Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage

Abstract

A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.

Claims

1. A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, wherein the exposure region (10) is a region formed by projecting an exposure light beam (2) onto a movable platform (3), wherein the method comprises following steps: fixing a planar grating (9) below a permanent magnet array (8) of the movable platform such that a measurement surface of the planar grating faces a coil array (4), and fixing a reading head (5) in a gap of the coil array such that a central line of the reading head coincides with a central line of a lens (1); forming a measurement region (11) on the planar grating by irradiating a measurement light beam (6) of the reading head onto the planar grating, wherein a center B of the measurement region and a center A of the exposure region (10) are located at a same vertical line; obtaining a six-degree-of-freedom pose (p.sub.x, p.sub.y, p.sub.z, .sub.x, .sub.y, .sub.z) of the measurement region at a moment by measurement with the reading head and the planar grating, wherein (p.sub.x, p.sub.y, p.sub.z) is a coordinate of the center B of the measurement region, and .sub.x, .sub.y, .sub.z are included angles formed between a normal line of a plane, in which the measurement region is located, along a positive Z direction and coordinate axes X, Y and Z, respectively; calculating and obtaining a six-degree-of-freedom pose of the exposure region by substituting the six-degree-of-freedom pose of the measurement region into (p.sub.x, p.sub.y, p.sub.z, .sub.x, .sub.y, .sub.z)=(p.sub.x+L cos .sub.x, p.sub.y+L cos .sub.y, p.sub.z+L cos .sub.z, .sub.y, .sub.z), wherein a part of the movable platform covered by the exposure region is taken as a rigid body approximately, wherein p.sub.x, p.sub.y, p.sub.z represent a position of the center A of the exposure region, .sub.x, .sub.y, .sub.z represent included angles formed between a normal line of a plane, in which the exposure region is located, along the positive Z direction and the coordinate axes X, Y and Z, respectively, and L is a distance between the center A and the center B; and obtaining a six-degree-of-freedom displacement of the exposure region from a previous moment to a next moment by subtracting the six-degree-of-freedom pose of the exposure region at the previous moment from the six-degree-of-freedom pose of the exposure region at the next moment when the movable platform moves to the next moment.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a schematic view showing an embodiment of the six-degree-of-freedom displacement measurement method for the exposure region on the wafer stage provided by the present invention.

(2) FIG. 2 is a schematic view showing the measurement device in the embodiment.

(3) FIG. 3 is a schematic view showing the pose calculation in the embodiment.

(4) In the drawings: 1lens, 2exposure light beam, 3movable platform, 4coil array, 5reading head, 6measurement light beam, 7back plate, 8permanent magnet array, 9planar grating, 10exposure region, 11measurement region.

DETAILED DESCRIPTION OF EMBODIMENTS

(5) Hereinafter, the implementations of the present invention are further explained in detail in connection with the accompanying drawings.

(6) FIG. 1 is a schematic view showing an embodiment of the six-degree-of-freedom displacement measurement method for the exposure region on the wafer stage provided by the present invention. The wafer stage comprises a coil array 4 and a movable platform 3, and the coil array 4 consists of coils arranged in a plane. In the present embodiment, square coils are used. FIG. 2 is a schematic view showing the measurement device in the embodiment. The movable platform 3 comprises a permanent magnet array 8 and a back plate 7, and the permanent magnet array 8 is bonded to the bottom of the back plate 7. The permanent magnet array 8 employs a two-dimensional permanent magnet array, and in this embodiment, a two-dimensional halbach-type permanent magnet array is used. A planar grating 9 is fixed below the permanent magnet array 8 such that the measurement surface faces the coil array 4. A reading head 5 is fixed in a gap of the coil array 4. The gap may be a gap in the center of a coil or a gap formed by removing a coil. In the present embodiment, the reading head 5 is fixed in the gap of the coil. A central line of the reading head 5 coincides with a central line of a lens 1. An exposure light beam 2 of the lens 1 is projected onto the movable platform 3 to form the exposure region 10. As shown in FIG. 2, a measurement light beam 6 of the reading head 5 is incident on the planar grating 9 to form a measurement region 11. The measurement region 11 and the exposure region 10 may have a circular shape, square shape or rectangle shape and the like, and have a square shape in the present embodiment. The center A of the exposure region 10 and the center B of the measurement region 11 are located at the same vertical line.

