Sliding machine

Abstract

A sliding machine includes: a pair of sliding members having sliding surfaces that oppose each other and are able to move relative to each other; and a lubricating oil which is able to be interposed between the opposed sliding surfaces, in which at least one of the sliding surfaces is covered with a chromium (Cr)-containing amorphous carbon film (chromium-coating DLC), and the lubricating oil contains an oil-soluble molybdenum compound having a chemical structure formed from a trinuclear material of molybdenum (Mo). Specifically, the chromium-coating DLC contains, when the entirety of the film is assumed to be 100 at. %, 1% to 49% of Cr, 0% to 30% of hydrogen (H), carbon (C) as a remainder, and impurities. The lubricating oil contains 5 ppm to 800 ppm of the oil-soluble molybdenum compound in terms of Mo mass ratio with respect to the entirety of the lubricating oil.

Claims

1. A sliding machine comprising: a pair of sliding members having sliding surfaces that oppose each other and are able to move relative to each other; and a lubricating oil interposed between the opposed sliding surfaces, wherein at least one of the sliding surfaces is formed of a covered surface covered with an amorphous carbon film containing 3 at. % to 20 at. % of chromium (Cr) relative to the total concentration of 100 at. % of the components of the amorphous carbon film and 5 at. % to 28 at. % of H, and wherein the lubricating oil contains an oil-soluble molybdenum compound having a chemical structure formed from a trinuclear material of molybdenum (Mo), the lubricating oil contains 10 ppm to 500 ppm of the oil-soluble molybdenum compound in terms of Mo mass ratio with respect to an entirety of the lubricating oil, and the amorphous carbon film has a hardness of 15 GPa to 35 GPa.

2. The sliding machine according to claim 1, wherein the amorphous carbon film further contains carbon (C) and impurities as a remainder relative to the total concentration of 100 at. % of the components of the amorphous carbon film.

3. The sliding machine according to claim 1, wherein the trinuclear material is formed from at least one of Mo.sub.3S.sub.7 and Mo.sub.3S.sub.8.

4. The sliding machine according to claim 1, wherein, when an outermost surface of the covered surface is analyzed by using time-of-flight secondary ion mass spectrometry (TOF-SIMS) with Bi.sup.+ as primary ions, a count ratio (A/B) which is a ratio of a count (A) of peaks that belong to .sup.98Mo.sub.3S.sub.7.sup. appearing near a mass number of 517.4 measured regarding a negative ion spectrum to a count (B) of peaks that belong to .sup.40Ca.sup.+ appearing near a mass number of 40.0 measured regarding a positive ion spectrum is 0.006 or higher.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Features, advantages, and technical and industrial significance of exemplary embodiments of the invention will be described below with reference to the accompanying drawings, in which like numerals denote like elements, and wherein:

(2) FIG. 1 is a bar graph showing the friction coefficient of each test material in a case where a lubricating oil containing a trinuclear Mo compound is used;

(3) FIG. 2 is a bar graph showing the friction coefficient of each test material in a case where the lubricating oil containing the trinuclear Mo compound or a lubricating oil that does not contain the trinuclear Mo compound is used;

(4) FIG. 3 is a graph showing the relationship between the Cr content in a DLC film and the friction coefficient in a case where the lubricating oil containing the trinuclear Mo compound is used;

(5) FIG. 4 is a spectrum graph focusing on negative ions near a mass number of 300 to 600 obtained by analyzing a sliding surface after a friction test is performed by using the lubricating oil containing the trinuclear Mo compound, through TOF-SIMS;

(6) FIG. 5 is a diagram showing the relationship between the count ratio (A/B) between .sup.40Ca.sup.+ and .sup.98Mo.sub.3S.sub.7.sup. obtained on the basis of the spectrum graph, and the friction coefficient;

(7) FIG. 6 is a bar graph showing the surface hardness of each DLC film;

(8) FIG. 7 is a stereoscopic diagram showing the sliding surface of each test material after the friction test is performed by using the lubricating oil containing the trinuclear Mo compound; and

(9) FIG. 8 is a molecular structural diagram showing an example of the trinuclear Mo compound according to the present invention.

