Method for scanning a sample by means of X-ray optics and an apparatus for scanning a sample

Abstract

A method for scanning a sample by means of X-ray optics for irradiating the sample with X-rays, comprises the following steps: (a) displacing a measuring point, defined by an optical exit point of the X-ray optics, in the sample in a first scanning direction by means of swiveling the X-ray optics about a first swivel axis; (b) detecting radiation emanating from the sample at, at least, two measuring points along the first scanning direction; (c) combining measured values correlating with the detected radiation to form an overall scan.

Claims

1. An apparatus for scanning a sample comprising: X-ray optics for irradiating a sample with X-rays; a goniometer mechanism connected to the X-ray optics, wherein the goniometer mechanism is configured to carry out a swiveling of the X-ray optics about a first swivel axis, wherein the goniometer mechanism comprises two trapezoidal guides, wherein the two trapezoidal guides comprise first counter-elements and second counter-elements, which are connected by pairs of connecting elements, wherein the first counter-elements are arranged between the second counter-element of the respective guide and the first swivel axis and the two second counter-elements of the two trapezoidal guides are connected immovably to one another or have a one-piece embodiment; at least one actuator, which is configured to actuate the goniometer mechanism; and a control device, which is configured to carry out a method for scanning the sample by means of the X-ray optics for irradiating the sample with X-rays, wherein the method comprises: (a) displacing a measuring point, defined by an optical exit point of the X-ray optics, in the sample in a first scanning direction by means of swiveling the X-ray optics about the first swivel axis; (b) detecting radiation emanating from the sample at, at least, two measuring points along the first scanning direction; and (c) combining measured values correlating with the detected radiation to form an overall scan.

2. The apparatus according to claim 1, wherein the goniometer mechanism is configured to carry out a swiveling of the X-ray optics about a second swivel axis.

3. The apparatus according to claim 1, wherein the X-ray optics is a polycapillary lens.

4. The apparatus according to claim 1, wherein the actuator comprises a piezo element.

5. The apparatus according to claim 1, wherein the two trapezoidal guides comprise a first trapezoidal guide and a second trapezoidal guide, wherein the first counter-element of the first trapezoidal guide is immovably connected to the X-ray optics, the second counter-element of the first trapezoidal guide is immovably connected with the second counter-element of the second trapezoidal guide or has a one-piece embodiment therewith, and the first counter-element of the second trapezoidal guide is adapted for fixing the apparatus.

6. The apparatus according to claim 5, wherein the two trapezoidal guides have a nested arrangement.

7. The apparatus according to claim 1, wherein the goniometer mechanism, comprises flexure bearings.

8. The apparatus according to claim 1, wherein the two trapezoidal guides have a nested arrangement.

9. The apparatus according to claim 1, wherein the goniometer mechanism has a one-piece configuration.

10. A method for scanning a sample by means of X-ray optics for irradiating the sample with X-rays, comprising the following steps: (a) displacing a measuring point, defined by an optical exit point of the X-ray optics, in the sample in a first scanning direction by means of swiveling the X-ray optics about a first swivel axis, wherein the first swivel axis passes through a focal spot of an X-ray tube; (b) detecting radiation emanating from the sample at, at least, two measuring points along the first scanning direction; (c) combining measured values correlating with the detected radiation to form an overall scan, wherein the combining takes place with spatial resolution, the measured values are associated with location information, and the location information is determined as a function of a swivel angle of the swiveling of the X-ray optics.

11. An apparatus for scanning a sample comprising: X-ray optics for irradiating a sample with X-rays; a goniometer mechanism connected to the X-ray optics, wherein the goniometer mechanism is configured to carry out a swiveling of the X-ray optics about a first swivel axis, wherein the first swivel axis passes through a focal spot of an X-ray tube; at least one actuator, which is configured to actuate the goniometer mechanism; and a control device, which is configured to carry out the method according to claim 10.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 a sectional view of an apparatus,

(2) FIG. 2 a detailed view of the sectional view of the apparatus,

(3) FIG. 3 a front view of a parallel displacement mechanism,

(4) FIG. 4 a side view of the parallel displacement mechanism,

(5) FIG. 5 a first isometric view of the parallel displacement mechanism,

(6) FIG. 6 a second isometric view of the parallel displacement mechanism,

(7) FIG. 7 a front view of a goniometer mechanism,

(8) FIG. 8 a side view of the goniometer mechanism,

(9) FIG. 9 a first isometric view of the goniometer mechanism,

(10) FIG. 10 a second isometric view of the goniometer mechanism,

(11) FIG. 11 a process flow according to a preferred embodiment,

(12) FIG. 12 a schematic representation of the process flow,

(13) FIG. 13 a representation of the measuring points in a sample, and

(14) FIG. 14 a measuring grid.

DETAILED DESCRIPTION

(15) The method according to the invention for scanning a sample 99 by means of X-ray optics 100 is described by means of FIGS. 11-14 and the associated description of the figures.

(16) FIG. 1 is a sectional view of an apparatus 96 according to a preferred embodiment of the invention viewed counter to a y-axis in a negative y-direction. A circle with a central cross symbolizes an arrow looking in the direction of the arrow, while a circle with a central dot symbolizes a view in the opposite direction to the arrow.

