PREPARATION DEVICE AND PREPARATION METHOD FOR ALLOY TARGETS

Abstract

A preparation device for an alloy target includes a material nozzle, a high-energy laser, and a target support substrate, the material nozzle and the high-energy laser are respectively arranged above the target support substrate. The preparation device uses the material nozzle to spray the material powder required for the alloy target to be prepared, the injection efficiency is independently adjusted to achieve the purpose of non-fixed composition of the alloy target, and the spatial position and angle of the material nozzle are independently adjusted to ensure uniform composition and density of the target, the high-energy laser beam generated by the high-energy laser is used to heat the material powder in the spraying area to form a target coating of the required composition, the target support substrate is used to support the target coating formed by the material powder.

Claims

1. A preparation device for an alloy target, comprising a material nozzle, a laser, and a target support substrate; wherein the material nozzle is arranged above the target support substrate, the material nozzle is configured to spray material powder required for an alloy target to be prepared, and an injection efficiency of the material nozzle is 0-100 mm.sup.3/s; the laser is arranged above the target support substrate to generate a laser beam; the target support substrate supports a target coating formed by the material powder and controls size and shape of the target coating; and the target coating is configured to be removable from the target support substrate.

2. The preparation device according to claim 1, wherein a number of material nozzles is 3 to 5.

3. The preparation device according to claim 1, wherein the preparation device for alloy targets further comprises a controller; the controller is connected to the material nozzle, the high-energy laser, and the target support substrate.

4. A preparation method for an alloy target, comprising the following steps: (1) preparing a required material powder according to a chemical element composition of the alloy target to be prepared; (2) dividing the material powder in step (1) into the material nozzle of the preparation device according to claim 1, and adjusting a spatial position and angle of the material nozzle independently, wherein a position and area of the material nozzle sprayed on the target support substrate are consistent, and obtaining a focusing surface of the same position and size; according to a stoichiometric ratio of each element at a specific position of the alloy target to be prepared, adjusting an injection efficiency of the material nozzle independently, and turning on the high-energy laser, using the high-energy laser beam generated by the high-energy laser to synchronously heat the material powder sprayed on the target support substrate by the material nozzle, wherein the material powder is fused to form a target coating; in a process of material powder injection, moving the target support substrate, and forming the target coating with the required size and shape by spraying; after a spraying of the above target coating is completed, moving the target support substrate, and spraying an upper surface of an upper target coating continuously to form a target coating with a required size and shape for a next layer, and obtaining the alloy target by spraying layer by layer.

5. The preparation method according to claim 4, wherein the material powder in step (1) is a simple substance or an alloy; the material powder is composed of micron-sized particles and/or nano-sized particles.

6. The preparation method according to claim 4, wherein an area of the focusing surface in step (2) is 1-100 mm; a coincidence rate between the material nozzle and the focusing surface is >95%.

7. The preparation method according to claim 4, wherein when the alloy target is a periodically doped alloy target, the material nozzle in step (2) obtains different focusing surfaces on the target support substrate; setting an injection mode of material nozzles on different focusing surfaces, and adjusting a working time of different injection modes to achieve periodic doping.

8. The preparation method according to claim 4, wherein the injection efficiency of the material nozzle in step (2) is 0-100 mm.sup.3/s independently.

9. The preparation method according to claim 4, wherein in step (2), the target support substrate or the material nozzle moves with the high-energy laser in three-dimensional space; a relative velocity of the movement is 1-100 mm/s.

10. The preparation method according to claim 4, wherein after the cyclic layer-by-layer spraying in step (2) is completed, it also comprises separating the alloy target coating obtained by the cyclic layer-by-layer spraying from the target support substrate to obtain the alloy target.

11. The preparation method according to claim 4, wherein in the preparation device, a number of material nozzles is 3 to 5.

12. The preparation method according to claim 4, wherein the preparation device for alloy targets further comprises a controller; the controller is connected to the material nozzle, the high-energy laser, and the target support substrate.

13. The preparation method according to claim 7, wherein the injection efficiency of the material nozzle in step (2) is 0-100 mm.sup.3/s independently.

