INTEGRATED DEVICE COMPRISING ELONGATED PADS
20240297129 ยท 2024-09-05
Inventors
Cpc classification
H01L2224/06132
ELECTRICITY
H01L2224/0348
ELECTRICITY
H01L2224/16014
ELECTRICITY
H01L24/02
ELECTRICITY
H01L2224/13028
ELECTRICITY
International classification
Abstract
A device comprising an integrated device. The integrated device comprising a die substrate; an interconnect portion coupled to the die substrate, a plurality of pillar interconnects and a passivation layer coupled to the interconnect portion. The interconnect portion includes a first plurality of pads and a second plurality of pads. The first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals. The second plurality of pads are configured to provide a second plurality of electrical paths for power. The plurality of pillar interconnects are coupled to the first plurality of pads and the second plurality of pads. The passivation layer comprises a plurality of openings. The plurality of openings include at least one opening located over a pad from the first plurality of pads.
Claims
1. A device comprising: an integrated device comprising: a die substrate; an interconnect portion coupled to the die substrate, wherein the interconnect portion includes a first plurality of pads and a second plurality of pads, wherein the first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals, and wherein the second plurality of pads are configured to provide a second plurality of electrical paths for power; a passivation layer coupled to the interconnect portion, wherein the passivation layer comprises a plurality of openings, and wherein the plurality of openings include at least one opening located over a pad from the first plurality of pads; and a plurality of pillar interconnects coupled to the first plurality of pads and the second plurality of pads.
2. The device of claim 1, wherein there is at least one opening in the passivation layer that is located over each pad from the first plurality of pads.
3. The device of claim 1, wherein the integrated device further comprises a plurality of solder interconnects coupled to the plurality of pillar interconnects.
4. The device of claim 1, wherein each pad from the first plurality of pads includes a length that is aligned in a diagonal direction relative to an edge of the integrated device.
5. The device of claim 1, wherein the first plurality of pads are located along a periphery of the integrated device, and wherein the second plurality of pads are laterally surrounded by the first plurality of pads.
6. The device of claim 1, wherein at least one pad from the first plurality of pads has a rectangular shape, an oval shape or an oblong shape, and wherein a portion of a surface of a pad from the first plurality of pads is exposed through an opening in the passivation layer, is not touching a solder interconnect.
7. The device of claim 1, wherein at least one pad from the second plurality of pads has a rectangular shape, an oval shape or an oblong shape, and wherein a portion of a surface of a pad from the second plurality of pads is exposed through an opening in the passivation layer, is not touching a solder interconnect.
8. The device of claim 1, further comprising a substrate coupled to the integrated device through a plurality of solder interconnects, wherein the plurality of solder interconnects are coupled to the plurality of pillar interconnects.
9. The device of claim 1, further comprising a board coupled to the integrated device through a plurality of solder interconnects, wherein the plurality of solder interconnects are coupled to the plurality of pillar interconnects.
10. The device of claim 1, wherein the device is selected from a group consisting of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, a laptop computer, a server, an internet of things (IoT) device, and a device in an automotive vehicle.
11. An integrated device comprising: a die substrate; an interconnect portion coupled to the die substrate, wherein the interconnect portion includes a first plurality of pads and a second plurality of pads, wherein the first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals, and wherein the second plurality of pads are configured to provide a second plurality of electrical paths for power, and a passivation layer coupled to the interconnect portion, wherein the passivation layer comprises a plurality of openings, and wherein the plurality of openings include at least two openings located over a pad from the first plurality of pads.
12. The integrated device of claim 11, wherein there are at least two openings in the passivation layer that are located over each pad from the first plurality of pads.
13. The integrated device of claim 12, wherein there is one opening in the passivation layer that is located over each pad from the second plurality of pads.
14. The integrated device of claim 12, further comprising a plurality of solder interconnects coupled to the first plurality of pads and the second plurality of pads.
15. The integrated device of claim 14, wherein the plurality of solder interconnects include (i) a first plurality of solder interconnects coupled to the first plurality of pads, and (ii) a second plurality of solder interconnects coupled to the second plurality of pads.
16. The integrated device of claim 15, wherein the first plurality of solder interconnects are coupled to the first plurality of pads through one of the two openings in the passivation layer for each pad from the first plurality of pads.
17. The integrated device of claim 16, wherein for each pad from the first plurality of pads, a first portion of a surface of the pad not covered by the passivation layer is coupled to a solder interconnect, and a second portion of the surface of the pad not covered by the passivation layer is not touching solder interconnect.
18. The integrated device of claim 11, wherein each pad from the first plurality of pads include a length that is aligned in a diagonal direction relative to an edge of the integrated device.
19. The integrated device of claim 11, wherein the first plurality of pads are located along a periphery of the integrated device, and wherein the second plurality of pads are laterally surrounded by the first plurality of pads.
