SEMICONDUCTOR MODULE
20240347466 ยท 2024-10-17
Inventors
Cpc classification
H01L2224/48141
ELECTRICITY
H01L23/48
ELECTRICITY
H01L23/52
ELECTRICITY
H02M7/003
ELECTRICITY
H01L25/071
ELECTRICITY
H01L23/538
ELECTRICITY
H01L23/4951
ELECTRICITY
H01L23/498
ELECTRICITY
H01L2924/13091
ELECTRICITY
International classification
H01L23/538
ELECTRICITY
H01L25/07
ELECTRICITY
Abstract
In a semiconductor module that includes four semiconductor chips Q1 to Q4, four wiring patterns, first and second power source terminals and first and second intermediate point terminals thus forming a bridge circuit in the semiconductor. The bridge circuit is formed where the chip Q1 and the chip Q3 are disposed on a high side and the chip Q2 and the chip Q4 are disposed on a low side. In a recessed portion that is formed in the wiring pattern, a wiring pattern on which a protruding portion having a first oblique side and a second oblique side is formed is disposed. Oblique sides parallel to the first oblique side and the second oblique side are formed on wiring patterns. The chips Q2, Q4 are obliquely arranged along the respective oblique sides. The wiring pattern functions as a current path from the intermediate point terminals to the power source terminal.
Claims
1. A semiconductor module comprising: first to fourth semiconductor chips; first to fourth wiring patterns; a first power source terminal; a second power source terminal; a first intermediate point terminal; and a second intermediate point terminal thus forming a bridge circuit in the semiconductor module, wherein the bridge circuit is formed where the first semiconductor chip and the third semiconductor chip are chips disposed on a high side, and the second semiconductor chip and the fourth semiconductor chip are chips disposed on a low side, wherein the first power source terminal is connected to the first wiring pattern and the first semiconductor chip and the third semiconductor chip are mounted on the first wiring pattern, the second power source terminal is connected to the second wiring pattern, the first intermediate point terminal is connected to the third wiring pattern and the second semiconductor chip is mounted on the third wiring pattern, and the second intermediate point terminal is connected to the fourth wiring pattern and the fourth semiconductor chip is mounted on the fourth wiring pattern, the first wiring pattern is configured such that, assuming one side out of a plurality of sides of the first wiring pattern as a first side of the first wiring pattern, a recessed portion having a recessed shape as viewed in a plan view is formed in the first wiring pattern within a predetermined range of the first side, and the first semiconductor chip and the third semiconductor chip sandwich the recessed portion, and, are mounted at positions disposed adjacently to the recessed portion, the second wiring pattern is configured such that three sides of the second wiring pattern is surrounded by the recessed portion formed in the first wiring pattern, a portion of the second wiring pattern is disposed so as to protrude outward from an opening of the recessed portion, and a protruding portion having a tapered shape that has a first oblique side and a second oblique side is formed on at least a part of the portion that protrudes from the recessed portion, the third wiring pattern and the fourth wiring pattern are disposed along the first side of the first wiring pattern from one end portion to an other end portion, an oblique side that extends along the first oblique side that the protruding portion having a tapered shape has is formed on the third wiring pattern, and an oblique side that extends along the second oblique side that the protruding portion having a tapered shape has is formed on the fourth wiring pattern, the first to fourth semiconductor chips each have at least a first electrode and a second electrode, the first semiconductor chip is configured such that, assuming one side out of a plurality of sides of the first semiconductor chip as a first side of the first semiconductor chip, the first side of the first semiconductor chip is disposed along the first side of the first wiring pattern, and the first electrode that the first semiconductor chip has is connected to the third wiring pattern via a first connection member, the second semiconductor chip is configured such that, assuming one side out of a plurality of sides of the second semiconductor chip as a first side of the second semiconductor chip, the first side of the second semiconductor chip is disposed along the oblique side formed on the third wiring pattern, and the first electrode that the second semiconductor chip has is connected to the second wiring pattern via a second connection member, the third semiconductor chip is configured such that, assuming one side out of a plurality of sides of the third semiconductor chip as a first side of the third semiconductor chip, the first side of the third semiconductor chip is disposed along the first side of the first wiring pattern, and the first electrode that the third semiconductor chip has is connected to the fourth wiring pattern via a third connection member, and the fourth semiconductor chip is configured such that, assuming one side out of a plurality of sides of the fourth semiconductor chip as a first side of the fourth semiconductor chip, the first side of the fourth semiconductor chip is disposed along the oblique side formed on the fourth wiring pattern, and the first electrode that the fourth semiconductor chip has is connected to the second wiring pattern via a fourth connection member.
2. The semiconductor module according to claim 1 wherein, the first power source terminal and the second power source terminal are disposed adjacently to each other, and the first intermediate point terminal and the second intermediate point terminal are disposed adjacently to each other, and the first power source terminal and the second power source terminal, and the first intermediate point terminal and the second intermediate point terminal are disposed so as to be positioned on opposite sides of the semiconductor module in a state where an outer lead portion of the first power source terminal and an outer lead portion of the second power source terminal, and an outer lead portion of the first intermediate point terminal and the outer lead portion of the second intermediate point terminal sandwich the second wiring pattern therebetween.
3. The semiconductor module according to claim 1, wherein an inner lead portion of at least one terminal of the first power source terminal, the second power source terminal, the first intermediate point terminal and the second intermediate point terminal has a large width compared to inner lead portions of other terminals formed on the semiconductor module.
4. The semiconductor module according to claim 1, wherein the first connection member extends from a side of the first side of the first semiconductor chip orthogonal to the first side of the first semiconductor chip, and is connected to the third wiring pattern, the second connection member extends from a side of the first side of the second semiconductor chip orthogonal to the first side of the second semiconductor chip, and is connected to the second wiring pattern, the third connection member extends from a side of the first side of the third semiconductor chip orthogonal to the first side of the third semiconductor chip, and is connected to the fourth wiring pattern, and the fourth connection member extends from a side of the first side of the fourth semiconductor chip orthogonal to the first side of the fourth semiconductor chip, and is connected to the second wiring pattern.
