Electric pump
10066626 ยท 2018-09-04
Assignee
Inventors
Cpc classification
F04C29/0078
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C18/344
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2270/12
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C29/0085
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C29/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2240/60
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2230/603
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C18/3446
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2230/91
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C2240/30
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
International classification
F04C18/344
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F04C29/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Abstract
An electric pump is provided, which may include a motor unit including a rotation shaft, and a pump unit including a rotor having a vane groove accommodating a vane and coupled with the rotation shaft, and including a pump plate including an external wall portion and a cam ring having a cam surface on which the vane slides, and a bottom lid portion provided in the pump plate and being integrally formed with the external wall portion and the cam ring, and a connection unit being provided between the external wall portion and the cam ring to connect the external wall portion and the cam ring and protruding in a direction away from the bottom lid portion, and the connection unit is integrally formed with the external wall portion, the cam ring, and the bottom lid portion.
Claims
1. An electric pump for a vehicle, the electric pump comprising: a motor unit including a rotation shaft; a pump unit including a rotor having a vane groove accommodating a vane and coupled with the rotation shaft, and including a pump plate including a cam ring having an inner surface as a cam surface on which the vane slides and an external wall portion surrounding the cam ring; a bottom lid portion provided in the pump plate and being integrally formed with the external wall portion and the cam ring, and a connection unit being provided between the external wall portion and the cam ring to connect the external wall portion and the cam ring and protruding in a direction away from the bottom lid portion, and the connection unit being integrally formed with the external wall portion, the cam ring, and the bottom lid portion; wherein a height of an end surface at the protruding side of the connection unit from the bottom lid portion is the same as an end surface of the cam ring or lower than the end surface of the cam ring; and at a side of the pump unit opposite to the motor unit, a cover is attached in a state of covering, and the cover is attached to an end surface of the external wall portion at a side away from the motor unit, and, inside of the cover, an expansion space in which a gas compressed in the pump unit and entered through a communication hole expands is formed between the cover and the pump unit.
2. The electric pump according to claim 1, wherein a plurality of connection units are provided at predetermined intervals along an outer periphery of the cam ring.
3. The electric pump according to claim 2, wherein when the pump plate is seen in a top view, a central line of at least one of a plurality of the connection units passes a closest portion where the rotor is closest to the cam surface, and further passes a center of the cam ring.
4. The electric pump according to claim 1, wherein the pump plate is made of an aluminum-based member.
5. The electric pump according to claim 4, wherein the cam surface is formed with a coating film for improving a sliding property of the vane, and this coating film is a hard plating film of which harness is harder than that of the cam ring other than the cam surface.
6. The electric pump according to claim 5, wherein the coating film is provided so that the hardness of the coating film when a temperature of the cam ring increases is harder than that of the vane.
7. The electric pump according to claim 4, wherein at least the cam ring of the pump plate is made of an AlSiC composite material made by adding SiC powder to aluminum or aluminum alloy.
8. The electric pump according to claim 1, wherein the cover is provided with a plurality of ribs in a protruding manner from an inner wall of the cover, a plate member is disposed at an end side of protrusions of the ribs, and a closed space is formed as being separated from the expansion space by the plate member, the ribs, and the inner wall of the cover, and the plate member is provided with a hole which allows for communication between the expansion space and the closed space.
9. The electric pump according to claim 8, wherein the ribs are provided on a top surface portion of the cover facing the pump unit at a position away from the pump unit, and the closed space is formed by attaching the plate member to the top surface portion.
10. The electric pump according to claim 9, wherein the plurality of ribs are arranged in a lattice manner on the top surface portion.
11. The electric pump according to claim 1, wherein an end surface of the connection unit at a protruding side from the bottom lid portion is disposed to be located at a side closer to an end surface of a protruding side of the cam ring than the bottom lid portion.
12. The electric pump according to claim 2, wherein the pump plate is made of an aluminum-based member.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
(13)
DESCRIPTION OF EMBODIMENTS
(14) Hereinafter, an electric pump according to an embodiment of the present invention will be described with reference to the drawings.