20. The integrated device of claim 11, wherein pads from the first plurality of pads have a different shape than pads from the second plurality of pads.
21. A method for fabricating an integrated device, comprising: providing a die substrate; providing an interconnect portion that is coupled to the die substrate, wherein the interconnect portion includes a first plurality of pads and a second plurality of pads, wherein the first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals, and wherein the second plurality of pads are configured to provide a second plurality of electrical paths for power, and providing a passivation layer that is coupled to the interconnect portion, wherein the passivation layer comprises a plurality of openings, and wherein the plurality of openings include at least two opening located over a pad from the first plurality of pads.
22. The method of claim 21, wherein there is at least one opening in the passivation layer that is located over each pad from the first plurality of pads.
23. The method of claim 21, further comprising: forming a plurality of pillar interconnects coupled to the first plurality of pads and the second plurality of pads; and forming a plurality of solder interconnects that are coupled to the plurality of pillar interconnects.
24. The method of claim 21, wherein each pad from the first plurality of pads includes a length that is aligned in a diagonal direction relative to an edge of the integrated device.
25. The method of claim 21, wherein the first plurality of pads are located along a periphery of the integrated device, and wherein the second plurality of pads are laterally surrounded by the first plurality of pads.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] Various features, nature and advantages may become apparent from the detailed description set forth below when taken in conjunction with the drawings in which like reference characters identify correspondingly throughout.
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DETAILED DESCRIPTION
[0023] In the following description, specific details are given to provide a thorough understanding of the various aspects of the disclosure. However, it will be understood by one of ordinary skill in the art that the aspects may be practiced without these specific details. For example, circuits may be shown in block diagrams in order to avoid obscuring the aspects in unnecessary detail. In other instances, well-known circuits, structures and techniques may not be shown in detail in order not to obscure the aspects of the disclosure.
[0024] The present disclosure describes a device comprising an integrated device. The integrated device comprises a die substrate; an interconnect portion coupled to the die substrate, a plurality of pillar interconnects and a passivation layer coupled to the interconnect portion. The interconnect portion includes a first plurality of pads and a second plurality of pads. The first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals. The second plurality of pads are configured to provide a second plurality of electrical paths for power. The plurality of pillar interconnects are coupled to the first plurality of pads and the second plurality of pads. The passivation layer comprises a plurality of openings. The plurality of openings include at least one opening located over a pad from the first plurality of pads. The configuration of the pads and the openings in the passivation layer allow for pads that have smaller pitches, while still allowing a testing probe to touch the pad in order to test whether the integrated device works properly.
Exemplary Integrated Device Comprising Elongated Pads
[0025]
[0026] The plurality of pads 107 (e.g., first plurality of pads) are located over the interconnect portion 122. The plurality of pads 107 may be coupled to die interconnects of the interconnect portion 122. The plurality of pads 107 may include a pad 107a and a pad 107b. At least some of the pads from the plurality of pads 107 may have a rectangular shape and/or elongated shape. The plurality of pads 107 may be configured to provide at least one electrical path for input/output (I/O) signals for the integrated device 100. The plurality of pads 109 (e.g., second plurality of pads) are located over the interconnect portion 122. The plurality of pads 109 may be coupled to die interconnects of the interconnect portion 122. The plurality of pads 109 may include a pad 109a. The plurality of pads 109 may be configured to provide at least one electrical path for power for the integrated device 100. The plurality of pads 119 may be testing pads and/or landing pads for testing probes. The plurality of pads 119 may include a pad 119a. As will be further described below, the plurality of pads 119 may be configured to be coupled to other pads (e.g., 107, 109, 207, 310, 312) through one or more traces (e.g., traces located over the interconnect portion 122). One or more of the pads from the plurality of pads 119 may have a width and/or diameter that is greater than other pads (e.g., 107, 109, 207).
[0027] The passivation layer 105 is located over and coupled to the interconnect portion 122. The passivation layer 105 may be a hard passivation layer. The passivation layer 105 may include a dielectric. The passivation layer 105 may be located over the plurality of pads 107, the plurality of pads 109 and/or the plurality of pads 119. In some implementations, the passivation layer 105, the plurality of pads 107, the plurality of pads 109 and/or the plurality of pads 119 may be considered part of the interconnect portion 122. For example, the plurality of pads 107, the plurality of pads 109 and/or the plurality of pads 119 may be considered part of die interconnects of the interconnect portion 122. In some implementations, a back end of line (BEOL) process may be used to fabricate the passivation layer 105, the plurality of pads 107, the plurality of pads 109 and/or the plurality of pads 119. There may be a plurality of openings 170 in the passivation layer 105. The plurality of openings 170 may be located over the plurality of pads 107, the plurality of pads 109 and/or the plurality of pads 119. The plurality of openings 170 may include an opening 170aa, an opening 170ab, an opening 170ba, an opening 170bb, an opening 170c and an opening 170d. Different openings from the plurality of openings 170 may have similar or different shapes.
