Method for characterizing carbon nanotubes by using scanning electron microscope
10020191 ยท 2018-07-10
Assignee
Inventors
Cpc classification
Y10S977/742
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G01N23/2251
PHYSICS
Y10S977/852
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/881
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L21/02
ELECTRICITY
G01N23/2251
PHYSICS
Abstract
A method for characterizing carbon nanotubes comprising: providing a conductive substrate and applying an insulating layer on the conductive substrate; forming a carbon nanotube structure on a surface of the insulating layer, the carbon nanotube structure includes at least one carbon nanotube; placing the carbon nanotube structure under a scanning electron microscope, adjusting the scanning electron microscope with an accelerating voltage ranging from 520 KV, a dwelling time ranging 620 microseconds and a magnification ranging from 10000100000 times; taking photos of the carbon nanotube structure with the scanning electron microscope; and, obtaining a photo of the carbon nanotube structure, the photo shows the at least one carbon nanotube and a background.
Claims
1. A method for characterizing carbon nanotubes comprising: providing a conductive substrate and applying an insulating layer on the conductive substrate; forming a carbon nanotube structure on a surface of the insulating layer, the carbon nanotube structure includes at least one carbon nanotube; placing the carbon nanotube structure under a scanning electron microscope, adjusting the scanning electron microscope with an accelerating voltage ranging from 520 KV, a dwelling time ranging from 620 microseconds and a magnification ranging from 1000100000 times; taking photos of the carbon nanotube structure with the scanning electron microscope; and obtaining a photo of the carbon nanotube structure, the photo shows the at least one carbon nanotube and a background.
2. The method of claim 1, wherein a material of the conductive substrate is metal, conductive organic material, or a doped conductive material.
3. The method of claim 1, wherein a material of the conductive substrate is doped silicon, and a material of the insulating layer is silicon oxide.
4. The method of claim 1, wherein a material of the insulating layer is oxide or polymer material.
5. The method of claim 4, wherein a thickness of the insulating layer ranges from 50 nanometers to 300 nanometers.
6. The method of claim 1, wherein the carbon nanotube structure is a single carbon nanotube.
7. The method of claim 1, wherein the carbon nanotube structure comprises a plurality of carbon nanotubes.
8. The method of claim 7, wherein the plurality of carbon nanotubes comprises a plurality of metallic carbon nanotubes and a plurality of semiconducting carbon nanotubes.
9. The method of claim 7, wherein the plurality of carbon nanotubes are parallel with a surface of the insulating layer.
10. The method of claim 1, wherein the accelerating voltage is ranged from 15 KV to 20 kV.
11. The method of claim 1, wherein the dwelling time is in a range from 10 microseconds to 20 microseconds.
12. The method of claim 1, wherein the photo shows a background and an image of the carbon nanotube structure.
13. The method of claim 12, wherein the carbon nanotube structure comprise a plurality of metallic carbon nanotubes with a color lighter than a color of the background and a plurality of semiconducting carbon nanotubes with a color deeper than the color of the background.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Implementations of the present technology will now be described, by way of example only, with reference to the attached figures, wherein:
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DETAILED DESCRIPTION
(7) The disclosure is illustrated by way of example and not by way of limitation in the figures of the accompanying drawings in which like references indicate similar elements. It should be noted that references to another, an, or one embodiment in this disclosure are not necessarily to the same embodiment, and such references mean at least one.
(8) It will be appreciated that for simplicity and clarity of illustration, where appropriate, reference numerals have been repeated among the different figures to indicate corresponding or analogous elements. In addition, numerous specific details are set forth in order to provide a thorough understanding of the embodiments described herein. However, it will be understood by those of ordinary skill in the art that the embodiments described herein can be practiced without these specific details. In other instances, methods, procedures, and components have not been described in detail so as not to obscure the related relevant feature being described. Also, the description is not to be considered as limiting the scope of the embodiments described herein. The drawings are not necessarily to scale, and the proportions of certain parts have been exaggerated to illustrate details and features of the present disclosure better.
(9) Several definitions that apply throughout this disclosure will now be presented.
(10) The term substantially is defined to be essentially conforming to the particular dimension, shape, or other feature which is described, such that the component need not be exactly or strictly conforming to such a feature. The term comprise, when utilized, means include, but not necessarily limited to; it specifically indicates open-ended inclusion or membership in the so-described combination, group, series, and the like.