14. The preparation method according to claim 11, wherein the material powder in step (1) is a simple substance or an alloy; the material powder is composed of micron-sized particles and/or nano-sized particles.

15. The preparation method according to claim 11, wherein an area of the focusing surface in step (2) is 1-100 mm.sup.2; a coincidence rate between the material nozzle and the focusing surface is >95%.

16. The preparation method according to claim 11, wherein when the alloy target is a periodically doped alloy target, the material nozzle in step (2) obtains different focusing surfaces on the target support substrate; setting an injection mode of material nozzles on different focusing surfaces, and adjusting a working time of different injection modes to achieve periodic doping.

17. The preparation method according to claim 11, wherein the injection efficiency of the material nozzle in step (2) is 0-100 mm.sup.3/s independently.

18. The preparation method according to claim 11, wherein in step (2), the target support substrate or the material nozzle moves with the high-energy laser in three-dimensional space; a relative velocity of the movement is 1-100 mm/s.

19. The preparation method according to claim 11, wherein after the cyclic layer-by-layer spraying in step (2) is completed, it also comprises separating the alloy target coating obtained by the cyclic layer-by-layer spraying from the target support substrate to obtain the alloy target.

20. The preparation method according to claim 16, wherein the injection efficiency of the material nozzle in step (2) is 0-100 mm.sup.3/s independently.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0027] FIG. 1 is a structure diagram of the preparation device for alloy targets in the invention;

[0028] FIG. 2 is a schematic diagram of the focusing surface in the invention;

[0029] FIG. 3 is a schematic diagram of the positional relationship between the target coating and the target support substrate in the invention;

[0030] FIG. 4 is a microstructure diagram of BaHf doped superconducting alloy target YBa.sub.2Cu.sub.3 prepared by Embodiment 2 in the invention.

MARKS IN THE FIGURES

[0031] 1, material nozzle; 2, high-energy laser; 3, target support substrate; 4, material powder; 5, target coating; 6, focusing surface; x, x-axis of three-dimensional space; y, y-axis of three-dimensional space; z, z-axis of three-dimensional space.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] The invention provides a preparation device for an alloy target, comprising the material nozzle 1, the high-energy laser 2, and the target support substrate 3; [0033] the material nozzle 1 is arranged above the target support substrate 3, which is used to spray the material powder required for the alloy target to be prepared; [0034] the high-energy laser 2 is arranged above the target support substrate 3 to generate the high-energy laser beam; [0035] the target support substrate 3 supports the target coating formed by the material powder and controls the size and shape of the target coating.

[0036] As shown in FIG. 1, in the embodiment of the invention, the preparation device for alloy targets comprises the material nozzle 1. In the invention, the material nozzle 1 is preferably a Laval nozzle. In the invention, the number of the material nozzles 1 is preferably set according to the type of material powder required for the alloy target to be prepared, and more preferably 3-5 nozzles. In the invention, the injection efficiency of the material nozzle 1 is preferably independently adjusted. In this invention, the injection efficiency of the material nozzle 1 is preferably set according to the stoichiometric ratio of each element at a specific position of the alloy target to be prepared. In the invention, the spatial position and angle of the material nozzle 1 are preferably adjusted independently.

[0037] The invention independently adjusts the spatial position and angle of the material nozzle 1, and sets the injection efficiency of different material nozzles 1 according to the stoichiometric ratio of each element at a specific position of the alloy target to be prepared, so as to meet the requirements of doping certain specific positions in the film layer in the coating scene and realize the purpose of non-fixed composition of the alloy target.

[0038] As shown in FIG. 1, in the embodiment of the invention, the preparation device for alloy targets comprises the high-energy laser 2, the invention uses the high-energy laser beam generated by the high-energy laser 2 to heat the target support substrate, the material powder sprayed on the surface of the target support substrate 3 and/or the target coating formed by the fusion of the material powder, that is, to heat the spraying area, so that the material powder in the spraying area has sufficient ability to form and diffuse, the alloying is achieved, and the target coating of the required composition is formed.

