursor. Alternatively, the organoaminodisilane precursor and/or other precursor can be maintained in separate vessels or in a single vessel having separation means for maintaining the organoaminodisilane precursor and other precursor separate during storage.

[0090] In one embodiment of the method described herein, a cyclic deposition process such as CCVD, ALD, or PEALD may be employed, wherein at least one silicon-containing precursor selected from an organoaminodisilane precursor having the formula described herein and optionally a nitrogen-containing source such as, for example, ammonia, hydrazine, monoalkylhydrazine, dialkylhydrazine, nitrogen, nitrogen/hydrogen, ammonia plasma, nitrogen plasma, nitrogen/hydrogen plasma are employed.

[0091] In certain embodiments, the gas lines connecting from the precursor canisters to the reaction chamber are heated to one or more temperatures depending upon the process requirements and the container of the organoaminodisilane precursor having the formula I described herein is kept at one or more temperatures for bubbling. In other embodiments, a solution comprising the at least one silicon-containing precursor having the formula described herein is injected into a vaporizer kept at one or more temperatures for direct liquid injection.

[0092] A flow of argon and/or other gas may be employed as a carrier gas to help deliver the vapor of the at least one organoaminodisilane precursor to the reaction chamber during the precursor pulsing. In certain embodiments, the reaction chamber process pressure is about 1 Torr.

[0093] In a typical ALD or CCVD process, a substrate such as, without limitation, a silicon oxide, carbon doped silicon oxide, flexible substrate, or metal nitride substrate is heated on a heater stage in a reaction chamber that is exposed to the silicon-containing precursor initially to allow the organoaminodisilane to chemically adsorb onto the surface of the substrate. A purge gas such as nitrogen, argon, or other inert gas purges away unabsorbed excess organoaminodisilane from the process chamber. After sufficient purging, an oxygen-containing source may be introduced into reaction chamber to react with the absorbed surface followed by another gas purge to remove reaction by-products from the chamber. The process cycle can be repeated to achieve the desired film thickness. In other embodiments, pumping under vacuum can be used to remove unabsorbed excess organoaminodisilane from the process chamber, after sufficient evacuation under pumping, an oxygen-containing source may be introduced into reaction chamber to react with the absorbed surface followed by another pumping down purge to remove reaction by-products from the chamber. In yet another embodiment, the organoaminodisilane and the oxygen-containing source can be co-flowed into reaction chamber to react on the substrate surface to deposit silicon oxide, carbon doped silicon oxide. In a certain embodiment of cyclic CVD, the purge step is not used.

[0094] In this or other embodiments, it is understood that the steps of the methods described herein may be performed in a variety of orders, may be performed sequentially or concurrently (e.g., during at least a portion of another step), and any combination thereof. The respective step of supplying the precursors and the nitrogen-containing source gases may be performed by varying the duration of the time for supplying them to change the stoichiometric composition of the resulting silicon-containing film.

[0095] In another embodiment of the method disclosed herein, the films containing both silicon and nitrogen are formed using an ALD, PEALD, CCVD or PECCVD deposition method that comprises the steps of:

[0096] a. providing a substrate in an ALD reactor;

[0097] b. introducing into the ALD reactor at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00021##

[0098] wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2;

[0099] c. chemisorbing the at least one organoaminodisilane precursor onto a substrate;

[0100] d. purging away the unreacted at least one organoaminodisilane precursor using a purge gas;

[0101] e. providing a nitrogen-containing source to the organoaminodisilane precursor onto the heated substrate to react with the sorbed at least one organoaminodisilane precursor; and

[0102] f. optionally purging or pumping away any unreacted nitrogen-containing source.

[0103] In another aspect, there is provided a method of forming a film selected from a silicon oxide and a carbon doped silicon oxide film via a PEALD or a PECCVD deposition process, the method comprising the steps of:

[0104] a. providing a substrate in a reactor;

[0105] b. introducing into the reactor oxygen along with at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00022##

[0106] wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2;

[0107] c. purging the reactor with a purge gas along with oxygen;

[0108] d. applying RF plasma;

[0109] e. purging the reactor with a purge gas or pumping the reactor to remove unreacted organoaminodisilane and any by-products; and wherein steps b through e are repeated until a desired thickness of the film is obtained.

[0110] In another embodiment of the method disclosed herein, the silicon-containing films is formed using a ALD deposition method that comprises the steps of:

[0111] a. providing a substrate in a reactor;

[0112] b. introducing into the reactor at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00023##

[0113] wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2;

[0114] c. chemisorbing the at least one organoaminodisilane precursor onto a substrate;

[0115] d. purging away the unreacted at least one organoaminodisilane precursor using a purge gas;

[0116] e. providing an oxygen-containing source to the organoaminodisilane precursor onto the heated substrate to react with the sorbed at least one organoaminodisilane precursor; and

[0117] f. optionally purging or pumping away any unreacted oxygen-containing source.

