ELECTRONIC CIRCUIT FOR IMAGE SENSING
20240334080 ยท 2024-10-03
Assignee
Inventors
Cpc classification
H04N25/77
ELECTRICITY
H04N25/616
ELECTRICITY
H03F2200/69
ELECTRICITY
International classification
H04N25/616
ELECTRICITY
H04N25/77
ELECTRICITY
Abstract
An electronic circuit includes image acquisition cells, wherein each cell has a photodetector coupled to a first node of the cell, and an amplifying transistor having a gate connected to the first node, a conduction node coupled to an output of the cell, and a node for controlling a back gate voltage. The amplifying transistor is configured so that its threshold voltage varies according to the back gate voltage. A control circuit adjusts a voltage applied to the control node of the back gate voltage of the amplifying transistor of one of the cells according to a comparison of the voltage present at the cell output and a reference voltage.
Claims
1. An electronic circuit, comprising: image acquisition cells, wherein each image acquisition cell comprises: a photodetector coupled to a first node of the image acquisition cell; and an amplifying transistor having a front gate connected to the first node, a conduction node coupled to an output of the image acquisition cell, and a back gate coupled to a node for controlling a back gate voltage; wherein the amplifying transistor has a threshold voltage that varies according to the back gate voltage of the amplifying transistor; and at least one control circuit configured to adjust a voltage applied as the back gate voltage to the back gate of the amplifying transistor of one of the image acquisition cells according to a difference between a voltage present at the image acquisition cell output and a reference voltage.
2. The electronic circuit according to claim 1, wherein the amplifying transistor is formed in a technology using a depleted semiconductor on insulator substrate.
3. The electronic circuit according to claim 1, wherein each image acquisition cell comprises a sampling capacitor and a sampling transistor, and wherein the back gate of the amplifying transistor is coupled to the sampling capacitor and coupled to an output of the at least one control circuit via the sampling transistor.
4. The electronic circuit according to claim 3, wherein the sampling capacitor stores a sampled correction value of the output of the at least one control circuit for controlling the back gate voltage applied to the back gate of the amplifying transistor.
5. The electronic circuit according to claim 3, wherein a size of the sampling capacitor is independent from the sensitivity of the image acquisition cell.
6. The electronic circuit according to claim 3, wherein the at least one control circuit comprises a differential amplifier having a first input coupled to said output of the image acquisition cell, and having a second input configured to receive the reference voltage, and wherein an output of the differential amplifier delivers an output voltage that is applied through the sampling transistor to the sampling capacitor.
7. The electronic circuit of claim 3, wherein the sampling capacitor has a capacitance greater than that of the first node.
8. The electronic circuit according to claim 1, wherein the first node of each image acquisition cell is a sense node and each image acquisition cell comprises: a readout transistor series-connected with the amplifying transistor; and a reset transistor configured to couple the sense node to a reset voltage rail, the amplifying transistor being assembled as a source-follower device and having said conduction node coupled to the output of the image acquisition cell via the readout transistor.
9. The electronic circuit according to claim 1, wherein each image acquisition cell is a capacitive transimpedance amplifier type cell comprising: a readout transistor series-connected with the amplifying transistor; a reset transistor configured to couple an integration node, common to the readout transistor, to the amplifying transistor, and to the reset transistor, to the first node; and an integration capacitive element coupling the integration node and the first node; the amplifying transistor having said conduction node coupled to the output of the image acquisition cell via the readout transistor.
10. The electronic circuit according to claim 9, wherein each image acquisition cell comprises a sampling capacitor and a sampling transistor, and wherein the back gate voltage applied to the back gate of the amplifying transistor is coupled to the sampling capacitor and coupled to an output of the at least one control circuit via the sampling transistor, and wherein the sampling capacitor has a capacitance greater than that of the integration capacitive element.
11. The electronic circuit according to claim 1, wherein at least some of the image acquisition cells are arranged in at least one cell column, where the outputs of said at least some of the image acquisition cells are interconnected by at least one first column conductor coupled to a current source and to said at least one control circuit configured to sequentially adjust the voltage applied to the back gate of the amplifying transistor as the back gate voltage of each of said at least some of the image acquisition cells in said at least one cell column.
12. The electronic circuit according to claim 1, wherein the amplifying transistor is insulated by trenches.
13. The electronic circuit according to claim 1, wherein the photodetectors comprise an organic material.
14. The electronic circuit according to claim 1, wherein the photodetectors comprise nanoparticles.
15. An electronic circuit, comprising: image acquisition cells, wherein each image acquisition cell comprises: a photodetector coupled to a first node; and a source-follower transistor having a front gate coupled to the first node, a conduction node coupled to an output of the image acquisition cell, and a back gate; and a control circuit configured to compare a voltage at the output of the image acquisition cell to a reference voltage to generate a back gate voltage which is applied to the back gate of the source-follower transistor.