[0039] As shown in FIG. 1, in the embodiment of the invention, the preparation device for alloy targets comprises the target support substrate 3, the invention uses the target support substrate 3 to support the target coating formed by the material powder, controls the size and shape of the target coating by moving the target support substrate 3, and sprays the target coating layer by layer, finally, it can produce large-size, anomalous alloy targets to meet the special needs of different coating scenarios.

[0040] In the invention, the preparation device for alloy targets also comprises the controller; the controller is connected to the material nozzle 1, the high-energy laser 2, and the target support substrate 3.

[0041] In the invention, the material nozzle 1, the high-energy laser 2, and the target support substrate 3 are preferably independently placed in a vacuum chamber containing an inert gas.

[0042] The invention also provides the preparation method for alloy targets, comprising the following steps: [0043] (1) the required material powder is prepared according to the chemical element composition of the alloy target to be prepared; [0044] (2) the material powder in Step (1) is divided and put into the material nozzle 1 of the preparation device described in the above technical solution, and then the spatial position and angle of the material nozzle 1 are adjusted independently, so that the position and area of the material nozzle 1 sprayed on the target support substrate 3 are consistent, and the focusing surface of the same position and size is obtained; [0045] according to the stoichiometric ratio of each element at the specific position of the alloy target to be prepared, the injection efficiency of the material nozzle 1 is adjusted independently, and the high-energy laser 2 is turned on, the high-energy laser beam generated by the high-energy laser 2 is used to synchronously heat the material powder sprayed on the target support substrate 3 by the material nozzle 1, so that the material powder is fused to form the target coating; [0046] in the process of the material powder injection, the target support substrate 3 is moved, and the target coating is formed with the required size and shape by spraying; [0047] after the spraying of the above target coating is completed, the target support substrate 3 is moved, and the upper surface of the upper target coating is sprayed continuously to form the target coating with the required size and shape for the next layer, and the alloy target is obtained by spraying layer by layer.

[0048] The invention prepares the required material powder according to the chemical element composition of the alloy target to be prepared.

[0049] In the invention, the material powder is preferably a simple substance or an alloy. In this invention, the material powder is preferably micron-sized particles and/or nano-sized particles. The invention uses micron-sized particles and/or nano-sized particles as material powders, which has the advantage of short distance of element diffusion. At the same time, sufficient energy diffusion is obtained under the action of the auxiliary high-energy laser beam, and finally, the uniformity of composition and density of target coating obtained by spraying is good.

[0050] After obtaining the material powder, the material powder is divided and put into the material nozzle 1 of the preparation device described in the above technical solution, and then the spatial position and angle of the material nozzle 1 are adjusted independently, so that the position and area of the material nozzle 1 sprayed on the target support substrate 3 are consistent, and the focusing surface of the same position and size is obtained.

[0051] In the invention, the area of the focusing surface is preferably 1-100 mm.sup.2. In the invention, the coincidence rate of the material nozzle 1 and the focusing surface is >95%.

[0052] The invention controls the coincidence rate of the material nozzle 1 and the focusing surface in the above range to ensure that the material powders ejected from different material nozzles 1 are ejected at the same position on the focusing surface, which can diffuse to form an alloy with uniform composition, so as to avoid the decrease in the shape resolution and composition uniformity of the target caused by the oversized focusing surface, at the same time, the low efficiency of prepared target caused by undersized focusing surface is also avoided. By independently adjusting the spatial position and angle of the material nozzle 1, the position and area of the material nozzle 1 sprayed on the target support substrate 3 are consistent, and the focusing surface of the same position and size is obtained to ensure the uniformity of the composition and density of the target.

[0053] In the invention, when the alloy target is a periodically doped alloy target, the material nozzle is preferably provided with different focusing surfaces on the target support substrate; the injection mode of the material nozzle on different focusing surfaces is set, and the working time of different injection modes is adjusted to realize the preparation of the periodically doped alloy target.

[0054] In the invention, the working time of the different injection modes is preferably adjusted according to the superlattice structure of the target film prepared by the deposition of the periodically doped alloy target.