DETAILED DESCRIPTION OF EMBODIMENTS

(10) One or two or more constituent elements which are arbitrarily selected from the specification can be added to the above-described constituent elements of the present invention. Contents described in the specification appropriately correspond to not only the entirety of a sliding machine of the present invention but also a sliding member and a lubricating oil included therein, and may also be methodological constituent elements or constituent elements regarding materials. Which embodiment is optimal depends on the object, required performance, and the like.

(11) Lubricating Oil

(12) A lubricating oil according to the present invention is not dependent on the type of base oil, the absence or presence of other additives, or the like as long as the lubricating oil contains a trinuclear Mo compound. Typically, a lubricating oil such as an engine oil contains various additives including S, P, Zn, Ca, Mg, Na, Ba, and Cu. Among the types of lubricating oils, the trinuclear Mo compound according to the present invention preferentially acts on a sliding surface (covered surface) covered with a DLC film and suppresses the generation of a compound that may deteriorate the surface roughness of the covered surface through an adsorption reaction or the like due to other added elements. In addition, the lubricating oil according to the present invention may also contain Mo-based compounds (for example, MoDTC, molybdenum disulfide, and the like) other than the trinuclear Mo compound. However, since Mo is a type of rare metal, it is preferable that the sum of the contained Mo is as low as possible.

(13) When too small an amount of the trinuclear Mo compound is contained, the above-described effect is not easily exhibited. However, there is no problem when too large an amount of the trinuclear Mo compound is contained. However, as described above, it is preferable that the amount of Mo being used is as low as possible. Here, it is preferable that the trinuclear Mo compound according to the present invention is contained in a proportion of 5 ppm to 800 ppm, 10 ppm to 500 ppm, 40 ppm to 200 ppm, or 60 ppm to 100 ppm in terms of the mass ratio of Mo to the entire lubricating oil. When the mass ratio of Mo to the entire lubricating oil is represented by ppm, the mass ratio thereof is designated by ppm Mo. Furthermore, even in a case where the Mo-based compounds and the like other than the trinuclear Mo compound are contained in the lubricating oil, it is preferable that the upper limit of the total amount of Mo with respect to the entire lubricating oil is 400 ppm Mo to 300 ppm Mo.

(14) Sliding Surface of Sliding Member

(15) The sliding member according to the present invention may have any type, form, or sliding form as long as the sliding member has sliding surfaces which move relative to each other with the lubricating oil interposed therebetween. In the case of the present invention, at least one of a pair of sliding surfaces which oppose each other and move relative to each other is coated with a chromium-containing DLC film, the friction coefficient of friction between the sliding surfaces can be significantly reduced due to combination with the lubricating oil. Particularly, by matching the DLC film and the composition of the lubricating oil, the sliding machine of the present invention can exhibit an ultralow friction property in which the friction coefficient of friction between the sliding surfaces is 0.04 or lower or near 0.03.

(16) The reason that a significantly low friction property is exhibited as described above is that, in a situation in which the lubricating oil containing the trinuclear Mo compound is present, the sliding surface (covered surface) coated with the chromium-containing DLC film comes into sliding contact with the opposing sliding surface and thus the surface shape (surface roughness) of the covered surface enters a very smooth state. The degree of smoothness of the covered surface changes with the type of the DLC film or the lubricating oil, sliding conditions, and the like, and the surface roughness thereof when measured by scanning a rectangular measurement area of, for example, 1 m1 m in a direction perpendicular to the sliding direction with an atomic force microscope may be 8 nm or lower, 5 nm or lower, or 2 nm or lower, in terms of maximum height (Rmax). Furthermore, the covered surface according to the present invention may have a surface roughness Rmax in the above range even when the measurement area is enlarged to 10 m10 m.

(17) The reason that such a significantly flat surface is formed is that, as described above, the trinuclear Mo compound contained in the lubricating oil impedes the generation of compounds that may deteriorate the surface roughness of the covered surface. Examples of the added elements that generate such compounds include Ca which is widely contained in a cleaning agent or the like of an engine oil. The ratio (presence ratio) of Mo.sub.3S.sub.7 which has a representative chemical structure that forms a trinuclear Mo material with Ca and is present on the covered surface was examined, and it was apparent that Mo.sub.3S.sub.7 correlates with the friction coefficient of friction between sliding surfaces. Specifically, it was seen that when the outermost surface of the covered surface according to the present invention is analyzed by using Time-Of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) with Bi.sup.+ as primary ions, if the count ratio (A/B) which is a ratio of a count (A) of peaks that belong to .sup.98Mo.sub.3S.sub.7.sup. appearing near a mass number of 517.4 measured regarding the negative ion spectrum to a count (B) of peaks that belong to .sup.40Ca.sup.+ appearing near a mass number of 40.0 measured regarding the positive ion spectrum is 0.006 or higher or 0.01 or higher, an excellent low friction property is exhibited.

