Device geometries for controlling mass spectrometer pressures
11501962 · 2022-11-15
Assignee
Inventors
Cpc classification
H01J49/005
ELECTRICITY
International classification
H01J49/04
ELECTRICITY
Abstract
A mass spectrometer collision cell system, comprising: a gas containment vessel comprising an internal chamber having ion inlet and ion outlet ends and a cross-sectional area, A.sub.chamber; a gas inlet aperture; first and second gas outlet apertures that are disposed at or proximal to the ion inlet and outlet ends, respectively, and that have respective outlet aperture cross-sectional areas, A.sub.aperture1 and A.sub.aperture2, and an average outlet aperture cross-sectional area, A.sub.aperture.sup.ave; a longitudinal axis of the chamber extending from the ion inlet end to the ion outlet end and having a length, L.sub.chamber; and a set of multipole rod electrodes, at least a portion of each multipole rod electrode being within the chamber, wherein the values of A.sub.chamber, L.sub.chamber and A.sub.aperture.sup.ave are such that the combined gas conductance of the chamber and the gas outlet apertures is not greater than 95 percent of the gas conductance of the gas outlet apertures alone.
Claims
1. A mass spectrometer collision cell, cooling cell or reaction cell system, comprising: a gas containment vessel comprising an internal chamber having an ion inlet end and an ion outlet end, the chamber having a cross-sectional area, A.sub.chamber, transverse to the longitudinal axis; a gas inlet aperture for providing gas to the internal chamber; first and second gas outlet apertures disposed at or proximal to the ion inlet and ion outlet ends of the internal chamber, respectively, the first and second gas outlet apertures having respective outlet aperture cross-sectional areas, A.sub.aperture1 and A.sub.aperture2, and an average outlet aperture cross-sectional area, A.sub.aperture.sup.ave; a longitudinal axis of the chamber extending from the ion inlet end to the ion outlet end and having a length, L.sub.chamber; and a set of multipole rod electrodes, wherein at least a portion of each multipole rod electrode is disposed within the chamber, wherein the values of A.sub.chamber, L.sub.chamber and A.sub.aperture.sup.ave are such that the combined gas conductance of the chamber and the gas outlet apertures is less than or equal to 95 percent of the gas conductance of the gas outlet apertures alone.
2. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein the values of A.sub.chamber, L.sub.chamber and A.sub.aperture.sup.ave are such that the combined gas conductance of the chamber and the gas outlet apertures is less than or equal to 90 percent of the gas conductance of the gas outlet apertures alone.
3. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein the values of A.sub.chamber, L.sub.chamber and A.sub.aperture.sup.ave are such that the combined gas conductance of the chamber and the gas outlet apertures is less than or equal to 80 percent of the gas conductance of the gas outlet apertures alone.
4. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein the values of A.sub.chamber, L.sub.chamber and A.sub.aperture.sup.ave are such that the combined gas conductance of the chamber and the gas outlet apertures is less than or equal to 70 percent of the gas conductance of the gas outlet apertures alone.
5. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein each of the entrance aperture and the exit aperture comprises an opening in or a channel through an electrostatic lens.
6. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein each of the entrance aperture and the exit aperture is defined by a respective channel between portions of the multipole rods that extend outside of the chamber.
7. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein each of the entrance aperture and the exit aperture is defined by a respective channel between rod electrodes of a respective multipole device disposed outside of the chamber.
8. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein the longitudinal axis and the multipole rods are curved.
9. A mass spectrometer collision cell, cooling cell or reaction cell system as recited in claim 1, wherein d.sub.aperture is less than or equal to 5 millimeters.
10. A method of mass analyzing a sample comprising: generating a first plurality of ions derived from the sample and transmitting the plurality of ions into a chamber having an internal pressure, P.sub.1; transmitting the first plurality of ions through a first gas-restricting aperture into a second chamber having an internal pressure, P.sub.2, where P.sub.2>P.sub.1; either cooling the first plurality of ions within the chamber, reacting the first plurality of ions with gas in the chamber, or colliding the first plurality of ions with gas in the chamber to generate a plurality of product ions; transmitting either the cooled first plurality of ions or the plurality of product ions through a second gas-restricting aperture into a third chamber having an internal pressure, P.sub.3, where P.sub.2>P.sub.3; and mass analyzing either the cooled first plurality of ions or the plurality of product ions using a mass analyzer within the third chamber, wherein the combined gas conductance of the second chamber and the gas-restricting apertures is less than or equal to 95 percent of the gas conductance of the gas-restricting apertures alone.
11. A method of mass analyzing a sample as recited in claim 10, wherein the combined gas conductance of the second chamber and the gas-restricting apertures is less than or equal to 90 percent of the gas conductance of the gas-restricting apertures alone.
