Device and method for generating a vapor for a CVD or PVD device from multiple liquid or solid source materials

Abstract

In a method and a device for generating vapor for a CVD or PVD device, liquid or solid particles of a first source material are fed into a first heat transfer body via a first feed line. The first heat transfer body vaporizes the particles into a first vapor, which is transported by a carrier gas from the first heat transfer body into a second heat transfer body arranged after the first heat transfer body. The first heat transfer body is heated to a first temperature, and the second heat transfer body is heated to a second temperature. Liquid or solid particles of a second source material are fed into a second heat transfer body via a second feed line. The second heat transfer body vaporizes the particles into a second vapor, which is transported along with the first vapor out of the second heat transfer body by the carrier gas.

Claims

1. An apparatus for generating a vapor for a chemical vapor deposition (CVD) or physical vapor deposition (PVD) device, the apparatus comprising: a first aerosol source (15) configured to generate a first aerosol flow of particles of a first source material, wherein said particles of the first source material comprise either of liquid particles and solid articles; a first feed line (5) configured to feed the first aerosol flow of particles of the first source material from the first aerosol source (15) into a first heat transfer body (1); the first heat transfer body (1) having heat transfer surfaces that are configured to, when heated to a first temperature, vaporize the particles of the first source material into a first vapor, wherein the first vapor is transported out of the first heat transfer body (1) by a carrier gas in a direction of a flow of the carrier gas; a second aerosol source (16) configured to generate a second aerosol flow of particles of a second source material, wherein said particles of the second source material comprise either of liquid particles and solid particles; a second feed line (6) configured to feed the second aerosol flow of the particles of the second source material from the second aerosol source (16) into a second heat transfer body (2); and the second heat transfer body (2) arranged downstream of the first heat transfer body (1) in the direction of the carrier gas flow, the second heat transfer body (2) configured to receive the first vapor from the first heat transfer body (1) and having heat transfer surfaces that are configured to, when heated to a second temperature, vaporize the particles of the second source material into a second vapor, wherein the second vapor along with the first vapor are transported out of the second heat transfer body (2) by the carrier gas.

2. The apparatus of claim 1, wherein the heat transfer surfaces of the first heat transfer body (1) and the second heat transfer body (2) are formed by surfaces of porous cells of a foam body, wherein the foam body comprises an electrically conductive material that is heated by passing an electrical current through the foam body, wherein the foam body has a porosity of 50 to 500 pores per inch, and/or wherein a proportion of porous areas on a surface of the foam body is greater than 90 percent.

3. The apparatus of claim 1, further comprising a third heat transfer body (3) located downstream from the second heat transfer body (2) in the direction of the carrier gas flow, wherein a clearance space (12) is situated between the second heat transfer body (2) and the third heat transfer body (3).

4. The apparatus of claim 3, further comprising a preheating body (4) with which the carrier gas is heated, the preheating body (4) located upstream from the first heat transfer body (1) in the direction of the carrier gas flow.

5. The apparatus of claim 4, wherein the first heat transfer body (1), the second heat transfer body (2), and the third heat transfer body (3), as well as the preheating body (4) comprise foam bodies with porous cells, the foam bodies being formed from an electrically conductive material that is heated when an electrical current is flowed through the foam bodies.

6. The apparatus of claim 5, wherein the first feed line (5) opens into an intermediate space (10) located between the preheating body (4) and the first heat transfer body (1), and wherein the second feed line (6) opens into an intermediate space (11) located between the first heat transfer body (1) and the second heat transfer body (2).

7. The apparatus of claim 1, further comprising: a gas inlet unit (14) and a susceptor (19), wherein the first and second vapors are transported by the carrier gas through the gas inlet unit (14) toward a substrate (20) resting on the susceptor (19), on which the first and second vapors condense in response to a chemical reaction or temperature drop; and a vacuum pump (21) configured to evacuate an interior of the CVD or PVD device.

8. The apparatus of claim 1, wherein the first source material and the second source material differ from one another.

9. The apparatus of claim 3, wherein a gas outlet surface of the third heat transfer body (3) lies directly opposite a susceptor (19) carrying a substrate, and comprises a ceiling of a process chamber.