(17) The apparatus 96 comprises X-ray optics 100, for example a capillary lens 100 (a polycapillary lens) for irradiating a sample 99 with X-rays. Furthermore, the apparatus 96 comprises a goniometer mechanism 300 connected to the X-ray optics 100, wherein the goniometer mechanism 300 is configured to carry out a swiveling of the X-ray optics 100 about a first swivel axis 336. The apparatus 96 further comprises at least one actuator 117, for example an electric motor, configured to operate the goniometer mechanism 300, and a control device 97 for controlling the at least one actuator 117.

(18) The goniometer mechanism 300 can be configured to perform a swiveling of the X-ray optics 100 about a second swivel axis 376.

(19) The goniometer mechanism 300 can be part of a particularly advantageously designed device 98 for spatial alignment of the X-ray optics 100, which is described as follows:

(20) The device 98 can be arranged in a housing with a first housing part 118, a second housing part 119 and a holder 120 (for securing the apparatus 96). The apparatus 96 further comprises a capillary lens 100, shown in a lens housing and not in cross section.

(21) The device 98 and the lens 100 are typically operated in an area with reduced pressure (partial vacuum). A vacuum seal is made typically along an outer surface of the first housing part 118. Here the holder 120 is arranged outside the vacuum. The side of the second housing part 119 facing the device is on the side of the vacuum, the other side outside the vacuum. Thus, the at least one actuator 117 is arranged outside the vacuum. Furthermore, adjustment elements 114 (for example, a fine screw drive) for operation of a parallel displacement mechanism 200 can be operated from outside the vacuum. A counterforce to an adjustment force of the adjustment elements 114 and the at least one actuator 117 can be applied by means of spring elements 115. The adjustment elements 114 and spring elements 115 can be sealed using grease in the second housing part 119.

(22) By means of the visible adjustment element 114 the device 98 can be operated such that a parallel displacement in a first parallel displacement direction 221 is performed. Furthermore, by means of the actuator 117 an at least to some extent swiveling of the lens 100 about a first swivel axis 336 (shown projected as a dot) can be performed. Displacements of the lens 100 in the z-direction caused by the swiveling of the lens 100 can normally be disregarded. By means of a further adjustment element (not shown) the device 98 can be operated such that a parallel displacement in a second parallel displacement direction 261 (shown projected as a dot) can be performed. Furthermore, by means of a further actuator (not shown) an at least to some extent swiveling of the lens 100 about a second swivel axis 376 can be performed.

(23) In the example shown, both the two parallel displacement directions 221, 261, and the two swivel axes 336, 376 run in x,y-directions, thus within an x,y-plane.

(24) Specifically, as shown, the first parallel displacement direction 221 and the second swivel axis 376 can extend in the x-direction and the second parallel displacement direction 261 and the first swivel axis 336 in the y-direction. The two parallel displacement directions 221, 261, and also the two swivel axes 336, 376, can thus make a right-angle to one another.

(25) In the starting position shown, the lens 100 is aligned by means of a receiving element 110 in the z-direction and comprises an optical entry point 104 and an optical exit point 108, which are spaced apart from one another in the z-direction. Since the X-ray optics 100 shown involve a capillary lens 100, the optical entry point 104 is an entry focal point 104 and the optical exit point 108 an exit focal point 108. Thus, one axis 101 of the X-ray optics 100, in the case shown a lens axis 101 of the lens, is aligned in the z-direction and the lens 100 is penetrable by X-rays in the z-direction. In addition, the entry focal point 104 of the lens 100 is positioned by means of the receiving element 110 in the point of intersection of the two swivel axes 336, 376. A window 122 in the second housing part 119 guarantees the most interference-free possible transmission of the X-rays and a vacuum seal.

(26) Before adjustment of the entry focal point 104 to a first predetermined point 102 (for example a focal spot of an anode) a check is first made whether there is any deviation of the entry focal point 104 from the first predetermined point 102 in the z-direction. Minor deviations can if necessary be compensated prior to the remainder of the adjustment by means of spacers (not shown) of different thicknesses at position 124 between the receiving element 110 and the lens 100.

(27) For the adjustment, initially the entry focal point 104 in the parallel displacements 221, 261 is adjusted to the predetermined point 102, thus made to coincide with the predetermined point 102. Here the swivel axes 336, 376 are displaced together with the entry focal point 104, so that the point of intersection of the swivel axes 336, 376 also corresponds with the predetermined point. It is thus ensured that in a subsequent swiveling of the lens 100 about the swivel axes 336, 376 the entry focal point 104 remains adjusted to the predetermined point 102.

(28) For adjusting the exit focal point 108 to a measuring point in the sample, a distance between the exit focal point 108 and the desired measuring point in the sample is reduced until it is substantially equal to zero. This can, by way of example, be performed by adjusting the sample table in the z-direction.

(29) As a result of the adjustment, the entry focal point is adjusted to the predetermined point 104 and the exit focal point 108 to the central measuring point 105.

(30) The distances shown between the apparatus 96 and the swivel axes 336, 376, the two focal points 104, 108, as well as the predetermined point 102 and the central measuring point 105, are not shown to scale in the figures.

(31) FIG. 2 is a detailed view of the sectional view of the apparatus 96 known from FIG. 1. The device 98 for spatial alignment of X-ray optics 100 comprises, as already described, substantially a parallel displacement mechanism 200 and a goniometer mechanism 300.