[0028] The opening 170aa and the opening 170ab are located over the pad 107a. The opening 170aa may have a circular shape. The opening 170ab may have a rectangular shape. The opening 170aa exposes a first portion of a surface of the pad 107a. The opening 170ab exposes a second portion of the surface of the pad 107a. The opening 170ba and the opening 170bb are located over the pad 107b. The opening 170ba exposes a first portion of a surface of the pad 107b. The opening 170bb exposes a second portion of the surface of the pad 107b. The opening 170c is located over the pad 109a. The opening 170c exposes a first portion of a surface of the pad 109a. The opening 170d is located over the pad 119a. The opening 170d exposes a first portion of a surface of the pad 119a. It is noted that a passivation layer may still be considered to have an opening even if the opening is subsequently filled and/or occupied by another material that is not the passivation layer.
[0029] In some implementations, a solder interconnect may be coupled to the pad 107a through the opening 170aa of the passivation layer 105. However, a solder interconnect is not touching the pad 107a through the opening 170ab of the passivation layer 105. During testing of the integrated device, a probe (e.g., testing probe) may be touching the pad 107a through the opening 170ab of the passivation layer 105. In some implementations, a solder interconnect may be coupled to the pad 107b through the opening 170ba of the passivation layer 105. However, a solder interconnect is not touching the pad 107b through the opening 170bb of the passivation layer 105. During testing of the integrated device, a probe (e.g., testing probe) may be touching the pad 107b through the opening 170bb of the passivation layer 105. During testing of the integrated device, a probe (e.g., testing probe) may be touching the pad 119a through the opening 170d of the passivation layer 105. In some implementations, the electrical connectivity of the pad 109a may be tested by testing the integrated device using a probe to touch the pad 119a. In such instances, the pad 119a may be configured to be electrically coupled to the pad 109a through one or more interconnects (e.g., die interconnects, traces).
[0030] As interconnects in an integrated device, get smaller and have smaller pitches, it becomes more difficult to test the integrated device without damaging the interconnects and/or the integrated device. Increasing the size and/or pitch between pads may not be practical or desirable due to design rules constraints on the integrated device and/or space constraints on the integrated device. In order for test probes to be able to properly test an integrated device, testing pads and/or landing pads are fabricated as part of an integrated device. The testing pads and/or landing pads may be larger in size and/or may have bigger pitches (relative to other pads) in order to not get damaged during testing of the integrated device and to accommodate the size of testing probes. These testing pads may be located in regions and/or areas that are not being used and/or occupied by other pads (e.g., core pads, periphery pads).
[0031] The configuration and/or arrangement of
[0032]
[0033] The plurality of pads 207 may be similar to the plurality of pads 107. However, pads from the plurality of pads 207 may have a different shape from pads from the plurality of pads 107. The plurality of pads 207 (e.g., first plurality of pads) are located over the interconnect portion 122. The plurality of pads 207 may be coupled to die interconnects of the interconnect portion 122. The plurality of pads 207 may include a pad 207a and a pad 207b. At least some of the pads from the plurality of pads 207 may have an oval shape (e.g., oblong) and/or elongated shape. The plurality of pads 207 may be configured to provide at least one electrical path for input/output (I/O) signals for the integrated device 200.
[0034] There may be a plurality of openings 270 in the passivation layer 105. The plurality of openings 270 may be located over the plurality of pads 207, the plurality of pads 109 and/or the plurality of pads 119. The plurality of openings 270 may include an opening 270aa, an opening 270ab, an opening 270ba, an opening 270bb, an opening 270c and an opening 270d. Different openings may have similar or different shapes.
[0035] The opening 270aa and the opening 270ab are located over the pad 207a. The opening 270aa may have a circular shape. The opening 270ab may have an oval shape (e.g., oblong shape). The opening 270aa exposes a first portion of a surface of the pad 207a. The opening 270ab exposes a second portion of the surface of the pad 207a. The opening 270ba and the opening 270bb are located over the pad 207b. The opening 270ba exposes a first portion of a surface of the pad 207b. The opening 270bb exposes a second portion of the surface of the pad 207b. The opening 270c is located over the pad 109a. The opening 270c exposes a first portion of a surface of the pad 109a. The opening 270d is located over the pad 119a. The opening 270d exposes a first portion of a surface of the pad 119a.