[0118] In another aspect, there is provided a method of forming a silicon nitride or silicon carbonitride film via PEALD or PECCVD process, the method comprising the steps of:

[0119] a. providing a substrate in a reactor;

[0120] b. introducing into the reactor a nitrogen-containing source and at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00024##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2;

[0121] c. purging the reactor with a purge gas along with the nitrogen-containing source;

[0122] d. applying RF plasma; and

[0123] e. purging the reactor with a purge gas or pumping the reactor to remove unreacted organoaminodisilane and any by-products; and wherein steps b through e are repeated until a desired thickness of the film is obtained.

[0124] The above steps define one cycle for the method described herein; and the cycle can be repeated until the desired thickness of a silicon-containing film is obtained. In this or other embodiments, it is understood that the steps of the methods described herein may be performed in a variety of orders, may be performed sequentially or concurrently (e.g., during at least a portion of another step), and any combination thereof. The respective step of supplying the precursors and oxygen-containing source may be performed by varying the duration of the time for supplying them to change the stoichiometric composition of the resulting silicon-containing film, although always using oxygen in less than a stoichiometric amount relative to the available silicon.

[0125] For multi-component silicon-containing films, other precursors such as silicon-containing precursors, nitrogen-containing precursors, reducing agents, or other reagents can be alternately introduced into the reactor chamber.

[0126] In a further embodiment of the method described herein, the silicon-containing film is deposited using a thermal CVD process. In this embodiment, the method comprises:

[0127] a. placing one or more substrates into a reactor which is heated to one or more temperatures ranging from ambient temperature to about 700 C.;

[0128] b. introducing at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00025##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2; and

[0129] c. providing an oxygen-containing source into the reactor to at least partially react with the at least one organoaminodisilane precursor and deposit a silicon-containing film onto the one or more substrates. In certain embodiments of the CVD method, the reactor is maintained at a pressure ranging from 10 mTorr to 760 Torr during the introducing step. The above steps define one cycle for the method described herein; and the cycle can be repeated until the desired thickness of a silicon-containing film is obtained. In this or other embodiments, it is understood that the steps of the methods described herein may be performed in a variety of orders, may be performed sequentially or concurrently (e.g., during at least a portion of another step), and any combination thereof. The respective step of supplying the precursors and oxygen-containing source may be performed by varying the duration of the time for supplying them to change the stoichiometric composition of the resulting silicon-containing film, although always using oxygen in less than a stoichiometric amount relative to the available silicon.

[0130] In a further embodiment of the method described herein, an amorphous or crystalline silicon film is deposited using the Formula I precursor described herein. In this embodiment, the method comprises:

[0131] a. placing one or more substrates into a reactor which is heated to a one or more temperatures ranging from ambient temperature to about 700 C.;

[0132] b. introducing at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00026##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2; and

[0133] c. providing a reducing agent source into the reactor to at least partially react with the at least one organoaminodisilane precursor and deposit a silicon-containing film onto the one or more substrates. The reducing agent is selected from the group consisting of hydrogen, hydrogen plasma, hydrogen chloride. In certain embodiments of the CVD method, the reactor is maintained at a pressure ranging from 10 mTorr to 760 Torr during the introducing step. The above steps define one cycle for the method described herein; and the cycle can be repeated until the desired thickness of a film is obtained.

[0134] For multi-component silicon-containing films, other precursors such as silicon-containing precursors, nitrogen-containing precursors, oxygen-containing sources, reducing agents, and/or other reagents can be alternately introduced into the reactor chamber.

[0135] In a further embodiment of the method described herein, the silicon-containing film is deposited using a thermal CVD process. In this embodiment, the method comprises:

[0136] a. placing one or more substrates into a reactor which is heated to one or more temperatures ranging from ambient temperature to about 700 C.;

[0137] b. introducing at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00027##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2; and

[0138] c. providing a nitrogen-containing source into the reactor to at least partially react with the at least one organoaminodisilane precursor and deposit a silicon-containing film onto the one or more substrates. In certain embodiments of the CVD method, the reactor is maintained at a pressure ranging from 10 mTorr to 760 Torr during the introducing step.