(32) The parallel displacement mechanism 200 comprises first parallel kinematics 220 for parallel displacement of the lens 100 in the first parallel displacement direction 221 and second parallel kinematics 260 for parallel displacement of the lens 100 in the second parallel displacement direction 261. As shown, the two kinematics can be implemented as a first parallelogram guide 220 and as a second parallelogram guide 260.

(33) The goniometer mechanism 300 comprises first goniometer kinematics 320 for the at least to some extent swiveling of the lens 100 about the first swivel axis 336 and second goniometer kinematics 360 for the at least to some extent swiveling of the lens about the second swivel axis 376. As shown, these two kinematics 320, 360 can be implemented as a first symmetrical, trapezoidal guide 320 and as a second symmetrical, trapezoidal guide 360. Symmetrical, trapezoidal guide refers, by analogy to a parallelogram guide, to the functional geometry of the guide (in the starting position shown) and not necessarily the optical appearance of the guide.

(34) As can be seen from FIG. 2, the goniometer mechanism 300 can, particularly in the starting position, be arranged coaxially between the parallel displacement mechanism 200 and the lens axis 101.

(35) The kinematics 220, 260, 320, 360 in each case comprise a first counter-element 222, 262, 322, 362, arranged between the swivel axes 336, 376 and a second counter-element 224, 264, 324, 364.

(36) Specifically, the first parallelogram guide 220 comprises a first counter-element 222 and a second counter-element 224, connected together by means of two connecting elements 226. The second parallelogram guide 260 comprises a first counter-element 262 and a second counter-element 264, connected together by means of two connecting elements 266. Of the two connecting elements 266, only one is visible, which in in FIG. 2 extends behind the lens 100. As shown, the two second counter-elements 224, 264 can be integrally connected with one another, thus implemented as a common counter-element. The first counter-element 262 in addition serves to fix the device in the second housing part 119. This can, by way of example, take place by means of screwed connections (not shown). Between the two first counter-elements 222, 262 there is a gap 112, so that a relative movement between the first counter-elements 222, 262 is possible.

(37) The first trapezoidal guide 320 comprises a first counter-element 322 and a second counter-element 324, which are connected to one another by means of two connecting elements 326. The second trapezoidal guide 360 comprises a first counter-element 362 and a second counter-element 364, which are connected to one another by means of two connecting elements 366. Of the two connecting elements 366, only one is visible, which in FIG. 2 extends behind the lens 100 and in front of the connecting element 266. As shown, the two second counter-elements 324, 364 can be integrally connected with one another, thus implemented as a common counter-element. The first counter-element 322 is implemented as one piece with the receiving element 110 and thus serves to receive and fix the lens 100. In the example, the lens 100 is screwed into the receiving element 110 by means of a screwed connection 126. Between the two first counter-elements 322, 362 there is a gap 112, allowing a relative movement between the first counter-elements 322, 362.

(38) The parallel displacement mechanism 200 is connected with the goniometer mechanism 300 via the first counter-element 222 and the first counter-element 362, so that no relative movements between these are possible. In the example, these are screwed together.

(39) According to the present nomenclature, the respective first counter-element 222, 262, 322, 362 is thus arranged between the swivel axes 336, 376 and the respective second counter-element 224, 264, 324, 364. In other words, the respective second counter-element 224, 264, 324, 364 spaced apart from the respective first counter-element 222, 262, 322, 362 in a positive z-direction.

(40) The connections between the connecting elements 226, 266, 326, 366 and the counter-elements 222, 262, 322, 362, 224, 264, 324, 364 are made particularly advantageously by means of flexure bearings 116. The descriptions of the figures deal with these connections in more detail.

(41) By using flexure bearings 116, both the parallel displacement mechanism 200 and the goniometer mechanism 300 can have a one-piece configuration.

(42) FIG. 3 is a front view of the parallel displacement mechanism 200, again viewed in the direction counter to the y-axis in the negative y-direction. In this view the first counter-element 222 of the first parallelogram guide 220 is partially concealed by the first counter-element 262 of the second parallelogram guide 260, so that the gap 112 (see particularly FIG. 4) between the first counter-elements 222, 262 is only partially visible. FIG. 4 is a side view of the parallel displacement mechanism 200 viewed in the direction of the x-axis, thus in the positive x-direction.

(43) The flexure bearings 116 connect the connecting elements 226, 266 with the counter-elements 222, 262, 224, 264, wherein the connection is made via at least a first end 232, 272 (in the example shown respectively via two ends 232, 272) and at least a second end 234, 274 (in the example shown respectively via two ends 234, 274) of the connecting elements 226, 266. The flexure bearings 116 are dimensioned with regard to their flexural strengths or elasticities such that an effort for bending in the respective parallel displacement direction 221, 261 is substantially less than in other spatial directions.

(44) In the first parallelogram guide 220 the connecting elements 226 are connected in a first connection plane 228, running along the first parallel displacement direction 221, respectively via two first ends 232 with the first counter-element 222. In the example shown, the first connection plane 228 is an x,y-plane. In a second connection plane 230, spaced apart from and parallel to the first connection plane 228, the connecting elements 226 are respectively connected via two second ends 234 with the second counter-element 224. The second counter-element 224 and the second connection plane 230 are offset to the first counter-element 222 and to the first connection plane 228 in the positive z-direction.

(45) In the first parallel displacement direction 221 the two first ends 232 of one of the connecting elements 226 are at a first distance 240 from the two first ends 232 of the other connecting element 226. In this direction, the two second ends 234 of one of the connecting elements 226 also have a second distance 242 from the two second ends 234 of the other connecting element 226. The first distance 240 is equal to the second distance 242, making a parallelogram guide.