(15) <1. Configuration of Electric Pump 10>
(16)
(17)
(18) As shown in
(19) The rotation shaft 23 is rotatably supported at one end by the bearing 24 (24a) attached to a bottom surface side (one end side) of the motor cover 21 and also rotatably supported by the bearing 24 (24b) attached to the end cap 22.
(20) As shown in
(21) As shown in
(22) As shown in
(23) As shown in
(24) As shown in
(25) In this case, not the entire bearing 24b fit into the fitting unit 223 is not accommodated in the fitting unit 223, and a portion of the bearing 24b (about half in
(26) As shown in
(27) The brush 26 providing electric power to the commutator 232 is supported by a brush support unit 233 supported by the end cap 22 explained above. Therefore, even when the commutator 232 rotates with respect to the brush 26 according to the rotation of the rotation shaft 23, the brush 26 does not follow the rotation shaft 23 and provides electric power to the commutator 232. The brush support unit 233 is integrally formed with the end cap 22. In the conventional configuration, the brush 26 is supported by a brush plate separate from the end cap 22, but in the present embodiment, a configuration is employed in which the brush support unit 233 having the function of the brush plate is integrally configured with the end cap 22. In the present embodiment, the end cap 22 integrally formed with the brush support unit 233 is formed by, for example, resin molding.
(28) As shown in
(29) As shown in
(30) (Integrate Configuration of Pump Plate 31)
(31) Subsequently, the configuration of the pump plate 31 will be explained in details. As shown in
(32) As shown in
(33) At the central side of the pump plate 31, the cam ring 313 enclosed by the external wall portion 311 is provided. The cam ring 313 is a ring-shaped portion projecting from a bottom lid portion 318 (explained later) of the pump plate 31 toward the cover 40 side, and the inner wall surface of the cam ring 313 is a cam surface 313a. A cam bottom surface 313b is provided at the bottom surface side in the inner space enclosed by the cam ring 313, so that the bottom surface side of the rotor 32 can be received. Further, the closing plate 34 (explained later) is attached to the side of the cover 40 of the cam ring 313. A rotor chamber C1 which is a space closed by the cam surface 313a, the cam bottom surface 313b (see
(34) As shown in
(35) Since the electric pump 10 according to the present embodiment is dry-type not using any lubricating oil, the cam surface 313a is formed with a coating film for improving the sliding property. As long as the sliding property can be improved, the composition and the deposition method of the coating film are not particularly limited, but it is preferable to employ a publicly-known hard plating film. The hard plating film in this case means a plating film provided with a higher degree of hardness than the cam ring 313 except the hard plating film. The hardness of the hard plating film where the temperature of the cam ring 313 rises may be higher than the vane 33.
(36) Examples of such hard plating films include NiPX-based plating films shown in, e.g., JP 2001-192850 A (X is at least a type of metal selected from the group consisting of W, Co, Pd, Re, Y, Mo, Ti, Mn, V, Zr, Cr, Cu, Au, Ag, Zn, Fe, Pb, Su, and Pt. This is also applicable to the following cases), and NiBX-based plating films, CoW-based plating film shown in, e.g., JP 4-94489 A, and a NiCoPW-based plating films shown in, e.g., JP 4185523 B1.
(37) The improvement of the sliding property of the cam surface 313a can also be attained by changing the material of the pump plate 31. Examples of such materials that can be used for improving the sliding property of the cam surface 313a include AlSiC composite materials explained above (a typical example is a material made by mixing SiC into AlSiMg-based aluminum alloy). In the pump plate 31, at least the material in the portion of the cam ring 313 may be changed.
(38) As shown in
(39) As shown in
(40) The flange engagement unit 315b is a portion into which the circumferential flange unit 222 is fit, and has a larger diameter than the bearing engagement unit 315a. Therefore, since the circumferential flange unit 222 is fit into the flange engagement unit 315b, the inner diameter (the diameter at the inner peripheral side) of the flange engagement unit 315b corresponds to the external diameter (the diameter at the external peripheral side) of the circumferential flange unit 222. The circumferential flange unit 222 is configured to have approximately such a diameter that it is prevented from moving in the radial direction (diameter direction) with respect to the flange engagement unit 315b (hardly any chattering) when the circumferential flange unit 222 is fit into the flange engagement unit 315b. Alternatively, the circumferential flange unit 222 may be configured to have approximately such a diameter that it slightly moves with respect to the flange engagement unit 315b.
