MULTIPLE DISTRIBUTED BRAGG REFLECTOR PIXEL ARRAY
20240341157 ยท 2024-10-10
Inventors
Cpc classification
H10K59/876
ELECTRICITY
H10K59/38
ELECTRICITY
International classification
H10K59/80
ELECTRICITY
H10K59/38
ELECTRICITY
Abstract
A microcavity pixel array device and fabrication method having a shared multi-DBR system configured to cover a wide spectral bandwidth range. A wide emission waveband is achieved by depositing a first DBR on top of an OLED array and subsequently depositing a second DBR on top of the first DBR, with each DBR having a unique design. The multi-DBR covers a wider spectral bandwidth range than a single DBR, therefore achieving nearly total reflection for a range of OLEDs designed at different color wavelengths.
Claims
1. A microcavity Organic Light Emitting Diode (MCOLED) array device comprising: a substrate; a plurality of subpixels deposits above the substrate, the subpixels having at least two different colors, each subpixel comprising: a bottom electrode; an organic stack deposited above the bottom electrode; and a top electrode deposited above the organic stack; and a shared multi-DBR system deposited on the plurality of subpixels, the multi-DBR system comprising: a first distributed Bragg reflector (DBR) having a first Bragg wavelength; and a second distributed Bragg reflector (DBR) above the first DBR, the second DBR having a second Bragg wavelength different from the first Bragg wavelength.
2. The device of claim 1, wherein the first DBR has a first stopband, the second DBR has a second stopband, and the first stopband and second stopband overlap.
3. The device of claim 2, wherein the shared multi-DBR system has a multi-DBR stopband which is the sum of the first stopband and the second stopband.
4. The device of claim 1, wherein the first DBR and the second DBR are comprised layers of one or more of silicon nitride (Si.sub.3N.sub.4), silicon dioxide (SiO.sub.2), zinc sulfide (ZnS), calcium fluoride (CaF.sub.2), aluminum oxides (AlO.sub.x), magnesium fluoride (MgF.sub.2), lithium fluoride (LiF), tellurium oxides (TeO.sub.x), and titanium dioxide (TiO.sub.2).
5. The device of claim 1, wherein the first DBR and the second DBR comprise sublayers of alternating high refractive index dielectric material and low refractive index dielectric material, and each sublayer provides an optical path length equal to one quarter of the Bragg wavelength for the DBR.
6. The device of claim 5, wherein the sublayers of alternating high refractive index dielectric material and low refractive index dielectric material have different indices of refraction.
7. The device of claim 5, wherein the sublayers of alternating high refractive index dielectric material and low refractive index dielectric material the first DBR and the second DBR are of different thicknesses.
8. The device of claim 5, wherein the sublayers of alternating high refractive index dielectric material and low refractive index dielectric material for each of the first DBR and the second DBR are of one or more of different materials and different thicknesses.
9. The device array of claim 1, wherein the subpixel colors are red, green, or blue.
10. The device of claim 1, wherein the bottom electrode of each subpixel comprises a reflective metal or reflective metal alloy.
11. The device of claim 1, wherein the bottom electrode comprises one or more layers of silver (Ag), aluminum (Al), gold (Au), Ag/Al, Lithium (Li)/Al, or Calcium (Ca)/Ag.
12. The device of claim 1, wherein the substrate is transparent.
13. The device of claim 1, wherein a bottom DBR structure is deposited below the organic stack.
14. The device of claim 1, wherein the top electrode comprises one or more of a metal reflective surface and a semi-transparent conductive material.
15. The device of claim 1, wherein the top electrode is transparent.
16. The device of claim 1, wherein the shared multi-DBR system comprises two or more distributed Bragg reflectors.
17. A microcavity Organic Light Emitting Diode (MCOLED) array device comprising: a substrate; a subpixel array deposited above the substrate, each subpixel in the subpixel array comprising: a bottom electrode; an optical filler layer deposited above the bottom electrode for a specific color; a white organic stack deposited above the optical filler layer; and a top electrode deposited above the white organic stack; and a multi-DBR system deposited above the subpixel array comprising: a first distributed Bragg reflector (DBR) having a first Bragg wavelength; and a second distributed Bragg reflector (DBR) above the first DBR, the second DBR having a second Bragg wavelength different from the first Bragg wavelength.