[0139] In a further embodiment of the method described herein, the organoaminodisilane precursors are used for depositing a silicon containing film which is an amorphous film, a crystalline silicon film, or a mixture thereof. In these embodiments, the silicon containing films is formed using a deposition method selected from ALD or cyclic CVD that comprises the steps of:

[0140] placing a substrates into a reactor which is heated to a temperature ranging from ambient temperature to about 700 C. and maintained at a pressure of 1 Torr or less;

[0141] introducing at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00028##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2;

[0142] providing a reducing agent into the reactor to at least partially react with the at least one organoaminosilane precursor and deposit a silicon containing film onto the one or more substrates wherein the reducing agent is at least one selected from the group consisting of hydrogen, hydrogen plasma, or hydrogen chloride. The above steps define one cycle for the method described herein; and the cycle can be repeated until the desired thickness of a silicon containing film is obtained. The desired thickness of the film can range from 1 to 10,000 .

[0143] In another aspect, there is provided a method of depositing amorphous or crystalline silicon film via an atomic layer deposition or cyclic chemical vapor deposition process or chemical vapor deposition at temperature lower than conventional silicon precursors, the method comprising the steps of:

[0144] a. providing a substrate in a reactor;

[0145] b. introducing into the reactor at least one organoaminodisilane precursor comprising a SiN bond, a SiSi bond, and a SiH.sub.3 group represented by the following Formula I below:

##STR00029##

wherein R.sup.1 is selected from a linear or branched C.sub.3 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.10 alkenyl group, a linear or branched C.sub.3 to C.sub.10 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, an electron withdrawing group, and a C.sub.6 to C.sub.10 aryl group; R.sup.2 is selected from hydrogen, a linear or branched C.sub.1 to C.sub.10 alkyl group, a linear or branched C.sub.3 to C.sub.6 alkenyl group, a linear or branched C.sub.3 to C.sub.6 alkynyl group, a C.sub.1 to C.sub.6 dialkylamino group, a C.sub.6 to C.sub.10 aryl group, a linear or branched C.sub.1 to C.sub.6 fluorinated alkyl group, an electron withdrawing group, and a C.sub.4 to C.sub.10 aryl group; optionally wherein R.sup.1 and R.sup.2 are linked together to form a ring selected from a substituted or unsubstituted aromatic ring or a substituted or unsubstituted aliphatic ring; and n=1 or 2;

[0146] c. purging the reactor with a purge gas wherein steps b through c are repeated until a desired thickness of the silicon film is obtained.

[0147] It is believed that Formula I precursors can generate H.sub.2Si: di-radicals or H.sub.3Si radical upon heating which can promote formation oligomers containing SiSi bonds or anchor on the surface of a substrate. Those oligomers or anchored SiH.sub.2 or SiH.sub.3 can further form amorphous silicon films. In this or other embodiments, those oligomers function as a seed layer for subsequent deposition of silicon or silicon oxide films.

[0148] In certain embodiments, the organoaminodisilane precursors having Formula I described herein can also be used as a dopant for metal containing films, such as but not limited to, metal oxide films or metal nitride films. In these embodiments, the metal containing film is deposited using an ALD or CVD process such as those processes described herein using metal alkoxide, metal amide, or volatile organometallic precursors. Examples of suitable metal alkoxide precursors that may be used with the method disclosed herein include, but are not limited to, group 3 to 6 metal alkoxide, group 3 to 6 metal complexes having both alkoxy and alkyl substituted cyclopentadienyl ligands, group 3 to 6 metal complexes having both alkoxy and alkyl substituted pyrrolyl ligands, group 3 to 6 metal complexes having both alkoxy and diketonate ligands; group 3 to 6 metal complexes having both alkoxy and ketoester ligands; Examples of suitable metal amide precursors that may be used with the method disclosed herein include, but are not limited to, tetrakis(dimethylamino)zirconium (TDMAZ), tetrakis(diethylamino)zirconium (TDEAZ), tetrakis(ethylmethylamino)zirconium (TEMAZ), tetrakis(dimethylamino)hafnium (TDMAH), tetrakis(diethylamino)hafnium (TDEAH), and tetrakis(ethylmethylamino)hafnium (TEMAH), tetrakis(dimethylamino)titanium (TDMAT), tetrakis(diethylamino)titanium (TDEAT), tetrakis(ethylmethylamino)titanium (TEMAT), tert-butylimino tri(diethylamino)tantalum (TBTDET), tert-butylimino tri(dimethylamino)tantalum (TBTDMT), tert-butylimino tri(ethylmethylamino)tantalum (TBTEMT), ethylimino tri(diethylamino)tantalum (EITDET), ethylimino tri(dimethylamino)tantalum (EITDMT), ethylimino tri(ethylmethylamino)tantalum (EITEMT), tert-amylimino tri(dimethylamino)tantalum (TAIMAT), tert-amylimino tri(diethylamino)tantalum, pentakis(dimethylamino)tantalum, tert-amylimino tri(ethylmethylamino)tantalum, bis(tert-butylimino)bis(dimethylamino)tungsten (BTBMW), bis(tert-butylimino)bis(diethylamino)tungsten, bis(tert-butylimino)bis(ethylmethylamino)tungsten, and combinations thereof. Examples of suitable organometallic precursors that may be used with the method disclosed herein include, but are not limited to, group 3 metal cyclopentadienyls or alkyl cyclopentadienyls. Exemplary Group 3 to 6 metal herein include, but not limited to, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Er, Yb, Lu, Ti, Hf, Zr, V, Nb, Ta, Cr, Mo, and W.