[0036] In some implementations, a solder interconnect may be coupled to the pad 207a through the opening 270aa of the passivation layer 105. However, a solder interconnect is not touching the pad 207a through the opening 270ab of the passivation layer 105. During testing of the integrated device, a probe (e.g., testing probe) may be touching the pad 207a through the opening 270ab of the passivation layer 105. In some implementations, a solder interconnect may be coupled to the pad 207b through the opening 270ba of the passivation layer 105. However, a solder interconnect is not touching the pad 207b through the opening 270bb of the passivation layer 105. During testing of the integrated device, a probe (e.g., testing probe) may be touching the pad 207b through the opening 270bb of the passivation layer 105. During testing of the integrated device, a probe (e.g., testing probe) may be touching the pad 119a through the opening 270d of the passivation layer 105.
[0037]
[0038] The pillar interconnect 307a is coupled to the pad 207a through the opening 270aa of the passivation layer 105. The solder interconnect 310a is coupled to the pillar interconnect 307a. A surface of the pad 207a that is exposed by the opening 270ab is not touching a solder interconnect. The pillar interconnect 307b is coupled to the pad 207b through the opening 270ba of the passivation layer 105. The solder interconnect 310b is coupled to the pillar interconnect 307b. A surface of the pad 207b that is exposed by the opening 270bb is not touching a solder interconnect. The pillar interconnect 309a is coupled to the pad 109a through the opening 270c of the passivation layer 105. The solder interconnect 312a is coupled to the pillar interconnect 309a.
[0039]
[0040] A probe 400b is shown being moved to touch the pad 119a. The probe 400b may be a testing probe. The probe 400b is configured to touch a surface of the pad 119a through the opening 270d of the passivation layer 105. The size of the pad 119a may be designed to accommodate the size of the probe 400b. Although two probes are shown, there may be multiple probes that may be configured to touch other pads (e.g., 207b) of the integrated device 300 through similar openings in the passivation layer 105. Using the elongated pads helps provide more compact, denser and/or finer pitches between pads, while still allowing enough space for testing probes to touch a portion of the pads to test whether the integrated device works properly. Once it is determined that the integrated device (e.g., 100, 200, 300) works properly, the integrated device can be coupled to other components, such as a substrate or a board (e.g., printed circuit board). In some implementations, the electrical connectivity of the pad 109a and the pillar interconnect 209a may be tested by testing the integrated device using a probe 400b to touch the pad 119a. The pad 119a may be configured to be electrically coupled to the pad 109a through one or more interconnects (e.g., traces).
[0041]
[0042]
[0043] It is noted that instead of a substrate, the integrated device 300 may be coupled to a board (e.g., printed circuit board) through the plurality of solder interconnects 310 and the plurality of solder interconnects 312.
[0044]
[0045]
[0046] It is noted that instead of a substrate, the integrated device 100 may be coupled to a board (e.g., printed circuit board) through the plurality of solder interconnects 310 and the plurality of solder interconnects 312.
[0047]
[0048] The plurality of pads 704 and the plurality of pads 706 may be testing pads and/or landing pads. In some implementations, one or more testing probes may be configured to touch the plurality of pads 704 and/or the plurality of pads 706 in order to test the connectivity and/or the performance of one or more pads from the plurality of pads 702. The plurality of pads 704 may be configured to be electrically coupled to one or more pads from the plurality of pads 702 through the plurality of traces 703. The plurality of pads 706 may be configured to be electrically coupled to one or more pads from the plurality of pads 702 through the plurality of traces 705. By touching the plurality of pads 704 and/or the plurality of pads 706, one or more probes may be able to test the connectivity of the plurality of pads 702, since the plurality of pads 704 and/or the plurality of pads 706 are configured to be electrically coupled to the plurality of pads 702 through the plurality of traces 703 and/or the plurality of traces 705.
[0049]
[0050] The plurality of pads 207 may be located along a periphery of the integrated device 300. For example, one or more rows (and/or one or more columns) of pads from the plurality of pads 207 may be located near and/or along one or more edges of the integrated device 300. The plurality of pads 207 may be located adjacent to an edge 890 of the integrated device 300. The plurality of pads 207 may include elongated pads. The plurality of pads 207 may include pads that have an oval shape (e.g., oblong shape). In some implementations, the plurality of pads 207 may have a minimum pitch (e.g., inline pitch) of about 80-90 micrometers. The plurality of pads 207 are arranged, configured, and/or aligned in such a way that a length of one or more pads from the plurality of pads 207 is aligned in a diagonal direction relative to one or more edges of the integrated device 300. This arrangement, alignment and/or configuration provides for more compact interconnects, pads with finer pitches, while still allowing testing probes to touch the interconnects so that the integrated device 300 can be tested. The plurality of pads 207 may laterally surround the plurality of pads 807. The plurality of pads 207 may include periphery pads.