Description
BRIEF DESCRIPTION OF DRAWINGS
[0020]
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[0022]
[0023]
[0024]
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DESCRIPTION OF EMBODIMENTS
[0030] Hereinafter, an embodiment of the semiconductor module of the present invention is described.
[0031]
[0032]
[0033] To prevent the drawing from becoming cumbersome, in
[0034] The semiconductor module 1 according to the embodiment includes the first to fourth semiconductor chips Q1 to Q4, the first to fourth wiring patterns 10 to 40, the first power source terminal 51, the second power source terminal 52, the first intermediate point terminal 61 and the second intermediate point terminal 62 thus forming a bridge circuit in the semiconductor module 1. The bridge circuit is formed in a state where the first semiconductor chip Q1 and the third semiconductor chip Q3 are chips disposed on a high side, and the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are chips disposed on a low side. In such a bridge circuit, an operation that turns on both the first semiconductor chip Q1 and the fourth semiconductor chip Q4, and an operation that turns on both the third semiconductor chip Q3 and the second semiconductor chip Q2 are alternately repeated.
[0035] The first to fourth wiring patterns 10 to 40 are formed of the first wiring pattern 10, the second wiring pattern 20, the third wiring pattern 30 and the fourth wiring pattern 40. In the description made hereinafter, in a case where the first to fourth semiconductor chips Q1 to 04 are collectively described, first, second, and the like may be omitted and the expression semiconductor chips Q1 to Q4 may be adopted. Further, the first to fourth wiring patterns 10 to 40 may be also expressed as wiring patterns 10 to 40 by omitting first, second, and the like in a case where the first to fourth wiring patterns 10 to 40 are collectively described.
[0036] In the semiconductor module 1 according to the embodiment, the description is made by assuming the semiconductor chips Q1 to Q4 are each formed of a metal oxide semiconductor field effect transistor (MOSFET), and have a rectangular shape in a plan view. Further, in the semiconductor module 1 according to the embodiment, assume that on a direct copper bonding (DCB) substrate 70 that is formed by directly bonding metal (copper) to a base made of ceramic (alumina, aluminum nitride, silicon nitride or the like), the wiring patterns 10 to 40 are formed. The substrate used in the semiconductor module of the present invention is not limited to the DCB substrate, and other ceramic substrates such as an active metal brazing (AMB) substrate, a metal base substrate such as a copper base or an aluminum base and the like can be also used. As metal bonded to the ceramic substrate, metal other than copper (for example, aluminum) can be also used.
[0037] The semiconductor chips Q1 to Q4 each include a source electrode (a first electrode) S, a drain electrode (a second electrode) D, and a gate electrode (a control electrode) G. The drain electrode D in a case where a vertical transistor chip (a vertical transistor chip such as a MOSFET or the like formed using Si or SiC material) is used as the semiconductor chips Q1 to Q4, is formed on a surface of the semiconductor chips Q1 to Q4 on surfaces of wiring patterns 10 to 40 side (a back surfaces of semiconductor chips Q1 to Q4). In the semiconductor module 1 according to the embodiment, the case is exemplified where the vertical transistor chip is used as the semiconductor chips Q1 to Q4. Accordingly, the drain electrode D is disposed on the wiring patterns 10 to 40 side and hence, the drain electrode D cannot be visually recognized thereby a symbol D that indicates the drain electrode is not illustrated. Further, the gate electrode G is disposed on surfaces of the semiconductor chips Q1 to Q4 on a source electrode S side.
[0038] Further, the semiconductor chips Q1 to Q4 are suitably changeable within a range that the gist of the present invention is not changed. For example, as the semiconductor chips Q1 to Q4, for example, a lateral-type transistor chip (for example, a GaN-HEMT made of a GaN on Si material, or a compound semiconductor transistor made of a Ga.sub.2O.sub.3 on Si material or the like) may be also used. In the case of the lateral-type transistor chip, it is preferable that gate electrodes G and source electrodes S may preferably be formed in plurals on a surface of the semiconductor chip including the drain electrode D. Further, semiconductor chips Q1 to Q4 are not limited to a transistor chip, may have a modified configuration where a transistor chip is replaced with a diode chip corresponding to a circuit application. By adopting such a modified configuration, the present invention is also applicable to a suitable totem pole type bridgeless PFC circuit and the like.
[0039] Assuming one side 11 out of a plurality of sides of the first wiring pattern 10 as a first side 11 of the first wiring pattern 10, a recessed portion 12 that is formed in a recessed shape when the first wiring pattern 10 is viewed in a plan view is formed predetermined range of the first side 11. In this embodiment, in the first wiring pattern 10, as illustrated in
[0040] The recessed portion 12 is not a recessed portion that is recessed in a thickness direction of the substrate 70. That is, recessed portion 12 is a recessed portion that is disposed in a region surrounded by a broken line frame Z in
[0041] Further, the first power source terminal 51 is connected to the first wiring pattern 10, and on the first wiring pattern 10, the first semiconductor chip Q1 and the third semiconductor chip Q3 are mounted. In this embodiment, the first semiconductor chip Q1 and the third semiconductor chip Q3 sandwich the recessed portion 12, and are disposed at positions adjacently to the recessed portion 12. Assume that the position at which the recessed portion 12 is formed is substantially in the vicinity of the approximately center of the first wiring pattern 10 in the lateral direction on the paper surface along the x axis illustrated in the drawing.