(41) As shown in
(42) In this case, as shown in
(43) In this case, the term integrally means that elements are formed as a single member through, e.g., casting process such as die cast, injection molding, and the like, and no interface exists unlike a case where separate bodies are fixed later using screws and the like or by means of adhering. However, when two separate members are fixed by welding, there is no interface separating the two members, so that atoms or molecules of the two members are dispersed from each other. Therefore, welding is included in the concept of integrally referred to herein. It should be noted that the concept of integrally is also applicable to a connection unit 319 explained below.
(44) It should be noted that the bottom lid portion 318 need not be in a plate shape, and the bottom lid portion 318 may be configured to extend toward at least one of the motor unit 20 side and the cover 40 side, and have unevenness, a penetration hole, and the like as necessary.
(45) The connection unit 319 is a portion vertically provided from the bottom lid portion 318 toward the cover 40 side. This connection unit 319 is provided such that its external appearance is in, for example, a rib shape (protrusion shape). Like the bottom lid portion 318 explained above, the connection unit 319 is integrally formed with the external wall portion 311 and the cam ring 313. This connection unit 319 protrudes to have a certain height from the bottom lid portion 318. More specifically, the connection unit 319 protrudes from the bottom lid portion 318 so that the end surface of the protruding side of the connection unit 319 is located at a side closer to the end surface of the cam ring 313 than the bottom lid portion 318. The end surface at the protruding side of the connection unit 319 may protrude to have about the same height as the end surface of the cam ring 313, but as shown in
(46) In this case, the connection unit 319 is preferably provided along the shortest path between the external wall portion 311 and the cam ring 313. This is because when the connection unit 319 is provided along the shortest path as described above, this can improve the cooling performance of the cam ring 313 by preferably transmitting the heat generated by the cam ring 313 to the external wall portion 311 when the temperature gradient of the connection unit 319 is taken into consideration.
(47) Each of the connection units 319 is provided with a predetermined angle in the peripheral direction of the cam ring 313. In the configuration as shown in
(48) A configuration for providing the connection units 319 on every predetermined angle may not be employed. Instead, the angle between multiple connection units 319 in the peripheral direction may be irregular.
(49) In the configuration as shown in
(50) In the rotation direction of the rotor 32, the connection unit 319 is preferably arranged to connect the external wall portion 311 and the cam ring 313 and in proximity to the side where the volume of a pressure chamber C3 explained later is reduced (the end side of the intake chamber C2 in the rotation direction of the rotor 32). In particular, when the gas is compressed according to the rotation of the rotor 32, the temperature increases. Therefore, when the connection unit 319 is disposed in proximity to the side where the volume of the pressure chamber C3 is reduced, which is a side where the temperature is higher, then, the cooling performance of the cam ring 313 can be increased.
(51) In the configuration as shown in
(52) (Rotor 32)
(53) As shown in
(54) The spline hole 321a has such a gap with the spline shaft unit 23a to allow for some chattering to such a degree that the spline shaft unit 23a can slightly move in the radial direction (diameter direction).
(55) As shown in
(56) As shown in
(57) As shown in
(58) As shown in
(59) As shown in
(60) As shown in
(61) In this case, in the present embodiment, as shown in
(62)
(63) The resonator plate 50 is made of a material such as steel-based material having a higher density than the resin material which is the material of the cover 40, and the resonator plate 50 is less likely to vibrate because of its weight. Therefore, when a sound wave collides with the resonator plate 50, the resonator plate 50 can also achieve the effect of reducing the noise. However, the resonator plate 50 may also be made of a material other than steel-based material. Examples of such materials include aluminum-based member, resin-based material, and the like.
(64) As shown in
(65) As shown in
(66) The insertion recessed portion 45a is provided in such a manner as to be positioned with the penetration hole 313d existing in the bulged portion 313c. A grommet 51 shown in
(67) As shown in
(68) It should be noted that the connector cover 48 is made in a cylindrical shape of which end portion at the side of the motor unit 20 is open, and a cable, not shown, can be inserted into this connector cover 48. The connector cover 48 can be formed in various shapes according to the connector shape of the vehicle to which the electric pump 10 according to the present embodiment is attached.