[0051] The plurality of pads 807 may be similar to the plurality of pads 207. The plurality of pads 807 may be core pads. The plurality of pads 807 may be configured to provide one or more electrical paths for power. The plurality of pads 807 may be configured to provide one or more electrical paths for ground. Thus, in one example some of the pads from the plurality of pads 807 may be configured to provide one or more electrical paths for power, and some of the pads from the plurality of pads 807 may be configured to provide one or more electrical paths for ground. The plurality of pads 807 may have similar designs in the openings in the passivation layer as designs in the passivation layer for the plurality of pads 207. The plurality of pads 807 may have features that are larger (e.g., longer width, larger size, larger diameter, bigger opening) than the features of the plurality of pads 207.
[0052]
[0053]
[0054] The plurality of solder interconnects 310 may be located along a periphery of the integrated device 300. For example, one or more rows (and/or one or more columns) of pads from the plurality of solder interconnects 310 may be located near and/or along one or more edges of the integrated device 300. In some implementations, the plurality of solder interconnects 310 may have a minimum pitch (e.g., inline pitch) of about 80-90 micrometers. The plurality of solder interconnects 310 may laterally surround the plurality of solder interconnects 312.
[0055]
[0056] The plurality of pads 1009 may include elongated pads. The plurality of pads 1009 may include a pad 1009a. The plurality of pads 1009 may be configured to provide at least one electrical path for power. The plurality of pads 1009 may include pads that have an oval shape (e.g., oblong shape). There is an opening 270ca and an opening 270cb in the passivation layer 105. The opening 270ca and the opening 270cb may each expose a portion of a surface of the pad 1009a. The pillar interconnect 309a may be coupled to the pad 1009a through the opening 270ca of the passivation layer 105. A portion of a surface of the pad 1009a is exposed by the opening 270cb of the passivation layer 105. The portion of the surface of the pad 1009a that is exposed by the opening 270cb of the passivation layer 105 may be free of any direct contact with a solder interconnect and/or other interconnects. However, it is noted there may be an underfill and/or a mold (both not shown) between the integrated device 1000 and the substrate 502. Such an underfill and/or a mold may come into contact (e.g., may touch) the pad 1009a through openings in the passivation layer 105.
[0057] The substrate 502 includes at least one dielectric layer 520 and a plurality of interconnects 522 (e.g., substrate interconnects). The integrated device 1000 is coupled to the substrate 502 through the plurality of solder interconnects 310 (e.g., first plurality of solder interconnects) and the plurality of solder interconnects 312 (e.g., second plurality of solder interconnects). The integrated device 1000 is coupled to the plurality of interconnects 522 of the substrate 502 through the plurality of solder interconnects 310 and the plurality of solder interconnects 312. The pillar interconnect 307a is coupled to the solder interconnect 310a. The solder interconnect 310a is coupled to the interconnect 522a of the substrate 502. The pillar interconnect 307b is coupled to the solder interconnect 310b. The solder interconnect 310b is coupled to the interconnect 522b of the substrate 502. The pillar interconnect 309a is coupled to the solder interconnect 312a. The solder interconnect 312a is coupled to the interconnect 522c of the substrate 502.
[0058] It is noted that instead of a substrate, the integrated device 1000 may be coupled to a board (e.g., printed circuit board) through the plurality of solder interconnects 310 and the plurality of solder interconnects 312.
[0059]
[0060]
[0061] It is noted that instead of a substrate, the integrated device 1000 may be coupled to a board (e.g., printed circuit board) through the plurality of solder interconnects 310 and the plurality of solder interconnects 312.
[0062]
[0063] The plurality of pads 207 may be located along a periphery of the integrated device 1000. For example, one or more rows (and/or one or more columns) of pads from the plurality of pads 207 may be located near and/or along one or more edges of the integrated device 1000. The plurality of pads 207 may include elongated pads. The plurality of pads 207 may include pads that have an oval shape (e.g., oblong shape). In some implementations, the plurality of pads 207 may have a minimum pitch (e.g., inline pitch) of about 80-90 micrometers. A more detailed description of an inline pitch was illustrated and described in at least
[0064] An integrated device (e.g., 100, 200, 300, 1000) may include a die (e.g., semiconductor bare die). The integrated device may include a power management integrated circuit (PMIC). The integrated device may include an application processor. The integrated device may include a modem. The integrated device may include a radio frequency (RF) device, a passive device, a filter, a capacitor, an inductor, an antenna, a transmitter, a receiver, a gallium arsenide (GaAs) based integrated device, a surface acoustic wave (SAW) filter, a bulk acoustic wave (BAW) filter, a light emitting diode (LED) integrated device, a silicon (Si) based integrated device, a silicon carbide (SiC) based integrated device, a memory, power management processor, and/or combinations thereof. An integrated device (e.g., 100, 200, 300, 1000) may include at least one electronic circuit (e.g., first electronic circuit, second electronic circuit, etc. . . . ). An integrated device may be an example of an electrical component and/or electrical device. In some implementations, an integrated device may be a chiplet. A chiplet may be fabricated using one or more processes that provides better yields compared to other processes used to fabricate other types of integrated devices, which can lower the overall cost of fabricating a chiplet. Different chiplets may have different sizes and/or shapes. Different chiplets may be configured to provide different functions. Different chiplets may have different interconnect densities (e.g., interconnects with different width and/or spacing). In some implementations, several chiplets may be used to perform the functionalities of one or more chips (e.g., one more integrated devices). Using several chiplets that perform several functions may reduce the overall cost of a package relative to using a single chip to perform all of the functions of a package.