12. A method of mass analyzing a sample as recited in claim 10, wherein the combined gas conductance of the second chamber and the gas-restricting apertures is less than or equal to 70 percent of the gas conductance of the gas-restricting apertures alone.
13. A method of mass analyzing a sample as recited in claim 10, wherein each gas-restricting aperture comprises a diameter, d.sub.aperture, that is less than or equal to 5 millimeters.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The above noted and various other aspects of the present invention will become apparent from the following description which is given by way of example only and with reference to the accompanying drawings, not necessarily drawn to scale, in which:
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DETAILED DESCRIPTION
(15) The following description is presented to enable any person skilled in the art to make and use the invention, and is provided in the context of a particular application and its requirements. Various modifications to the described embodiments will be readily apparent to those skilled in the art and the generic principles herein may be applied to other embodiments. Thus, the present invention is not intended to be limited to the embodiments and examples shown but is to be accorded the widest possible scope in accordance with the features and principles shown and described. To fully appreciate the features of the present invention in greater detail, please refer to
(16) In the description of the invention herein, it is understood that a word appearing in the singular encompasses its plural counterpart, and a word appearing in the plural encompasses its singular counterpart, unless implicitly or explicitly understood or stated otherwise. Furthermore, it is understood that, for any given component or embodiment described herein, any of the possible candidates or alternatives listed for that component may generally be used individually or in combination with one another, unless implicitly or explicitly understood or stated otherwise. Moreover, it is to be appreciated that the figures, as shown herein, are not necessarily drawn to scale, wherein some of the elements may be drawn merely for clarity of the invention. Also, reference numerals may be repeated among the various figures to show corresponding or analogous elements. Additionally, it will be understood that any list of candidates or alternatives is merely illustrative, not limiting, unless implicitly or explicitly understood or stated otherwise.
(17) The Clausing factor, K, is often used for static molecular flow calculations (Clausing, Pieter. “Ober das Kosinusgesetz der Zurückwerfung als Folge des zweiten Hauptsatzes der Thermodynamik.” Annalen der Physik 396, no. 5 (1930): 533-566.). The Clausing Factor is a transmission probability correction factor that that ranges from zero to unity and that must be applied in order to correct calculations of gas flux through a theoretical aperture in an infinitely thin plane to real apertures of non-zero thickness, e.g., tubes of length, L. This factor takes into account the phenomenon that, when a tube has non-zero length, L, there are certain molecule trajectories that are excluded from passing out of the tube through the aperture because of angular restrictions. The original calculations of K were based on early Monte-Carlo simulations of molecular flow through tubes of different L/d ratios. Subsequently, the results of such calculations have been fit to empirical equations and tabulated. Clausing tables may also be used to gas conductance values and internal pressures for various types of tubes and chambers.
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(19) Lambertian reflection, as referred to herein, is analogous to Lambert's cosine law in the field of optics which states that the radiant intensity or luminous intensity observed from an ideal diffusely reflecting surface or ideal diffuse radiator is directly proportional to the cosine of the angle θ between the direction of the incident light and the surface normal. When molecules interact with a surface (metal, ceramic, plastic, etc), the molecular structure is rough relative to the size of a molecule. Molecules interact with this roughness and ultimately lose “memory” of the original angle of incidence. This phenomenon leads to desorption angles which are centered around normal to the surface and to the Cosine Law. With regard to this phenomenon, Rozanov (Rozanov, L. N. “Vacuum Technique” (2002) Hablanian, M. H. ed.) notes that a particularly relevant idea that emerges from Clausing's paper is that “the molecules leaving a surface at equilibrium consist of molecules having undergone, in general, various types of interaction with the surface: elastic scattering (specular reflection, diffraction in various channels), inelastic scattering (one or multiphonon annihilation or creation) or desorption (following adsorption). If more than one of these processes are effective, the distribution of the molecules leaving the surface, as a result of one of these processes, is in principle arbitrary even at equilibrium. The only constraint imposed by the presence of equilibrium is that the sum of all the distributions must be cosine.”
