Method for arranging fine particles on substrate by physical pressure
09994442 ยท 2018-06-12
Assignee
Inventors
Cpc classification
B82Y10/00
PERFORMING OPERATIONS; TRANSPORTING
B82Y30/00
PERFORMING OPERATIONS; TRANSPORTING
Y10T428/24851
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
Y10T428/25
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10T428/24876
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10T428/24893
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G03F7/0002
PHYSICS
B81C1/00373
PERFORMING OPERATIONS; TRANSPORTING
Y10T156/10
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
B32B5/16
PERFORMING OPERATIONS; TRANSPORTING
B05D1/36
PERFORMING OPERATIONS; TRANSPORTING
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
G03F7/00
PHYSICS
B82Y30/00
PERFORMING OPERATIONS; TRANSPORTING
B81C1/00
PERFORMING OPERATIONS; TRANSPORTING
B82Y10/00
PERFORMING OPERATIONS; TRANSPORTING
Abstract
Provided is a method of arranging particles on a substrate, the method including: (a) preparing a substrate, a surface of which has depressions or projections capable of fixing the positions and/or orientations of one or more particles; and (b) placing the particles on the substrate and applying a physical pressure to the particles so that a portion or the whole of each particle is inserted in each of pores defined by the depressions or the projections. Provided is also a method of arranging particles on a substrate, the method including: (a) preparing a substrate, at least a surface portion of which has adhesive property; and (b) placing particles, which do not have flat facets but curved surfaces, on the substrate and applying a physical pressure to the particles so that the particles are immobilized on adhesive surface portions of the substrate.
Claims
1. A method of arranging colloidal particles on a substrate, the method comprising: (a) preparing a substrate, a surface of which has depressions or projections defining pores capable of fixing the positions and/or orientations of one or more colloidal particles; (b) randomly placing on the substrate, a first plurality of dry colloidal particles in the absence of any solvent; and physically pressing the particles to provide immobilized particles and residual particles, wherein a portion or the whole of each of the immobilized particle is inserted in each of the pores, and the residual particles remain not immobilized on the substrate; and (c) removing the residual particles using an adhesive member, wherein the colloidal particles have sizes in a range of 10 nm-10 m.
2. The method of claim 1, wherein the depressions or the projections are formed by direct printing by lithography, printing using photoresist, laser ablation after sacrificial layer coating, or inkjet printing.
3. The method of claim 1, wherein the pores have shapes corresponding to the shapes of predetermined portions of the particles to be inserted in the pores so that the particles are oriented in predetermined directions.
4. The method of claim 1, wherein the shapes of the depressions and the projections are nanowells, nanodots, nanopillars, nanotrenches or nanocones.
5. The method of claim 1, wherein the pores receiving the particles have two or more different sizes and/or shapes.
6. The method of claim 1, wherein each of the depressions of the substrate comprises two or more another depressions capable of individually fixing the positions and/or orientations of the particles therein.
7. The method of claim 1, wherein the pores of the substrate form a predetermined pattern or shape, and the immobilized particles inserted into the pores form a pattern corresponding to the predetermined pattern or shape.
8. The method of claim 1, wherein a particle inserted in a pore and another particle inserted in an adjacent pore are contacted with or separated from each other by adjusting a distance between the pores.
9. The method of claim 1, further comprising: (d) placing a second plurality of colloidal particles on a monolayer formed by the first plurality of colloidal particles after step (c) and physically pressing the particles so that the particles are inserted into interstitial spaces defined by adjacent three or more of the particles constituting the monolayer.
10. The method of claim 9, wherein step (d) is performed once or more to form a two or more-layered array.
11. The method of claim 1, further comprising: (e) coating or filling with a transparent or opaque protecting material, after step (c).
12. The method of claim 1, wherein some particles are different in size or shape from some other particles, and whereby the first plurality of the particles are separated corresponding to the size or shape of the pores.
13. The method of claim 1, further comprising modifying exposed portions of the particles present in the pores.
14. A method of arranging colloidal particles on a substrate, the method comprising: (a) preparing a substrate having one or more adhesive surface portions; (b) randomly placing on the substrate, a plurality of dry colloidal particles in the absence of any solvent, wherein said dry colloidal particles do not have flat facets but curved surfaces, and physically pressing the particles so that the particles are immobilized on adhesive surface portions of the substrate; and (c) removing residual particles randomly placed on the particle array of step (b), which are not immobilized on the substrate, using an adhesive member, wherein the colloidal particles have sizes in a range of 10 nm-10 m.