(7) FIG. 3 is a schematic view showing the pose calculation in the embodiment. The part of the movable platform covered by the exposure region 10 is shown in the figure. A stationary coordinate system O-XYZ is fixed on the coil array 4. The position vector from the origin O to the center B of the measurement region 11 is {right arrow over (r)}.sub.1, the position vector from the origin O to the center A of the exposure region 10 is {right arrow over (r)}.sub.2, and the vector from the point B to the point A is {right arrow over (r)}. The six-degree-of-freedom pose of the measurement region 11 obtained by using the reading head 5 and planar grating 9 is (p.sub.x, p.sub.y, p.sub.z, .sub.x, .sub.y, .sub.z), wherein (p.sub.x, p.sub.y, p.sub.z) is the coordinate of the center B of the measurement region 11, and .sub.x, .sub.y, .sub.z are the included angles between the normal line of the plane, in which the measurement region 11 is located, in the positive Z direction and the coordinate axes X, Y and Z, respectively, which may refer to the reading head capable of measuring six degrees of freedom of a movable platform mentioned in A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage provided by Xinghui Li, etc. Assuming that the distance between the points A and B is L, then {right arrow over (r)}=L(cos .sub.x, cos .sub.y, cos .sub.z), and the position vector {right arrow over (r)}.sub.2 of the point A can be calculated by the following formula:
{right arrow over (r)}=(p.sub.x, p.sub.y, p.sub.z)={right arrow over (r)}.sub.1+{right arrow over (r)}=(p.sub.x+L cos .sub.x, p.sub.y+L cos .sub.y, p.sub.z+L cos .sub.z),

(8) wherein p.sub.x, p.sub.y, p.sub.z represent the position of the center A of the exposure region 10.

(9) As the area of the exposure region 10 is small, the part of the movable platform covered by the exposure region 10 may be taken as a rigid body approximately, and when the whole movable platform 3 moves, or is deformed due to vibration, the included angles (.sub.x, .sub.y, .sub.z) between the normal line of the plane, in which the exposure region 10 is located, in the positive Z direction and the coordinate axes X, Y and Z respectively, are equal to the included angles between the normal line of the plane, in which the measurement region 11 is located, in the positive Z direction and the coordinate axes X, Y and Z respectively, that is, (.sub.x, .sub.y, .sub.z)=(.sub.x, .sub.y, .sub.z).

(10) In this way, the six-degree-of-freedom pose of the exposure region 10 is calculated by using the six-degree-of-freedom pose of the measurement region 11, that is,
(p.sub.x, p.sub.y, p.sub.z, .sub.x, .sub.y, .sub.z)=(p.sub.x+L cos .sub.x, p.sub.y+L cos .sub.y, p.sub.z+L cos .sub.z, .sub.x, .sub.y, .sub.z),

(11) wherein p.sub.x, p.sub.y, p.sub.z represent the position of the center A of the exposure region, .sub.x, .sub.y, .sub.z represent the included angles between the normal line of the plane, in which the exposure region is located, in the positive Z direction and the coordinate axes X, Y and Z, respectively, (p.sub.x, p.sub.y, p.sub.z) is the coordinate of the center B of the measurement region, .sub.x, .sub.y, .sub.z are the included angles between the normal line of the plane, in which the measurement region is located, in the positive Z direction and the coordinate axes X, Y and Z, respectively; and L is the distance between the center A and the center B.

(12) When the movable platform moves to the next moment, the six-degree-of-freedom displacement of the exposure region from the previous moment to the next moment is obtained by subtracting the six-degree-of-freedom pose of the exposure region at the previous moment from the six-degree-of-freedom pose of the exposure region at the next moment.

(13) The six-degree-of-freedom displacement signal of the exposure region calculated according to the present invention can be used for feedback control to control the leveling and focusing as well as horizontal movement of the exposure region; in addition, the six-degree-of-freedom displacement signal of the exposure region can be used for feedforward control which compensates the error of the six-degree-of-freedom displacement of the exposure region, obtained in the current moment, to the next moment in advance, so as to reduce the error of the leveling and focusing as well as the error of the horizontal movement.