Method for preparing ultra-long-tube type fine-grain molybdenum tube target

Abstract

A method for preparing an ultra-long-tube type fine-grain molybdenum tube target uses molybdenum powder with the purity being greater than 3N to prepare a target tube with a uniform wall thickness, where the length is 1700-2700 mm; the diameter is greater than 150 mm; and the wall thickness is 15-40 mm. The method includes: taking molybdenum powder, feeding the molybdenum powder into a film, molding by static pressing, placing in a medium frequency furnace, performing hydrogen sintering to form a tube blank, placing into a mold, forging the mold of a tube target, placing into tempering furnace, annealing, forming fine-grain structures, fine processing, washing, and drying to prepare a molybdenum tube target. The method overcomes defects of a sintering process and a forging process, and relates to simple processes, easy industrial production and control, reduced pollution, reduced cost, improved quality, and remarkably improved production efficiency.

Claims

1. A method for preparing an ultra-long-tube type fine-grain molybdenum tube target, wherein the length of the ultra-long-tube type fine-grain molybdenum tube target is 1700-2700 mm; the diameter of the ultra-long-tube type fine-grain molybdenum tube target is greater than 150 mm; and a wall thickness of the ultra-long-tube type fine-grain molybdenum tube target is 15-40 mm; the method uses molybdenum powder with the purity being greater than 3N to prepare the tube target, wherein the wall thickness of the tube target is uniform, comprising: (1) taking molybdenum powder having a granularity of 2.8-3.8 mm, feeding the molybdenum powder into a film prepared in advance, molding by static pressing under 160-200 Mpa, placing the molybdenum powder in a medium frequency furnace, sintering for 55-65 h under hydrogen protection at 1900-2000 C., sintering to form a tube blank, keeping the temperature, and reserving for use; (2) taking the sintered tube blank from the medium frequency furnace, placing into a mold prepared in advance, controlling the temperature of the tube blank to be 1350 C., forging the mold of the tube target, controlling the deformation amount of the tube blank to be less than 50% during the forging, and forging to form the tube target with the length being 1700-2700 mm, the diameter being greater than 150 mm, and the wall thickness being 15-40 mm; (3) taking the tube target formed by forging, placing in a tempering furnace of 1000-1200 C., annealing for 1-3 h, and stabilizing fine-grain structures; and (4) performing fine processing on the tube target, washing, and drying to prepare the fine-grain molybdenum tube target.

2. The method for preparing an ultra-long-tube type fine-grain molybdenum tube target according to claim 1, wherein the sintering is vacuum sintering, and the temperature is increased from 0 C. to 2000 C. during the vacuum sintering.

3. The method for preparing an ultra-long-tube type fine-grain molybdenum tube target according to claim 1, wherein the purity of molybdenum powder is greater than 99.95%.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a schematic diagram of a product prepared according to the present disclosure.

(2) FIG. 2 is a structural cutaway diagram of the present disclosure.

DETAILED DESCRIPTION

(3) A method for preparing an ultra-long-tube type fine-grain molybdenum tube target uses molybdenum powder with the purity being greater than 3N to prepare a target tube with a uniform wall thickness, where the length is 1700-2700 mm; the diameter is greater than 150 mm; and the wall thickness is 15-40 mm. The preparation method includes:

(4) (1) taking molybdenum powder having a granularity of 2.8-3.8 mm, feeding the molybdenum powder into a film prepared in advance, molding by static pressing under 160-200 Mpa, placing in a medium frequency furnace, sintering for 55-65 h under hydrogen protection at 1900-2000 C., sintering to form a tube blank, keeping the temperature, and reserving for use;

(5) (2) taking the sintered tube blank from the medium frequency furnace, placing into a mold prepared in advance, controlling the temperature of the tube blank to be 1350 C., forging the mold of a tube target, controlling the deformation amount of the tube blank to be less than 50% during the forging, and forging to form a tube target with the length being 1700-2700 mm, the diameter being greater than 150 mm, and the wall thickness being 15-40 mm;

(6) (3) taking the tube target formed by forging, placing in a tempering furnace of 1000-1200 C., annealing for 1-3 h, and stabilizing formed fine-grain structures; and

(7) (4) performing fine processing on the tube target, then washing, and drying to prepare the fine-grain molybdenum tube target.