16. The electronic circuit according to claim 15, wherein each image acquisition cell comprises a sampling capacitor coupled to the back gate and a sampling transistor coupled between the back gate and an output of the control circuit, and wherein the back gate voltage is stored by the sampling capacitor in response to actuation of the sampling transistor.
17. The electronic circuit according to claim 15, wherein the control circuit comprises a differential amplifier having a first input coupled to said output of the image acquisition cell, and having a second input configured to receive the reference voltage, the back gate voltage being generated from a difference between the output of the image acquisition cell and the reference voltage.
18. An electronic circuit, comprising: image acquisition cells, wherein each image acquisition cell comprises: a photodetector coupled to a first node; and a common-source transistor having a front gate coupled to the first node, a conduction node coupled to an output of the image acquisition cell, and a back gate; and a control circuit configured to compare a voltage at the output of the image acquisition cell to a reference voltage to generate a back gate voltage which is applied to the back gate of the common-source transistor.
19. The electronic circuit according to claim 18, wherein each image acquisition cell comprises a sampling capacitor coupled to the back gate and a sampling transistor coupled between the back gate and an output of the control circuit, and wherein the back gate voltage is stored by the sampling capacitor in response to actuation of the sampling transistor.
20. The electronic circuit according to claim 18, wherein the control circuit comprises a differential amplifier having a first input coupled to said output of the image acquisition cell, and having a second input configured to receive the reference voltage, the back gate voltage being generated from a difference between the output of the image acquisition cell and the reference voltage.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0021] The foregoing features and advantages, as well as others, will be described in detail in the rest of the disclosure of specific embodiments given by way of illustration and not limitation with reference to the accompanying drawings, in which:
[0022]
[0023]
[0024]
[0025]
[0026]
[0027]
DETAILED DESCRIPTION
[0028] Like features have been designated by like references in the various figures. In particular, the structural and/or functional features that are common among the various embodiments may have the same references and may dispose identical structural, dimensional and material properties.
[0029] For the sake of clarity, only the steps and elements that are useful for the understanding of the described embodiments have been illustrated and described in detail.
[0030] Unless indicated otherwise, when reference is made to two elements connected together, this signifies a direct connection without any intermediate elements other than conductors, and when reference is made to two elements coupled together, this signifies that these two elements can be connected or they can be coupled via one or more other elements.
[0031] In the following description, when reference is made to terms qualifying absolute positions, such as terms edge, back, top, bottom, left, right, etc., or relative positions, such as terms above, under, upper, lower, etc., or to terms qualifying directions, such as terms horizontal, vertical, etc., it is referred, unless specified otherwise, to the orientation of the drawings.
[0032] Unless specified otherwise, the expressions about, approximately, substantially, and in the order of signify plus or minus 10%, preferably of plus or minus 5%.
[0033]
[0034]
[0035] In the example of
[0036] In the example of
[0037] In the example of
[0038] First transistor RST receives, on its gate, a signal RESET with two states for controlling the resetting of the voltage at sense node SN. When signal RESET is in a first state, first transistor RST is conductive. In a second state of signal RESET, transistor RST is off.
[0039] In the example of
[0040] The switching from an on to an off state of the third transistor RD induces random noise having a standard deviation
at node SN, which is forwarded by transistor SF to the output of pixel VX.
[0041]
[0042] At a time t1, signals READ and RESET are set to a state, for example high, to turn on transistors RD and RST. Sense node SN is thus set to voltage VRST and voltage VX settles at a level 302 depending on an offset due to the sizing of transistor SF and to the value of the corresponding column current.
[0043] At a time t2, signal RESET is, for example, set to a low state to turn off transistor RST. The capacitance at sense node SN is in the order of one femtofarad, which results in that, at time t2, a
wideband noise is generated in the channel of transistor RST, then sampled at sense node SN and ends up, in baseband, integrated to VX in the form of a random voltage offset, illustrated on curve 292, with respect to noise-free case 290. An integration phase starts from time t2, which causes the decrease (in the case where the charges are electrons) of voltage VX as charges are being photogenerated, until a time t5.
[0044] At a time t3 between times t2 and t5, signal READ switches, for example, to a low state, to turn off transistor RD and to enable to access to other rows of the array.