[0055] In the invention, the material nozzle 1 is preferably a Laval nozzle. The invention adjusts the injection efficiency of the material nozzle 1 by controlling the velocity of the working gas in the Laval nozzle. The invention independently adjusts the injection efficiency of the material nozzle 1 according to the stoichiometric ratio of each element at the specific position of the alloy target to be prepared, so that in the spraying area, the material powder ejected by different material nozzles 1 is consistent with the stoichiometric ratio of the chemical elements of the alloy target to be prepared, and finally the target target coating with non-fixed composition is obtained.

[0056] In the invention, the injection efficiency of the material nozzle 1 is independently preferably 0-100 mm.sup.3/s. The invention controls the injection efficiency in the above range to ensure the uniformity of the target composition based on ensuring the target preparation efficiency and avoids the excessive injection efficiency that will limit the kinetic process of the element diffusion process, which is not suitable for preparing a target with uniform composition. At the same time, by adjusting the change of the injection efficiency of different material nozzles 1, the target with uniform composition change or periodic doping can be prepared.

[0057] The invention uses the high-energy laser beam produced by the high-energy laser 2 to synchronously heat the material nozzle 1 to spray the material powder on the target support substrate 3, so that the material powder is fused to form the target coating; [0058] in the invention, the target support substrate 3 or the material nozzle 1 and the high-energy laser 2 are preferably moved in three-dimensional space. In this invention, the relative velocity of the movement is preferably 1-100 mm/s. The invention controls the relative speed of movement in the above range to take into account the efficiency and accuracy of target preparation and avoids the decrease in the accuracy of target shape caused by the excessive moving speed, and at the same time avoids the decrease in the efficiency of target preparation caused by the low moving speed.

[0059] In the invention, in the moving process, the focusing surface is preferably maintained on the plane of the target support substrate 3 to ensure the uniformity of the target coating composition.

[0060] After the cyclic layer-by-layer spraying is completed, the alloy target coating obtained by the cyclic layer-by-layer spraying is separated from the target support substrate 3 to obtain the alloy target.

[0061] The preparation method for alloy targets provided by the invention uses laser-assisted spraying and adopts an additive method to spray the target coating layer by layer, which can form the alloy target with a non-fixed composition, anomalous, and large size. At the same time, it overcomes the inhomogeneity of composition and density in the preparation process of traditional target materials and meets the special requirements of different coating scenes for target materials.

[0062] The technical solution in the invention will be clearly and completely described in the following combined with the embodiments. Obviously, the described embodiments are only parts of the embodiments of the invention, not all of the embodiments. Based on the embodiments in the invention, all other embodiments obtained by ordinary technicians in this field without making creative labor belong to the scope of protection of the invention.

Embodiment 1

[0063] The disk-shaped superconducting alloy target YBa.sub.2Cu.sub.3 with a diameter of 15 cm and a thickness of 1 cm is prepared by using the preparation device for alloy targets shown in FIG. 1, the preparation method is as follows: [0064] (1) according to the disk-shaped superconducting alloy target YBa.sub.2Cu.sub.3, the elemental Y powder, the elemental Ba powder, and the elemental Cu powder are prepared as three kinds of material powders; [0065] (2) the three material powders in Step (1) are divided and put into three material nozzles 1 of the preparation device for alloy targets, and then the spatial position and angle of the three material nozzles 1 are adjusted independently, so that the position and area of the three material nozzles 1 sprayed on the target support substrate 3 are consistent, and the focusing surface of the same position and size is obtained; [0066] according to the stoichiometric ratio of each element of the disk-shaped superconducting alloy target YBa.sub.2Cu.sub.3 (i.e., the alloy target to be prepared), the injection efficiency of the three material nozzles 1 for spraying the elemental Y powder, the elemental Ba powder, and the elemental Cu powder is adjusted to 19 mm.sup.3/s, 78 mm.sup.3/s, and 21.5 mm.sup.3/s, respectively, and the high-energy laser 2 is turned on, the high-energy laser beam generated by the high-energy laser 2 is used to synchronously heat the material powder sprayed on the target support substrate 3 by the three material nozzles 1, so that the material powder is fused to form the target coating, and good uniformity is obtained under sufficient energy; [0067] in the process of the material powder injection, the target support substrate 3 is moved, and the circular target coating is formed with a required diameter of 15 cm by spraying; [0068] the preparation device for alloy targets also comprises a controller; the controller is connected to the material nozzles 1, the high-energy laser 2, and the target support substrate 3; [0069] the material nozzles 1, the high-energy laser 2, and the target support substrate 3 are independently placed in a vacuum chamber containing an inert gas; [0070] after the spraying of the upper target coating is completed, the target support substrate 3 is moved, and the upper surface of the upper target coating is continuously sprayed to form a circular target coating with a required diameter of 15 cm for the next layer, the disk-shaped superconducting alloy target YBa.sub.2Cu.sub.3 with a thickness of 1 cm is obtained by spraying layer by layer.