[0149] In certain embodiments, the resultant silicon-containing films or coatings can be exposed to a post-deposition treatment such as, but not limited to, a plasma treatment, chemical treatment, ultraviolet light exposure, electron beam exposure, and/or other treatments to affect one or more properties of the film.

[0150] In certain embodiments, the silicon-containing films described herein have a dielectric constant of 6 or less. In these or other embodiments, the films can a dielectric constant of about 5 or below, or about 4 or below, or about 3.5 or below. However, it is envisioned that films having other dielectric constants (e.g., higher or lower) can be formed depending upon the desired end-use of the film. An example of the silicon containing or silicon-containing film that is formed using the organoaminodisilane precursors and processes described herein has the formulation Si.sub.xO.sub.yC.sub.zN.sub.vH.sub.w wherein Si ranges from about 10% to about 40%; 0 ranges from about 0% to about 65%; C ranges from about 0% to about 75% or from about 0% to about 50%; N ranges from about 0% to about 75% or from about 0% to 50%; and H ranges from about 0% to about 50% atomic percent weight % wherein x+y+z+v+w=100 atomic weight percent, as determined for example, by XPS or other means.

[0151] As mentioned previously, the method described herein may be used to deposit a silicon-containing film on at least a portion of a substrate. Examples of suitable substrates include but are not limited to, silicon, SiO.sub.2, Si.sub.3N.sub.4, OSG, FSG, silicon carbide, hydrogenated silicon carbide, silicon nitride, hydrogenated silicon nitride, silicon carbonitride, hydrogenated silicon carbonitride, boronitride, antireflective coatings, photoresists, a flexible substrate, organic polymers, porous organic and inorganic materials, metals such as copper and aluminum, and diffusion barrier layers such as but not limited to TiN, Ti(C)N, TaN, Ta(C)N, Ta, W, or WN. The films are compatible with a variety of subsequent processing steps such as, for example, chemical mechanical planarization (CMP) and anisotropic etching processes.

[0152] The deposited films have applications, which include, but are not limited to, computer chips, optical devices, magnetic information storages, coatings on a supporting material or substrate, microelectromechanical systems (MEMS), nanoelectromechanical systems, thin film transistor (TFT), light emitting diodes (LED), organic light emitting diodes (OLED), IGZO, and liquid crystal displays (LCD).

[0153] The following examples illustrate the method for preparing organoaminodisilane precursors as well as depositing silicon-containing films described herein and are not intended to limit it in any way.

EXAMPLES

[0154] In the following examples, unless stated otherwise, properties were obtained from sample films that were deposited onto medium resistivity (8-12 cm) single crystal silicon wafer substrates.

Example 1: Synthesis of di-iso-propylaminodisilane (DIPADS) from Monochlorodisilane

[0155] In a 3-necked round bottom flask equipped with a mechanic stirrer, a condenser, and an addition funnel, a solution of 1 equivalent monochlorodisilane in hexane was cooled to 10 C. with a cold bath. With stirring, 2 equivalent of di-iso-propylamine was added dropwise through the addition funnel. After the addition was completed, the reaction mixture was allowed to warm up to room temperature. The reaction mixture was stirred at room temperature for 2 hours, followed by filtration. A distillation removed solvent hexane from the filtrate. The product di-iso-propylaminodisilane was obtained by vacuum distillation. Gas chromatography (GC) showed that it was >99% pure di-iso-propylaminodisilane (DIPADS) CH NMR (500 MHz, C.sub.7D.sub.8): =4.89 (m, SiH.sub.2), 3.31 (t, SiH.sub.3), 2.93 (m, CHMe.sub.2), 1.00 (d, CHMe.sub.2). FIG. 1 shows the TGA/DSC graph of di-iso-propylaminodisilane, wherein the TGA demonstrates that the compound is volatile and the DSC shows it has a boiling point of about 157 C.