[0045] At a time t4 between times t3 and t5, signal READ switches, for example, to a high level to turn on transistor RD until a time t7. Between times t4 and t5, voltage VX is, for example, converted by an analog-to-digital converter not illustrated in
[0046] In the example of
random noise. At time t6 and until time t7, the pixel is read from with no signal, which corresponds to a first digitization of the level of voltage VX. The charges integrated between t6 and t7 may be neglected since the integration time is short. Between times t6 and t7, voltage VX is, for example, converted, during a second digitization, by the analog-to-digital converter used for the first integration phase and the comparison between the values obtained during the two digitizations gives access to the quantity of photogenerated charges. However, the
random noise sampled on voltage SN when transistor RST switches from the high state to the low state is statistically different between the first and the second digitization. The standard deviation of the difference thus becomes
and this noise is predominating over all other noise sources, given the generally very low value of the capacitance C of sense node SN. It is thus desirable to provide a solution to decrease the impact of this noise.
[0047]
[0048] In the example of
[0049] Control node 262 corresponds, for example, to a back gate of second transistor SF. In this case, the gate connected to sense node SN is referred to as a front gate of second transistor SF. The back and front gates may act separately, and with a different associated transconductance, on a same channel of second transistor SF. The back gates may be formed, for example, by the technology using a depleted semiconductor substrate, preferably fully depleted, on insulator (Fully Depleted Silicon on Insulator, FDSOI). When the substrate of second transistor SF is of FDSOI type, the back gate is, for example, formed under a layer of insulator placed between the channel and the substrate. In this example, the front gate is, for example, formed at the surface above the insulator and the channel.
[0050] In another example, control node 262 corresponds to an electrode influencing the threshold voltage of the channel formed in the semiconductor material of the substrate of second transistor SF. For example, portions of the semiconductor material comprising said electrode are insulated from the rest of the substrate by insulating trenches, for example biased.
[0051] In the example of
[0052] In the example of
[0053] In the example of
[0054] The control circuit 295 is, for example, configured to adjust a voltage VBB applied to the control node of the back gate voltage of the second transistor SF according to a control of the voltage VX present at the output 250 of the cell selected on signal READ so that it tends towards a reference voltage VREF.
[0055] In the example of
[0056] Control circuit 295 applies a correction voltage VCORR to the cell selected by transistor RD via the sampling transistor CORR of the same cell.
[0057] In the example of
[0058] Sampling transistor CORR receives, on its gate, a signal SMP with two control states defining time ranges during which respectively 1) the output of amplifier 290 is coupled to the control node 262 of the back gate voltage of transistor SF, and 2) during which sampling transistor CORR is off and voltage VCORR is thus sampled and stored by capacitor 255. The retention of voltage VCORR is all the better as storage capacitive element 255 is connected on the back gate of transistor CORR, since the gain between the back gate and the source is approximately 10%, to be compared with approximately 90% for the front gate. The fact of having a significant capacitance thus limits the voltage drift due to leakage currents, and further, this voltage drift is strongly attenuated by the small gain between back gate 262 and the source of transistor SF. The control voltage VBB of node 262 corresponds to the output voltage VCORR of amplifier 290, sampled by sampling transistor CORR and stored by capacitive element 255.
[0059] The control value that can be observed in the voltage VBB sampled on capacitive element 255 also samples a
noise where C1 here is the value of the sampling capacitance 255. However, sampling capacitance 255 being greater than the capacitance of sense node SN, the generated noise is lower. Further, the sampled voltage VBB being stored on back gate 262, its associated noise is multiplied by the amplification of the back gate (that is, approximately 10%), knowing that the main noise to be corrected of sense node SN is submitted to the amplification of approximately 90% of the front gate. By comparing these two contributions on node VX, the contribution to the total noise at output 250 introduced by the correction on back gate 262 is much lower than that of the noise to be corrected on sense node SN, for example by a ratio 1/10.
[0060] Signal SMP is, for example, common to all the cells of a same row and is delivered, for example, on a row line 270.
[0061] In operation, amplifier 290 delivers voltage VCORR to make the output voltage VX of the selected cell equal to reference voltage VREF.
[0062]
[0063] At a time t1, similar to the time t2 of
[0064] At a time t2, signal RESET is, for example, set to a low state to turn off transistor RST. At time t2, the
noise generated in the channel of transistor RST is sampled at the output of the pixel and ends up integrated to VX in the form of a voltage offset.
[0065] At a time t3, amplifier 290, which has, for example, been previously activated before time t2, delivers at its output the voltage VCORR generated based on a comparison between the initially noisy voltage VX and voltage VREF. The noise is sampled at time t2, which sets the amplifier input, which then needs a certain time (until t3) to settle. The level of the voltage VCORR thus obtained depends on the voltage on sense node SN comprising both the offsets due to the sizing differences of transistors SF and the
noise. Voltage VCORR will modify the threshold voltage of the second transistor SF of the selected cell which, in turn, will modify the output voltage of cell VX by forming a control loop so that VX tends towards VREF.