(46) The result of this is also that in a plane running along the direction of the first parallel displacement direction 221 and at right angles to the two connection planes 228, 230, the respective distances 244, 246 between the respective first ends 232 and the respective second ends 234 of the connecting elements 226 are equal. The two first ends 232 and the two second ends 234 of the respective connecting element 226, in a direction parallel to the connection planes 228, 230 and at right angles to the first parallel displacement direction 221, thus in the example in the y-direction, are offset to one another.

(47) In order to perform a parallel displacement of the lens 100 in the first parallel displacement direction 221, by means of an adjustment element 114 a first adjustment force 238 is introduced into the first counter-element 222, wherein the first adjustment force 238 comprises a component in the first parallel displacement direction 221. The first adjustment force 238 shown in the exemplary embodiment comprises a (single) component in the positive x-direction. Through the first adjustment force 238 therefore a bending of the flexure bearings 116 and thus a parallel displacement of the first counter-element 222 relative to the second counter-element 224 is achieved.

(48) The parallel displacement comes to an end when an equilibrium of forces is arrived at. This is the result on the one side of the first adjustment force 238, acting in the positive x-direction and on the other side of forces resulting from the bending of the flexure bearings 116, and a spring force (not shown), applied by a spring element 115 and acting on a first counter-bearing 239 in the negative x-direction. By pre-tensioning the spring element 115 a parallel displacement in the negative x-direction can also be performed.

(49) In the second parallelogram guide 260 the connecting elements 266 are connected in a first connection plane 268, running along the second parallel displacement direction 261, in each case via two first ends 272 with the first counter-element 262. In the example shown, the first connection plane 268 is an x,y-plane. In a second connection plane 270, spaced apart from and parallel to the first connection plane 268, the connecting elements 266 are connected via two second ends 274 with the second counter-element 264. The second counter-element 264 and the second connection plane 270 are offset to the first counter-element 262 and to the first connection plane 268 in the positive z-direction. In the second parallel displacement direction 261 the two first ends 272 of one of the connecting elements 266 have a first distance 280 from the two first ends 272 of the other connecting element 266. In this direction, the two second ends 274 of one of the connecting elements 266 also have a second distance 282 from the two second ends 274 of the other connecting element 266. The first distance 280 is equal to the second distance 282, making a parallelogram guide. The result of this is also is that in a plane in the direction of the second parallel displacement direction 261 and at right angles to the two connection planes 268, 270 the respective distances 284, 286 between the respective first ends 272 and the respective second ends 274 of the connecting elements 266 are equal. The two first ends 272 and the two second ends 274 of the respective connecting element 266, in a direction parallel to the connection planes 268, 270 and at right angles to the second parallel displacement direction 261, thus in the example in the x-direction, are offset to one another.

(50) In the exemplary embodiment, the first connection planes 228 and 268, as well as the second connection planes 230, 270 of the parallelogram guides 220, 260 are identical.

(51) In order to perform a parallel displacement of the lens 100 in the second parallel displacement direction 261, by means of an adjustment element 114 a second adjustment force 278 is introduced in the first counter-element 222 of the first parallelogram guide 220, wherein the second adjustment force 278 comprises a component in the second parallel displacement direction 261. The second adjustment force 278 shown in the exemplary embodiment comprises a (single) component in the positive y-direction. The second adjustment force 278 is transmitted via the flexure bearings 116 of the first parallelogram guide 220 that are resistant to bending in the second parallel displacement direction 261, to the common second counter-element 224, 264 of the first and the second parallelogram guide 220, 260. Through the second adjustment force 278 therefore a bending of the flexure bearings 116 of the second parallelogram guide 260 and thus a parallel displacement of the second counter-element 264 relative to the second counter-element 264 in the second parallel displacement direction 261 is achieved.

(52) The parallel displacement comes to an end, when an equilibrium of forces in the second parallel displacement direction 261 is arrived at. This is the result on the one side of the second adjustment force 278, acting in the positive y-direction and on the other side of forces resulting from the bending of the flexure bearings 116, and a spring force (not shown), applied by a spring element 115 and acting on a first counter-bearing 279 in the negative y-direction. By pre-tensioning the spring element 115 a parallel displacement in the negative y-direction can also be performed.

(53) In details C and D, the flexure bearings 116 are shown in detail. These comprise, as necessary, rounded transitions to the counter-elements 222, 224, 262, 264 and the connecting elements 226, 266indicated by symbolic broken lines.

(54) FIGS. 5 and 6 are isometric views of the parallel displacement mechanism 200. The coaxial structure of the parallel displacement mechanism 200 about the lens axis 101 is clearly visible. In addition, an opening 134 is visible, passing through the parallel displacement mechanism 200 and the device 98 as a whole. The opening 134 serves to receive the goniometer mechanism 300. In addition, threaded holes 130 in the first counter-element 262 (FIG. 6) are visible, serving for fixing the parallel displacement mechanism 200 and thus the device 98 in the second housing part 119. The through-holes 132 in the first counter-element 222 (FIG. 5) serve for connecting the parallel displacement mechanism 200 with the goniometer mechanism 300. By means of the through-holes 132 in the first counter-element 262 (FIG. 6) screws can be passed through the first counter-element 262 and their screw heads introduced into the first counter-element 222. The parallel displacement mechanism 200, like the goniometer mechanism 300 discussed below, is implemented as one piece.