[0065] Having described an integrated device with elongated pads, a method for fabricating an integrated device will now be described below.
Exemplary Sequence for Fabricating an Integrated Device Comprising Elongated Pads
[0066] In some implementations, fabricating an integrated device includes several processes.
[0067] It should be noted that the sequence of
[0068] Stage 1, as shown in
[0069] Stage 2 illustrates a state after a passivation layer 105 is formed over the interconnect portion 122, the plurality of pads 207 and/or the plurality of pads 109. A deposition, a lamination, an exposure, a development and/or an etching process may be used to form and pattern the passivation layer 105. The passivation layer 105 includes a plurality of openings 270, as described in at least
[0070] Stage 3 illustrates a state after a plurality of pillar interconnects 307 and a plurality of pillar interconnects 309 are formed. The plurality of pillar interconnects 307 may be coupled to the plurality of pads 207. The plurality of pillar interconnects 309 may be coupled to the plurality of pads 109. One or more plating processes and patterning processes may be used to form the plurality of pillar interconnects 307 and/or the plurality of pillar interconnects 309.
[0071] Stage 3 also illustrates a state after a plurality of solder interconnects 310 and a plurality of solder interconnects 312 are provided. The plurality of solder interconnects 310 may be coupled to the plurality of pillar interconnects 307. The plurality of solder interconnects 312 may be coupled to the plurality of pillar interconnects 309. One or more solder reflow processes may be used to form the plurality of solder interconnects 310 and/or the plurality of solder interconnects 312. Stage 3 may illustrate an integrated device 300 that includes elongated pads.
[0072] In some implementations, an integrated device may not include a plurality of pillar interconnects. In such instances, the plurality of solder interconnects (e.g., 310, 312) may be formed such that the plurality of solder interconnects are coupled to the plurality of pads (e.g., 107, 207, 109).
Exemplary Flow Diagram of a Method for Fabricating an Integrated Device Comprising Elongated Pads
[0073] In some implementations, fabricating an integrated device includes several processes.
[0074] It should be noted that the method of
[0075] The method provides (at 1405) a die substrate, an interconnect portion, and a plurality of pads. Stage 1 of
[0076] The method forms (at 1410) a passivation layer over the interconnect portion. The passivation layer may include a plurality of openings. Some of the openings may be located over a pad (e.g., elongated pad). In some implementations, two or more openings in the passivation layer may be located over a pad. Stage 2 of
[0077] The method forms (at 1415) a plurality of pillar interconnects that are coupled to the plurality of pads. Stage 3 of
[0078] The method forms (at 1420) a plurality of solder interconnects that are coupled to the plurality of pillar interconnects. Stage 3 of
[0079] In some implementations, there may not be a plurality of pillar interconnects. In such instances, the plurality of solder interconnects (e.g., 310, 312) may be formed such that the plurality of solder interconnects are coupled to the plurality of pads (e.g., 107, 207, 109).
Exemplary Electronic Devices
[0080]
[0081] One or more of the components, processes, features, and/or functions illustrated in
[0082] It is noted that the figures in the disclosure may represent actual representations and/or conceptual representations of various parts, components, objects, devices, packages, integrated devices, integrated circuits, and/or transistors. In some instances, the figures may not be to scale. In some instances, for purpose of clarity, not all components and/or parts may be shown. In some instances, the position, the location, the sizes, and/or the shapes of various parts and/or components in the figures may be exemplary. In some implementations, various components and/or parts in the figures may be optional.