18. The device of claim 16, wherein the white organic stack is deposited as a blanket deposition above the subpixel array.
19. The device of claim 16, wherein the optical filler layer in each subpixel has a thickness selected to emit the specific color of light.
20. The device of claim 16, where the optical filler layer for each specific color of subpixel is one or more of a different thickness and a different material.
Description
BRIEF DESCRIPTION OF THE FIGURES
[0036] For a better understanding of the present invention, as well as other aspects and further features thereof, reference is made to the following description which is to be used in conjunction with the accompanying drawings, where:
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DETAILED DESCRIPTION OF THE INVENTION
[0049] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
[0050] As used in the specification and claims, the singular forms a, an and the include plural references unless the context clearly dictates otherwise.
[0051] The term comprise and any of its derivatives (e.g. comprises, comprising) as used in this specification is to be taken to be inclusive of features to which it refers, and is not meant to exclude the presence of any additional features unless otherwise stated or implied. The term comprising as used herein will also be understood to mean that the list following is non-exhaustive and may or may not include any other additional suitable items, for example one or more further feature(s), component(s) and/or element(s) as appropriate.
[0052] As used herein, the terms having, including and containing, and grammatical variations thereof, are inclusive or open-ended and do not exclude additional, unrecited elements and/or method steps, and that that the list following is non-exhaustive and may or may not include any other additional suitable items, for example one or more further feature(s), component(s) and/or element(s) as appropriate. A composition, device, article, system, use, process, or method described herein as comprising certain elements and/or steps may also, in certain embodiments consist essentially of those elements and/or steps, and in other embodiments consist of those elements and/or steps and additional elements and/or steps, whether or not these embodiments are specifically referred to.
[0053] As used herein, the term about refers to an approximately +/?10% variation from a given value. It is to be understood that such a variation is always included in any given value provided herein, whether or not it is specifically referred to. The recitation of ranges herein is intended to convey both the ranges and individual values falling within the ranges, to the same place value as the numerals used to denote the range, unless otherwise indicated herein.
[0054] The use of any examples or exemplary language, e.g. such as, exemplary embodiment, illustrative embodiment and for example is intended to illustrate or denote aspects, embodiments, variations, elements or features relating to the invention and not intended to limit the scope of the invention.
[0055] As used herein, the terms connect and connected refer to any direct or indirect physical association between elements or features of the present disclosure. Accordingly, these terms may be understood to denote elements or features that are partly or completely contained within one another, attached, coupled, disposed on, joined together, in communication with, operatively associated with, etc., even if there are other elements or features intervening between the elements or features described as being connected.
[0056] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.
[0057] As used herein, the term DBR refers to a distributed Bragg reflector. A distributed Bragg reflector (DBR) is a photonic device, often used as an optical mirror, composed of multiple pairs of alternating layers of two dielectric materials with different refractive indices, each layer having a ?/4 thickness, where ? is the central wavelength of operation.
[0058] As used herein, the term transparent refers to a material which allows visible light to pass through it.
[0059] As used herein, the term transparent conductive oxide or TCO refers to a doped metal oxide commonly used in optoelectronic devices. TCO materials include but are not limited to Indium Tin Oxide (ITO), Fluorine-doped Tin Oxide (FTO), Aluminum-doped Zinc Oxide (AZO), Indium-doped Zinc Oxide (IZO), and Gallium-doped Zinc Oxide (ZnO).
[0060] As used herein, the term pixel refers to a light source and light emission mechanism used to create a display.
[0061] As used herein, the term vertical-cavity surface-emitting laser (VCSEL) refers to a semiconductor-based laser diode that emits light or optical beam vertically from its top surface.
[0062] As used herein, the term electron-hole balancing refers to the charge balance within an organic light emitting diode device. Electrons and holes injected from the respective contacts recombine in an emission zone to form excitons which undergo radiative emission to generate light. The external device efficiency is determined by the fraction of light, which is generated in the device stack and extracted to air. In an OLED device, the internal device efficiency is highly dependent on the charge balance of the device.