[0156] Additional organoaminodisilane precursors of Formula I were made via exchange reaction between di-iso-propylaminodisilane with corresponding amines and were characterized by mass spectroscopy (MS). The molecular weight (MW), the structure, and corresponding MS fragmentation peaks of each organoaminosilane precursor are provided in Table 1 to confirm their identification.

TABLE-US-00001 TABLE 1 Organoaminodisilanes Having Formula I No. Precursor Name MW Structure MS Peaks 1 Di-iso-butylaminodisilane 189.44 [00030] 189, 174, 158, 146, 114, 102, 90, 72, 57 2 Phenylmethylaminodisilane 167.36 [00031] 167, 136, 119, 106, 93, 78, 58 3 2-(N-disilylmethylamino)pyridine 168.34 [00032] 167, 137, 121, 108, 93, 78 4 Dicyclohexylaminodisilane 241.52 [00033] 241, 210, 198, 138, 103, 55 5 Di-sec-butylaminodisilane 189.44 [00034] 189, 176, 160, 128, 100, 72 6 Diethylaminodisilane 133.34 [00035] 133, 118, 102, 86, 72, 58 7 Phenylcyclohexylaminodisilane 235.47 [00036] 235, 204, 192, 178, 160, 150, 120, 107, 93, 77, 55 8 Dipropylaminodisilane 161.39 [00037] 161, 132, 100, 88, 72, 58 9 Dimethylmorpholinodisilane 175.38 [00038] 175, 144, 132, 114, 100, 89, 70, 58 10 2-methylpyrrolidinodisilane 145.35 [00039] 145, 130, 114, 98, 84, 70, 56, 41 11 N-ethylisopropylaminodisilane 147.09 [00040] 147, 132, 114, 100, 86, 72, 58, 40 12 N-isopropylmethylaminodisilane 133.34 [00041] 133, 118, 100, 86, 72, 58, 40 13 N-allylphenylaminodisilane 193.39 [00042] 193, 178, 162, 148, 133, 119, 93, 77, 51 14 2-methylpiperidinodisilane 159.38 [00043] 159, 144, 128, 114, 98, 84, 70, 56, 42 15 N-phenylethyldisilane 181.38 [00044] 181, 166, 150, 134, 120, 106, 91, 77, 51 16 N-ethylcyclohexyldisilane 187.43 [00045] 188, 172, 158, 144, 127, 112, 98, 84, 70, 55, 41 17 2-methylindolinodisilane 193.39 [00046] 193, 178, 160, 145, 132, 118, 91, 70, 53, 39 18 Decahydroquinolinodisilane 199.44 [00047] 198, 182, 168, 152, 138, 124, 111, 96, 81, 67, 44 19 3,5-dimethylpiperidinodisilane 173.40 [00048] 173, 158, 142, 126, 112, 90, 70, 56, 41 20 N-isopropylcyclohexylaminodisilane 201.46 [00049] 201, 186, 171, 154, 141, 126, 112, 98, 84, 70, 55, 41 21 2,5-dimethylpyrrolyldisilane 155.35 [00050] 155, 139, 123, 109, 94, 79, 65, 39 22 tert-butylaminodisilane 133.34 [00051] 133, 118, 102, 86, 74, 57 23 iso-propylaminodisilane 119.31 [00052] 119, 104, 88, 72, 59 24 Di-iso-butylaminodisilane 189.44 [00053] 189, 174, 158, 146, 114, 102, 90, 72, 57 25 Phenylisopropylaminodisilane 195.41 [00054] 195, 180, 164, 148, 134, 120, 93, 77, 59, 43 26 N-allylcyclopentylaminodisilane 185.41 [00055] 185.41 27 Dibutylaminodisilane 189.45 [00056] 189, 156, 146, 130, 114, 104, 86, 74, 58 28 Diphenylaminodisilane 229.43 [00057] 229, 214, 198, 181, 167, 143, 120, 105, 93, 77, 66, 51 29 7-Azaindolyldisilane 178.34 [00058] 177, 161, 145, 130, 118, 102, 91, 78, 70, 54 30 N-methylcyclohexylaminodisilane 173.40 [00059] 173, 158, 142, 130, 117, 98, 85, 70, 55 31 2,6-dimethylpiperidinodisilane 173.40 [00060] 173, 158, 142, 126, 112, 98, 87, 72, 55 32 2-ethyl-6-methylanilinodisilane 195.41 [00061] 195, 180, 162, 148, 134, 120, 105, 91, 77 33 N,N,N-trimethyl-N- disilylethelenediamine 162.38 [00062] 161, 146, 131, 114, 104, 86, 72, 58 34 1,1-(N,N-di-tert- butylethylenediamino)disilane 230.50 [00063] 230, 215, 199, 185, 173, 100, 86, 57