[0083] The word exemplary is used herein to mean serving as an example, instance, or illustration. Any implementation or aspect described herein as exemplary is not necessarily to be construed as preferred or advantageous over other aspects of the disclosure. Likewise, the term aspects does not require that all aspects of the disclosure include the discussed feature, advantage or mode of operation. The term coupled is used herein to refer to the direct or indirect coupling (e.g., mechanical coupling) between two objects. For example, if object A physically touches object B, and object B touches object C, then objects A and C may still be considered coupled to one another-even if they do not directly physically touch each other. An object A, that is coupled to an object B, may be coupled to at least part of object B. The term electrically coupled may mean that two objects are directly or indirectly coupled together such that an electrical current (e.g., signal, power, ground) may travel between the two objects. Two objects that are electrically coupled may or may not have an electrical current traveling between the two objects. The use of the terms first, second, third and fourth (and/or anything above fourth) is arbitrary. Any of the components described may be the first component, the second component, the third component or the fourth component. For example, a component that is referred to a second component, may be the first component, the second component, the third component or the fourth component. The terms encapsulate, encapsulating and/or any derivation means that the object may partially encapsulate or completely encapsulate another object. The terms top and bottom are arbitrary. A component that is located on top may be located over a component that is located on a bottom. A top component may be considered a bottom component, and vice versa. As described in the disclosure, a first component that is located over a second component may mean that the first component is located above or below the second component, depending on how a bottom or top is arbitrarily defined. In another example, a first component may be located over (e.g., above) a first surface of the second component, and a third component may be located over (e.g., below) a second surface of the second component, where the second surface is opposite to the first surface. It is further noted that the term over as used in the present application in the context of one component located over another component, may be used to mean a component that is on another component and/or in another component (e.g., on a surface of a component or embedded in a component). Thus, for example, a first component that is over the second component may mean that (1) the first component is over the second component, but not directly touching the second component, (2) the first component is on (e.g., on a surface of) the second component, and/or (3) the first component is in (e.g., embedded in) the second component. A first component that is located in a second component may be partially located in the second component or completely located in the second component. A value that is about X-XX, may mean a value that is between X and XX, inclusive of X and XX. The value(s) between X and XX may be discrete or continuous. The term about value X, or approximately value X, as used in the disclosure means within 10 percent of the value X. For example, a value of about 1 or approximately 1, would mean a value in a range of 0.9-1.1. A plurality of components may include all the possible components or only some of the components from all of the possible components. For example, if a device includes ten components, the use of the term the plurality of components may refer to all ten components or only some of the components from the ten components.
[0084] In some implementations, an interconnect is an element or component of a device or package that allows or facilitates an electrical connection between two points, elements and/or components. In some implementations, an interconnect may include a trace, a via, a pad, a pillar, a metallization layer, a redistribution layer, and/or an under bump metallization (UBM) layer/interconnect. In some implementations, an interconnect may include an electrically conductive material that may be configured to provide an electrical path for a signal (e.g., a data signal), ground and/or power. An interconnect may include more than one element or component. An interconnect may be defined by one or more interconnects. An interconnect may include one or more metal layers. An interconnect may be part of a circuit. Different implementations may use different processes and/or sequences for forming the interconnects. In some implementations, a chemical vapor deposition (CVD) process, a physical vapor deposition (PVD) process, a sputtering process, a spray coating, and/or a plating process may be used to form the interconnects.
[0085] Also, it is noted that various disclosures contained herein may be described as a process that is depicted as a flowchart, a flow diagram, a structure diagram, or a block diagram. Although a flowchart may describe the operations as a sequential process, many of the operations can be performed in parallel or concurrently. In addition, the order of the operations may be re-arranged. A process is terminated when its operations are completed.
[0086] In the following, further examples are described to facilitate the understanding of the disclosure. [0087] Aspect 1: A device comprising an integrated device. The integrated device comprises a die substrate; an interconnect portion coupled to the die substrate; a passivation layer coupled to the interconnect portion and a plurality of pillar interconnects. The interconnect portion includes a first plurality of pads and a second plurality of pads. The first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals. The second plurality of pads are configured to provide a second plurality of electrical paths for power. The passivation layer comprises a plurality of openings. The plurality of openings include at least one opening located over a pad from the first plurality of pads. The plurality of pillar interconnects are coupled to the first plurality of pads and the second plurality of pads. [0088] Aspect 2: The device of aspect 1, wherein there is at least one opening in the passivation layer that is located over each pad from the first plurality of pads. [0089] Aspect 3: The device of aspects 1 through 2, wherein the integrated device further comprises a plurality of solder interconnects coupled to the plurality of pillar interconnects. [0090] Aspect 4: The device of aspects 1 through 3, wherein each pad from the first plurality of