[0042] Subsequently, the second wiring pattern 20 is described. The second wiring pattern 20 is disposed such that the second wiring pattern 20 is surrounded by the recessed portion 12 of the first wiring pattern 10 from three sides, and a portion of the second wiring pattern 20 protrudes outward (in an upward direction on the paper surface along the y axis illustrated in the drawing) from an opening of the recessed portion 12. Further, on at least a portion of the second wiring pattern 20 that protrudes from the recessed portion 12, a protruding portion 23 having a tapered shape that includes a first oblique side 21 and a second oblique side 22 is formed. Hereinafter, the protruding portion 23 having a tapered shape may be also expressed as protruding portion 23 by omitting having a tapered shape.
[0043] A lower side 24 of the second wiring pattern 20 (a side of the second wiring pattern 20 that faces a bottom side 12a of the recessed portion 12 of the first wiring pattern 10) is disposed parallel to the bottom surface 12a of the recessed portion 12 of the first wiring pattern 10. The second power source terminal 52 is connected to the second wiring pattern 20 (see
[0044] Also assume that the second wiring pattern 20 has a line symmetry shape using a center line C of the second wiring pattern 20 that is orthogonal to a lower side as an axis of symmetry. However, in this embodiment, line symmetry shape does not a line symmetry shape in the strict meaning of the term, and includes a line symmetry shape where one side and the other side with respect to the axis of symmetry slightly differ from each other. Further, in the semiconductor module 1 according to the embodiment 1, assume that, in the protruding portion 23, an angle made by the first oblique side 21 and the second oblique side 22 is an acute angle, and the protruding portion 23 has an apex P at a distal end portion of the protruding portion 23. Assume that the center line C is a line that flows through the apex P of the protruding portion 23 and is orthogonal to the lower side 24.
[0045] An angle (see
[0046] Next, the third wiring pattern 30 and the fourth wiring pattern 40 are described. The third wiring pattern 30 and the fourth wiring pattern 40 are disposed along from one end portion (left end portion) 11a of the first side 11 of the first wiring pattern 10 to the other end portion (right end portion) 11b of the first wiring pattern 10. More specifically, as illustrated in
[0047] The first intermediate point terminal 61 is connected to the third wiring pattern 30, and the second semiconductor chip Q2 is mounted on the third wiring pattern 30. The third wiring pattern 30 includes: a horizontal portion 30a (see
[0048] An oblique side 31 (see
[0049] The third wiring pattern 30 having such a configuration is arranged such that a side (assuming a lower side 32) of the horizontal portion 30a of the third wiring pattern 30 on a first wiring pattern 10 side extends along the first side 11 of the first wiring pattern 10.
[0050] On the other hand, the second intermediate point terminal 62 is connected to the fourth wiring pattern 40, and the fourth semiconductor chip Q4 is mounted on the fourth wiring pattern 40. The fourth wiring pattern 40 includes: a horizontal portion 40a (see
[0051] An oblique side 41 (see
[0052] The fourth wiring pattern 40 having such a configuration is arranged such that a side (assuming a lower side 42) of the horizontal portion 40a of the fourth wiring pattern 40 on a first wiring pattern 10 side is disposed along the first side 11 of the first wiring pattern 10, and a vertical portion 40b of the fourth wiring pattern 40 is disposed adjacently to the vertical portion 30a of the third wiring pattern 30. More specifically, a right side 33 (see
[0053] In the semiconductor module 1 according to the embodiment, assume that the first wiring pattern 10 has a line symmetry shape using the center line C of the second wiring pattern 20 as an axis of symmetry. Further, the third wiring pattern 30 and the fourth wiring pattern 40 have the same shape, and are arranged such that the third wiring pattern 30 and the fourth wiring pattern 40 have a line symmetry shape using the center line C of the second wiring pattern 20 as an axis of symmetry. However, also in this case, line symmetry shape does not a line symmetry shape in the strict meaning of the term, and includes where one side and the other side with respect to the axis of symmetry slightly differ from each other.
[0054] By arranging the wiring patterns 10 to 40 in this manner, the second wiring pattern 20 is surrounded by the first wiring pattern 10, the third wiring pattern 30 and the fourth wiring pattern 40 and hence, the second wiring pattern 20 is positioned in the vicinity of the center portion of the substrate 70.
[0055] In the semiconductor module 1 according to the embodiment, the semiconductor chips Q1 to Q4 have a quadrangular shape as viewed in a plan view. That is, the semiconductor chips Q1 to Q4 may have a square shape or a rectangular shape. However, in this embodiment, the description is made by assuming that the semiconductor chips Q1 to Q4 have a rectangular shape. With respect to a plurality of sides, that is, the first side to the fourth side of the semiconductor chips Q1 to Q4, the first side and the second side on a side opposite to the first side are formed of a short side respectively, and the third side and the fourth side on a side opposite to the third side are formed of a long side respectively. However, assume that the semiconductor chips Q1 to Q4 have a rectangular shape where the long side is slightly longer than the short side.
[0056] As illustrated in
[0057] As illustrated in
[0058] As illustrated in
[0059] As illustrated in
[0060] As illustrated in
[0061] In this manner, the second semiconductor chip Q2 mounted on the third wiring pattern 30 is configured such that the first short side a1 (See
[0062] In this embodiment, an angle made by the first oblique side 21 and the second oblique side 22 that the protruding portion 23 of the second wiring pattern 20 has (an internal angle at the apex point P) is set to 90 degrees. Accordingly, the second semiconductor chip Q2 is inclined by 45 degrees in a counterclockwise direction with respect to the center line C, and the fourth semiconductor chip Q4 is inclined by 45 degrees in a clockwise direction with respect to the center line C. In this manner, the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are arranged such that these semiconductor chips Q2 and Q4 are not parallel to each other and a predetermined angle (45 degrees in this case) is made between the second semiconductor chip Q2 and the fourth semiconductor chip Q4. Hereinafter, there may be also a case where such arrangement is expressed in a simplified manner such as the second semiconductor chip Q2 and the fourth semiconductor chip Q4 adopt the oblique arrangement.