(18) Therefore, on the assumption that the sliding surface according to the present invention is coated with the chromium-containing DLC film, it can be said that a reduction in the friction coefficient of friction between the sliding surfaces can be easily achieved as the lubricating oil according to the present invention has a higher Ca content and a lower amount of the trinuclear Mo compound (particularly, Mo compounds formed from Mo.sub.3S.sub.7). However, when the content of the added elements that may deteriorate the surface roughness of the covered surface is low, the content of the trinuclear Mo compound may be correspondingly reduced in a predetermined range.

(19) DLC Film

(20) (1) Composition

(21) It is preferable that the chromium-containing DLC film according to the present invention contains 1% to 49% or 3% to 29% of Cr in total when the entire film is assumed to be 100 at. % as described above. Too small an amount of Cr may not sufficiently function during the interaction with the trinuclear Mo compound, and too large an amount of Cr may cause difficulty in the formation of a good DLC film.

(22) An H-free chromium-containing DLC film which does not substantially contain H or a low-hydrogen chromium-containing DLC film which has a low H content may exhibit both a low friction property and wear resistance to a high level. However, as the H amount in the film increases, the low friction property may further be enhanced. Here, it is preferable that the chromium-containing DLC film according to the present invention contains H in a proportion of 0% to 30% (the lower limit is higher than 0%, 0.1%, or 1%), 6% to 28%, or 10% to 26% when the entire film is assumed to be 100 at. %. When too large an amount of H is contained, the DLC film becomes excessively soft, and thus the wear resistance thereof may be degraded.

(23) The DLC film according to the present invention may contain, in addition to the above-described elements, reforming elements which improve the sliding property and the like, or unavoidable impurities. The elements may include B, O, Ti, V, Mo, Al, Mn, Si, Cr, W, and Ni. Such elements may have any content, and it is preferable that the sum of the amounts of the elements in the DLC film is lower than 8 at. % or lower than 4 at. %. The composition of the DLC film may be homogeneous, may slightly change, or may also be inclined in the thickness direction.

(24) (2) Structure and Property

(25) The chromium-containing DLC film according to the present invention may have an amorphous structure as in a DLC film of the related art. However, the chromium-containing DLC film is not limited thereto and more preferably has a non-oriented structure.

(26) The base material (or the base material of the sliding member) on which the DLC film is formed may be any material, and it is preferable that the DLC film is harder than the base material and has a lower elastic modulus than that of the base material. Accordingly, enhancement in the wear resistance, ductility, or impact resistance of the covered surface according to the present invention can be achieved. For example, it is preferable that the DLC film according to the present invention has a hardness of 15 GPa to 35 GPa, or 17 GPa to 30 GPa. When the hardness thereof is too low, the wear resistance is reduced, and when the hardness thereof is too high, cracking may easily occur in the DLC film. From the same point of view, it is preferable that the elastic modulus of the DLC film is, for example, 100 GPa to 200 GPa, or 130 GPa to 170 GPa.

(27) (3) Film Forming Method

(28) A method of forming the DLC film may be any method, and is preferably, for example, a sputtering method, and particularly, an unbalanced magnetron sputtering (UBMS) method because a dense DLC film is effectively formed.

(29) It is preferable that before forming the DLC film, the chamber may be evacuated (preliminary evacuation) to 10.sup.5 Pa or lower, or hydrogen gas may be introduced into the chamber to remove oxygen and moisture remaining in the chamber before the film formation. The amount of introduced hydrogen gas may be adjusted depending on the amount of H in the DLC film.

(30) As the sputtering gas, for example, one or more types of noble gases such as argon (Ar) gas, helium (He) gas, and nitrogen (N.sub.2) gas may be used. As a reaction gas containing H, one or more types of hydrocarbon gases such as methane (CH.sub.4), acetylene (C.sub.2H.sub.2), and benzene (C.sub.6H.sub.6) may be used.