(8) In the method for preparing an ultra-long-tube type fine-grain molybdenum tube target of the present disclosure, the sintering may be vacuum sintering, and the method for controlling the temperature of the vacuum sintering is: gradually increasing the temperature from 0 C. to 2000 C.

(9) In the method for preparing an ultra-long-tube type fine-grain molybdenum tube target of the present disclosure, the purity of the molybdenum powder is greater than 99.95%.

Embodiment 1

(10) A method for preparing an ultra-long-tube type fine-grain molybdenum tube target uses molybdenum powder with the purity being greater than 3N to prepare a target tube with a uniform wall thickness, where the length is 1700 mm; the diameter is greater than 150 mm; and the wall thickness is 15 mm. The preparation method includes:

(11) (1) taking molybdenum powder having a granularity of 2.8-3.8 mm, feeding the molybdenum powder into a film prepared in advance, molding by static pressing under 160 Mpa, placing in a medium frequency furnace, sintering for 65 h under hydrogen protection at 1900 C., sintering to form a tube blank, keeping the temperature, and reserving for use;

(12) (2) taking the sintered tube blank from the medium frequency furnace, placing into a mold prepared in advance, controlling the temperature of the tube blank to be 1350 C., forging the mold of a tube target, controlling the deformation amount of the tube blank to be less than 50% during the forging, and forging to form a tube target with the length being 1700 mm, the diameter being greater than 150 mm, and the wall thickness being 15 mm;

(13) (3) taking the tube target formed by forging, placing in a tempering furnace of 1000 C., annealing for 3 h, and stabilizing formed fine-grain structures; and

(14) (4) performing fine processing on the tube target, then washing, and drying to prepare the fine-grain molybdenum tube target.

Embodiment 2

(15) A method for preparing an ultra-long-tube type fine-grain molybdenum tube target uses molybdenum powder with the purity being greater than 3N to prepare a target tube with a uniform wall thickness, where the length is 2000 mm; the diameter is greater than 150 mm; and the wall thickness is 25 mm. The preparation method includes:

(16) (1) taking molybdenum powder having a granularity of 2.8-3.8 mm, feeding the molybdenum powder into a film prepared in advance, molding by static pressing under 180 Mpa, placing in a medium frequency furnace, sintering for 60 h under hydrogen protection at 1950 C., sintering to form a tube blank, keeping the temperature, and reserving for use;

(17) (2) taking the sintered tube blank from the medium frequency furnace, placing into a mold prepared in advance, controlling the temperature of the tube blank to be 1350 C., forging the mold of a tube target, controlling the deformation amount of the tube blank to be less than 50% during the forging, and forging to form a tube target with the length being 2000 mm, the diameter being greater than 150 mm, and the wall thickness being 25 mm;

(18) (3) taking the tube target formed by forging, placing in a tempering furnace of 1100 C., annealing for 2 h, and stabilizing formed fine-grain structures; and

(19) (4) performing fine processing on the tube target, then washing, and drying to prepare the fine-grain molybdenum tube target.

Embodiment 3

(20) A method for preparing an ultra-long-tube type fine-grain molybdenum tube target uses molybdenum powder with the purity being greater than 3N to prepare a target tube with a uniform wall thickness, where the length is 2700 mm; the diameter is greater than 150 mm; and the wall thickness is 40 mm. The preparation method includes:

(21) (1) taking molybdenum powder having a granularity of 2.8-3.8 mm, feeding the molybdenum powder into a film prepared in advance, molding by static pressing under 200 Mpa, placing in a medium frequency furnace, sintering for 55 h under hydrogen protection at 2000 C., sintering to form a tube blank, keeping the temperature, and reserving for use;

(22) (2) taking the sintered tube blank from the medium frequency furnace, placing into a mold prepared in advance, controlling the temperature of the tube blank to be 1350 C., forging the mold of a tube target, controlling the deformation amount of the tube blank to be less than 50% during the forging, and forging to form a tube target with the length being 2700 mm, the diameter being greater than 150 mm, and the wall thickness being 40 mm;

(23) (3) taking the tube target formed by forging, placing in a tempering furnace of 1200 C., annealing for 1 h, and stabilizing formed fine-grain structures; and

(24) (4) performing fine processing on the tube target, then washing, and drying to prepare the fine-grain molybdenum tube target.