[0063] On the other hand, the first semiconductor chip Q1 and the third semiconductor chip Q3 mounted on the first wiring pattern 10 are arranged parallel to each other with the recessed portion 12 sandwiched between the first semiconductor chip Q1 and the third semiconductor chip Q3. Accordingly, the first semiconductor chip Q1 and the third semiconductor chip Q3 adopt the parallel arrangement. The first semiconductor chip Q1 and the third semiconductor chip Q3 are arranged in a spaced apart manner such that the distance between the first semiconductor chip Q1 and the third semiconductor chip Q3 is a distance that is equal to or larger than at least an opening width of the recessed portion 12.
[0064] Further, as wiring patterns formed on the substrate 70, besides the wiring patterns 10 to 40 described above, first to fourth control wiring patterns 111 to 114 and first to fourth detection wiring patterns 121 to 124 exist.
[0065] The first to fourth control wiring patterns 111 to 114 are connected to the respective gate electrodes G of the semiconductor chips Q1 to 04 by way of connection members such as aluminum wires or the like respectively. These connection members are referred to as first to fourth control-use connection members 131 to 134. First to fourth control terminals T11 to T14 are connected to the first to fourth control wiring patterns 111 to 114. On the other hand, the first to fourth detection wiring patterns 121 to 124 are connected to the respective source electrodes S of the semiconductor chips Q1 to Q4 via connection members such as aluminum wires respectively. These connection members are referred to as first to fourth detection-use connection members 141 to 144. First to fourth detection terminals T21 to T24 are connected to the first to fourth detection wiring patterns 121 to 124.
[0066] Hereinafter, the description is made by taking the first semiconductor chip Q1 as an example. The first control wiring pattern 111 and the first detection 121 wiring pattern are formed corresponding to the gate electrodes G of the first semiconductor chip Q1. The first control-use connection member 131 is connected between the gate electrodes G of the first semiconductor chip Q1 and the first control wiring pattern 111. A first detection-use connection member 141 is connected between the source electrodes S of the first semiconductor chip Q1 and the first detection wiring pattern 121. The first control-use connection member 131 and the first detection-use connection member 141 are connected to the gate electrodes G and the source electrodes S of the semiconductor chip Q1 from the second short side a2 (see
[0067] The same goes for other semiconductor chips (second to fourth semiconductor chips Q2 to Q4). Corresponding to the second to fourth semiconductor chips Q2 to 04, the second to fourth control wiring patterns 112 to 114 and the second to fourth detection wiring patterns 122 to 124 are respectively formed. The second to fourth control-use connection members 132 to 134 are connected between the respective gate electrodes G of the second to fourth semiconductor chips Q2 to Q4 and the second to fourth control wiring patterns 112 to 114. The second to fourth detection-use connection members 142 to 144 are connected between the respective source electrodes S of the second to fourth semiconductor chips Q2 to Q4 and the second to fourth detection wiring patterns 122 to 124.
[0068] Also in the second to fourth semiconductor chips Q2 to Q4, the second to fourth control-use connection members 132 to 134 and the second to fourth control-use connection members 142 to 144 are connected to the respective gate electrodes G and the respective source electrodes S from sides of the respective second short sides a2 (see
[0069] In this manner, as illustrated in
[0070] With the provision of such a structure, it is easy for the semiconductor chips Q1 to Q4 to ensure spaces for connecting the semiconductor chips Q1 to Q4 with the first to fourth connection members 81 to 84, the first to fourth control-use connection members 131 to 134 and the first to fourth detection-use connection members 141 to 144.
[0071] Accordingly, even in a case where a plurality of wires (such as aluminum wires) are used as the first to fourth connection members 81 to 84 for connecting the respective source electrodes S of the semiconductor chips Q1 to Q4 and the wiring patterns 10 to 40, the wires having the same length respectively can be arranged in parallel in plane. In the semiconductor module 1 according to the embodiment 1, as illustrated in
[0072] That is, the first connection member 81 extends from the side of the first short side a1 that is the first side of the first semiconductor chip Q1 orthogonal to the first side a1 of the first semiconductor chip Q1 and is connected to the third wiring pattern 30, and the second connection member 82 extends from the side of the first short side a1 that is the first side of the second semiconductor chip Q2 orthogonal to the first side a1 of the second semiconductor chip Q2 and is connected to the second wiring pattern 20. Further, the third connection member 83 extends from the side of the first short side a1 that is the first side of the third semiconductor chip Q3 orthogonal to the first side a1 of the third semiconductor chip Q3 and is connected to the fourth wiring pattern 40, and the fourth connection member 84 extends from the side of the first short side a1 that is the first side of the fourth semiconductor chip Q4 orthogonal to the first side a1 of the fourth semiconductor chip Q4 and is connected to the second wiring pattern 20.
[0073] The first to fourth connection members 81 to 84 are connected to the semiconductor chips Q1 to Q4 as described above. Accordingly, for example, in a case of connecting the first to fourth control-use connection members 131 to 134, the first to fourth detection-use connection members 141 to 144 and the like to the respective semiconductor chips Q1 to Q4, by extending these first to fourth control-use connection members 131 to 134, the first to fourth detection-use connection members 141 to 144 and the like from the sides (the second short sides a2) of the semiconductor chips Q1 to Q4 opposite to the first sides a1 of the semiconductor chips Q1 to Q4 toward the outside of the semiconductor chips Q1 to Q4, it becomes easy to ensure a space for connecting the first to fourth connection members 81 to 84, the first to fourth control-use connection members 131 to 134 and the first to fourth detection-use connection members 141 to 144. With such a configuration, in the case where the first to fourth connection members 81 to 84 are used in plurals as described above, the plurality of connection members can be arranged in parallel in plane and hence, wiring of the connection members can be made simple whereby it is possible to acquire an advantageous effect that the wiring step can be simplified.
