Manufacturing apparatus of electrolytic copper foil
11492717 · 2022-11-08
Assignee
Inventors
- Jaewon Moon (Daejeon, KR)
- Hyung Seok Han (Daejeon, KR)
- Hyungkyun Yu (Daejeon, KR)
- Ki Hoon PAENG (Daejeon, KR)
Cpc classification
Y02E60/10
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
Abstract
An apparatus for manufacturing an electrolytic copper foil includes an electrolytic bath defining a cavity for receiving an electrolyte; an internal drum partially disposed in the cavity; an outer drum in contact with a surface of the internal drum; a counter electrode positioned in the cavity of the electrolytic bath and positioned to be spaced apart from the internal drum by a predetermined distance; and a power supply unit electrically connecting the internal drum and the counter electrode.
Claims
1. An apparatus for manufacturing an electrolytic copper foil, comprising: an electrolytic bath defining a cavity for receiving an electrolyte; a rotating drum partially disposed in the cavity, wherein the rotating drum includes an outer drum formed of a single conductive material having a hollow tube shape and an internal drum formed of a single conductive material inserted into the outer drum, wherein the outer drum is an outermost drum, the internal drum is an innermost drum, and the outer drum is in direct contact with the internal drum, wherein the outer drum has a surface in which a plurality of protrusions are formed, the plurality of protrusions each having a predetermined shape; a counter electrode positioned in the cavity of the electrolytic bath and positioned to be spaced apart from the rotating drum by a predetermined distance; and a power supply unit electrically connecting the internal drum and the counter electrode.
2. The apparatus of claim 1, wherein: a height of each protrusion of the plurality of protrusions is 0.5 μm to 10 μm.
3. The apparatus of claim 1, wherein: the plurality of protrusions are arranged with a predetermined interval interposed therebetween.
4. The apparatus of claim 3, wherein: the interval between the protrusions is 5 μm to 100 μm.
5. The apparatus of claim 1, wherein: a cross section of one of the protrusions cut in a direction perpendicular to the surface of the outer drum is a polygonal shape including a triangular shape and a quadrangle shape.
6. The apparatus of claim 1, wherein: the single conductive material of the inner drum is any one selected from the group of a Ti-based material, a Zr-based material, a Fe-based material, a Ni-based material, a Pb-based material, a C-based material, a Si-based material, an alloy of any of the foregoing materials, and a conductive polymer material, and the single conductive material of the outer drum is any one selected from the group of a Ti-based material, a Zr-based material, a Fe-based material, a Ni-based material, a Pb-based material, a C-based material, a Si-based material, an alloy of any of the foregoing materials, and a conductive polymer material.
7. The apparatus of claim 1, wherein: a cross section of one of the protrusions cut in a direction perpendicular to the surface of the outer drum is a curved shape including a hemispherical shape.
8. The apparatus of claim 1, wherein: the internal drum and the outer drum are formed of different metals.
9. The apparatus of claim 1, wherein: the internal drum and the outer drum are formed of a same metal.
10. The apparatus of claim 1, further comprising: an electrolyte disposed in the cavity to be in contact with the outer drum.
11. The apparatus of claim 10, wherein: the electrolyte contains copper sulfate.
12. The apparatus of claim 1, further comprising: a pump configured to circulate the electrolyte through the cavity.
13. The apparatus of claim 1, wherein: wherein the rotating drum is an anode electrode and the counter electrode is a cathode electrode.
Description
DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
MODE FOR INVENTION
(5) Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily practice the present invention. However, the present invention may be implemented in various different forms and is not limited to exemplary embodiments described herein.
(6) Portions unrelated to the description will be omitted to obviously describe the present disclosure, and similar portions will be denoted by similar reference numerals throughout the specification. In addition, “first”, “second”, “third”, or the like may be used in order to avoid confusion between components.
(7) In addition, the size and thickness of each component illustrated are randomly represented for convenience of explanation, but the present invention is not limited thereto.
(8) Hereinafter, an apparatus for manufacturing an electrolytic copper foil according to the present invention will be described with reference to the accompanying drawings.
(9)
(10) As illustrated in
(11) In the apparatus 100 for manufacturing an electrolytic copper foil, a metal is precipitated on a surface of an electrode in a thin film form by allowing a current to flow between two electrodes and the precipitated metal is separated from the electrode, thereby obtaining a metal thin film. The first drum 10 may be a metal, that is, an anode electrode in which copper is precipitated.
(12) The first rotating drum 10 includes an internal drum 10a and an outer drum 10b. The outer drum 10b may have a hollow tube shape and the internal drum 10a may be inserted into the outer drum 10b. In this case, it is preferable that the internal drum 10a is inserted into the outer drum 10b so that an outer surface of the internal drum 10a is in direct contact with an internal surface of the outer drum 10b.
(13) Accordingly, the outer drum 10b may be formed by inserting the internal drum 10a into the outer drum 10b after the outer drum 10b is separately formed or by attaching a plate shaped metal to an outer side of the internal drum 10a so as to surround the outer side of the internal drum 10a.