(31) Regarding the gas flow rates, for example, the noble gas may have a flow rate of 200 sccm to 500 sccm, and the hydrocarbon gas may have a flow rate of 10 sccm to 25 sccm. In addition to the gases, H.sub.2 gas may be introduced at a flow rate of 1 sccm to 25 sccm to reduce the incorporation of O or impurities into the film. In addition, the unit sccm is a flow rate at room temperature under atmospheric pressure (1013 hPa).

(32) When the film forming temperature of the DLC film is 150 C. to 300 C., the generation of carbides can be suppressed, which is preferable. In addition, the film forming temperature is a surface temperature of the base material during the film formation and can be measured by a thermocouple or a heat-dissipation type thermometer.

(33) Furthermore, it is preferable that the sputtering is performed under the conditions in which the gas pressure is 0.5 Pa to 1.5 Pa, the power applied to the targets (C target, Cr target) is 1 kW to 3 kW, and the intensity of a magnetic field in the vicinity of the base material (the sliding surfaces) is 6 mT to 10 mT. Moreover, a negative bias voltage of 50 V to 2000 V may also be applied to the base material.

(34) Instead of the sputtering method, the DLC film may also be formed by an arc-ion plating (AIP) method. The AIP method is a method of forming a DLC film on the surface of a base material by generating arc discharge in vacuum and allowing C, Cr, and the like evaporated from the corresponding targets to react with processing gas in a reaction container.

(35) Uses

(36) The sliding machine of the present invention can be widely applied to various types of machines and apparatuses regardless of the specific form and uses. Particularly, the sliding machine of the present invention exhibits an ultralow friction property with which the friction coefficient of friction between the sliding surfaces is significantly reduced, and is thus appropriate for machines and the like that strictly require a reduction in sliding resistance and a reduction in the mechanical loss due to sliding. For example, the sliding machine of the present invention is appropriate for a driving system unit such as an engine or a transmission mounted in a vehicle or the like, a sliding body which forms a portion thereof, and the like. The sliding body mentioned here includes shafts and bearings, pistons and liners, meshing gears, pumps, and the like. Examples of a sliding member included in such sliding bodies include cams, valve lifters, followers, shims, valves, valve guides, and the like included in a valve system, and further include pistons, piston rings, piston pins, crankshafts, gears, rotors, rotor housings, and the like.

SUMMARY

(37) Combinations of various test materials (sliding members) coated with DLC films which vary in doping metal elements (doping elements) and the contents thereof, and a lubricating oil (referred to as lubricating oil A) which contains a trinuclear Mo compound (oil-soluble molybdenum compound) or a lubricating oil (referred to as lubricating oil B) which does not contain the trinuclear Mo compound were subjected to a block on ring friction test. On the basis of the test results, the present invention will be described in more detail.

(38) Production of Samples

(39) (1) Base Material

(40) A plurality of block-shaped (6.3 mm15.7 mm10.1 mm) base materials made of quenched steel (JISSUS440C) were prepared. The surface (the covered surface of the DLC film) of each of the base materials was subjected to a mirror finish (a surface roughness Ra of 0.08 m).

(41) As a comparative sample (Sample C1 of Table 1) which was not coated with a DLC film, steel (JISSCM420) which was subjected to only a carburizing treatment was prepared. The carburized surface (a hardness of HV600) was subjected to a mirror finish to the same surface roughness.

(42) (2) Formation of DLC Film

(43) Test materials (Samples 10 to 15) in which DLC films that varied in doping elements and the H contents thereof as shown in Table 1 were formed on the surfaces of the corresponding base materials, and test materials (Samples 20 to 24) in which DLC films that varied in Cr contents as shown in Table 2 were formed were prepared.

(44) (i) The formation of the DLC films containing doping elements was performed by using an unbalanced magnetron sputtering apparatus (UBMS504 made by KOBE STEEL, LTD.). Specifically, the formation was performed as follows. First, in order to ensure adhesion, before forming the DLC film, a Cr-based intermediate layer was performed on the surface of the mirror-finished base material. The intermediate layer was formed by evacuating the inside of the sputtering apparatus to 110.sup.5 Pa, thereafter sputtering a pure chromium target which was disposed to oppose the surface of the base material with Ar gas, and subsequently introducing CH.sub.4 gas into the apparatus. The thickness of the intermediate layer was about 0.5 m or greater. In addition, the distance between the surface of the base material according to each of the samples and the target surface was adjusted to be in a range of 100 mm to 800 mm. A film thickness mentioned in the present invention was specified from a wear track obtained by Calotest made by CSM Instruments (the same is applied hereinafter).