[0074] Subsequently, the first and second power source terminals 51, 52 and the first and second intermediate point terminals 61, 62 are described. The first power source terminal 51 and the second power source terminal 52 are terminals for supplying electricity to the bridge circuit. In a case where the supply of electricity is considered as the flow of a current, the first power source terminal 51 functions as an input side of the current and the second power source terminal 52 functions as an output side of the current.
[0075] The first power source terminal 51 is connected to the first wiring pattern 10. The second power source terminal 52 is connected to the second wiring pattern 20 while straddling over the first wiring pattern 10 in a non-contact manner. These first power source terminal 51 and the second power source terminal 52 are disposed adjacently to each other. A decoupling capacitor 90 is disposed on an extension of the first power source terminal 51 along the y axis, and one end of the decoupling capacitor 90 is connected to the first wiring pattern 10, and the other end of the decoupling capacitor 90 is connected to the second wiring pattern 20. The decoupling capacitor 90 has a function of avoiding the fluctuation of a power source voltage and of removing various noises.
[0076] On the other hand, the first intermediate point terminal 61 and the second intermediate point terminal 62 are terminals to which a load not illustrated in the drawing is connected. The first intermediate point terminal 61 is connected to the third wiring pattern 30, and the second intermediate point terminal 62 is connected to the fourth wiring pattern 40. These first intermediate point terminal 61 and second intermediate point terminal 62 are disposed adjacently to each other. In such a configuration, the directions of currents that flow with respect to the first intermediate point terminal 61 and the second intermediate point terminal 62 become opposite (are inverted) between when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on and when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on.
[0077] In the semiconductor module 1 according to the embodiment, when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on, a current flows from the first intermediate point terminal 61 to the second intermediate point terminal 62. On the other hand, when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on, a current flows from the second intermediate point terminal 62 to the first intermediate point terminal 61. The overall current path in the semiconductor module 1 according to the embodiment is described later.
[0078] Further, the first and second power source terminals 51, 52 and the first and second intermediate point terminals 61, 62 are arranged on opposite sides of the semiconductor module 1 in a state where the second wiring pattern 20 is sandwiched between the first and the second power source terminals 51, 52 and the first and second intermediate point terminals 61, 62. That is, as illustrated in
[0079] In the above-mentioned configuration, opposite sides of the semiconductor module 1 means, to take the case illustrated in
[0080] An inner lead portion of at least one terminal of the first power source terminal 51, the second power source terminal 52, the first intermediate point terminal 61 and the second intermediate point terminal 62 has a large width compared to the inner lead portions of other terminals (for example, the first to fourth control terminal T11 to T14, the first to fourth detection terminals T21 to T24 and the like) that are formed on the semiconductor module 1 according to the embodiment.
[0081] In the semiconductor module 1 according to the embodiment, an inner lead portion 52a of the second power source terminal 52 and the inner lead portions 61a, 62a of the first and second intermediate portion terminals 61, 62 have a large width. In such a configuration, width means a length of each terminal in a direction orthogonal to an extending direction of the terminal. For example, to take the second power source terminal 52 as an example, the extending direction of the second power source terminal 52 is the direction along the y axis illustrated in the drawing and hence, a length in the direction along the x axis orthogonal to the extending direction (the direction along the y axis) is set as width.
[0082] A width (referred to as the width W1 hereinafter) of the inner lead portion 52a of the second power source terminal 52 is substantially two times to four times as large as a width of the first power source terminal 51, and widths of the first to fourth control terminals T11 to T14 and the first to fourth detection terminals T21 to T24. The second power source terminal 52 is connected to a portion of the second wiring pattern 20 close to a lower side 24 of the second wiring pattern 20, and the width W1 of the inner lead portion 52a of the second power source terminal 52 occupies a range where the width W1 is or slightly larger than of a length of the second wiring pattern 20 in a direction along the lower side 24 of the second wiring pattern 20 (direction along the x axis). The width W1 of the inner lead portion 52a of the second power source terminal is set such that it is possible to ensure an arrangement space of the decoupling capacitor 90 that is connected between the first wiring pattern 10 and the second wiring pattern 20. In this embodiment, the width W1 of the inner lead portion 52a of the second power source terminal 52 is set large compare to the widths of other terminals. However, when the space has still a margin, the width of the first power source terminal 51 can be also made large.
[0083] Further, the respective inner lead portions 61a, 62a of the first intermediate point terminal 61 and the second intermediate point terminal 62 also have a large width compare to other terminals (for example, the first to fourth control terminals T11 to T14, the first to fourth detection terminals T21 to T24 and the like). In the semiconductor module 1 according to the embodiment, a width W2 (see
[0084]
[0085] In such a bridge circuit 100, by applying a predetermined voltage to the respective gate electrodes G of the first semiconductor chip Q1 and the fourth semiconductor chip Q4, both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on. Further, by applying a predetermined voltage to the respective gate electrodes G of the third semiconductor chip Q3 and the second semiconductor chip Q2, both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on.
[0086] In such a bridge circuit 100, a current path when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on is, as indicated by a solid line A in
[0087] On the other hand, a current path when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on is, as indicated by a broken line B in
[0088] Such current paths are described specifically with reference to
[0089] The current path when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on forms a path indicated by a solid line A in
[0090] On the other hand, the current path when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on forms a path indicated by a broken line B in
[0091] In this manner, the current path when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on and the current path when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on can be shortened as indicated by the solid line A and the broken line B in
[0092] That is, in the recessed portion 12 formed in the first wiring pattern 10, the second wiring pattern 20 that includes the protruding portion 23 having a tapered shape is disposed, and the second wiring pattern 20 functions as a current path from the first intermediate point terminal 61 or the second intermediate point terminal 62 to the second power source terminal 52. Further, as described previously, the first semiconductor chip Q1 and the third semiconductor chip Q3 sandwich the recessed portion 12 formed in the first wiring pattern 10, and are disposed adjacently to the recessed portion 12. Further, the second semiconductor chip Q2 is obliquely arranged so as to follow the oblique side 31 of the third wiring pattern 30, and the fourth semiconductor chip Q4 is obliquely arranged so as to follow the oblique side 41 of the fourth wiring pattern 40.