15. The method of claim 14, wherein the adhesive surface portions of the substrate form a predetermined pattern or shape so that the particles immobilized on the adhesive surface portions of the substrate form a pattern or shape corresponding to the predetermined pattern or shape of the adhesive surface portions.
16. The method of claim 14, wherein the particles and/or the substrate are surface-coated with an adhesive material.
17. The method of claim 16, further comprising: removing the adhesive material coated on the particles and/or the substrate, after step (c).
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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(15) In the panels (a) and (b) of
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DETAILED DESCRIPTION OF THE INVENTION
(30) Hereinafter, the present invention will be described with reference to the following examples but is not limited thereto.
Examples
(31) Experimental Methods
(32) Throughout the specification, a percentage (%) used to represent the concentration of a material is wt/wt % unless stated otherwise.
(33) <Preparation of Silica Beads>
(34) A solution of tetraethylorthosilicate (TEOS, 20 ml, Aldrich) in ethanol (350 ml) was hydrolyzed in the presence of NH.sub.4OH (35%, 75 ml) at room temperature to prepare 20 to 1000-nm sized silica beads according to the Stober method (Stober, W. et al., Journal Interface Science 26:62-69 (1968)). The sizes of the silica particles were adjusted by changing the concentrations of TEOS and NH.sub.4OH. For example, for the preparation of 500 nm sized silica beads, 20 ml TEOS was added to a solution containing 350 ml ethanol and 75 ml 35% NH.sub.4OH, and the resultant solution was stirred at room temperature for three hours. In order to increase the size of silica beads from 500 nm to 700 nm, 16 ml TEOS and 8 ml NH.sub.4OH were simultaneously dropwise added to a solution containing 500 nm sized silica beads. For the preparation of smaller sized silica beads, TEOS and NH.sub.4OH were used in smaller amounts.
(35) The silica beads thus produced were washed with ethanol (3) and then with water (3).
(36) The washed silica beads were lyophilized. The standard size deviation of the resultant silica beads was 2%.
(37) <Preparation of Substrates Surface-Coated with an Adhesive>
(38) Glass plates (2.5 cm2.5 cm, Marienfield) were placed in a piranha solution (a ratio of H.sub.2SO.sub.4 to H.sub.2O.sub.2=7:3) for 30 minutes and washed with deionized water. The washed glass plates were incubated in ethanol and then dried under highly pure nitrogen atmosphere. The dried glass plates were spin-coated with polyethyleneimine (PEI, Mw=25000, Aldrich). The spin coating was started at a spinning speed of 600 rpm, with gradual increase to 1000 rpm for one minute.
(39) For monolayer assembly of silica beads, the concentration of PEI was 0.0625% for 20-nm sized silica beads, 0.125% for 200300 nm sized silica beads, and 0.5% for 7001000 nm sized silica beads.
(40) <Preparation of Directly Patterned Substrates>
(41) Tetragonal or hexagonal net arrays of nanowells or nanocones were formed on silicone wafers using lithography (NNFC (National NanoFab Center), Korea). The sizes of the silicone wafers used were 1 cm1 cm. The diameters of the nanowells were 500 nm for 700 nm sized silica particles, 300 nm for 500 nm sized silica particles, and 200 nm for 300 nm sized silica particles. The depths of the nanowells were 250 nm. A well-to-well distance (pitch) was designed to be the same as the size of each of silica particles to be arrayed. For example, in case of forming an array of 700 nm sized silica particle, a well-to-well distance is 700 nm. The nanocones were sized to have a bottom diameter of 250 nm, a top diameter of 200 nm and a height of 200 nm. The distance between adjacent ones of the nanocones was designed to be 700 nm for arrays of 700 nm sized silica particles.
(42) <Preparation of Substrates Patterned with PR>
(43) Silicone wafers (p-type) coated with patterned PR (tetragonal or hexagonal net arrays of nanowells) were prepared (NNFC, Korea). The wafers were sized to have an area of 1 cm1 cm. The diameters of the nanowells formed in the PR were 500 nm, 300 nm and 200 nm for 700 nm, 500 nm and 300 nm sized silica beads, respectively. The depths of the nanowells were 250 nm regardless of the diameters of the nanowells.
(44) <Arrangement of Particles Using Rubbing>
(45) In case of using the patterned silicone wafers and glass plates, a small amount (2 mg) of powdered silica beads were placed on PEI-coated substrates (glass plates or patterned silicone wafers), and the silica beads were repeatedly gently rubbed in predetermined directions using PDMS (poly(dimethysiloxane)) plates (4.04.00.5 cm.sup.3). The rubbing was performed for about one minute until a substrate surface got slight rainbow colors by light reflection.