(69) Inside of the extension unit 47, a connector bus bar 49 one end side of which is electrically connected to the connection unit 46 is provided (see
(70) <2. Operation of Electric Pump 10>
(71) In the electric pump 10 having the above configuration, electric power is provided from the cable via the connector bus bar 49, the connection unit 46, the lead line 28, the brush 26, and the commutator 232 to the wound wire of the rotator 231, and by providing the electric power, the rotator 231 and the rotation shaft 23 are rotated.
(72) In the rotation of the rotation shaft 23, the spline shaft unit 23a engages with the spline hole 321a, so that the rotation torque (rotation force) of the rotation shaft 23 is transmitted to the rotor 32. At this occasion, as shown in
(73) By the way, according to the rotation of the rotation shaft 23, the rotor 32 rotates in the counterclockwise direction in
(74) When the vane 33 that is in contact with the cam surface 313a comes to the intake chamber C2, a pressure chamber C3 is formed between the vane 33 and one of the top clearances between the rotor 32 and the cam surfaces 313a (one of the closest portions) or between the vane 33 and an adjacent vane 33. The volume in the pressure chamber C3 increases for some time along the rotation direction of the rotor 32, and therefore, the gas such as air is sucked through the opening portion of the projection unit 341. However, when the vane 33 advances to the other of the top clearances between the rotor 32 and the cam surfaces 313a (the other of the closest portions) for some time, the volume of the pressure chamber C3 decreases in turn, so that the gas inside thereof is compressed. Accordingly, when the pressure chamber C3 becomes in communication with the communication hole 342, the gas such as air is discharged through the communication hole 342.
(75) The temperature of the cam ring 313 greatly increases because of the sliding of the vane 33 to the cam surface 313a and the gas compression in the pressure chamber C3. In this case, the pump plate 31 is provided such that the entire pump plate 31 including the external wall portion 311 and the cam ring 313 are integrated. Accordingly, for example, as compared with a configuration in which the cam ring 313 and the like are separately provided, the heat radiation property of the cam ring 313 improves. In other words, the cooling performance of the cam ring 313 improves.
(76) In addition, between the external wall portion 311 and the cam ring 313, the connection unit 319 is integrally provided. Therefore, this connection unit 319 functions as an active heat transmission path, and the heat of the cam ring 313 is easily dissipated to the outside. Not only the connection unit 319 but also the bottom lid portion 318 function as active heat transmission paths, and the heat of the cam ring 313 is also easily dissipated to the outside via the bottom lid portion 318. Since the heat of the cam ring 313 is easily dissipated to the outside, the amount of wear of the vane 33 is reduced as compared with a case where the temperature of the cam ring 313 is high.
(77) In this case, how the temperature of the pump plate 31 having the cam ring 313 decreases is shown in
(78) In
(79)
(80) As is evident from
(81) By the way, by compressing and sucking the gas according to the rotation of the rotor 32 as described above, the vane pump unit 30 generates a large operation sound (noise).
(82) However, when the gas enters the cover 40 from the intake chamber C2 via the communication hole 342, the gas compressed in the intake chamber C2 expands when the gas enters the expansion space C4. As described above, when the gas expands in the expansion space C4, the speed and the pressure of the gas decrease, and further, the sound waves interfere with each other by interference made by reflection and the like of sound waves in the expansion space C4, and accordingly, the acoustic energy of the gas is attenuated. Therefore, the sound generated by the vane pump unit 30 is reduced.
(83) In addition, the change in the pressure of the gas (sound waves) enters the inside of the expansion space C4 via the holes 50a. More specifically, this makes a vibration system so that, when a sound wave of a particular frequency enters the small chambers C5 through the hole 50a, the gas inside of the small chambers C5 acts as a spring, and the gas located inside of the hole 50a penetrating through the resonator plate 50 acts as a spindle.