(11) Referring to
(12) S1: providing a conductive substrate and applying an insulating layer on the conductive substrate;
(13) S2: forming a carbon nanotube structure on a surface of the insulating layer, the carbon nanotube structure includes at least one carbon nanotube;
(14) S3: placing the carbon nanotube structure under a scanning electron microscope, adjusting the scanning electron microscope with an accelerating voltage ranging from 520 KV, a dwelling time ranging 620 microseconds and a magnification ranging from 10000100000 times; and taking photos of the carbon nanotube structure with the scanning electron microscope; and
(15) S4: obtaining a photo of the carbon nanotube structure, the photo shows the at least one carbon nanotube and a background.
(16) In step S1, a material of the conductive substrate is not limited, as long as it is a conductive material. The material of the conductive substrate can be metal, conductive organic material, or a doped conductive material. In the present embodiment, the material of the conductive substrate is doped silicon. A material of the insulating layer can be oxide or polymer material. In the present embodiment, the material of the insulating layer silicon oxide. A thickness of the insulating layer ranges from 50 nanometers to 300 nanometers.
(17) In step S2, the carbon nanotube structure comprises one carbon nanotube or a plurality of carbon nanotubes. If the carbon nanotube structure includes a plurality of carbon nanotubes, the plurality of carbon nanotubes can be parallel to the surface of the insulating layer. If the carbon nanotube structure comprises a plurality of carbon nanotubes, the plurality of carbon nanotubes can include metallic carbon nanotubes and/or semiconducting carbon nanotubes. In the present embodiment, the carbon nanotube structure includes a plurality of metallic carbon nanotubes and a plurality of semiconducting carbon nanotubes.
(18) In step S3, in some embodiments, the accelerating voltage is 1520 kV and the dwelling time is 1020 microseconds. In the present embodiment, the acceleration voltage is 10 kV, the dwelling time is 20 microseconds, and the magnification is 20,000 times.
(19) In step S4, a photo of the carbon nanotube structure is obtained as shown in
(20) Compared
(21) In the carbon nanotube photo obtained by the traditional scanning electron microscope characterization method, the color of all the carbon nanotubes including metallic carbon nanotubes and semiconducting carbon nanotubes, is lighter than the color of the photo background. When the metallic carbon nanotubes and the semiconducting carbon nanotubes are both present in the photo, it is very hard to distinguish the type of carbon nanotubes having middle color, such as gray carbon nanotubes. Therefore, the accuracy of the traditional scanning electron microscopy method for characterizing carbon nanotubes in the identification of carbon nanotubes types is not high enough. However, in carbon nanotube photo obtained by the method for characterizing carbon nanotubes according to present disclosure, the color of metallic carbon nanotubes is lighter than the color of the background, and the color of semiconducting carbon nanotubes is deeper than the color of the background. As such, metallic carbon nanotubes and semiconducting carbon nanotubes can be distinguished quickly and without mistake.
(22) Further, in the carbon nanotube photo obtained by the traditional scanning electron microscope characterization method, the color of both the metallic carbon nanotubes and the semiconducting carbon nanotubes displayed in the photo is lighter than the photo background color, when there is only one type of carbon nanotubes in the photo, it is difficult to judge that the carbon nanotubes in the photo are metallic carbon nanotubes or semiconducting carbon nanotubes. However, in carbon nanotube photo obtained by the method for characterizing carbon nanotubes according to present disclosure, the color of metallic carbon nanotubes is lighter than the color of the background, and the color of semiconducting carbon nanotubes is deeper than the color of the background. As such, even if there is a single type of carbon nanotubes, the type of carbon nanotubes can be distinguish quickly and without mistake.
(23) Further more, compared with
(24) Moreover, compared with
(25) It is to be understood that the above-described embodiments are intended to illustrate rather than limit the present disclosure. Variations may be made to the embodiments without departing from the spirit of the present disclosure as claimed. Elements associated with any of the above embodiments are envisioned to be associated with any other embodiments. The above-described embodiments illustrate the scope of the present disclosure but do not restrict the scope of the present disclosure.
(26) Depending on the embodiment, certain of the steps of a method described may be removed, others may be added, and the sequence of steps may be altered. The description and the claims drawn to a method may include some indication in reference to certain steps. However, the indication used is only to be viewed for identification purposes and not as a suggestion as to an order for the steps.