[0071] The relative velocity of the target support substrate 3 moving relative to the material nozzle 1 is 1 mm/s.

Embodiment 2

[0072] The disk-shaped BaHf-doped superconducting alloy target YBa.sub.2Cu.sub.3 with a diameter of 15 cm and a thickness of 1 cm is prepared by the preparation device for alloy targets shown in FIG. 1, which is used to deposit YBa.sub.2Cu.sub.307+BaHfO.sub.3 superlattice films, the preparation method is as follows: [0073] (1) according to the disk-shaped BaHf doped superconducting alloy target YBa.sub.2Cu.sub.3, the elemental Y powder, the elemental Ba powder, the elemental Cu powder, and the elemental Hf powder are prepared as five kinds of material powders, of which the elemental Ba powder accounted for two parts; [0074] (2) the five material powders in Step (1) are divided and put into five material nozzles 1 of the preparation device for alloy targets, and then the spatial position and angle of the three material nozzles 1 with the elemental Y powder, the elemental Ba powder and the elemental Cu powder are adjusted independently, so that the position and area of the three material nozzles 1 sprayed on the target support substrate 3 are consistent, and the focusing surface of the same position and size is obtained; Then, the spatial position and angle of the remaining two material nozzles 1 with the elemental Ba powder and the elemental Hf powder are adjusted independently, so that the position and area of the two material nozzles 1 sprayed on the target support substrate 3 are consistent, and another focusing surface at the same position and size is obtained. [0075] according to the stoichiometric ratio of each element of YBa.sub.2Cu.sub.3 in the disk-shaped BaHf-doped superconducting alloy target YBa.sub.2Cu.sub.3 (i.e., the alloy target to be prepared), the injection efficiency of the three material nozzles 1 for spraying the elemental Y powder, the elemental Ba powder and the elemental Cu powder is adjusted to 19 mm.sup.3/s, 78 mm.sup.3/s and 21.5 mm.sup.3/s, respectively, the injection mode is set to mode A; according to the stoichiometric ratio of each element of BaHf in the disk-shaped BaHf-doped superconducting alloy target YBa.sub.2Cu.sub.3 (i.e., the alloy target to be prepared), the injection efficiency of the above-mentioned remaining two material nozzles 1 for the injection of elemental Ba powder and elemental Hf powder with another focusing surface is independently adjusted to 3.9 mm.sup.3/s and 3.9 mm.sup.3/s, respectively, and the injection mode is set to mode B. The injection efficiency of the remaining two material nozzles 1 is 3.9 mm.sup.3/s and 3.9 mm.sup.3/s, respectively, according to the superlattice structure required by the target film, the working time of mode A and mode B is adjusted to 1 s and 1 s respectively and cycled when working. The high-energy laser 2 is turned on, the high-energy laser beam generated by the high-energy laser 2 is used to synchronously heat the material powder sprayed on the target support substrate 3 by the five material nozzles 1, so that the material powder is fused to form the target coating, and good uniformity is obtained under sufficient energy; The microstructure diagram of the BaHf-doped superconducting alloy target YBa.sub.2Cu.sub.3 is shown in FIG. 4; [0076] in the process of the material powder injection, the target support substrate 3 is moved, and the circular target coating is formed with a required diameter of 15 cm by spraying; [0077] the preparation device for alloy targets also comprises a controller; the controller is connected to the material nozzles 1, the high-energy laser 2, and the target support substrate 3; [0078] the material nozzles 1, the high-energy laser 2, and the target support substrate 3 are independently placed in a vacuum chamber containing an inert gas; [0079] after the spraying of the upper target coating is completed, the target support substrate 3 is moved, and the upper surface of the upper target coating is continuously sprayed to form a circular target coating with a required diameter of 15 cm for the next layer, the disk-shaped BaHf-doped superconducting alloy target YBa.sub.2Cu.sub.3 with a thickness of 1 cm is obtained by spraying layer by layer.