(84) In the vibration system explained above, a resonance occurs of which predetermined frequency is the characteristic frequency, but when the frequency of the sound wave (particular frequency) matches the characteristic frequency, the resonance occurs and the vibration increases, and the gas intensively enters and exists in proximity to the hole 50a. Because of this entering and exiting, for example, the acoustic energy of the gas is converted into frictional heat, so that it is reduced. Accordingly, the noise generated by the vane pump unit 30 is reduced.
(85) In this case, when the volume of the small chambers C5 is constant because of the height and the arrangement of the ribs 44, the effect of reducing the noise is different in accordance with the diameter of the hole 50a and the plate thickness of the resonator plate 50. This state is shown in
(86) In
(87) In the case shown in
(88) After the noise is reduced as described above, the gas inside the expansion space C4 is discharged via the discharge pipe 316 to the outside.
(89) <3. Effects>
(90) According to the electric pump 10 having the above configuration, the pump plate 31 is provided with the external wall portion 311 and the cam ring 313 which are integrally formed. Therefore, for example, as compared with a case where the cam ring 313 and the like are provided separately, the cooling performance of the cam ring 313 can be improved. More specifically, the heat radiation efficiency during operation of the electric pump 10 can be improved.
(91) In particular, between the external wall portion 311 and the cam ring 313, the connection unit 319 is integrally provided. Therefore, the connection unit 319 functions as an active heat transmission path, and the heat of the cam ring 313 can be easily dissipated to the outside. Further, not only the connection unit 319 but also the bottom lid portion 318 function as active heat transmission paths, and the heat of the cam ring 313 is also easily dissipated to the outside via the bottom lid portion 318.
(92) In the present embodiment, it may also be possible to employ a configuration that the connection units 319 are provided on every predetermined angle along the peripheral direction of the cam ring 313. When such configuration is used rather than arranging the same number of connection units 319 with irregular angles along the peripheral direction of the cam ring 313, a portion having locally high temperature can be prevented from occurring on the cam ring 313, and the deviation of the heat radiation property can be reduced.
(93) Further, in the present embodiment, the end surface of the connection units 319 at the protruding side from the bottom lid portion 318 may be disposed at a side closer to the end surface at the protruding side of the cam ring 313 than the bottom lid portion 318. In this case, the height of the connection units 319 from the bottom lid portion 318 is sufficiently ensured, and the connection units 319 can function as preferable heat transmission path. Therefore, the heat of the cam ring 313 can be easily dissipated to the outside via the connection units 319.
(94) In the present embodiment, when the pump plate 31 is seen in the top view, a central line of at least one of multiple connection units 319 (two connection units 319 in
(95) Further, in the present embodiment, the pump plate 31 may be made of aluminum-based member. In this case, aluminum-based member has a high degree of thermal conductivity, and therefore, the heat of the cam ring 313 can be preferably dissipated to the outside. Accordingly, the heat radiation property of the electric pump 10 can be improved.
(96) In the present embodiment, the cam surface 313a may be provided with the coating film in order to improve the sliding property of the vane 33, and this coating film can be a hard plating film of which hardness is less than the hardness of the cam ring 313 except the cam surface 313a. When such hard plating is used for the coating film, the vane 33 is likely to slide with respect to the cam surface 313a, and the sliding property can be improved.
(97) Further, in the present embodiment, the hardness of the coating film formed on the cam surface 313a when the temperature of the cam ring 313 rises may be configured to be harder than the vane 33. When such coating film is used, the sliding property can be further enhanced. In addition, the anti-wear property of the cam surface 313a can be improved, and the lifetime of the electric pump 10 can be increased.
(98) In the electric pump 10 according to the present embodiment, at least the cam ring 313 of the pump plate 31 can be made of an AlSiC composite material made by adding SiC powder to aluminum or aluminum alloy. When such configuration is employed, the vane 33 easily slides with respect to the cam surface 313a, which improves the sliding property.
(99) In the electric pump 10 according to the present embodiment, the expansion space C4 is formed in a portion inside of the cover 40 and between the cover 40 and the vane pump unit 30. Therefore, when the gas compressed in the intake chamber C2 enters the expansion space C4, the gas expands, and accordingly, the noise generated by the vane pump unit 30 is reduced.