[0063] As used herein, the term subpixel refers to a structure comprised of a light emitting device housed within an optical microcavity. The optical microcavity is operatively associated with a plurality of reflective surfaces to substantially collimate, manipulate, or tune the light. At least one of the reflective surfaces is a light propagating reflective surface connected to the optical microcavity to propagate the light out of the microcavity. The present disclosure provides individually addressable red, green, and blue (RGB) pixels. The subpixel size as presently described is in a nanoscale to several microns range, which is significantly smaller than the pixel size previously known in the art.
[0064] As used herein, the acronym FWHM refers to full width half maximum, which is an expression of the extent of a function given by the difference between the two extreme values of the independent variable at which the dependent variable is equal to half of its maximum value.
[0065] As used herein, the term OLED refers to an Organic Light Emitting Diode, which is an opto-electronic device which emits light under the application of an external voltage. OLEDS can be divided into two main classes: those made with small organic molecules and those made with organic polymers. An OLED is a light-emitting diode in which the emissive electroluminescent layer comprises a film of organic compound that emits light in response to an electric current. Generally, an OLED is a solid-state semiconductor device comprised at least one conducting organic layer disposed between and electrically connected to an anode and a cathode. When a current is applied, the anode injects holes and the cathode injects electrons into the organic layers. The injected holes and electrons each migrate toward the oppositely charged electrode. When an electron and hole localize on the same molecule, an exciton, which is a localized electron-hole pair having an excited energy state, is formed. Light is emitted when the exciton relaxes via a photoemissive mechanism. Types of OLEDs include, but are not limited to: [0066] a. Active-matrix OLEDs (AMOLED) [0067] AMOLEDs have full layers of cathode, organic molecules and anode. The anode layers have a thin film transistor (TFT) plane in parallel to it to form a matrix. This helps in switching each pixel to its on or off state as desired, thus forming an image. Hence, the pixels switch off whenever they are not required or there is a black image on the display, increasing the battery life of the device. This is the least power consuming type of OLED and has quicker refresh rates which makes them suitable for video. The best uses for AMOLEDs are computer monitors, large-screen TVs and electronic signs or billboards. [0068] b. Top-emitting OLEDs [0069] Top-emitting OLEDs have a substrate that is either opaque or reflective. Top-emitting OLEDs are better suited for active-matrix applications as they can be more easily integrated with a non-transparent transistor backplane. Manufacturers use top-emitting OLED displays in smart cards. [0070] c. Bottom-emitting OLEDs [0071] An OLED is bottom emitting if the emitted light passes through the transparent or semi-transparent bottom electrode and substrate.
[0072] As used herein, the term microcavity refers to a structure formed by reflecting faces on the two sides of a spacer layer or optical medium, such as, for example, an OLED.
[0073] As used herein, the term microcavity OLED (MCOLED) refers to the materials of an OLED, as previously described, bound in a microcavity defined by two reflective surfaces, in which the reflective surfaces can be metallic materials, dielectric materials arranged in such a way to reflect light within a specific range, or a combination of dielectric and metallic materials.
[0074] As used herein, the term electrode refers to a conductor through which electricity enters or leaves an object, substance, or region.
[0075] As used herein, the term cathode refers to the negatively charged electrode by which electrons enter an electrical device.
[0076] As used herein, the term anode refers to the positively charged electrode by which the electrons leave an electrical device.
[0077] As used herein, the term patterning refers to a technique using a series of post treatments to chemically engrave a transferred pattern into or allow the deposition of new material in the transferred pattern upon a target material.
[0078] As used herein, the term blanket deposition refers to depositing material without using a patterning technique.
[0079] As used herein, the term mirror refers to an object that reflects light in such a way that, for incident light in some range of wavelengths, the reflected light preserves many or most of the detailed physical characteristics of the original light, called specular reflection. Two or more mirrors aligned exactly parallel and facing each other can give an infinite regress of reflections, called an infinity mirror effect.
[0080] As used herein, the term optical path length, denoted by A, refers to the distance between two points (P1, P2), accounting for the refractive index (n) of the material that light travels through. In an example OLED device, the media that the light travels through may comprise one or more semitransparent or transparent intermediate electrodes and other layers, as well as layers comprising a white OLED stack. An optical path length is defined as the function:
[0081] As used herein, the term transmissivity refers to the percentage of light transmitted per the incident light.