(46) In case of using the patterned PR-coated silicones wafers, the powdered silica beads were placed on the patterned PR-coated wafers, and then repeatedly gently rubbed in a predetermined direction using a PDMS plate in the presence of water. Here, water was used as a lubricant to prevent damage to the patterned PR.
(47) <Formation of Monolayer Arrays>
(48) After the rubbing, the silica bead-coated glass plates or silicone wafers were subjected to slight pressing using clean PDMS plates or to gentle brushing in order to remove randomly physically adsorbed, undesired silica beads, thus resulting in formation of more tightly, regularly bound monolayer arrays of the silica beads.
(49) <Formation of Multilayer Arrays 1>
(50) For layer-by-layer stacking, the above-formed monolayer arrays were calcined at 550 C. for one hour. A droplet of a solution of PEI (0.5%) in ethanol was spin-coated on the calcined silica bead arrays. Silica beads were further placed on the PEI-coated silica bead arrays, and then were rubbed as described above to form two-layered silica bead arrays. Through the repetition of the above-described procedure, it was possible to form 3D arrays of silica beads with a desired number of layers (i.e., a desired thickness).
(51) <Formation of Multilayer Arrays 2>
(52) The above-formed monolayer arrays were calcined at 550 C. for one hour. A droplet of a solution of PEI (0.5%) in ethanol was spin-coated on the calcined silica beads (200 nm). PMMA polymer balls (700 nm) were stacked on the PEI-coated silica bead monolayers using rubbing. Then, PEI coating was applied thereto and silica beads were further stacked thereon by rubbing (
(53) Experimental Results
(54) Silica beads (20 nm to 1 m in diameter) were prepared. Glass plates (2.52.5, 1515 cm.sup.2 in area) and patterned silicone wafers (1.01.0 cm.sup.2 in area) were used as substrates. For the patterned silicone wafers, silicone wafers were patterned with tetragonal or hexagonal net arrays of 250-nm depth nanowells of 200 nm and 300 nm in diameter and pitch, of 350 nm and 500 nm in diameter and pitch, and of 500 nm and 700 nm in diameter and pitch. Also, there were prepared silicone wafers coated with 350-nm thick PR patterned with tetragonal or hexagonal net arrays of wells of 200 nm and 300 nm in diameter and pitch, of 350 nm and 500 nm in diameter and pitch, and of 500 nm and 700 nm in diameter and pitch. Also, there were prepared silicone wafers patterned with tetragonal arrays of truncated cone pillars (200 nm in top diameter, 250 nm in bottom diameter, 700 nm in pitch, and 250 nm in height), and silicone wafers patterned with tetragonal net arrays of cylindrical PR pillars (300 nm, 700 nm in pitch, 350 nm in height, 200 nm in diameter). Hereinafter, the substrates will be described as symmetry-pattern shape-(pattern dimensions, i.e., a diameter of a well/cylinder or a bottom diameter of a cone/a pitch)-material. Here, the symmetry is T (tetragonal) or H (hexagonal), the pattern shape is Wel (wells), Cyl (cylinders), or Con (cones), and the material is Si (silicone) or PR/Si (PR-coated silicone). The number of the patterns for each substrate were as follows: T-Wel-(500/700)-Si: 14,28614,286 (2.010.sup.8); H-Wel-(500/700)-Si: 14,28616,496 (2.410.sup.8); T-Wel-(350/500)-Si: 20,00020,000 (4.010.sup.8); H-Wel-(350/500)-Si: 20,00023,094 (4.610.sup.8); T-Wel-(200/300)-Si: 33,33333,333 (11.110.sup.8); H-Wel-(200/200)-Si: 33,33338,490 (12.810.sup.8).