[0093] With such a configuration, a current path is formed where a current flows from the second intermediate point terminal 62 and reaches the second power source terminal 52 when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on, and a current path is formed where a current flows from the first intermediate point terminal 61 and reaches the second power source terminal 52 when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on. As illustrated by a solid line A and a broken line B in
[0094] Accordingly, in both the current path that reaches the second power source terminal 52 from the first intermediate point terminal 61 and the current path that reaches the second power source terminal 52 from the second intermediate point terminal 62, currents flow more straightly without being bent largely and hence, the current paths can be shortened whereby a parasitic inductance can be reduced.
[0095] The first and second power source terminals 51, 52 are disposed adjacently to each other, and the first and second intermediate point terminals 61, 62 are also disposed adjacently to each other. Further, the first and second power source terminals 51, 52 and the first and second intermediate point terminals 61, 62 are disposed on opposite sides of the semiconductor module 1 with the second wiring pattern 20 sandwiched therebetween, that is, are disposed on an upper side and a lower side of the semiconductor module 1 along the y axis in
[0096] By arranging the first and second power source terminals 51, 52 and the first and second intermediate point terminals 61, 62 in this manner, in the semiconductor module 1 according to the embodiment, the current paths of the entire bridge circuit where a current flows from the first power source terminal 51 and reaches the second power source terminal 52 when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on, and the current paths of the entire bridge circuit where a current flows from the first power source terminal 51 and reaches the second power source terminal 52 when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on are, as indicated by the solid line A and the broken line B in
[0097] The first and second power source terminals 51, 52 are disposed adjacently to each other, and the first and second intermediate point terminals 61, 62 are also disposed adjacently to each other. Accordingly, in both the case where an operation of turning on both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 is performed and the case where an operation of turning on both the third semiconductor Q3 chip and the second semiconductor chip Q2 is performed, the directions of the currents that flow in the first intermediate point terminal 61 and the second intermediate point terminal 62 that are disposed adjacently to each other respectively become the directions opposite to each other. Accordingly, it is possible to make a magnetic field generated in the first intermediate point terminal 61 and a magnetic field generated in the second intermediate point terminal 62 cancel each other. Accordingly, it is possible to reduce the parasitic inductance also from this aspect.
[0098] For example, with respect to the current paths (solid lines A) at the first intermediate point terminal 61 and at the second intermediate point terminal 62 when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on, as illustrated in
[0099] On the other hand, with respect to the current paths (broken lines B) at the first intermediate point terminal 61 and at the second intermediate point terminal 62 when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on, as illustrated in
[0100] An advantageous effect that the magnetic fields are cancelled with each other by making the directions of the flowing currents become opposite directions so that a parasitic inductance reducing effect can be expected exists also between the first power source terminal 51 and the second power source terminal 52 that are disposed adjacently to each other.
[0101] In this manner, in the semiconductor module 1 according to the embodiment, it is possible to acquire an advantageous effect that a parasitic inductance can be reduced. Further, it is possible to suppress the thermal interference between the semiconductor chips in addition to the advantageous effect of reducing a parasitic inductance.
[0102] That is, in the semiconductor module 1 according to the embodiment, the first semiconductor chip Q1 and the third semiconductor chip Q3 are mounted on the first wiring pattern 10 in a state where the first semiconductor chip Q1 and the third semiconductor chip Q3 sandwich the recessed portion 12 formed in the first wiring pattern 10 (see
[0103] With such a configuration, the semiconductor chips Q1 to Q4 are disposed while keeping predetermined distances therebetween respectively and hence, it is possible to suppress the thermal interference between the semiconductor chips.
[0104] Particularly, with respect to the second semiconductor chip Q2 and the fourth semiconductor chip Q4, the semiconductor chip Q2 and the fourth semiconductor chip Q4 are obliquely disposed. Accordingly, it is possible to easily dissipate heat that the second and fourth semiconductor chips Q2, Q4 generate and hence, it is possible to suppress the thermal interference between the second and fourth semiconductor chips Q2, Q4.
[0105] On the other hand, for example, when the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are disposed adjacently to each other and are arranged parallel to each other as in the case of the semiconductor device 900 (see
[0106] As has been described heretofore, according to the semiconductor module 1 of the embodiment, it is possible to acquire an advantageous effect that a parasitic inductance can be reduced, and an advantageous effect that the interference of heats between the semiconductor elements can be reduced. To verify these advantageous effects, the inventors carried out a simulation. Hereinafter, a result of the simulation that the inventors carried out is described.
[0107]
[0108] The semiconductor module 1A basically has substantially the same constitutional elements as the semiconductor module 1 according to the embodiment. In
[0109] In the semiconductor module 1 according to the embodiment, the first to fourth semiconductor chips Q1 to Q4 are used as the first to fourth semiconductor chips Q1 to Q4 also in the semiconductor module 1A, and the substrate 70 in the semiconductor module 1 according to the embodiment is also used as the substrate 70 in the semiconductor module 1A. Further, also in such a configuration, in a case where the first to fourth semiconductor chips Q1 to Q4 are collectively described, these semiconductor chips Q1 to Q4 may be expressed as the semiconductor chips Q1 to Q4, and in a case where the first to fourth wiring patterns 210 to 240 are collectively described, these wiring patterns 210 to 240 may be also expressed as the wiring patterns 210 to 240.