(45) Next, various doping targets (pure metal of doping elements (Cr, Al, W, or V)) disposed to oppose the surfaces of the base materials and a graphite target were sputtered with Ar gas. Subsequent to this, Ar gas and CH.sub.4 gas (hydrocarbon gas) were introduced into the apparatus. At this time, the sputtering output or the amount of each of the introduced gases was appropriately changed, thereby forming a DLC film having a desired composition. In this manner, test materials in which various DLC films (with a film thickness of 1 m to 1.5 m) were formed in the above-described intermediate layer were obtained. In addition, when the ratio (volume ratio) of the flow rates of CH.sub.4 and Ar gases (CH.sub.4/Ar) was about 5%, a hard chromium-containing DLC film was formed.

(46) (ii) A DLC film (Sample 11 or Sample 20) which did not contain doping elements and had a high H content was formed by changing a doping target to C and introducing CH.sub.4 gas. In addition, the H-free DLC film (Sample 10) was formed by an ion-arc plating method (cathodic-arc method) described in Japanese Patent Application Publication No. 2004-115826 (JP 2004-115826 A).

(47) Measurement of Samples

(48) (1) Film Composition

(49) The film composition of each of the DLC films was measured as follows. The doping elements in the films were measured by electron probe microanalysis (EPMA). H was measured by elastic recoil detection analysis (ERDA). ERDA is a method of measuring a hydrogen concentration by irradiating the film surface with a 2 MeV helium ion beam and detecting hydrogen that is kicked out of the film with a semiconductor detector. The composition of each of the DLC films obtained as described above was shown in both Table 1 and Table 2.

(50) (2) Film Structure

(51) A cross-sectional center portion of each of the DLC films in the thickness direction was irradiated with an electron beam by using a transmission electron microscope (TEM), and an electron beam diffraction image was obtained. A halo pattern was observed from each of the electron beam diffraction images, and thus it was confirmed that each DLC film had an amorphous structure.

(52) (3) Surface Hardness and Surface Roughness

(53) The surface hardness of each of the DLC films was obtained from a measurement value measured by a nanoindenter test machine (MTS made by TOYO Corporation). In addition, the surface roughness of each of the test materials mentioned in the specification was measured by a white light interferometry optical surface profiler (NewView 5022 made by Zygo Corporation) unless otherwise specified. The film property of each of the DLC films obtained as above is shown in both Table 1 and Table 2.

(54) Lubricating Oil

(55) As the lubricating oils used in the friction test, two types of engine oils shown in Table 3 were prepared. The lubricating oil A is made by using an engine oil (motor oil SN 0W-20 made by Toyota Motor Corporation) corresponding to the ILSAC GF-5 standard in the 0W-20 viscosity grade as the base, and adding and mixing a trinuclear Mo compound (appropriately and simply referred to as trinuclear Mo material) described as Trinuclear in the disclosure material Molybdenum Additive Technology for Engine Oil Applications of Infineum International Ltd. to allow the Mo content with respect to the entire oil to correspond to 80 ppm Mo. On the other hand, the lubricating oil B is an engine oil based on no added or blended oil additives. Both the lubricating oils did not contain molybdenum dithiocarbamate (MoDTC).

(56) Block on Ring Friction Test

(57) (1) Friction Coefficient

(58) Combinations of the test materials and the lubricating oils were subjected to a block on ring friction test (simply referred to as friction test), and the friction coefficient () of each of the sliding surfaces was measured. The friction coefficient of each of the test materials when the lubricating oil A containing the trinuclear Mo material was used was shown in both Table 1 and Table 2.

(59) The friction test was performed by using each of the test materials as a block test piece with a sliding surface width of 6.3 mm, and using an S-10 standard test piece (with a hardness of HV800 and a surface roughness of 1.7 m to 2.0 m in terms of Rzjis) made by Falex Corporation formed from carburized steel (AIS14620) as a ring test piece (with an outer diameter of 35 mm and a width of 8.8 mm). At this time, the friction test was performed at a test load of 133 N (a Hertz pressure of 210 MPa), a sliding speed of 0.3 m/s, and an oil temperature of 80 C. (constant) for 30 minutes, and the average value of for one minute immediately before the end of the test was determined as the friction coefficient of the test.