(20) Based on the above considerations, the present inventors have recognized that the reason why molecules are generally prevented from escaping from a tube having a large L/d ratio is that, even when using the maximum diameter openings at the ends of the tube (i.e., apertures having the same diameter as the tube diameter), the average trajectories of molecules rebounding off of the tube interior surfaces are transverse to the longitudinal axis of the tube. As a result, there are relatively few internal pathways by which molecules rebound can off of the interior surfaces and still pass through an aperture immediately after the rebound. A consequence of the Lambertian reflection phenomenon is that, for a given constant diameter, d.sub.aperture, of gas-flow restricting apertures at the ends of a tube having length, L, and tube diameter, d, it is increasingly less likely for gas molecules to pass through the apertures as the ratio, L/d, increases (e.g.,
(21) In order to exploit the phenomenon of Lambertian reflection, the inventors have studied how changing the geometry of a collision cell affects its internal gas pressure. Three different simple empty tubes with different inner diameters were fabricated by three-dimensional printing as listed in Table 1 below. The internal gas pressure of each tube under a flow of argon gas at 300 K was determined as the inlet pressure required to create a steady-state flow of 0.248 mL/min through the respective tube. Additionally, expected internal tube pressures were calculated from Direct Simulation Monte Carlo (DSMC) calculations [e.g., see G. A. Bird, “Molecular Gas Dynamics and the Direct Simulation of Gas Flows” (Oxford University Press, Oxford, 1994)] as well as by using the Clausing factor. The results of the experiments and calculations are shown in Table 1 below.
(22) TABLE-US-00001 TABLE 1 Experimental data from 3D printed tubes. 2.5 mm apertures, 125 mm total internal chamber length, L.sub.chamber (see FIG. 7). Cell Inner Pressure (mTorr) Pressure (mTorr) Pressure Diameter determined from determined from (mTorr) (mm) DSMC simulation Clausing Factor measured 40 5.5 4.1 3.9 24 5.8 4.2 4.3 2.50 40.3 67.3 78.1
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(24) As stated in the Background section of this document, the inventors have identified a need in the mass spectrometry art for collision cell designs that are able to attain the highest possible internal pressure possible while, at the same time, reducing the flow rate of collision gas to the collision cell. The ratio of gas flow rate to pressure is known as conductance, which may be stated in units of liters per second as follows:
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Thus, the above-identified need in the art may be satisfied by making cell conductance as small as possible. As a result of the observed close correspondence between measured pressures and pressures that are calculated using the Clausing factor (Table 1), it is possible to predict the internal pressures will be developed, under steady-state gas flow, in tube-like collision cells of other sizes and then calculate the conductance. More generally, it is possible to measure conductance for any tentative collision cell design. It is then possible to calculate a quantity which is herein referred to as “relative conductance”, which is the ratio of the conductance for a complete collision cell system (including the interior chamber and the its gas inlet and gas outlet apertures) to the theoretical conductance of the apertures by themselves. The theoretical gas conductance, C.sub.aperture, of an aperture (or “theoretical aperture conductance”) is herein defined as the limiting conductance of a circular-bore tube of inner diameter, d, as tube length, L, approaches zero. Generally, for any tube of finite length, C.sub.tube=νκ.sub.tubeA.sub.tube/4, where ν is the average molecular velocity, κ.sub.tube is the Clausing factor of the tube and A.sub.tube is the cross-sectional area of the tube. Similarly, C.sub.aperture=νκ.sub.apertureA.sub.aperture/4 where κ.sub.aperture and A.sub.aperture are the Clausing factor and cross-sectional area of the aperture, respectively. The above procedure gives a ratio of how much lower the conductance of the complete collision cell geometry is compared to the conductance of the apertures in isolation. This procedure also normalizes out the molecular velocity and temperature of the gas.
(26) For example,
(27) The asymptotic values (i.e., baseline values) of pressure that are approached at the right-hand side of the graph of
(28) In order to take advantage of the above insights, the inventors have developed new collision cell designs that can achieve higher internal pressures than can be achieved within conventional collision cells without an increase in gas flow relative to conventional designs. Accordingly, each of
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d.sub.average=d.sub.tube.
Otherwise, if the cross section is a rectangle with height, h and width, w, then one may approximate d.sub.average as
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If the tube or chamber in question is long and narrow, then, instead of estimating relative conductance values by comparing diameters or cross-sectional areas (as above), it is preferable to calculate the conductance directly using rectangular duct Clausing factors or DSMC calculations.
(31) The Clausing factor for a rectangular duct can be calculated using the tables in Santeler, D. J.; Boeckmann, M. D. “Molecular Flow Transmission Probabilities of Rectangular Tubes”, Journal of Vacuum Science Technology A, 1991, 9(4), 2378-2383. The conductance of the rectangular chamber is then calculated as
C.sub.chamber=(νκ.sub.chamberA.sub.chamber)/4
where A.sub.chamber=hw is the cross-sectional area of the rectangular chamber and k.sub.chamber is the Clausing factor of the rectangular chamber.