[0082] As used herein, the term wavelength is a measure of distance between two identical peaks (high points) or troughs (low points) in a wave, which is a repeating pattern of traveling energy such as light or sound.
[0083] It is contemplated that any embodiment of the compositions, devices, articles, methods and uses disclosed herein can be implemented by one skilled in the art, as is, or by making such variations or equivalents without departing from the scope of the invention.
[0084] An organic light emitting diode (OLED) structure typically includes a substrate, a first electrode, an OLED stack of organic material layers, and a second electrode. The organic materials stack may include a hole injection layer (HIL), a hole transport layer (HTL), an electron injection layer (EIL), an electron transport layer (ETL) and an emissive layer (EML). Material and thickness design considerations for the layers of the OLED stack of a MCOLED are based upon the desired indices of refraction n and electron-hole balancing requirements. A balanced charge injection results from the equal flow rate of electrons/holes to the emissive layer (EML). If an OLED device is unbalanced, the electrons or holes will accumulate and charge the emission layer, thereby compromising device output.
[0085] A microcavity organic light emitting diode (MCOLED) is a device in which the materials of an OLED are bound in a microcavity defined by two reflective surfaces arranged in such a way to reflect light within a specific range, or some combination of dielectric and metallic materials. The organic materials which make up the OLED stack are arranged with material thicknesses d.sub.j which have an optical path length of L.sub.j, where L.sub.j=n.sub.j?d.sub.j, and where n.sub.j is the refractive index of the OLED material. The sum of the optical path length of the materials between the reflective surfaces is designed to equal m?.sub.i/2, where ?.sub.i is the peak design wavelength of the MCOLED. The optical path length can therefore be changed by changing the thickness of one or more of the materials between the reflective surfaces, or by adding one or more additional filler material (optical filler layer 56). The optical filler layer 56 is selected to emit a desired wavelength range of light from the MCOLED. The use of a microcavity in an OLED structure decreases the spectral width of the OLED, decreases the angular output, and increases the overall efficiency. Tuning of the optical microcavity for specific wavelengths of light, or color, is a challenging task as tuning a microcavity is achieved by creating a resonance at a specific wavelength between two reflective surfaces, completed by selecting and defining material thickness, refractive index, and phase change through careful analysis and simulations.
[0086] The reduced angular spread due to the microcavity can be approximated as:
[0087] Similarly, the FWHM of the output spectrum is determined as:
where R.sub.Cathode is the reflectance of the cathode, and R.sub.DBR is the reflectance of the DBR.
[0088] The highest reflectivity of the DBR structure is attained when the layer thicknesses, d.sub.i, are chosen such that the optical path length of each layer is one quarter of the resonance wavelength, or:
where ?.sub.Bragg is the design wavelength for the DBR, which can be any value but is chosen such that the reflectance is high in the wavelength range for the design. Under these conditions, all reflections will add in phase, and the transmissivity will decrease exponentially as a function of mirror thickness.
[0089] The reflectance of a DBR at ?.sub.Bragg can be approximated as:
where n.sub.1 is the refractive index of the low index DBR at ?.sub.Bragg, n.sub.2 is the refractive index of the high index DBR material at ?.sub.Bragg, and ? is the number of dielectric pairs. At longer or shorter wavelengths, the reflections begin to add out of phase, therefore the total reflections decrease.
[0090] The result is a broad-band high-reflectivity region centered on ?.sub.Bragg, referred to as the stop band, ??.sub.sb determined as:
where n.sub.eff is the effective index. These are the theoretical design variables considered for a microcavity OLED structure with a DBR. The materials of the DBR can be any material which are not opaque in the wavelength range of the design. For example, in the visible wavelength range, materials such as silicon nitride, titanium dioxide, silicon dioxide, and other dielectrics may be used.
[0091] The total optical path length of the microcavity is represented as:
where L.sub.DBR is the penetration depth into the DBR, L.sub.Organics is the optical path length in the OLED materials, and L.sub.Cathode is the penetration depth into the metal cathode.