[0080] The relative velocity of the target support substrate 3 moving relative to the material nozzle 1 is 1 mm/s.

[0081] The prepared target is applied to the pulse laser deposition process, the target is uniformly rotated during the deposition process, and the superlattice nanostructure of YBa.sub.2Cu.sub.3O.sub.7 doped with BaHfO.sub.3 is obtained, that is, the YBa.sub.2Cu.sub.3O.sub.7+BaHfO.sub.3 superlattice film.

Embodiment 3

[0082] A circular ring-shaped superconducting alloy target YBa.sub.2Cu.sub.3 with an outer diameter of 15 cm and an inner diameter of 13 cm is prepared by using the preparation device for alloy targets shown in FIG. 1 to improve the utilization rate of the target in the pulse laser deposition process. The preparation method is as follows: [0083] (1) according to the disk-shaped superconducting alloy target YBa.sub.2Cu.sub.3, the elemental Y powder, the elemental Ba powder, and the elemental Cu powder are prepared as three kinds of material powders; [0084] (2) the three material powders in Step (1) are divided and put into three material nozzles 1 of the preparation device for alloy targets, and then the spatial position and angle of the three material nozzles 1 are adjusted independently, so that the position and area of the three material nozzles 1 sprayed on the target support substrate 3 are consistent, and the focusing surface of the same position and size is obtained; [0085] according to the stoichiometric ratio of each element of the disk-shaped superconducting alloy target YBa.sub.2Cu.sub.3 (i.e., the alloy target to be prepared), the injection efficiency of the three material nozzles 1 for spraying the elemental Y powder, the elemental Ba powder, and the elemental Cu powder is adjusted to 19 mm.sup.3/s, 78 mm.sup.3/s, and 21.5 mm.sup.3/s, respectively, and the high-energy laser 2 is turned on, the high-energy laser beam generated by the high-energy laser 2 is used to synchronously heat the material powder sprayed on the target support substrate 3 by the three material nozzles 1, so that the material powder is fused to form the target coating and good uniformity is obtained under sufficient energy; [0086] in the process of the material powder injection, the target support substrate 3 is moved, and the circular ring-shaped target coating is formed with a required diameter of 15 cm and an inner diameter of 13 cm. [0087] the preparation device for alloy targets also comprises a controller; the controller is connected to the material nozzles 1, the high-energy laser 2, and the target support substrate 3; [0088] the material nozzles 1, the high-energy laser 2, and the target support substrate 3 are independently placed in a vacuum chamber containing an inert gas; [0089] after the spraying of the upper target coating is completed, the target support substrate 3 is moved, and the upper surface of the upper target coating is continuously sprayed to form a circular target coating with a diameter of 15 cm and an inner diameter of 13 cm for the next layer, the circular ring-shaped superconducting alloy target YBa.sub.2Cu.sub.3 with a thickness of 1 cm is obtained by spraying layer by layer.

[0090] The relative velocity of the target support substrate 3 moving relative to the material nozzle 1 is 1 mm/s.

[0091] It can be seen from the above that the preparation method of the alloy target provided by the invention, using laser-assisted spraying, using an additive method, and spraying the target coating layer by layer, can form a non-fixed, shaped, and large-sized alloy target. At the same time, it overcomes the inhomogeneity of composition and density in the traditional target preparation process and meets the special requirements of different coating scenarios for the target.

[0092] The above is only the preferred implementation method of the invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and embellishments can be made without breaking away from the principle of the invention. These improvements and embellishments should also be regarded as the protection scope of the invention.