Example 2: Thermal Stability of Di-iso-propylaminodisilane

[0157] Approximately 2.0 ml samples of diisopropylaminodisilane (DIPADS) were loaded into 4 stainless steel tubes under dry, inert conditions. The tubes were capped and placed into a lab oven and heated at 80 C. for 4 days. The 4 heated samples were analyzed by GC to determine the extent of degradation relative to the unheated control sample. The samples had an average purity of 99.15% after heating, showing an average degradation of 0.09% relative to the initial purity of 99.24% and demonstrating that DIPADS is suitable precursor for depositing silicon-containing film because of its excellent thermal stability. It is expected that both di-sec-butylaminodisilane and 2,6-dimethylpiperidinodisilane would have similar thermal stability as they have same chemical environments around both silicon atoms as DIPAS.

Comparable Example 2: Thermal Stability of Diethylaminodisilane (DEADS)

[0158] Approximately 2 ml of diethylaminodisilane (DEADS) was heated in duplicate sealed stainless steel tubes at 80 C. for 3 days. GC analysis of samples before and after heating showed an average purity drop of 4.4%. Bis(diethylamino)disilane (bis-DEADS) grew in by 3.0% as a result of heating. Disilane was also detected via GC-MS. The observed degradation is consistent with what is reported by Abedini et. al. (Inorg. Chem. Vol 2, 608 (1963)) for dimethylaminodisilane (DMADS) as shown below:

2 DEADS=bis-DEADS+disilane

This seems to suggest both DEADS and DMADS may not be suitable as a precursor for depositing silicon-containing films due to their instability.

Example 3: Cyclic Chemical Vapor Deposition of Amorphous Silicon Films Using Organoaminodisilane

[0159] Amorphous silicon film was deposited using organoaminodisilane such as diisopropylaminodisilane (DIPADS) and phenylmethylaminodisilane (PMADS) on borosilicate glass and 100 nm Si oxides on Si substrates in cyclic CVD mode at a temperature ranging from 300-400 C. The deposition process was comprised of the following steps a. through c. shown in Table 2 and repeated 1000 times:

TABLE-US-00002 TABLE 2 Deposition Parameters Using DIPADS or PMADS Step a 6 sec. (s) Evacuate reactor <100 mT Step b 1 s Dose Reactor pressure organoaminodisilane typically <2 Torr precursor Step c 6 s Purge reactor with Flow 1.5 slpm N.sub.2 nitrogen

[0160] Although the example uses cyclic CVD deposition, one skilled in the art could transfer the process to conventional thermal CVD process which precursor flow continuously. The deposition rate is reported as film thickness (in ) as function of silicon precursor flow (in second). Process parameters and resulting films properties are tabulated in Table 3.

TABLE-US-00003 TABLE 3 Film Properties of Amorphous Silicon Film Using DIPADS or PMADS Wafer temperature Deposition Rate Ref. (Celcius) Precursor (/s) Index 300 DIPADS No deposition N/A 400 DIPADS 0.2 3.55 400 PMADS 0.1 N/A

[0161] The films deposited at 400 C. using DIPADS was analyzed using Raman spectroscopy. The film has Raman scattering at 477 cm.sup.1 which is provided in FIG. 2 and confirms an amorphous silicon structure.

Example 4: Atomic Layer Deposition of Silicon Oxide Films Using Organoaminodisilane

[0162] Atomic layer deposition of silicon oxide films were conducted using di-iso-propylaminodisilane (DIPADS). The depositions were performed on a laboratory scale ALD processing tool. The organoaminodisilane precursor was delivered to the chamber by vapor draw at 55 C. source temperature. All gases (purge, oxygen-containing source and reactant gas) and precursor lines are heated accordingly to ensure precursor flows without any condensation. Gases and precursor flow rates were controlled with ALD diaphragm valves with high speed actuation. The substrates used in the deposition were 12 inch long silicon strips. A thermocouple attached on the sample holder to confirm substrate temperature. Depositions were performed using ozone as the oxygen-containing source gas. The deposition parameters are provided in Table 4.