(60) (2) Products on Sliding Surface

(61) The sliding surface of each of the test materials after the friction test was measured by Time-Of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS). By using TOF-SIMS 5 made by ION-TOF, high-resolution spectrum measurement was performed on a measurement area of 100 m100 m on the sliding surface, with 30 keV Bi+ beams as primary ions. Representative secondary ion mass spectra obtained through the measurement are shown in FIG. 4. In FIG. 4, the values obtained by the friction test were added. In addition, all of the spectra shown in FIG. 4 were also measured from the sliding surfaces after the friction test using the lubricating oil A.

(62) (3) Wear of Sliding Surface

(63) The sliding surface of each of the test materials after the friction test using the lubricating oil A was measured by the above-mentioned optical surface profiler. The stereoscopic shapes (wear depths) of the sliding surfaces obtained in this manner are collectively shown in FIG. 7.

(64) Evaluations

(65) (1) Friction Property

(66) First, the friction coefficients when the DLC films that varied in doping elements and the lubricating oil A (containing the trinuclear Mo material) were combined are shown in FIG. 1. It can be seen that the friction coefficient of the chromium-containing DLC film was significantly lower than the friction coefficients of other DLC films and the friction coefficient of carburized steel that does not have a DLC film.

(67) In addition, the friction coefficients when the chromium-containing DLC film or the carburized steel and the lubricating oil A or the lubricating oil B (that does not contain the trinuclear Mo material) were combined are shown in FIG. 2. In the case of the carburized steel, the friction coefficient thereof was rarely changed even when any lubricating oil was used. Contrary to this, in the case of the chromium-containing DLC film (13 at. % of Cr), the friction coefficient when the lubricating oil A was used was significantly lower than the friction coefficient when the lubricating oil B was used. From this, it became apparent that by a combination of the chromium-containing DLC film and the lubricating oil containing the trinuclear Mo material, a specific ultralow friction property is exhibited.

(68) Next, from the results obtained as described above, the relationship between the Cr content in the chromium-containing DLC film and the friction coefficient when the lubricating oil A was used is shown in FIG. 3. As is apparent from FIG. 3, it could be seen that the friction coefficient can be sufficiently reduced only by including 1 at. % or higher (or 3 at. % or higher) of Cr in the DLC film. In addition, it was also seen that even when the Cr content is 22 at. % or higher, an ultralow friction property is exhibited. From this, it could be seen that an ultralow friction property when the lubricating oil containing the trinuclear Mo material and the chromium-containing DLC film are combined can be stably exhibited while not being significantly affected by the Cr content in the DLC film.

(69) (2) Products on Sliding Surface

(70) As is apparent from the analysis results of TOF-SIMS shown in FIG. 4, in the case of the chromium-containing DLC film (13 at. % of Cr) and the H-free DLC film, fragments of MoxSy such as Mo.sub.3S.sub.7 and Mo.sub.3S.sub.8 were detected from the sliding surface after the friction test using the lubricating oil A, and thus the adsorption of the trinuclear Mo material was confirmed. On the other hand, in the case of the carburized steel, the adsorption of the trinuclear Mo material was not recognized.

(71) From the analytical results of TOF-SIMS, further examination was performed, and it could be seen that the secondary ion mass spectrum amount regarding .sup.40Ca.sup.+ was different between the chromium-containing DLC film and the H-free DLC film. Specifically, it became apparent that the .sup.40Ca.sup.+ spectrum intensity of the chromium-containing DLC film was significantly lower than that of the H-free DLC film. This means that the amount of Ca compounds that adhered to the sliding surface or were generated after the friction test in the chromium-containing DLC film was lower than that of the H-free DLC film. In addition, it is thought that Ca is a component derived from overbased calcium sulfonate that is frequently mixed to impart an acid neutralization action or a deposit cleaning action to an engine oil.