(55) FIG. 7 is a front view of the goniometer mechanism 300 viewed in the direction counter to the y-axis in the negative y-direction. In this view, the first counter-element 322 of the first symmetrical, trapezoidal guide 320 is partially concealed by the first counter-element 362 of the second symmetrical, trapezoidal guide 360, so that the gap 112 (see particularly FIG. 8) between the first counter-elements 322, 362 is only partially visible. FIG. 8 is a side view of the goniometer mechanism 300 seen in the direction of the x-axis, thus in the positive x-direction.

(56) The flexure bearings 116 connect the connecting elements 326, 366 with the counter-elements 322, 362, 324, 364, wherein the connection is made via at least a first end 332, 372 (in the example shown via in each case two ends 332, 372) and at least a second end 334, 374 (in the example shown via in each case two ends 334, 374) of the connecting elements 326, 366. The flexure bearings 116 are dimensioned with regard to their flexural strengths or elasticities such that an effort for bending about the first swivel axis 336 (thus a bending in the x-direction) or about the second swivel axis 376 (thus a bending in the y-direction) is substantially less than in other spatial directions.

(57) In the first trapezoidal guide 320 the connecting elements 326 in a first connection plane 328, running parallel to the first swivel axis 336, are in each case connected via two first ends 332 with the first counter-element 322. In a second connection plane 330, similarly running parallel to the first swivel axis 336 and spaced apart from the first connection plane 328, the connecting elements 326 are in each case via two second ends 334 connected with the second counter-element 324. In the example shown, the second connection plane 330 is an x,y-plane. In addition, in the starting position shown the first connection plane 328 is parallel to the second connection plane 330. The second counter-element 324 and the second connection plane 330 are offset to the first counter-element 322 and to the first connection plane 328 in the positive z-direction.

(58) In a direction running along the first connection plane 328 and at right angles to the first swivel axis 336 (in the example in the x-direction) the two first ends 332 of one of the connecting elements 326 have a first distance 340 to the two first ends 332 of the other connecting element 326. In one direction running along the second connection plane 330 and at right angles to the first swivel axis 336 (in the example in the x-direction) the two second ends 334 of one of the connecting elements 326 also have a second distance 342 to the two second ends 334 of the other connecting element 326. The first distance 340 is smaller than the second distance 342.

(59) In directions running along a plane 321, running at right angles to the first swivel axis 336, the respective distances 344, 346 between the respective first ends 332 and the respective second ends 334 of the connecting elements 326 are equal. The two first ends 332 and the two second ends 334 of the respective connecting element 326 in the direction of the first swivel axis 336, thus in the example in the y-direction, are offset to one another.

(60) In order to perform a goniometer movement of the lens 100 about the first swivel axis 336, by means of an actuator 117 a first pivot force 338 is introduced into the first counter-element 322, wherein the first pivot force 338 comprises a component at right angles to the first swivel axis 336 and parallel to the first connection plane 328. The first pivot force 338 shown in the exemplary embodiment comprises a (single) component in the positive x-direction. Through the first pivot force 338 therefore a bending of the flexure bearings 116 and thus a goniometer movement of the first counter-element 322 is achieved, in that the first counter-element 322 at least to some extent swivels about the first swivel axis 336. Provided the second trapezoidal guide 360 is not operated, the lens 100 is thus to some extent swiveled in the plane 321.

(61) The goniometer movement comes to an end when an equilibrium of forces is arrived at. This is the result on the one side of the first pivot force 338, acting in the positive x-direction and on the other side of forces resulting from the bending of the flexure bearings 116, and a spring force (not shown), applied by a spring element 115 and acting on a combined counter-bearing 339 inter alia in the negative x-direction. The spring element, acting on the combined counter-bearing 339, due to the inclined position, applies a spring force within the x,y-plane to the first counter-element 322, which counteracts both the first pivot force 338, and also a second pivot force 378 (see FIG. 8). By pre-stressing the spring element 115 a goniometer movement in the opposing swivel direction about the first swivel axis 336 can be ensured.

(62) In the second trapezoidal guide 360 the connecting elements 366 are connected in a first connection plane 368, running parallel to the second swivel axis 376, in each case via two first ends 372 with the first counter-element 362. In the example shown, the first connection plane 368 is an x,y-plane. In a second connection plan 370, similarly running parallel to the second swivel axis 376 and spaced apart from the first connection plane 368, the connecting elements 366 are connected via in each case two second ends 374 with the second counter-element 364. In the starting position shown, the second connection plane 370 is parallel to the first connection plane 368. The second counter-element 364 and the second connection plane 370 are offset to the first counter-element 362 and to the first connection plane 368 in the positive z-direction.

(63) In a direction running along the first connection plane 368 and at right angles to the second swivel axis 376 (in the example in the y-direction) the two first ends 372 of one of the connecting elements 366 has a first distance 380 to the two first ends 372 of the other connecting element 366. In a direction running along the second connection plane 370 and at right angles to the second swivel axis 376 (in the example in the y-direction) the two second ends 374 of one of the connecting elements 366 have a second distance 382 to the two second ends 374 of the other connecting element 366. The first distance 380 is smaller than the second distance 382.