(55) A small amount (2 mg) of dried 1 m sized silica beads were placed on PEI-coated glass plates (2.52.5 cm.sup.2), and the silica beads were repeatedly gently rubbed in one direction using a PDMS plate (4.04.00.3 cm.sup.3) for about 30 seconds until surfaces of the glass plates got slight rainbow colors by light reflection. As shown in SEM images of
(56) For very large (1515 cm.sup.2) substrates, the same effects as described above were achieved (
(57) According to the same method as described above, monolayer arrays of 700-nm sized silica beads on patterned substrates, i.e., T-Wel-(500/700)-Si, H-Wel-(500/700)-Si, and T-Con-(250/700)-Si (
(58) Similarly, for silica bead arrays on T-Wel-(300/500)-Si, H-Wel-(300/500)-Si, T-Wel-(200/300)-Si, and H-Wel-(200/300)-Si substrates (1.01.0 cm.sup.2), perfect 2D fcc (100) and fcc (111) monolayer arrays of 500 nm (
(59) For patterned PR-coated silicone wafers, i.e., T-Wel-(500/700)-PR/Si (
(60) For PR-coated substrates, PR layers can be easily removed by methanol, and thus, it is possible to form free-standing 2D silica monolayers supported on flat substrates (
(61) Much attention has been paid to pattern-induced arrays of colloidal particles on a fcc (100) surface (A. van Blaaderen, R. Ruel, P. Wiltzius, Nature 1997, 385, 321; J. P. Hoogenboom, C. Re'tif, E. de Bres, M. van de Boer, A. K. van Langen-Suurling, J. Romijn, A. van Blaaderen, Nano Lett. 2004, 4, 205; Y. Yin, Y. Lu, B. Gates, Y. Xia, J. Am. Chem. Soc. 2001, 123, 8718). However, only substrates patterned with tetragonal net arrays of pillars (not wells) were effective (A. van Blaaderen, R. Ruel, P. Wiltzius, Nature 1997, 385, 321). In this case, 500500 sites (2.510.sup.5 sites) were imperfectly filled with silica beads, even when using substrates having areas 0.1% smaller than the areas of substrates used in the present invention. Moreover, it was impossible to form large-scale (1 cm.sup.2) fcc (111) monolayer arrays even when using a patterned substrate.
(62) According to the inventive methods, it was also possible to achieve 1D arrays, i.e., wire arrays (
(63) It was also possible to achieve simultaneous 2D arrays into fcc (100) and fcc (111) lattice structures (
(64) Formation of different two types of symmetric arrays on only one substrate has not yet been achieved. Formation of 1D wires/stripes through self-assembly in solvents is known in the art (A. van Blaaderen, R. Ruel, P. Wiltzius, Nature 1997, 385, 321; J. P. Hoogenboom, C. Re'tif, E. de Bres, M. van de Boer, A. K. van Langen-Suurling, J. Romijn, A. van Blaaderen, Nano Lett. 2004, 4, 205; Y. Yin, Y. Lu, B. Gates, Y. Xia, J. Am. Chem. Soc. 2001, 123, 8718). However, lateral ordering of silica beads in 1D arrays has not yet been reported.
(65) When repeatedly forming the fcc (100) arrays of the same-sized silica beads on substrates (1 cm.sup.2) according to the inventive methods, it is possible to achieve perfect 3D fcc arrays grown in the [100] direction. This result is seen by panel (f) of
(66) After calcining a first layer of a close-packed array of 700 nm sized silica beads on a T-Wel-(500/700)-Si substrate, PEI coating, application of silica beads with a different size from the silica beads constituting the first layer, and rubbing enabled to easily produce a binary 2D, tetragonal net array of different sized silica beads. For example, when calcining the 2D monolayer arrays of 700 nm sized silica beads on T-Wel-(500/700)-Si substrates, and placing and rubbing 300 nm or 420 nm sized silica beads on the monolayers, 2D binary, tetragonal net arrays of 700 nm/300 nm (
(67) According to the present invention, it is possible to achieve 2D non-close packed arrays of 700 nm or less sized silica beads on T-Wel-(500/700)-Si substrates. This was demonstrated using 500 nm (
(68) The insertion of silica beads in patterned wells with diameters that are the same as or greater than the sizes of the silica beads can be easily rapidly performed relative to the organization of silica beads into fcc (100) or fcc (111) arrays. Interestingly, when using 420 nm sized silica beads and 500 nm diameter wells, the silica beads could be located in internal sides of the wells through rubbing in one direction (
(69) It is interesting that, during rubbing according to the present invention, the application of strong force to silica bead particles induces deformation of wells and silica beads. For example, 500 nm diameter circular wells were deformed to an oval shape so that two 300 nm sized silica beads were received in each well. At this time, silica beads were also deformed to an oval shape. The panel (f) of
(70) The above-described experimental results demonstrate the excellent effects of the present invention, i.e., simple, rapid, and precise arrays on a large-scale area.
(71) While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims.
DESCRIPTION OF REFERENCE NUMERALS
(72) TABLE-US-00001 100: substrate, 101: first depression 102: second depression, 200: particle, A: adhesive material