VACUUM PUMP SYSTEM AND METHOD FOR OPERATING A VACUUM PUMP SYSTEM

Abstract

A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Claims

1. A vacuum pump system, comprising: a main vacuum pump adapted to be connected to a chamber to be evacuated; an auxiliary pump connected to an inlet of the main vacuum pump; a sealing gas supply device; and a control device connected to the sealing gas supply device and to the auxiliary pump, the control device being configured to switch the sealing gas supply device and/or the auxiliary vacuum pump off and on as a function of a predetermined control variable.

2. The vacuum pump system of claim 1, wherein the predetermined control variable comprises a pressure falling below a value of 1 mbar at the inlet of the main vacuum pump and falling below a value of 1020 mbar at the outlet of the main vacuum pump.

3. The vacuum pump system of claim 1, wherein the predetermined control value comprises a first value configured to control the sealing gas supply device and a second value configured to control the auxiliary vacuum pump.

4. The vacuum pump system of claim 3, wherein the first value and the second value are a common value.

5. The vacuum pump system of claim 3, wherein the first value and the second value are different values.

6. The vacuum pump system of claim 1, wherein the predetermined control variable comprises an entering or a termination of a standby mode.

7. The vacuum pump system of claim 1, wherein the predetermined control variable comprises a characteristic value of an electric motor driving the main vacuum pump.

8. The vacuum pump system of claim 1, wherein the predetermined control variable comprises a power consumption of an electric motor driving the main vacuum pump.

9. A vacuum pump system. comprising: a main vacuum pump having an inlet adapted to be connected to a chamber to be evacuated and an outlet; an auxiliary vacuum pump connected to the outlet; a check valve provided at the outlet; and a control device connected to the check valve for controlling the check valve as a function of one or more predetermined control variables, wherein the one or more predetermined control variables comprise a position of the check valve.

10. The vacuum pump system of claim 9, wherein the control device is connected to the auxiliary vacuum pump for switching the auxiliary vacuum pump off and on as a function of the one or more predetermined control variables.

11. The vacuum pump system of claim 9, further comprising a sealing gas supply device, wherein the control device is connected to the sealing gas supply device for switching the sealing gas supply device off and on as a function of the one or more predetermined control variables.

12. The vacuum pump system of claim 11, wherein the one or more predetermined control values comprise a first value configured to control the sealing gas supply device and a second value configured to control the auxiliary vacuum pump.

13. The vacuum pump of claim 9, wherein the one or more predetermined control variables comprise a first pressure of less than 1 mbar at the inlet of the main vacuum pump and a second pressure of less than 1020 mbar at the outlet of the main vacuum pump.

14. The vacuum pump system of claim 9, wherein the one or more predetermined control variables comprise an entering of a standby mode and/or a termination of the standby mode.

15. The vacuum pump system of claim 9, wherein the one or more predetermined control variables comprise a characteristic value of an electric motor driving the main vacuum pump.

16. The vacuum pump system of claim 9, wherein the one or more predetermined control variables comprise a power consumption of an electric motor driving the main vacuum pump.

Description

DESCRIPTION OF THE DRAWINGS

[0029] The sole the FIGURE shows a schematic diagram of a vacuum pump system including a control device.

DETAILED DESCRIPTION

[0030] In the illustrated exemplary embodiment, the vacuum pump system comprises a main vacuum pump 10. The outlet of the main vacuum pump 10 is connected to an auxiliary vacuum pump 12 which is in particular an ejector pump. The inlet of the main vacuum pump 10 is connected to a chamber 14 to be evacuated. Further, the main vacuum pump 10 has connected thereto a pump 16. The latter is connected to a container 24 via a controllable valve 18, in which container sealing gas is provided. With the aid of the pump 16 sealing gas is thus supplied to the main vacuum pump 10. If the sealing gas is pressurized the pump 16 may be omitted.

[0031] In the illustrated exemplary embodiment, a control device 20 is connected to a pressure sensor 22 arranged between the chamber 14 to be evacuated and the main vacuum chamber 10.

[0032] The pressure measured by the pressure sensor 22 serves as a control variable for the control device 20. The electric valve 18, via which sealing gas is supplied to the main vacuum pump 10, is controlled as a function of the pressure. Further, the ejector pump 12 is controlled correspondingly. Here, too, an electric valve, which controls the propellant gas supply to the ejector pump 12, can be controlled.