Description

(1) Exemplary embodiments of the invention will be explained below based on attached drawings. Shown on:

(2) FIG. 1 is a schematic view of the structural design of a coating device with a multistage aerosol vaporizer,

(3) FIG. 2 is a section along the II-II line on FIG. 1,

(4) FIG. 3 is a second exemplary embodiment of the invention, in which the multistage aerosol vaporizer feeds a gas inlet unit 14 of a PVD reactor 26, and

(5) FIG. 4 is another exemplary embodiment of a multistage aerosol vaporizer.

(6) FIG. 1 shows a schematic view of a reactor housing 26, which incorporates a coolable susceptor 19, on which one or several substrates 20 are arranged.

(7) A carrier gas flows through the reactor housing 26 from top to bottom. The carrier gas is fed in through a feed line 7. A first aerosol is fed in through a feed line 5, two or four of which are present in the exemplary embodiment, and a second aerosol is fed in through a feed line 6. The two aerosols are chemically different from each other, and have differing vaporization temperatures. The vaporization temperature of the first aerosol is less than the vaporization temperature of the second aerosol.

(8) A preheating body 4 that extends over the entire cross sectional surface of the reactor housing 26 is located directly behind the opening 7 of the carrier gas feed line in the direction of flow. An electrical current introduced into the preheating body 4 via electrical contacts 22 can be used to heat the preheating body 4 to a temperature that roughly corresponds to the vaporization temperature of the first aerosol.

(9) Feed lines 5, 6 comprised of pipes penetrate through the preheating body 4. The opening 5 of the first feed line 5 is located in an intermediate space 10, which is arranged downstream from the preheating body 4 and upstream from a first vaporization body 1. The vaporization body 1 extends over the entire cross sectional surface of the reactor housing 26. An electrical current introduced into the first vaporization body 1 via contacts 23 brings the vaporization body 1 up to a first vaporization temperature. The heated carrier gas exiting the preheating body 4 and the first aerosol fed into the intermediate space 10 enter into the first vaporization body 1. The aerosol particles then come into physical contact with vaporization surfaces of the first heat transfer body 1. The first aerosol vaporizes completely inside the first heat transfer body 1. The latter is transported by the carrier gas stream out of the first heat transfer body 1 into a second intermediate space 11, which is located behind the first heat transfer body 1 in the direction of flow, and before a second heat transfer body 2 in the direction of flow.

(10) Located in the second intermediate space 11 is the opening 6 of the second aerosol feed line 6, through which the second aerosol is fed in at a higher vaporization temperature.

(11) An electrical current introduced into the second heat transfer body 2 via electrical contacts 24 can be used to heat the second heat transfer body 2 to a second vaporization temperature that is greater than the first vaporization temperature. The aerosol stream exiting the opening 6 and the vapor transported by the carrier gas and exiting the first heat transfer body 1 enters into the second vaporization body 2.

(12) The particles of the second aerosol are vaporized in the second heat transfer body 2. The vapor from the first source material passes through the second heat transfer body 2 essentially undispersed and uninfluenced.

(13) Located behind the second heat transfer body 2 in the direction of flow is a third intermediate space 12. The intermediate space 12 is located above the last heat transfer body 3 in the direction of flow, which can be heated to a temperature by introducing an electrical current into contacts 25. Also provided are means for cooling the last heat transfer body 3, so that condensation can take place in the heat transfer body 3. For example, such means can consist of a feed line (not shown), through which a cooled carrier gas is fed into the intermediate space 12. In order to coat the substrate 20, however, the heat transfer body 3 is kept at a temperature where no condensation takes place on the heat transfer surfaces of the heat transfer body 3. A process gas comprised of two different vapors then exits the outlet surface of the heat transfer body 3. The vapor condenses on the surface of the substrate 20, which is kept at a deposition temperature by the susceptor 19.

(14) The job of the heat transfer bodies 1 and 2 is to vaporize a respective aerosol fed into them. The heat transfer bodies 1, 2 thus constitute vaporization bodies.

(15) The aerosols can contain a layer-forming source material and a doping source material. They can also contain several layer-forming materials. Possible in particular are organic materials, which are used for depositing OLEDs.

(16) In the exemplary embodiment shown on FIG. 1, the lower side or a broadside surface of the last heat transfer body 3 in the direction of flow pointing toward the susceptor comprises a gas outlet surface, and forms the upper side of a process chamber, whose lower side consists of the upper side of the susceptor 19.