(64) In directions along the course of a plane 361, running at right angles to the second swivel axis 376, the respective distances 384, 386 between the respective first ends 372 and the respective second ends 374 of the connecting elements 366 are equal. The two first ends 372 and the two second ends 374 of the respective connecting element 366 are, in the direction of the second swivel axis 376, thus in the example in the x-direction, offset to one another.

(65) In order to perform a goniometer movement of the lens 100 about the second swivel axis 376, by means of a further actuator 117 a second pivot force 378 is introduced into the first counter-element 322 of the first trapezoidal guide 320, wherein the second pivot force 378 comprises a component at right angles to the second swivel axis 376 and parallel to the second connection planes 370. The second pivot force 378 shown in the exemplary embodiment comprises a (single) component in the positive y-direction. The second pivot force 378 is transmitted via the flexure bearings 116 of the first trapezoidal guide 320, that are bend-resistant in a direction at right angles to the second swivel axis 376 and parallel to the second connection planes 370 to the common second counter-element 324, 364 of the first and second trapezoidal guides 320, 360. Through the second pivot force 378 therefore a bending of the flexure bearings 116 of the second trapezoidal guide 360 and thus a goniometer movement of the second counter-element 324, 364 and the first counter-element 322 at least to some extent about the second swivel axis 376 is achieved. Provided the first trapezoidal guide 320 is not operated, the lens 100 is thus to some extent rotated in the plane 361.

(66) The goniometer movement comes to an end when an equilibrium of forces is arrived at. This is the result on the one side of the second pivot force 378, acting in the positive y-direction and on the other side of the forces resulting from the bending of the flexure bearings 116, and a spring force (not shown), applied by a spring element 115 acting on the combined counter-bearing 339, inter alia in the negative y-direction. The spring element 115, acting on the combined counter-bearing 339, as already discussed, due to the inclined position applies a spring force within the x,y-plane to the first counter-element 322, counteracting both the first pivot force 338, and the second pivot force 378. By pre-stressing the spring element 115 a goniometer movement in the opposing swivel direction about the first second swivel axis 376 can be performed.

(67) Instead of a combined counter-bearing 339, similarly to the parallel displacement mechanism 200, a second separate counter-bearing can also be used. In a variant in which the goniometer mechanism 300 can follow rapid operations by the at least one actuator 117 more quickly, the combined counter-bearing 339 can be dispensed with, and thus the spring element 115. To swivel goniometer mechanism 300, the respective actuator 117 applies a compressive force to the first counter-element 322, and to swivel the goniometer mechanism 300 in the opposite direction a tractive force to the counter-element 322, wherein the forces of the actuators 117 and those of an elastic recovery of the flexure bearings 117 can at least partially compensate or also overcompensate one another.

(68) Control of the at least one actuator 117 by means of the control device 97 typically takes place by path control, meaning that a path (travel) to be adjusted is specified to the actuator 117.

(69) In the exemplary embodiment, the first connection planes 328 and 368, as well as the second connection planes 330, 370 of the trapezoidal guides 320, 360 are parallel to one another in the starting position shown.

(70) In details D and E, the flexure bearings 116 are shown in detail. These comprise, as necessary, rounded transitions to the counter-elements 322, 324, 362, 364 and the connecting elements 326, 366indicated by symbolic broken lines.

(71) FIGS. 9 and 10 are isometric views of the goniometer mechanism 300. The coaxial structure of the goniometer mechanism 300 about the lens axis 101 is clearly visible. In addition, an opening 134 is visible, passing through the goniometer mechanism 300 and the device 98 as a whole. Via the opening 134 the X-rays can pass through device 98. In addition, threaded holes 130 are visible in the first counter-element 362, which serve to connect the goniometer mechanism 300 with the parallel displacement mechanism 200.

(72) As particularly visible in FIGS. 1, 2, 5, 6, 9 and 10, the parallel displacement mechanism 200 and the goniometer mechanism 300 have a substantially hollow cylindrical configuration and are arranged coaxially to one another, wherein the goniometer mechanism 300 is arranged coaxially in the parallel displacement mechanism 200.

(73) Within the apparatus 96 (compare FIGS. 1 and 2), therefore: the lens 100 is connected with the receiving element 110 (or screwed into the receiving element 110) and the receiving element 110 is configured with the first counter-element 322 of the first trapezoidal guide 320 as one piece; the first counter-element 322 by means of the connecting elements 326 of the first trapezoidal guide 320 and its flexure bearings 116 is connected with the second counter-element 324, 364 with a one-piece configuration of the first and second trapezoidal guide 320, 360; the second counter-element 324, 364 by means of the connecting elements 366 of the second trapezoidal guide 360 and its flexure bearings 116 is connected with the first counter-element 362 of the second trapezoidal guide 360;

(74) the first counter-element 362 of the second trapezoidal guide 360 is connected (or screw-connected) with the first counter-element 222 of the first parallel guide 220; the first counter-element 222 by means of the connecting elements 226 of the first parallelogram guide 220 and its flexure bearings 116 is connected with the second counter-element 224, 264 with a one piece configuration of the first and second parallelogram guide 220, 260; the second counter-element 224, 264 by means of the connecting elements 266 of the second trapezoidal guide 260 and their flexure bearings 116 is connected with the first counter-element 262 of the second trapezoidal guide 360; and the first counter-element 262 of the second parallelogram guide 260 is connected (or screw-connected) with the second housing part 119 of the apparatus 96.