TABLE-US-00004 TABLE 4 Deposition Parameters for Atomic Layer Deposition of Silicon Oxide Films with Ozone Using DIPADS Step a 6 s Evacuate reactor <100 mT Step b Variable Dose Reactor pressure organoaminodisilane typically <2 Torr precursor Step c 6 s Purge reactor with Flow 1.5 slpm N.sub.2 nitrogen Step d 6 s Evacuate reactor <100 mT Step e 4 s Dose Ozone, 16-20% wt Step f 6 s Purge reactor with Flow 1.5 slpm N.sub.2 nitrogen

[0163] The steps a. through f. in Table 4 are repeated until desired thickness is reached. Thickness and refractive indices of the films were measured using a FilmTek 2000SE ellipsometer by fitting the reflection data from the film to a pre-set physical model (e.g., the Lorentz Oscillator model). The % thickness non-uniformity was calculated from 6-point measurements using the following equation: % non-uniformity=((maxmin)/(2*mean)). Film density was characterized with X-ray reflectometry (XRR). X-ray Photoelectron Spectroscopy (XPS) is used to determine film composition. Film density is characterized using X-ray Reflectometry (XRR). Table 5 summarizes resulting silicon oxide film properties and the film composition and density are provided in Table 6.

TABLE-US-00005 TABLE 5 Film properties of Silicon Oxide Deposited from DIPADS and Ozone Process Deposition Deposition Non- Temperature Precursor # of Rate uniformity Ref. ( C.) Pulse (s) cycles (/cycle) (%) Index 100 1 500 3.0 0.7 1.46 300 1 350 2.8 1.0 1.44

TABLE-US-00006 TABLE 6 Composition and Density of Deposited Silicon Oxide Films Using DIPADS Deposition Temperature Density ( C.) (g/cc) % Si % O % C % N 100 2.1 35.6 64.4 ND ND 300 2.1 36.3 63.7 ND ND

[0164] All deposited films had a refractive index that fell in the range from 1.44 to 1.46, which is a typical refractive index for silicon oxide. Table 6 shows that the carbon and nitrogen contents are below XPS detection limit (<0.1%) for all films. In addition, DIPADS shows significant deposition rate at low temperature (100 C.) which is much better than halogenated disilane precursor such as Si.sub.2Cl.sub.6 because halogenated precursors are typically not very reactive to ozone or oxygen and require high temperature (>400 C.) for depositing silicon oxide films when ozone is employed as oxygen-containing source. Typical halogenated precursors requires water with catalyst such as pyridine, therefore, they are susceptible to particles formation especially at low temperature.

[0165] FIG. 3 shows the relationship between deposition rate and pulse time of DIPADS for forming a silicon oxide film using DIPADS and ozone at a temperature of 300 C., demonstrating self-limiting behavior of DIPADS and confirming that DIPADS is a suitable precursor for ALD of silicon oxide.

[0166] FIG. 4 shows the relationship between thicknesses and the number of cycles for forming a silicon oxide film using DIPADS and ozone at a temperature of 300 C., demonstrating good linearity and further confirming DIPADS is a suitable precursor for ALD of silicon oxide.

Example 5: Plasma Enhanced Atomic Layer Deposition of Silicon Oxide Films Using Organoaminodisilane

[0167] ALD deposition of silicon oxide was conducted from DIPADS and oxygen plasma process using ASM Stellar 3000 production tool on 300 mm Si wafers. Precursor is delivered using Ar carrier gas at room temperature. Oxygen is flowing continuously during process to reduce deposition time. Deposition temperature is set to 30 C. and 100 C. Precursor lines were heated to prevent precursor condensation. Chamber pressure is fixed to 3 Torr during the depositions. The deposition steps and parameters are provided in Table 7.

TABLE-US-00007 TABLE 7 Deposition Parameters for Plasma Enhanced Atomic Layer Deposition of Silicon Oxide Films with Oxygen Plasma Using DIPADS Step a 60 s Evacuate reactor <100 mTorr Step b 60 s Flow Argon to Ar gas flow = 800 sccm stabilize reactor Reactor pressure = 3 Torr pressure Step c 1 s Dose Ar carrier gas flow = Organoaminodisilane, 200 sccm Argon and Oxygen Ar gas flow = 800 sccm O.sub.2 flow = 100 sccm Step d 2 s Remove Ar gas flow = 800 sccm Organoaminodisilane O.sub.2 flow = 100 sccm from reactor using Ar and O.sub.2 gases Step e 2 s Turn on RF plasma Plasma power = 200 W

[0168] Steps c to e are repeated for 500 cycles to get a desired thickness of film. Thickness and refractive indices of the deposited films were measured using a FilmTek 2000SE ellipsometer by fitting the reflection data from the film to a pre-set physical model (e.g., the Lorentz Oscillator model). The % thickness non-uniformity was calculated from 9-point measurements using the following equation: % non-uniformity=((maxmin)/(2*mean)). Table 8 provides the resulting silicon oxide films properties.

