Modular tubular susceptor

Abstract

The invention relates to a susceptor which is for the processing chamber of protective gas and vacuum high-temperature processing installations and consists of graphite or CFC, has a tunnel-like design, and can be closed by a cover at both its ends. The invention should allow the provision of a flexibly and modularly extendable susceptor that has a material-saving design and, in particular, uniform thermal expansion. This is achieved by virtue of the fact that said susceptor (1) consists of a plurality of modules (2) aligned one next to the other along a continuous tunnel, that each module (2) consists of a tubular section (3) and a base panel (4) fixed thereto, and that the end faces (5) between each pair of modules (2) are interconnected in a form-fitting manner.

Claims

1. A susceptor for delimiting process space in protective gas and vacuum process installations, said susceptor is made from graphite, and closable at each of two opposite ends by a cover, the susceptor comprising a plurality of modules which are lined up with one another longitudinally into a continuous tunnel and which are connected to one another positively and nonpositively, wherein each module is composed of two components, said two components being a tubular portion and a baseplate screwed thereto, wherein a first module and a second module are adjacent having profiled end faces where the first module has a first end face abutting a second end face of the second module said first module and second module have a positive connection where the end face of the first module has the negative shape of the end face of the second module; wherein the baseplate of each adjacent module is provided with depressions which pass over from the first module to the second module and a connector engages flush into each depression between adjacent modules to connect the first module and the second module, wherein the connector is a double-T tongue-and-groove connector having a semicircular cross-section, said connector is a pin made of graphite and said pin has a flat upper surface and an outer lower surface engaging the depression between adjacent modules and said outer lower surface having a per portion with a semi-circular shape, and wherein all of the components of each module are cut from a same blank of graphite.

2. The susceptor as defined in claim 1, wherein at least one of the modules has a length different from a length of another one of the modules.

3. The susceptor as defined in claim 1, further comprising a sealing material interposed between said end faces of adjacent modules.

4. The susceptor as defined in claim 1, wherein adjacent modules are connected to each other by a graphite cement or graphite adhesive.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The invention will be explained in more detail below by means of an exemplary embodiment. In the accompanying drawings:

(2) FIG. 1 shows a susceptor assembled from individual modules and having a flattened tubular cross section, composed of a plurality of tubular pieces which are provided in each case with a baseplate;

(3) FIG. 2 shows an enlarged perspective illustration of part of a susceptor;

(4) FIG. 3 shows a portion of a susceptor; and

(5) FIG. 4 shows a connecting element for a tongue-and-groove connection.

DETAILED DESCRIPTION

(6) FIG. 1 shows a susceptor 1 assembled from individual modules 2 and having a flattened tubular cross section, each module 2 being composed of a tubular portion 3 which is provided with a baseplate 4. The baseplate 4 is screwed to a tubular portion 3. The end faces 5 between two modules are profiled (FIG. 2), so that the components can be joined together positively by means of a fit. The end faces may, for example, be configured such that one end face 5 has the negative shape of the opposite end face. A good positive connection is thereby achieved, and at the same time the contact area between the end faces 5 is enlarged, thus resulting in better sealing.

(7) Alternatively or additionally, in the end faces, bores may be provided, into which pins engage for the positive connection of adjacent modules. The pins are likewise composed of graphite or CFC.

(8) In order to ensure a good closure of the ends of the susceptor 1 in each case by means of a graphite cover, not illustrated, the outer end faces 8 may be made smooth (FIG. 2) or have an additional sealing element.

(9) On account of the appreciable thermal expansion of the susceptors 1, the graphite covers should be suspended movably or movably in a spring-loaded manner, for example on a furnace door.

(10) Furthermore, nonpositive and positive connecting elements 6 (FIG. 4) for connecting the modules 2 firmly to one another may be provided, which engage, flush, into corresponding depressions 9 lying in the baseplates 4 (FIG. 3). FIG. 4 shows such a connecting element 6 in the form of a double-T tongue-and-groove connecting element of semicircular cross section.

(11) In addition, the leaktightness of the joints may be increased by the introduction of film or graphited cord seals or else by adhesive bonding with a graphite cement or graphite adhesive. What is thereby achieved at the same time is that the susceptor, overall, behaves as though it were a susceptor manufactured in one piece. All the components of the susceptor 1 are composed of graphite or CFC.

(12) If the susceptors 1 are assembled from modules 2 of different width, a multiplicity of different tube lengths of the susceptor can be implemented in a simple way. It is therefore sufficient for the manufacture of the susceptors 1 to keep a certain number of modules 2 of different width in stock, and there can still be a rapid response to different customer wishes. Stockkeeping is thereby simplified most appreciably.

(13) Particularly where larger susceptors are concerned, it may be advantageous if the tubular portions 3 are divided into a plurality of segments. The advantage of this is that susceptors with a large inner space can be manufactured from comparatively small blanks. Here, too, profiled end faces are provided, so that the individual parts can be connected positively to one another. In addition, it is also possible to connect the end faces to one another nonpositively, and this can be implemented by means of the connecting elements 6 described.

(14) In any event, the size of the individual parts of a module 2 should be selected such that they can be manufactured from the same blank. This ensures that the thermal expansion is the same for individual parts of each module 2, thus ensuring that the entire susceptor 1 has a uniform longitudinal expansion. The leaktightness of the joints and of the end faces with respect to the doors or covers is consequently ensured at all times.

(15) In addition, in some modules 2, supply and disposal ports 7 may be provided for media. It can be seen from FIG. 1 that the in each case outer modules 2 are provided with such ports 7.

(16) Of course, susceptors 1 with other cross-sectional shapes, for example even rectangular, can also be assembled in the same way, as described above.

(17) The invention in at least some embodiments provides a flexible, modular and material-saving construction of susceptors 1.

LIST OF REFERENCE SYMBOLS

(18) 1 Susceptor 2 Module 3 Tubular portion 4 Baseplate 5 End face 6 Connecting element 7 Supply and disposal port 8 End face 9 Depression