[0110] The bridge circuit of the semiconductor module 1A has substantially the same configuration as the semiconductor module 1 according to the embodiment. That is, the bridge circuit of the semiconductor module 1A is a bridge circuit where the first semiconductor chip Q1 and the third semiconductor chip Q3 are disposed on a high side and the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are disposed on a low side, wherein both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on, and both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on.
[0111] In the semiconductor module 1A, in the same manner as the semiconductor module 1 according to the embodiment, the recessed portion (a recessed portion 212) is formed in the first wiring pattern 210, and the second wiring pattern 220 is disposed so as to be surrounded by the recessed portion 212 from three directions. In the semiconductor module 1A, the second wiring pattern 220 does not have the protruding portion 23 having a tapered shape illustrated in
[0112] Further, in the semiconductor module 1A, in the same manner as the semiconductor module 1 according to the embodiment, the first power source terminal 251 is connected to the first wiring pattern 210, the second power source terminal 252 is connected to the second wiring pattern 220 while straddling over the first wiring pattern 210 in a non-contact manner. Further, the first intermediate point terminal 261 is connected to the third wiring pattern 230, and the second intermediate point terminal 262 is connected to the fourth wring pattern 240.
[0113] However, in the semiconductor module 1A, the first intermediate point terminal 261 and the second intermediate point terminal 262 are not disposed adjacently to each other, are disposed at the both end portions (a left end portion and a right end portion) of the substrate 70 in a spaced-apart manner, the first power source terminal 251 and the second power source terminal 252 are disposed on the substrate 70 at the same side. Further, widths of the first and second power source terminals 251, 252 and widths of the first and second intermediate point terminals 261, 262 are not particularly set wide compared to other terminals. The semiconductor module 1A also differs from the semiconductor module 1 according to the embodiment in view of these points.
[0114] Further, in the semiconductor module 1A, the first semiconductor chip Q1 is connected to the third wiring pattern 230 via the first connection member 281, the second semiconductor chip Q2 is connected to the second wiring pattern 220 via the second connection member 282, the third semiconductor chip Q3 is connected to the fourth wiring pattern 240 via the third connection member 283, the fourth semiconductor chip Q4 is connected to the second wiring pattern 220 via the fourth connection member 284.
[0115]
[0116] As illustrated in
[0117] Hereinafter, the description is made with respect to a result obtained by comparing, by simulation, a parasitic inductance generated in the semiconductor module 1 according to the embodiment and a parasitic inductance generated in the semiconductor module 1A. Here, assuming frequency of a turn on/off operation of the bridge circuit as 100 kHz, a parasitic inductance that was generated in the current paths when the first semiconductor chip Q1 and the fourth semiconductor chip Q4 were turned on, and a parasitic inductance that was generated in the current paths when the third semiconductor chip Q3 and the second semiconductor chip Q2 were turned on are measured.
[0118]
[0119] As illustrated in
[0120] On the other hand, in the semiconductor module 1 according to the embodiment, a parasitic inductance that was generated in the current path A when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 were turned on (see
[0121] It was confirmed from this result that the semiconductor module 1 according to the embodiment can largely reduce a parasitic inductance compared to the semiconductor module 1A in both the case where the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on and the case where both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on.
[0122] Further, in the semiconductor module 1A, in addition to the problem relating to a parasitic inductance, the interference of heats of the semiconductor chips also gives rise to a problem. Particularly, in the semiconductor module 1A, the interference of heats of the second and fourth semiconductor chips Q2, Q4 gives rise to a drawback. This is because that, in the semiconductor module 1A, the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are disposed parallel to each other and are disposed adjacently to each other and hence, it is difficult for the second semiconductor chip Q2 and the fourth semiconductor chip Q4 to dissipate the heats that these semiconductor chips generate and hence, the interference of heats is liable to be easily generated between the second semiconductor chip Q2 and fourth semiconductor chips Q4.
[0123]
[0124] In
[0125]
[0126] In
[0127] That is, out of the neighboring sides where the third wiring pattern 30 and the fourth wiring pattern 40 are disposed adjacently to each other, a distance between the right side 33 (see
[0128] Specifically, the right side 33 (see
[0129] Further, the left side 43 (see
[0130] In this manner, the second semiconductor chip Q2 has the wide distance with respect to the right side 33 of the third wiring pattern on which the second semiconductor chip Q2 is mounted, and the fourth semiconductor chip Q4 has the wide distance with respect to the left side 43 of the fourth wiring pattern on which the fourth semiconductor chip Q4 is mounted. Accordingly, the distance between the second semiconductor chip Q2 and the fourth semiconductor chip Q4 is, for example, wider than a corresponding width in a case where the second and fourth semiconductor chips Q2, Q4 are disposed parallel to each other as the semiconductor module 1A illustrated in
[0131] Further, a semiconductor chip that is also a heat generating source is not mounted on the second wiring pattern 20. Accordingly, with respect to a temperature of a wiring pattern, the temperature of the second wiring pattern 20 becomes lower than a temperature of the third wiring pattern 30 on which the second semiconductor chip Q2 is mounted and a temperature of the fourth wiring pattern 40 on which the fourth semiconductor chip Q4 is mounted. Heat is transferred from a side having a high temperature to a side having a low temperature. Accordingly, by arranging the second wiring pattern having a low temperature between the second semiconductor chip Q2 that is also a heat generating source and the fourth semiconductor chip Q4 that is also a heat generating source, the interference of heats between the second and fourth semiconductor chips Q2, Q4 can be reduced and hence, the increase of the temperatures of the second and fourth semiconductor chips Q2, Q4 can be suppressed.
[0132] Further, also in surroundings around the semiconductor chips Q1 to Q4 and in a wide range away from the semiconductor chips Q1 to Q4, a slightly darker shaded region expressing a low temperature is slightly large in amount in the semiconductor module 1 according to the embodiment compared to the semiconductor module 1A.