(17) The heat transfer bodies 1 to 3 along with the preheating body 4 are comprised of a solid foam, which exhibits a suitable porosity, for example of 100 pores per inch. Depending on the intended use, the porosity can lie between 50 and 500 pores per inch. The heat transfer bodies can exhibit a circular contour. In the exemplary embodiment, the heat transfer bodies 1 to 3 along with the preheating body 4 exhibit a rectangular contour. They are somewhat thinner in design in the middle than on the edge. As a result, the intermediate spaces are formed by the meniscus-shaped lower side and upper side of the foam bodies 1 to 4 when their edges lie one on top of the other with contact. The feed lines 5 and 6 consist of pipes, which penetrate openings in the foam body 4 or 1 like a lance.

(18) Because the second exemplary embodiment shown on FIG. 2 has an essentially identical vaporization device as the exemplary embodiment described on FIG. 1, reference is made to the statements therein. The first aerosol feed line 5 is fed by a first aerosol generator 15. The second aerosol feed line 6 is fed by a second aerosol generator 16. The carrier gas lines 7 are fed by a carrier gas source 17. The carrier gas source 17 can be a hydrogen source, a nitrogen source or an inert gas source.

(19) Located downstream from the last heat transfer body 3 in the direction of flow is a funnel-shaped gas outlet channel, whose walls 9 are heated. The gas outlet channel ends in a gas outlet opening 13, through which the vapor mixture transported by the carrier gas can enter into a gas inlet unit 14 of a CVD reactor 26. In this exemplary embodiment, the vaporization device exhibits its own housing 8, which is joined with the reactor housing 26 in the area of the gas outlet opening 13 via the heated walls 9.

(20) The gas inlet unit 14 consists of a showerhead, which exhibits a plurality of gas outlet openings, through which the process gas comprised of the carrier gas-vapor mixture can flow into the process chamber 18, in which a substrate 20 cooled to the deposition temperature is arranged.

(21) A vacuum device 21 having a pump can be used to evacuate the process chamber 18 or keep it at a low pressure.

(22) The third exemplary embodiment shown on Fig. 4 depicts a three-stage vaporizer. A carrier gas fed in via a feed line 7 is preheated in a preheating unit 4 here as well. A first aerosol feed line 5 opens into a first heat transfer body 1. A second aerosol feed line 6 for a second aerosol opens into a second heat transfer body 2. A third aerosol line 28 through which a third aerosol can be fed into the third heat transfer body 27 opens into a third heat transfer body 27. Provided here as well is a last heat transfer body 3 in the direction of flow, through which all of the three generated vapors must pass.

(23) The three heat transfer bodies 1, 2, 27 are arranged one behind the other in the direction of carrier gas flow. A cascaded vaporization of several aerosols takes place one after the other in the direction of carrier gas flow. An aerosol is individually fed to each vaporization body 1, 2, 27. The vaporization bodies 1, 2, 27 arranged one behind the other are heated to different vaporization temperatures, wherein a vaporization body lying downstream is always heated to a higher temperature than the respective vaporization body lying upstream therefrom. The aerosol with the lowest vaporization temperature is fed into the first vaporization body in the direction of flow, while the aerosol with the highest vaporization temperature is fed into the last evaporation body in the direction of flow.

(24) Here as well, feed line pipes 5, 6, 28 penetrate through openings in the heat transfer bodies 1, 2, 4, wherein the direction of pipe extension coincides with the direction of carrier gas flow.

(25) Using a vaporization device in which several different aerosols can be vaporized simultaneously eliminates the need for an additional mixing device, in which separately generated vapors would otherwise have to be mixed. Not only is the second source material vaporized in the vaporization body 2, the vapor generated by vaporizing the first source material is also homogeneously intermixed with the vapor generated by vaporizing the second source material. Further intermixing takes place in the heat transfer body 3 arranged last in the direction of flow.

(26) In the exemplary embodiment shown on FIG. 3, the two already generated vapors are intermixed in a third vaporization body 27 with a vapor of a third source material generated therein.

(27) As a consequence, a homogeneous vapor mixture of several chemically differing source materials exits from the outlet surface of the last heat transfer body 3 in the direction of flow. This vapor mixture is transported to the susceptor 19 via heated connecting channels, where condensation takes place. The gas outlet surface of the last heat transfer body in the direction of flow can comprise the ceiling of a process chamber.