(72) From the results, it is thought that the reason why the chromium-containing DLC film exhibits an ultralow friction property unlike other DLC films when the lubricating oil A is used is that the trinuclear Mo material adsorbs onto the sliding surface and thus the adsorption and generation of Ca compounds is suppressed. In order to measure the effect of the trinuclear Mo material and the Ca compounds on the friction coefficient, the relationship between the count ratio (Mo.sub.3S.sub.7.sup./.sup.40Ca.sup.+) between Mo.sub.3S.sub.7.sup. and .sup.40Ca.sup.+ and the friction coefficient is shown in FIG. 5. As is apparent from FIG. 5, it can be said that when the count ratio is 0.006 or higher, 0.01 or higher, or 0.015 or higher, the friction coefficient is significantly reduced.

(73) In summary, when a sliding member in which the sliding surface is coated with a chromium-containing DLC film is used in the presence of a lubricating oil containing the trinuclear Mo material, molybdenum sulfide compounds (trinuclear Mo materials such as Mo.sub.3S.sub.7 and Mo.sub.3S.sub.8) adsorb onto the sliding surface. It is thought that the molybdenum sulfide compounds have a similar layered structure to that of MoS.sub.2 and the low shear property thereof contributed to a reduction in the friction coefficient described above.

(74) Furthermore, in a case where the Ca-based additive (overbased calcium sulfonate or the like) is mixed with the lubricating oil, the molybdenum sulfide compounds prevent Ca compounds that may cause an increase in the friction coefficient from adsorbing onto the sliding surface and being generated. It is thought that this also contributed to a reduction in the friction coefficient described above.

(75) The surface roughnesses of all of the chromium-containing DLC films according to Examples were Ra 0.01 m to 0.02 m and were in a very smooth state. Accordingly, it is thought that the effect of reducing the friction coefficient described above was stably exhibited immediately after the start of sliding.

(76) (3) Wear Resistance

(77) The hardnesses of the DLC film that varied in doping elements are shown in FIG. 6 in contrast with each other. As is apparent from FIG. 6, the chromium-containing DLC film is sufficiently harder than the DLC films containing other doping elements and has the same degree of hardness as that of the H-DLC film. It is thought that since the H contents of the DLC films are at the same degree, the hardnesses of the DLC films depend on the types of the doping elements.

(78) It was seen from FIG. 7 which illustrates the sliding surfaces after the friction test that the chromium-containing DLC film rarely wears and exhibits excellent wear resistance regardless of the Cr content.

(79) As described above, although the reason that the chromium-containing DLC film is excellent in wear resistance with a high hardness is not necessarily clear, it is thought that one of the reasons is that chromium carbide (CrC) which is hard and fine strengthened particles are uniformly dispersed in the DLC which is a matrix and the CrC is consistent with the matrix (DLC). In addition, the state of the CrC dispersed in the DLC film can be checked through TEM or the like.

(80) TABLE-US-00001 TABLE 1 Film composition Friction (remainder: C) Film property coefficient (at. %) Surface (in lubricating Sample Sample Production Doping Hardness roughness oil containing No. name method element H (GPa) Ra (m) trinuclear Mo) Note 10 H-free DLC Arc ion 0.3 49.0 0.045 0.08 plating 11 H-DLC Sputtering 20 25.7 0.013 0.07 Same as Sample 20 12 Cr-DLC Cr: 13.2 20 20.7 0.015 0.027 Same as (13%Cr-DLC) Sample 23 13 Al-DLC Al: 14 15 14.6 0.014 0.063 14 W-DLC W: 4 15 15.0 0.018 0.062 15 V-DLC V: 9 12 15.7 0.016 0.065 C1 Carburized (HV (0.08) 0.09 SCM420 steel 600) (without DLC film)

(81) TABLE-US-00002 TABLE 2 Composition of Friction coefficient Sam- DLC film (at. %/ Hard- (in lubricating ple Sample remainder: C) ness oil containing No. name Cr H (GPa) trinuclear Mo) 20 H-DLC 0 20 25.7 0.07 21 1% Cr-DLC 1.2 25 25.7 0.033 22 5% Cr-DLC 5.1 21 17.4 0.020 23 13% Cr-DLC 13.2 19.6 20.7 0.027 24 23% Cr-DLC 22.6 18.6 17.4 0.023

(82) TABLE-US-00003 TABLE 3 Presence or absence of Composition of lubricating oil (remainder: base oil) Lubricating trinuclear (ppm) oil name Mo compound Mo S Zn P N B Ca Na Si Lubricating Present 80 2400 700 630 500 16 2000 0 4 oil A (80 ppm) Lubricating Absent 130 1800 730 690 900 4 1760 360 4 oil B