(75) Thus, through the device 98 on the one hand an adjustment of an entry focal point 104 of an X-ray lens 100 to a focal spot 102, and on the other a goniometer mechanism 300 (a twin axis goniometer), are implemented, configured for swiveling the X-ray lens 100 about the first and second swivel axis 336, 376. The device 98 is characterized, inter alia, by its compactness, vacuum tightness and excellent accessibility, even in the tightest space and under technical limitations. This is achieved particularly also by implementation of the device 98 by means of flexure bearings 116.

(76) Through the coaxial construction, maximum use is made of installation space, simplifying device integration.

(77) The device 98 is characterized by a very small number of parts, since each of the two kinematics (axes) is implemented as a monolithic block. The embodiment shown is characterized also by a production-ready design and optimization. A number of excitation sources can also be used in one device, provided that the excitation points of all excitation sources can be calibrated with one another.

(78) In the following, using FIGS. 11-14, the method 90 according to the invention is discussed based on a preferred embodiment of the invention:

(79) The method 90 for scanning the sample 99 by means of the X-ray optics 100 for irradiating the sample 99 with X-rays 107a can comprise the following steps shown schematically in FIG. 11:

(80) Firstly, in a step 400 a starting measuring point 109 is occupied in a corner of the sample 99 (see FIG. 13), in which the optical exit focal point 108 of the X-ray lens 100 is brought into line with the starting measuring point 109. This is achieved by displacing the optical exit focal point 108 and a measuring point 106 congruent with this in a negative first scanning direction 92b, according to the negative x-direction as far as the end of a preset measuring range. Additionally, the optical exit focal point 108 and thus also the congruent measuring point 106 are displaced in a negative second scanning direction 93b, according to the negative y-direction as far as the end of the preset measuring range.

(81) Then a step 402 of the detection of the radiation 107b emanating from the sample 99 takes place. The emanating radiation 107b can, for example, be emitted, reflected or transmitted radiation. This can involve electromagnetic radiation, for example X-radiation or corpuscular radiation (electron beams). The emanating radiation 107b is detected by a detector 94 (see FIG. 12) and transmitted with the measured values correlating with the detected, emanating radiation 107b to the control device 97. The emanating radiation 107b results from the irradiation of the measuring point 106 with the X-rays 107a emanating from the X-ray optics 100.

(82) Here, the sample 99 can be irradiated continuously, thus during the swiveling of the X-ray optics 100, and also only after occupation of the respective measuring point 106 with the X-radiation 107a. Detection of the radiation 107b emanating from the sample 99 can similarly take place continuously, thus during the swiveling of the X-ray optics 100, and also only after occupation of the respective measuring point 106.

(83) In a step 404 the measuring point 106 is displaced by one increment in the positive first scanning direction 92a (see FIG. 13). Then the step 402 of the detection of the radiation 107b emanating from the sample 99, together with transmission of the correlating values, is performed.

(84) In a decision 406 a check is made whether an end of the measuring range in the positive first scanning direction 92a has been reached. Should this not be the case, the steps 404 and 402 are repeated until the end of the measuring range is reached.

(85) If according to decision 406 the end of the measuring range has been reached, a decision 408 follows, in which it is queried whether the end of the measuring range in the positive second scanning direction 93a has been reached. Should this be the case, by means of the control device 97 according to a step 410 a combining with the measured values correlating with the detected radiation takes place to form an overall scan. The overall scan can, for example, be output via a monitor (not shown).

(86) If according to decision 408 the end of the measuring range has not been reached, according to a step 412 a displacement of the measuring point 106 by one increment in the direction of the positive scanning direction 93a (see FIG. 13) takes place, and then according to step 402 a detection of emanating radiation 107b.

(87) In a step 414 a displacement of the measuring point 106 by one increment in the negative first scanning direction 92b takes place. Then the step 402 of detection of the radiation 107b emanating from the sample 99, together with transmission of the correlating values is performed.

(88) In a decision 416 a check is made whether an end of the measuring range in the negative first scanning direction 92b has been reached. Should this not be the case, steps 414 and 402 are repeated until the end of the measuring range has been reached.

(89) If according to decision 416 the end of the measuring range has been reached, a decision 408 follows in which it is queried whether the end of the measuring range in the positive second scanning direction 93a has been reached. Should this be the case, by means of the control device 97 according to a step 410 the combining to form an overall scan takes place.

(90) If according to decision 408 the end of the measuring range has not been reached, according to a step 412 a displacement of the measuring point 106 by one increment in the direction of the positive second scanning direction 93a takes place. Then the method is continued after the first step shown in FIG. 11.

(91) Through this embodiment, a meandering scanning according to FIG. 13 is achieved.

(92) As an alternative to the meandering scanning the method 90 after a negative first decision 408 (thus with the end of the measuring range in the positive second scanning direction 93a not yet reached) can be continued, in that a displacement of the measuring point 106 in the direction of the negative first scanning direction 92b takes place as far as the start of the measuring range. The X-ray optics 100 are thus swiveled back. This can take place at the same time, before or after step 412, with which a displacement of the measuring point 106 by one increment in the direction of the positive second scanning direction 93a is carried out. The method is then continued with the step 402 (which in FIG. 11 follows step 400), in which the emanating radiation is detected. Then the method is continued as shown in the top part of FIG. 11, with steps 404, 402 and the decision 406. Thus, following a scanned line in the positive first scanning direction 92a a line return always takes place, whereupon in the next line scanning is again in the positive first scanning direction 92a. Because the scanning always takes place in the positive first scanning direction 92a, measurement errors due to mechanical inaccuracies can be avoided.