(32) For tubes or chambers having more complex cross-sectional shapes, one may compare different chamber designs or to compare estimated chamber conductance to aperture conductance by comparing cross sectional areas instead of comparing average diameters. For example, one may determine the cross sectional area, A.sub.chamber, of the chamber by graphical integration and then compare A.sub.chamber to A.sub.aperture (where, in general, A.sub.aperture=πr.sub.aperture.sup.2) or else compare A′.sub.chamber, relating to the cross sectional area of a first collision cell structure, to A″.sub.chamber relating to a the cross sectional area of a second collision cell structure to which the first cell structure is being compared.
(33) Plotted point 144c on
(34) The data depicted in
(35) As a specific example of how a decrease in collision gas chamber diameter increases internal pressure, the inventors have compared the known collision cell 34a of
(36) As another specific example of how a decrease in collision gas chamber diameter increases internal pressure, the inventors have compared the known collision cell 34a of
(37) Line 147 of
(38) The total conductance of gas flowing out of a collision cell involves gas flow from the gas inlet 9, 35 at the center (
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where C.sub.aperture is the conductance of each aperture and C.sub.halftube is the conductance from the center of the tube at the gas inlet to the aperture. Equations in Haefer, R. A.; Vacuum 1980 30 217, p. 217 and p. 221 can be used to sum more complex structures. For a large cross section tube, C.sub.halftube becomes very large compared to C.sub.aperture and the above equation reduces simply to C.sub.cell=2C.sub.aperture. However, as the cross section of the tube becomes smaller and/or the chamber length becomes longer, the resulting conductance C.sub.halftube decreases. A smaller cross section reduces the area and a longer distance reduces the Clausing factor. These trends lead to the inequality C.sub.cell<2C.sub.aperture which results in the desired higher pressure for a given flow of gas.
(40) As an example, if we have 2.5 mm diameter apertures in plates that are 0.75 mm thick, the conductance out of each such aperture will be 0.377 L/s for argon at 300 K. For a large inner diameter tube, there is no significant obstruction to the flow of gas. Therefore, in this instance, the conductance of the cell is approximately equal to 2C.sub.aperture=0.76 L/s. With a 125 mm total cell length, the conductance of the half tube drops as the inner diameter is reduced. Once the inner diameter is reduced to approximately 40 mm, the conductance of the tube itself becomes a restriction for the gas to reach the apertures. At an inner diameter of approximately 20 mm, the conductance of the cell has dropped to approximately 0.96 that of the two apertures by themselves. At an inner diameter of approximately 10 mm, the conductance of the cell has dropped to approximately 0.77 that of the two apertures by themselves. The conductance of the half-cell is 1.26 L/s. This makes the total cell conductance 0.58 L/s which is 0.77 times the conductance of the apertures by themselves, 0.76 L/s. This results in a lower conductance out of the cell. This in turn, gives a higher pressure in the cell for a given flow rate.
(41) These equations can be used for cells which are not symmetric, in other words where the gas inlet is not at the center of the device. These equations can also be used for cells which do not have identical apertures on each end. The conductance from the gas inlet to each of the two apertures are calculated, C.sub.halftube1 and C.sub.halftube2. Then the conductance of the two apertures are calculated, C.sub.aperture1 and C.sub.aperture2. The total cell conductance is
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For more complex geometries, DSMC can be used to calculate the total conductance of the cell. This can then be compared to the conductance of the apertures by themselves. This could include curved cells (e.g. 90°, 180°, or anything else). The conductance of cell geometries with other internal shapes which are not simply round or rectangular can be calculated by simulation. This also includes cell geometries with internal parts which make the actual conductance different from that of a simple round or rectangular tube.
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(45) In alternative embodiments, the portions of the internal rod electrodes that extend through the wall of the gas containment vessel 38 (
(46) The discussion included in this application is intended to serve as a basic description. The present invention is not intended to be limited in scope by the specific embodiments described herein, which are intended as single illustrations of individual aspects of the invention. Functionally equivalent methods and components are within the scope of the invention. As but one example, collision cells and ion cooling cells that have been used in the examples herein have been described above as having linear longitudinal axes. However, the principles described herein may also be applied more broadly to collision cells and ion cooling cells that are not straight. Thus, collision cells ion cooling cells and reaction cells that have rod electrodes that are curved along their lengths and that have curved longitudinal axes are also contemplated. Such curved multipole devices are described, for example, in U.S. Pat. Nos. 8,461,524, 9,543,136 and 6,576,897. The curvature is beneficial for the separation of uncharged molecules, which follow straight line trajectories in the absence of collisions, from ions, the trajectories of which are largely constrained to follow a pseudopotential well surrounding the curved longitudinal axis. In such instances, the chamber length, L.sub.chamber, (which equals 2 L) should be taken as the total length of the curved longitudinal axis, from an entrance aperture to an exit aperture. Various other modifications of the invention, in addition to those shown and described herein will become apparent to those skilled in the art from the foregoing description and accompanying drawings.