TABLE-US-00008 TABLE 8 Film Properties of Silicon Oxide Deposited From DIPADS and Oxygen using Plasma Enhanced Atomic Layer Deposition Depo- Wafer sition Non- temp- Rate uni- Den- erature (/ formity Ref. sity (Celcius) cycle) (%) Index (g/cc) % Si % O % C % N 30 3.1 0.3 1.46 N/A N/A N/A N/A N/A 100 2.9 1.3 1.46 2.1 35.1 64.9 ND ND

[0169] DIPADS deposits high quality silicon oxide films as indicated by a refractive index ranging from 1.45-1.46. Table 8 shows no carbon or nitrogen was detected by XPS. Film density is 2.1 g/cc as determined by XRR. The results in Table 8 indicates that DIPADS shows good deposition rates at even lower temperature such as 30 C. which is superior to halogenated disilane precursor such as Si.sub.2Cl.sub.6. It is believed that the good deposition rate is due to the high chemical reactivity of organoaminodisilanes described in this invention.

Example 6: Plasma Enhanced Atomic Layer Deposition of Silicon Nitride or Carbonitride Films Using DIPADS Organoaminodisilane

[0170] ALD deposition of silicon containing film deposited from DIPADS and nitrogen-hydrogen plasma process using ASM Stellar 3000 production tool on 300 mm Si wafers was conducted. Precursor was delivered using Ar carrier gas at room temperature. Deposition temperature was set to 300 C. Precursor lines were heated accordingly to prevent precursor condensation. Chamber pressure was fixed to 3 Torr during depositions. Deposition steps and parameters are provided in Table 9.

TABLE-US-00009 TABLE 9 Deposition Parameters for DIPADS using N.sub.2/H.sub.2 Plasma Step a 300 sec Evacuate reactor <100 mTorr Step b 60 sec Flow Argon Ar gas flow = 1200 sccm stabilizing Reactor pressure = 3 Torr reactor pressure Step c 1 sec Dose Ar carrier gas flow = Organoaminodisilane, 400 sccm nitrogen and Ar process gas flow = hydrogen gas 1200 sccm N.sub.2 flow = H.sub.2 flow = 250 sccm Step d 4 sec Remove silicon Ar process gas flow = precursor from 1200 sccm reactor using Ar, N.sub.2 flow = H.sub.2 flow = H.sub.2 and N.sub.2 gases 250 sccm Step e 2 sec Turn on RF plasma Plasma power = 500 W

[0171] Steps c to e are repeated for 500 cycles to get a desired film thickness. The % thickness non-uniformity was calculated from 9-point measurements using the following equation: % non-uniformity=((maxmin)/(2*mean)). X-ray Photoelectron Spectroscopy (XPS) was used to determine film composition while X-ray Reflectometry (XRR) for density measurements. Table 10 summarizes the resulting film properties.

TABLE-US-00010 TABLE 10 Film Properties of SiCxNy Deposited from DIPADS and N.sub.2/H.sub.2 Plasma Process at 300 C. Pre- Non- cursor Deposition uni- Den- Purge Rate formity Ref. sity (sec) (/cycle) (%) Index (g/cc) % O % N % C % Si 4 0.3 2.4 1.76 2.1 3.5 45.5 12.1 38.9 1 0.8 6.1 1.76 2.0 2.6 41.2 14.2 41.6

Example 7: Cyclic Chemical Vapor Deposition of Silicon Oxide Films Using Organoaminodisilane

[0172] A silicon containing film was deposited in cyclic chemical vapor deposition mode using PMADS and ozone (O.sub.3). The deposition steps are as shown in Table 11 below and the deposition temperature was 300 C.

TABLE-US-00011 TABLE 11 Deposition Parameter of Silicon Oxide Deposited from PMADS and Ozone Using CCVD Process Step a 6 s Evacuate reactor <100 mT Step b 6 s Dose Reactor pressure Organoaminodisilane typically <2 Torr Step c 4 s Dose O.sub.3 (15-20% wt)

[0173] Steps b to c are repeated for 500 cycles to get a desired film thickness. The deposited film had a RI of 1.48 and a uniformity of 2.3%; the deposition rate of 3.7 /cycle. Dosing oxidant without purging after the organoaminodisilane delivery step enhanced the deposition rate but still provided good uniformity, further confirming the high surface chemical reactivity of organoaminodisilane described in this invention.