[0092] The optical path length in the materials between the two reflective surfaces is found as the sum of the optical path lengths in each material:
where n.sub.i and d.sub.i are the layer indices and thicknesses, respectively. The penetration depth into the DBR can be determined as:
and the penetration depth into the metal cathode is:
where ?.sub.m is the phase shift at the metal reflector, given by:
where n.sub.Cavity is the refractive index of the organic in contact with the cathode, and n.sub.Cathode and k.sub.Cathode are the real and imaginary parts of the refractive index of the metal cathode.
[0093] Herein is described a microcavity OLED array and method of making a microcavity OLED array with a shared DBR structure shared across a plurality of pixels and subpixels, where the shared DBR structure has multiple shared DBR structures. A single DBR structure is understood to comprise multiple alternating layers of two different dielectric materials, each with different refractive indices. Increasing the number of pairs in a DBR increases the mirror reflectivity and increasing the refractive index contrast between the materials in the Bragg pairs increases both the reflectivity and the bandwidth. As understood herein, a multiple DBR structure comprises at least two different and distinct DBR structures, where each of the different DBR structures has its own distinct alternating layer structure, layer width, and/or layer materials that is different from the DBRs in the multiple DBR structure, and where each of the different single DBR structures in the multiple DBR structure has a different Bragg wavelength, or ?.sub.Bragg. By way of example, each of the DBR layers in the multiple DBR structure can vary by, for example, thickness of each of the alternating dielectric layers, material of the dielectric layers, microstructure of the dielectric layers, and/or method of deposition of the dielectric layers, where the property of the dielectric layers can confer structural and functional operational characteristics of the DBR layer that it is in. By using multiple stacked DBR structures on top of one another over an OLED microcavity array, with each of the multiple DBR or Bragg structures having a different Bragg wavelength, blanket fabrication techniques can be used in microcavity OLED array manufacture to deposit each of the layers providing a simplified method of layering with good optical performance. The present device and method using multiple stacked DBRs increases the visible spectrum coverage of the OLED array in a microcavity OLED display providing an extensive spectral emissive bandwidth range across a more fulsome range of visible wavelengths of light in the visible spectrum emitted by the colored subpixels in the OLED array.
[0094] Distributed Bragg reflectors (DBRs) are designed for a tight spectral bandwidth range and are therefore functional for a narrow color spectrum. Known MCOLED devices which use DBRs generally have a unique DBR structure, designed and selected based on the pixel of the MCOLED. This is particularly advantageous for an RGB display, specifically for a device with a DBR deposited on top of an organic stack. Microscale multi-color microcavity OLED arrays face numerous fabrication challenges, and techniques facilitating accurate and scalable material deposition, specifically blanket deposition, is desirable to provide a more economical and reproducible fabrication. Additionally, depositing the DBR using a blanket deposition method as opposed to photolithographic patterning methods prevents the underlying fragile organic layers from exposure to harmful developers used in photolithography.
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[0096] Individual subpixels 18, 20, 22 share a single first DBR 26 with alternating layers material having a low index of refraction, or low index layer, and high index of refraction, or high index layer. On top of the first DBR 26 is a second DBR 28, also comprises of layers of alternating high index layers and low index layers, however having a different layer thickness, or alternatively a different layer structure and/or composition, as the layers in the first DBR 26. In one specific example, each of the individual DBRs can consist of, for example, 8 pairs of alternating layers of zinc sulfide (ZnS) as a high index layer and calcium fluoride (CaF.sub.2) as a low index layer and, with layer thicknesses of about 55.1 nm and 90.9 nm, respectively, for the first DBR 26 and second DBR 28. It is preferred that the thinner, low index layers be deposited first over the individual subpixels 18, 20, 22, as illustrated in
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[0098] In a multiple DBR structure, the Bragg wavelength for the first DBR (single DBR), ?.sub.BraggDBR1, value is used to calculate the stopband ??.sub.sbDBR1 range for the first DBR using:
[0101] The value of the Bragg Wavelength for the second DBR ?.sub.BraggDBR2, which in this case is situated above of the first DBR, is used to calculate the stopband range for the second DBR. In the depicted configuration with two DBRs stacked one top of one another and situated above the subpixels, as illustrated in
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[0103] The highest reflectivity (90% reflectance) of a DBR is attained when the OLED device layer thicknesses (d.sub.i) are selected such that the optical path length of each layer is one quarter of the resonance wavelength, commonly referred to as the Bragg Wavelength, ?.sub.Bragg. For perpendicular incidence, the layer thickness should be d.sub.i=?.sub.Bragg/4n.sub.i, where n.sub.i is the refractive index of the layer material. In the example shown in
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[0110] The waveband ??.sub.OR of the overlap region 34 encompasses the wavelengths of light included in the stopband ranges for both the first DBR and the second DBR. The total stopband width for the multi-DBR (??.sub.sbMDBR) captures a greater range of desired wavelengths of the color spectrum for controlled emission. The total multi-DBR stopband width ??.sub.sb is therefore calculated using the lower value of the stopband range ??.sub.sbDBR1 for the first DBR and the upper value of the stopband range ??.sub.sbDBR2 for the second DBR. It is noted that the above equations are ideal equations, independent of the period of the DBR(s) (dictated by the number of alternating pairs of low/high n material).