(100) In addition, in the present embodiment, as shown in
(101) In the present embodiment, multiple ribs 44 are provided on the cover 40 to protrude toward the vane pump unit 30 side. At the end side of the protrusion of the rib 44, the resonator plate 50 is arranged, and the small chambers C5 separated from the expansion space C4 are formed by the resonator plate 50, the ribs 44, and the inner wall of the cover 40. Therefore, the gas is flown into and out of the small chamber C5 via the hole 50a, and the resonance is caused, so that the acoustic energy of the gas can be changed into frictional heat and the like, and the acoustic energy can be reduced. Therefore, the noise generated by the vane pump unit 30 can be reduced.
(102) Further, in the present embodiment, the ribs 44 are provided on the top surface portion 41 facing the vane pump unit 30 at the position of the cover 40 away from the vane pump unit 30, and the resonator plate 50 is attached to the top surface portion 41, so that the small chambers C5 are formed. Therefore, the small chambers C5 are formed at the side of the top surface portion 41 having the largest size of area, and therefore, more small chambers C5 can be provided than small chambers C5 provided at another portion of the cover 40. Accordingly, the noise reduction effect is further improved.
(103) In the present embodiment, multiple ribs 44 are arranged in the lattice manner on the top surface portion 41. Therefore, many small chambers C5 can be formed. In addition, in a case where the ribs 44 are arranged regularly like a lattice, the characteristics of the noise reduction by each of the small chambers C5 can be the same, and the acoustic energy of a desired frequency can be reduced in a preferable manner. Since the ribs 44 are arranged in a lattice form on the top surface portion 41, the strength of the cover 40 at the side of the top surface portion 41 can be improved.
(104) <Modification>
(105) Each embodiment of the present invention has been hereinabove explained, but the present invention can be modified in various manners other than the above. This will be hereinafter explained.
(106) In the above embodiments, no member is disposed in the small chambers C5. However, for example, a material having sound adsorption effect such as glass wool may be arranged in the small chambers C5. In such configuration, the acoustic energy can be further reduced in a preferable manner.
(107) According to the above embodiment, in the small chambers C5, the acoustic energy of the gas is changed into frictional heat and the like by the resonance of the gas, so that the noise is reduced. However, the phase of the sound reflected in the small chamber C5 may be reversed, so that the sound input from the hole 50a and the sound output from the hole 50a may be caused to cancel each other, so that the noise is reduced.
(108) In the above embodiment, the arrangement of the ribs 44 in a lattice form on the top surface portion 41 has been explained. However, the arrangement of the ribs 44 may be any arrangement other than lattice form. For example, the ribs 44 may be disposed in a honeycomb shape on the top surface portion 41, or may be arranged in a triangular lattice form. Alternatively, various other shapes may also be employed. The thickness of the top surface portion 41 may be increased, and recessed portions may be formed on the top surface portion 41 and small chambers C5 may be formed.
REFERENCE SIGNS LIST
(109) 10, 10A . . . electric pump 20 . . . motor unit 21 . . . motor cover 22 . . . end cap 23 . . . rotation shaft 23a . . . spline shaft unit 23b . . . centering portion 23c . . . involute teeth (corresponding to male tooth portion) 26 . . . brush 27 . . . power supply bus bar 28 . . . lead line 30 . . . vane pump unit (corresponding to pump unit) 31 . . . pump plate 32 . . . rotor 33 . . . vane 34 . . . closing plate 40 . . . cover 41 . . . top surface portion 42 . . . side surface portion 44 . . . rib 45 . . . connector box 45a . . . insertion recessed portion 46 . . . connection unit 48 . . . connector cover 49 . . . connector bus bar 50 . . . resonator plate 51 . . . grommet 100 . . . control substrate 231 . . . rotator 232 . . . commutator 311 . . . external wall portion 313 . . . cam ring 313a . . . cam surface 313c . . . bulged portion 313d . . . penetration hole 315 . . . recessed engagement unit 315a . . . bearing engagement unit 315b . . . flange engagement unit 318 . . . bottom lid portion 319 . . . connection unit 322 . . . vane groove 341 . . . projection unit 342 . . . communication hole C1 . . . rotor chamber C2 . . . intake chamber C3 . . . pressure chamber C4 . . . expansion space C5 . . . small chambers