(28) The above embodiments serve to explain the inventions encompassed as a whole by the application, which each separately further develop prior art at least via the following feature combinations, specifically:

(29) A method, characterized in that solid or liquid particles of a second source material are fed into the second heat transfer body 2, and vaporization heat is transferred to these particles by bringing them into contact with heat transfer surfaces of the second heat transfer body 2, thereby forming a second vapor, which together with the first vapor is transported by the carrier gas out of the second heat transfer body 2.

(30) A method, characterized in that the first and second vapors are transported by the carrier gas into a third heat transfer body 3 arranged a distance behind the second heat transfer body 2 in the direction of carrier gas flow.

(31) A method, characterized in that the carrier gas is heated in a preheating body 4 arranged before the first heat transfer body 1 in the direction of carrier gas flow.

(32) A method, characterized in that the second temperature of the second heat transfer body 2 corresponds to at least the first temperature of the first heat transfer body 1, and in particular is higher than the first temperature.

(33) A method, characterized in that the heat transfer surfaces are the surfaces of open cells of a respective solid foam comprising the heat transfer body 1, 2, 27.

(34) A device, characterized in that a second feed line 6 opens directly into or before the second heat transfer body 2, through which liquid or solid particles of a second source material can be fed into the second heat transfer body 2, so that vaporization heat can be transferred to these particles, and the second vapor generated by vaporizing the particles together with the first vapor can be transported by the carrier gas out of the second heat transfer body 2.

(35) A device, characterized in that the heat transfer surfaces are comprised of the surfaces of walls of an open-cell foam body, wherein it is provided in particular that the foam body consist of electrically conductive material and can be heated by passing through an electrical current, exhibits a porosity of 500 to 200, preferably of 100 pores per inch, and/or the share of all open areas on the surface of the foam body is greater than 90 percent.

(36) A device, characterized in that a third heat transfer body 3 is placed downstream from the second heat transfer body 2 in the direction of carrier gas flow, wherein in particular a clearance space 9 is situated between the second heat transfer body 2 and the third heat transfer body 3.

(37) A device, characterized in that a preheating body 4 with which the carrier gas can be heated is arranged before the first heat transfer body 1 in the direction of flow.

(38) A device or a method, characterized in that all vaporization bodies 1, 2, 3 as well as the preheating body are comprised of open-celled foam bodies, and can be electrically heated.

(39) A device or a method, characterized in that the first and second source material can each be fed in as a respective aerosol through a feed line 5, 6, which opens into an intermediate space 10, 11 between two foam bodies.

(40) A device or a method, characterized in that the device is part of a CVD or PVD reactor 26 that exhibits a gas inlet unit and a susceptor 19, wherein the first and second vapor transported by the carrier gas is transported through the gas inlet unit 14 in the direction toward a substrate 20 resting on the susceptor 19, where it condenses in response to a chemical reaction or temperature drop, wherein in particular a vacuum pump 21 is provided to evacuate the interior of the CVD or PVD reactor.

(41) A device or a method, characterized in that several heat transfer bodies 1, 2, 27 are arranged one after the other in the direction of carrier gas flow, before or into which a respective aerosol feed line 5, 6, 28 opens, wherein differing source materials can be fed through the aerosol feed lines 5, 6, 28 into the heat transfer body 1, 2, 27 as a respective aerosol.

(42) A device or a method, characterized in that the gas outlet surface of a heat transfer body 3 arranged last in the direction of flow lies directly opposite a susceptor 19 carrying a substrate, and in particular comprises the ceiling of a process chamber.

(43) All disclosed features are essential to the invention (whether taken separately or in combination). The disclosure content of the accompanying/attached priority documents (copy of prior application) is hereby also included in the disclosure of the application in its entirety, including for the purpose of also incorporating features of these documents into claims of the present application. The subclaims with their features characterize independent inventive further developments of prior art, in particular to initiate partial applications based upon these claims.

(44) TABLE-US-00001 Reference List 1 Heat transfer body 2 Heat transfer body 3 Heat transfer body 4 Preheating body 5 Feed line 5 Opening 6 Feed line 6 Opening 7 Feed line 7 Opening 8 Housing 9 Clearance space 10 Intermediate space 11 Intermediate space 12 Intermediate space 13 Gas outlet opening 14 Gas inlet unit 15 Aerosol generator 16 Aerosol generator 17 Carrier gas source 18 Process chamber 19 Susceptor 20 Substrate 21 Vacuum pump 22 Contacts 23 Contact 24 Contact 25 Contact 26 Reactor 27 Heat transfer body 28 Feed line