[0133] This is because, in the semiconductor module 1 according to the embodiment, as described previously, the inner lead portion 52a (see
[0134] A measurement result obtained by measuring the temperatures of the semiconductor chips Q1 to Q4 in the semiconductor module according to the embodiment and the semiconductor module 1A is described in Table 9. Temperatures ( C.) indicated in Table 9 are temperatures at the center positions of surfaces (surfaces on a source electrode S side) of the semiconductor chips Q1 to Q4.
[0135] As illustrated in
[0136] Specifically, in the semiconductor module 1A, the temperature of the second semiconductor chip Q2 is 141.55 C. and the temperature of the fourth semiconductor chip Q4 is 141.54 C. On the other hand, in the semiconductor module 1, the temperature of the second semiconductor chip Q2 is 134.56 C. and the temperature of the fourth semiconductor chip Q4 is 134.45 C. In this manner, the temperature of the semiconductor module 1 according to the embodiment is substantially 7 C. low compared to the temperature of the semiconductor module 1A.
[0137] With respect to the first semiconductor chip
[0138] Q1 and the third semiconductor chip Q3, the arrangement of the semiconductor chips Q1, Q3 of the semiconductor module 1 according to the embodiment is substantially equal to the arrangement of the semiconductor chips Q1, Q3 of the semiconductor module 1A. However, as illustrated in
[0139] In this manner, it may be considered the reason that the temperatures of the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are particularly suppressed to low temperatures is that these second semiconductor chip Q2 and the fourth semiconductor chip Q4 are arranged obliquely as illustrated in
[0140] That is, by adopting the configuration where the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are arranged obliquely, a distance between the second semiconductor chip Q2 and the fourth semiconductor chip Q4 is widened and hence, it is possible to easily dissipate heats generated by the second semiconductor chip Q2 and the fourth semiconductor chip Q4 and hence, it is possible to suppress the interference between heats of the semiconductor chips Q2, Q4. Accordingly, it is possible to suppress the temperatures of the second semiconductor chip Q2 and the fourth semiconductor chip Q4 of the semiconductor module 1 to low temperatures compared to the temperatures of the second semiconductor chip Q2 and the fourth semiconductor chip Q4 of the semiconductor module 1A.
[0141] As has been described heretofore, in the semiconductor module 1 according to the embodiment, both the current path (solid line A) when both the first semiconductor chip Q1 and the fourth semiconductor chip Q4 are turned on, and the current path (broken line B) when both the third semiconductor chip Q3 and the second semiconductor chip Q2 are turned on can be shortened respectively. Accordingly, a parasitic inductance at the time of operating the bridge circuit can be reduced.
[0142] Further, according to the semiconductor module 1 of the embodiment, an adverse effect of the heats generated by the semiconductor chips Q1 to Q4 can be suppressed. Particularly, due to the oblique arrangement of the second semiconductor chip Q2 and the fourth semiconductor chip Q4, it is possible to suppress the interference of heats between the second and fourth semiconductor chips Q2, Q4.
[0143] Further, in the semiconductor module 1 according to the embodiment, the second power source terminal 52, and the first and second intermediate point terminals 61, 62 have a large width respectively. Accordingly, an effect of dissipating heat from these terminals is large. Also with such a heat dissipation effect, it is possible to suppress not only temperatures of the semiconductor chips Q1 to Q4 but also temperatures of ranges far away from the semiconductor chips Q1 to Q4 to low temperatures.
[0144] The present invention is not limited to the embodiment described above, and can be carried out in various modifications without departing from the gist of the present invention. For example, the following modifications can be also carried out. [0145] (1) In the embodiment described above, it is not always necessary that the first oblique side 21 and the second oblique side 22 that the protruding portion 23 formed on the second wiring pattern 20 includes are each formed of a straight line, and may be formed of a bent line that is curved gently, or may be formed of a line that has unevenness to some extent. These lines are also included in the first oblique side and the second oblique side described in claims of the present invention. Further, with respect to the protruding portion, in
[0148] For example, in the semiconductor module 1A prepared for comparison with the semiconductor module 1 according to the embodiment, the second wiring pattern 220 is formed into a wiring pattern having a tapered protruding portion 23 in the same manner as the semiconductor module 1 according to the embodiment, and the second semiconductor chip Q2 and the fourth semiconductor chip Q4 are obliquely arranged. With such a configuration, in the same manner as the semiconductor module 1 according to the embodiment, it is possible to suppress the interference of heats of the second and fourth semiconductor chips Q2, Q4.
[0149] Further, also in the semiconductor module 1A, the inner lead of at least one terminal out of the first, second power source terminals 251, 252, and the first and second intermediate point terminals 261, 262 may have a wide width compared to the inner leads of other terminals formed on the semiconductor module 1A. With such a configuration, the temperatures of a wide range away from the semiconductor chips Q1 to 04 can be suppressed to low temperatures. [0150] (4) It is not always necessary that the first wiring pattern 10 and the third and fourth wiring patterns 30, 40 have shapes described in
[0153] The same substantially goes for the semiconductor chip Q4. The semiconductor chip Q4 may be rotated by 90 degrees in a clockwise direction from the position illustrated in
[0154] Further, also with respect to the first semiconductor chip Q1 and the third semiconductor chip Q3, the wiring pattern 10 can be arranged in a state where these semiconductor chips Q1, Q3 are rotated. For example, these semiconductor chips Q1, Q3 may be arranged on the wiring pattern 10 in a state where the semiconductor chips Q1, Q3 are rotated by a predetermined angle in a clockwise direction or in a counterclockwise direction respectively. [0155] (7) The shapes, the numbers, the sizes, the positions and the like of the constitutional elements according to the present invention are not limited to