[0066] At time t3, the amplifier output having settled at the correction value, signal SMP is set, for example, to a low level to turn off sampling transistor CORR and amplifier 290 is, for example, deactivated. The sampling capacitive element 255 of the correction then takes over by storing the control voltage for the entire duration of the integration which starts after the sampling.
[0067] As shown in the example of
[0068] The output level VX obtained during the establishing and the sampling of the correction is mainly deterministic since the random portion corresponding to the
noise has been corrected.
[0069] At time t3, similar to the time t3 of
[0070] Similarly to
[0071] At time t4 between times t3 and t5 and similar to the time t4 of
[0072] In
[0073] Thereby, although the slope of the curve of voltage VX between t3 and t4 appears as stronger than between times t4 and t5, it is actually similar.
[0074] The electronic circuit and its operation, such as described in the example of
[0075] Similarly to
noise correction.
[0076] At time t5, after the conversion of the signal by means of the analog-to-digital converter, signals RESET and SMP switch back to a high level to respectively turn on transistors RST and CORR, and perform a new operation of control of noise
by means of control circuit 295.
[0077] At time t6 similar to time t6 of
noise value is then sampled from the sense node.
[0078] Before time t6 or at t6, the amplifier is, for example, reactivated to control the output voltage VX of the cell to voltage VREF as between t2 and t3. The output level VX obtained at the end of the settling, at a time t7, and the sampling of the correction is then deterministic and equal to that obtained at time t3 due to the
removal of the random portion.
[0079] At the end of the settling time, at time t7, between times t6 and t8, signal SMP switches, for example, to a low level to turn off sampling transistor CORR, which enables to store the correction VBB to be applied to capacitive element 255. Between times t7 and t8, an analog-to-digital conversion of voltage VX, not illustrated, is then performed, which enables to measure VX in the absence of photogenerated charges and with a correction of the
noise. By difference between the first conversion (between t4 and t5) and the second conversion (between t7 and t8), the correlated double sampling (CDS) function only provides the result of the integration of photogenerated charges, the
random portion having been corrected.
[0080] By comparison, during the same switching to the high state of signal READ between the value of VX obtained between t7 and t8, and the value of VX obtained between t4 and t5, that is, after the integration phase, it is possible to measure a more precise quantity of the accumulated charges with no memory storage. The same elements (cell 210, amplifier 295, control voltages, etc.) being used between times t2 to t3, then between times t6 and t7, the involved disparities are the same, so that their effects will exactly compensate for one another by the correlated double sampling operation.
[0081] The phase of the operation of the electronic circuit between times t5 and t8 enables to do away with the transistor sizing dispersions between cells (Fixed Pattern Noise) particularly regarding the disparities between the transistors CORR and/or second transistors SF of the different cells 210 of the different columns.
[0082] As a summary, before the first digitization, the control loop enables to divide, by the gain of the loop, the sum of the deterministic offset due to the manufacturing differences and of the generated first
random noise. Similarly, before the second digitization, control loop 295 enables to correct the sum of the deterministic offset due to manufacturing differences and of the generated second
random noise.
[0083] The difference between the two digitizations corresponds to the signal due to the photogenerated charges.
[0084] The correlated double sampling (CDS) enables to calculate the difference between the two digitizations to obtain the photogenerated charges.
[0085] Those skilled in the art may however implement a measurement of the photogenerated charges with no correlated double sampling at the cost, however, of a lower accuracy. Indeed, the correlated double sampling enables to correct, in particular, the offset of amplifier 290 and the charge injection during the sampling at VBB.
[0086]
[0087] The cells 410 of
[0088] In the example of
[0089] In the example of
[0090] In the example of
[0091] In the example of
[0092] When cell 410 is biased, that is, when signal READ is at logic 1 state, the potential of node NCTIA is equal to the gate-source voltage of transistor DRV biased by the current originating from current source 245. When signal RESET is at logic 1 state, the voltage across Cint is 0 V. When signal RESET is at logic 0 state, the photogenerated charges integrate in feedback capacitive element Cint. The signal is thus detected at integration node NINT.
[0093] In the example of
[0094] In the example of
[0095] The example of
[0096] The operation of the example of
[0097] Various embodiments and variants have been described. Those skilled in the art will understand that certain features of these various embodiments and variants may be combined, and other variants will occur to those skilled in the art.
[0098] Finally, the practical implementation of the described embodiments and variants is within the abilities of those skilled in the art based on the functional indications given hereabove.
[0099] In particular, in the examples of
[0100] In particular, although the discussed embodiments are based on the photogeneration of electrons, those skilled in the art may use their knowledge to modify the discussed circuits in the case where holes are generated at sense node SN.
[0101] Besides, although the case of photodiodes has been described in the different embodiments, those skilled in the art may replace them with photodetectors comprising an organic material and/or nanoparticles.