(14) In this case, the outer drum 10b may surround the internal drum 10a while being closely adhered to the internal drum 10a. The outer drum 10b may have a thickness at which a roughness may be formed, for example, 1 mm to 50 mm.
(15) Meanwhile, the outer drum 10b has one surface with a roughness pattern and the roughness pattern may be a pattern in which protrusions each have a predetermined shape and are regularly arranged.
(16) As in
(17) A cross section of the protrusion 12 cut in a direction perpendicular to a surface of the outer drum may be a polygonal shape such as a triangular shape and a quadrangle shape or a curved shape such as a hemispherical shape, an oval shape, and a circular shape.
(18) The protrusion 12 may be formed by various methods. According to a desired shape of the protrusion 12, the protrusion may be formed by selectively using methods, for example, a mechanical polishing method, a buffing method, or the like is used as a method of etching a metal, a deposition method in which non-conductive materials are disposed at a position opposite to a desired pattern on a conductive material, and a partial deposition is performed, a patterning method in which a polymer frame is filled with a metal and the polymer is burned at a high temperature to leave the metal only, and a photolithography method in which a metal thin film is applied on a precision polymer pattern and the polymer is removed to form a metal thin film pattern.
(19) Referring to
(20) The electrolytic bath 20 receives the electrolyte 22 to form a copper foil and a counter electrode 24 may be installed in the electrolytic bath 20. The counter electrode 24 is installed to face an anode electrode and may be a cathode electrode which is a polarity opposite to the anode electrode.
(21) The electrolyte 22 may be filled to be in contact with a lower surface of the first rotating drum 10 and it is preferable that the electrolyte completely fills the cavity, taking into account the space in the cavity already occupied by the first rotating drum 10, so that the electrolyte is filled to a height at which a contact area with the lower surface of the first rotating drum is the maximum.
(22) The counter electrode 24 may be formed along an outer circumferential surface of the first rotating drum 10 having a circular transversal cross section and may have a hemispherical transversal cross section in a form surrounding a lower portion of the first rotating drum 10. The counter electrode 24 is positioned to be spaced apart from the first rotating drum 10 by a predetermined distance and the electrolyte 22 may flow therebetween. The electrolyte 22 may be supplied through a pump 40 installed outside and may be circulated.
(23) The electrolyte 22 may be an electrolyte containing copper sulfate as a main component and the copper foil may be precipitated by a reaction represented by Reaction Formulas (i), (ii), and (iii).
CuSO.sub.4+2e.sup.−+2H.sup.+.fwdarw.Cu+H.sub.2SO.sub.4 (Reaction in rotating drum) (i)
H.sub.2O.fwdarw.2H.sup.++½O.sub.2+2e (Reaction in counter electrode) (ii)
CuSO.sub.4+H.sub.2O.fwdarw.Cu+H.sub.2SO.sub.4+½O.sub.2 (Entire reaction) (iii)
(24) A thickness of the copper foil may be changed depending on a concentration a current density, and the like of the electrolyte 22, for example, the thickness of the copper foil may be 5 μm to 100 μm.
(25) A copper foil continuously discharged from the first rotating drum 10 is wound around the second rotating drum 30. A plurality of rolls (not illustrated) may be disposed between the first rotating drum 10 and the second rotating drum 30 so as to control a tension of the copper foil wound around the second rotating drum 30.
(26) When the apparatus for manufacturing an electrolytic copper foil described above is used, it is possible to manufacture a copper foil 50 having a surface with a roughness.
(27)
(28) Referring to
(29) In addition, when the first rotating drum 10 and the counter electrode 24 are electrically connected to each other and a current is allowed to flow therebetween through a power supply unit 1000, copper is precipitated on the surface of the first rotating drum 10 by the reaction represented by Reaction Formulas described above.
(30) The copper is continuously precipitated during rotation of the first rotating drum 10, is formed on the surface of the first rotating drum 10 in a thin film form, and is wound around the second rotating drum 30, thereby manufacturing a copper foil roll.
(31) As in the above-described exemplary embodiment, a specific pattern formed on the surface of the outer drum may be transferred to a surface of the copper foil by using the first rotating drum 10 including the outer drum with the specific pattern.
(32) Since such a roughness is uniformly formed on the surface of the copper foil, it is possible to prevent a surface of a conventional drum from being non-uniform due to transfer of a polishing mark. Accordingly, there are no additional processes for treating a surface of the copper foil.
(33) Further, the uniform roughness formed on the surface of the copper foil may prevent an adhesive force of the copper foil from being lowered due to the non-uniform surface of the copper foil.
(34) Therefore, it is possible to easily manufacture a copper foil in view of various characteristics using an outer drum having protrusions whose arrangement and shape are deformed depending on the desired adhesiveness and gloss of a copper foil.
DESCRIPTION OF SYMBOLS
(35) 10: first rotating drum 10a: internal drum 10b: outer drum 20: electrolytic bath 30: second rotating drum 40: pump 50: copper foil