[0111] The presently described multi-DBR system has an increased stopband wavelength range of about 432.5 to about 728.5 nm for a total stopband 16 of with a ??.sub.sbMDBR 16=296 nm to reflect and emit controlled light beams for all wavelengths of light emitted by individually colored subpixels blue 18, green 20, and red 22, thereby reducing the non-reflective wavelengths ?.sub.NF. This is approximately a 69% increase in the wavelength range of the stopband compared to the single DBR system. Non-reflective frequencies ?.sub.NF lie outside of the reflection stopband wavelength range of the multi-DBR and are not reflected by the multi-DBR structure. The wavelength range captured by the embodiment of the DBR system illustrated is increased from 432.5 nm-607.5 nm for the single DBR to 432.5 nm-728.5 nm for the illustrated multi-DBR structure. It is noted that the number of pairs of each DBR can be any integer value and is limited here for illustrative purposes.
Fabrication
[0112] MCOLEDs used for high resolution light field display applications are nanometers in size, therefore face significant fabrication challenges, namely patterning. The term patterning refers to a technique using a series of post treatments to chemically engrave a transferred pattern into or allow the deposition of new material in the transferred pattern upon a target material. It is advantageous to deposit as many material layers as possible within the array using a deposition technique that requires no patterning at all, for example using blanket deposition, to avoid chemical etching and photolithography that can damaged pre-deposited layers. Alternative to depositing a single DBR per OLED, a shared DBR integrated into the array does not require patterning. Eliminating this patterning step in fabrication of a MCOLED array with strong cavity effects reduces manufacturing time, complexity and cost.
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[0120] Optical resonance is achieved within a microcavity device when wavelengths of light, reflected between two mirrors, achieve the same phase. This condition is known as constructive interference wherein wavelengths of the same phase combine, resulting in a more intense light beam. Wavelengths of light that are out of phase, do not constructively interfere, and are phased out (i.e., the intensity is significantly reduced until it is negligible). This light reflection occurs within the microcavity of the device. In this case, the microcavity of an OLED. By intensifying only resonant frequencies, the emission spectrum of light is thereby narrowed/reduced. In other words, light emitted by the DBR has a narrower wavelength range compared to a device without a DBR structure.
[0121] With stronger microcavity effects, the emission of a microcavity device can be narrowed to approach that of a laser. For DBR design, the resonant wavelength is the desired, most intense wavelength to be output by the device. To achieve this, the resonant wavelength is referred to as the Bragg wavelength, and the thickness of each material layer in the alternating material pairs in each of the distributed Bragg reflectors (DBRs) is chosen such that thickness is equal to the Bragg wavelength divided by 4 times the index of refraction for that material, n.
[0122] As illustrated in
[0123] All publications, patents and patent applications mentioned in this specification are indicative of the level of skill of those skilled in the art to which this invention pertains and are herein incorporated by reference. The reference to any prior art in this specification is not, and should not be taken as, an acknowledgement or any form of suggestion that such prior art forms part of the common general knowledge.
[0124] The invention being thus described, it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the scope of the invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.