pads includes a length that is aligned in a diagonal direction relative to an edge of the integrated device. [0091] Aspect 5: The device of aspects 1 through 4, wherein the first plurality of pads are located along a periphery of the integrated device, and wherein the second plurality of pads are laterally surrounded by the first plurality of pads. [0092] Aspect 6: The device of aspects 1 through 5, wherein at least one pad from the first plurality of pads has a rectangular shape, an oval shape or an oblong shape, and wherein a portion of a surface of a pad from the first plurality of pads is exposed through an opening in the passivation layer, is not touching a solder interconnect. [0093] Aspect 7: The device of aspects 1 through 6, wherein at least one pad from the second plurality of pads has a rectangular shape, an oval shape or an oblong shape, and wherein a portion of a surface of a pad from the second plurality of pads is exposed through an opening in the passivation layer, is not touching a solder interconnect. [0094] Aspect 8: The device of aspects 1 through 7, further comprising a substrate coupled to the integrated device through a plurality of solder interconnects, wherein the plurality of solder interconnects are coupled to the plurality of pillar interconnects. [0095] Aspect 9: The device of aspects 1 through 7, further comprising a board coupled to the integrated device through a plurality of solder interconnects, wherein the plurality of solder interconnects are coupled to the plurality of pillar interconnects. [0096] Aspect 10: The device of aspects 1 through 9, wherein the device is selected from a group consisting of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, a laptop computer, a server, an internet of things (IoT) device, and a device in an automotive vehicle. [0097] Aspect 11: An integrated device comprising a die substrate; an interconnect portion coupled to the die substrate; and a passivation layer coupled to the interconnect portion. The interconnect portion includes a first plurality of pads and a second plurality of pads. The first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals. The second plurality of pads are configured to provide a second plurality of electrical paths for power. The passivation layer comprises a plurality of openings. The plurality of openings include at least two openings located over a pad from the first plurality of pads. [0098] Aspect 12: The integrated device of aspect 11, wherein there are at least two openings in the passivation layer that are located over each pad from the first plurality of pads. [0099] Aspect 13: The integrated device of aspect 12, wherein there is one opening in the passivation layer that is located over each pad from the second plurality of pads. [0100] Aspect 14: The integrated device of aspects 12 through 13, further comprising a plurality of solder interconnects coupled to the first plurality of pads and the second plurality of pads. [0101] Aspect 15: The integrated device of aspect 14, wherein the plurality of solder interconnects include (i) a first plurality of solder interconnects coupled to the first plurality of pads, and (ii) a second plurality of solder interconnects coupled to the second plurality of pads. [0102] Aspect 16: The integrated device of aspect 15, wherein the first plurality of solder interconnects are coupled to the first plurality of pads through one of the two openings in the passivation layer for each pad from the first plurality of pads. [0103] Aspect 17: The integrated device of aspect 16, wherein for each pad from the first plurality of pads, a first portion of a surface of the pad not covered by the passivation layer is coupled to a solder interconnect, and a second portion of the surface of the pad not covered by the passivation layer is not touching solder interconnect. [0104] Aspect 18: The integrated device of aspects 11 through 17, wherein each pad from the first plurality of pads include a length that is aligned in a diagonal direction relative to an edge of the integrated device. [0105] Aspect 19: The integrated device of aspects 11 through 18, wherein the first plurality of pads are located along a periphery of the integrated device, and wherein the second plurality of pads are laterally surrounded by the first plurality of pads. [0106] Aspect 20: The integrated device of aspects 11 through 19, wherein pads from the first plurality of pads have a different shape than pads from the second plurality of pads. [0107] Aspect 21: A method for fabricating an integrated device. The method provides a die substrate. The method provides an interconnect portion that is coupled to the die substrate. The interconnect portion includes a first plurality of pads and a second plurality of pads. The first plurality of pads are configured to provide a first plurality of electrical paths for input/output signals. The second plurality of pads are configured to provide a second plurality of electrical paths for power. The method provides a passivation layer that is coupled to the interconnect portion. The passivation layer comprises a plurality of openings. The plurality of openings include at least two opening located over a pad from the first plurality of pads. [0108] Aspect 22: The method of aspect 21, wherein there is at least one opening in the passivation layer that is located over each pad from the first plurality of pads. [0109] Aspect 23: The method of aspects 21 through 22, further comprising: forming a plurality of pillar interconnects coupled to the first plurality of pads and the second plurality of pads; and forming a plurality of solder interconnects that are coupled to the plurality of pillar interconnects. [0110] Aspect 24: The method of aspects 21 through 23, wherein each pad from the first plurality of pads includes a length that is aligned in a diagonal direction relative to an edge of the integrated device. [0111] Aspect 25: The method of aspects 21 through 24, wherein the first plurality of pads are located along a periphery of the integrated device, and wherein the second plurality of pads are laterally surrounded by the first plurality of pads.
[0112] The various features of the disclosure described herein can be implemented in different systems without departing from the disclosure. It should be noted that the foregoing aspects of the disclosure are merely examples and are not to be construed as limiting the disclosure. The description of the aspects of the present disclosure is intended to be illustrative, and not to limit the scope of the claims. As such, the present teachings can be readily applied to other types of apparatuses and many alternatives, modifications, and variations will be apparent to those skilled in the art.