(93) Because the first swivel axis 336 and/or the second swivel axis 376 runs through the optical entry point 104 of the X-ray optics 100 and the optical entry point 104 has first been brought into line with the focal spot 102 of the tubes, during swiveling of the X-ray lens 100 a quantity of radiation 107a captured by the X-ray lens 100 does not change.

(94) Due to the relatively small swivel angle of the X-ray optics about the two swivel axes 336, 376 of at most+?5? (particularly at most+?2?) a displacement of the exit focal point 108 in the z-direction can be disregarded.

(95) The method 90 can comprise a step of the displacement of the sample 99 in the second scanning direction 93. In this way, the displacement of the measuring point 106 in the second scanning direction 93 by means of swiveling the X-ray optics 100 about the second swivel axis 376 can be dispensed with. The displacement of the sample 99 in the second scanning direction 93 can take place by, for example, displacing the sample table 103 together with the sample 99 in the negative second scanning direction 93b. In this way, the measuring point 106 is displaced in relation to the sample 99 in the positive second scanning direction 93a.

(96) Furthermore, a displacement of the sample 99 in the first scanning direction 92 and/or the second scanning direction 93 can also take place, in order to displace the measuring point 106 on the sample 99 within a measuring grid 502 from one grid area 500 to the next (see FIG. 14). Thus, relatively large displacements of the measuring point 106 from one grid area 500 to the next grid area 500 can take place by means of displacement of the sample 99, while to this end relatively small displacements within a respective grid area 500 by means of swiveling the X-ray optics 100 are performed. Thus, a possible measurement inaccuracy as a result of a displacement of the exit focal point 108 in the z-direction due to relatively large swiveling of the X-ray optics 100 is prevented.

(97) By means of the method, by swiveling the X-ray optics 100 a very rapid and also low-vibration displacement of measuring point 106 can be achieved. This is made possible particularly through the use of the flexure bearings 116 within the trapezoidal guides 320, 360, since flexure bearings 116, unlike conventional hinges, do not have any adhesive friction and thus also no breakaway torques when overcoming the adhesive friction.

LIST OF REFERENCE NUMERALS

(98) 90 Method for scanning a sample by means of X-ray optics 92 First scanning direction 92a Positive first scanning direction 92b Negative first scanning direction 93 Second scanning direction 93a Positive second scanning direction 93b Negative second scanning direction 94 Detector 96 Apparatus 97 Control device 98 Device 99 Sample 100 X-ray optics/capillary-lens 101 Lens axis 102 Predetermined point/focal spot 103 Sample table 104 Optical entry point/entry focal point 105 Central measuring point 106 Measuring point 107a (Ingoing) X-rays 107b (Emanating) radiation 108 Optical entry point/exit focal point 109 Starting measuring point 110 Receiving element 112 Gap 114 Adjustment elements 115 Spring element 116 Flexural bearing 117 Actuator 118 First housing part 119 Second housing part 120 Holder 122 Window 124 Position of a spacer 126 Screwed connection 128 Recess 130 Threaded hole 132 Through-hole 134 Opening 200 Parallel displacement mechanism 220 First parallel kinematics/first parallelogram guide 221 First parallel displacement direction 222 First counter-element 224 Second counter-element 226 Connecting element 228 First connection plane 230 Second connection plane 232 First end 234 Second end 238 First adjustment force 239 First counter-bearing 240 First distance 242 Second distance 244 Distance between first and second end of a first connecting element 246 Distance between first and second end of a second connecting element 260 Second parallel kinematics/second parallelogram guide 261 Second parallel displacement direction 262 First counter-element 264 Second counter-element 266 Connecting element 268 First connection plane 270 Second connection plane 272 First end 274 Second end 278 Second adjustment force 279 Second counter-bearing 280 First distance 282 Second distance 284 Distance between first and second end of a first connecting element 286 Distance between first and second end of a second connecting element 300 Goniometer mechanism 320 First goniometer kinematics/first trapezoidal guide 321 Plane at right angles to the first swivel axis 322 First counter-element 324 Second counter-element 326 Connecting element 328 First connection plane 330 Second connection plane 332 First end 334 Second end 336 First swivel axis 338 First pivot force 339 Combined counter-bearing 340 First distance 342 Second distance 344 Distance between first and second end of a first connecting element 346 Distance between first and second end of a first connecting element 360 Second goniometer kinematics/second trapezoidal guide 361 Plane extending at right angles to the second swivel axis 362 First counter-element 364 Second counter-element 366 Connecting element 368 First connection plane 370 Second connection plane 372 First end 374 Second end 376 Second swivel axis 378 Second pivot force 380 First distance 382 Second distance 384 Distance between first and second end of a first connecting element 386 Distance between first and second end of a second connecting element 400 Occupation of a starting measuring point 402 Detection of emanating radiation 404 Displacement of the measuring point in the positive first scanning direction 406 Decision on whether the end of the measuring range in the positive first scanning direction has been reached 408 Decision on whether the end of the measuring range in the positive second scanning direction has been reached 410 Combining to form an overall scan 412 Displacement of the measuring point in the positive second scanning direction 414 Displacement of the measuring point in the negative first scanning direction 416 Decision on whether the end of the measuring range in the negative first scanning direction has been reached 500 Grid area 502 Measuring grid