LIQUID DETECTION IN A SENSOR ENVIRONMENT AND REMEDIAL ACTION THEREOF
20230035487 · 2023-02-02
Inventors
- Calin Miclaus (Fremont, CA, US)
- Chung-Hsien Lin (Hsinchu City, TW)
- Jye Ren (Taipei City, TW)
- Tim Piessens (Bornem, BE)
- Pei-Wen Yen (Hsinchu City, TW)
- Manish Sharma-Kulamarva (Chandler, AZ, US)
Cpc classification
H01L2224/73204
ELECTRICITY
G01L9/0041
PHYSICS
H01L2924/00014
ELECTRICITY
H01L2224/131
ELECTRICITY
G01L19/0092
PHYSICS
H01L2224/73204
ELECTRICITY
G01N33/0009
PHYSICS
H01L2224/4813
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/29191
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/16225
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2224/131
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L23/564
ELECTRICITY
H01L2224/16227
ELECTRICITY
H01L2924/00
ELECTRICITY
International classification
G01L19/06
PHYSICS
G01L19/00
PHYSICS
G01L9/00
PHYSICS
Abstract
A device includes a housing unit with an internal volume. The device further includes a sensor coupled to a substrate via an electrical coupling, wherein the sensor is disposed within the internal volume of the housing unit, and wherein the sensor is in communication with an external environment of the housing unit from a side other than a side associated with the substrate. The device also includes a moisture detection unit electrically coupled to the sensor, wherein the moisture detection unit comprises at least two looped wires at different heights, and wherein the moisture detection unit is configured to detect presence of a moisture within an interior environment of the housing unit when the moisture detection unit becomes in direct contact with the moisture.
Claims
1. A device comprising: a housing unit with an internal volume; a sensor coupled to a substrate via an electrical coupling, wherein the sensor is disposed within the internal volume of the housing unit, and wherein the sensor is in communication with an external environment of the housing unit from a side other than a side associated with the substrate; and a moisture detection unit electrically coupled to the sensor, wherein the moisture detection unit comprises at least two looped wires at different heights, and wherein the moisture detection unit is configured to detect presence of a moisture within an interior environment of the housing unit when the moisture detection unit becomes in direct contact with the moisture.
2. The device of claim 1 further comprising a gel filled within the interior environment of the housing unit covering the sensor and the substrate, wherein the gel is configured to protect the sensor, the electrical coupling, and the substrate from exposure to the moisture.
3. The device of claim 2, wherein the gel is selected from a group consisting of silicone and fluoro silicone.
4. The device of claim 1, wherein the moisture detection unit comprises electrodes, wherein presence of moisture is detected responsive to a change in thermal conductance measured by the electrodes or responsive to a change of capacitance between the electrodes.
5. The device of claim 4, wherein the change in the thermal conductance is measured by measuring a resistance between the electrodes and by comparing the measured resistance to a resistance between the electrodes in absence of the moisture.
6. The device of claim 1, wherein the moisture detection unit comprises electrodes and wherein the moisture detection unit is within the sensor and is configured to detect presence of moisture by detecting a change in a measured electrical characteristics by the electrodes.
7. The device of claim 1, wherein the sensor is a pressure sensor.
8. The device of claim 1, wherein a pair of looped wires of the plurality of looped wires at a first height is configured to detect a different amount of moisture presence from another pair of looped wires of the plurality of looped wires at a second height.
9. A device comprising: a housing unit with an internal volume; a sensor comprising a heating element coupled to a substrate via an electrical coupling, wherein the sensor is disposed within the internal volume of the housing unit, and wherein the sensor is in communication with an external environment of the housing unit from a side other than a side associated with the substrate; and a moisture detection unit electrically coupled to the sensor, wherein the moisture detection unit comprises at least two looped wires at different heights, and wherein the moisture detection unit is configured to detect presence of a moisture within an interior environment of the housing unit when the moisture detection unit becomes in direct contact with the moisture, and wherein a control circuitry within the sensor is configured to turn on the heating element responsive to the moisture detection circuitry detecting presence of moisture.
10. The device of claim 9 further comprising a gel filled within the interior environment of the housing unit covering the sensor and the substrate, wherein the gel is configured to protect the sensor die and the substrate from exposure to the moisture.
11. The device of claim 9, wherein the control circuity turns the heating element on to maintain a predetermined temperature in response to detecting that output from the sensor has drifted, and wherein maintaining the predetermined temperature compensates for the drift.
12. The device of claim 9, wherein the sensor comprises a pressure sensor, and wherein the heating element is disposed in a plane of a movable membrane of the pressure sensor.
13. The device of claim 12, wherein the heating element is disposed around the movable membrane.
14. The device of claim 13, wherein the heating element comprises silicon.
Description
BRIEF DESCRIPTION OF DRAWINGS
[0012]
[0013]
[0014]
[0015]
[0016]
[0017]
DETAILED DESCRIPTION
[0018] Before various embodiments are described in greater detail, it should be understood by persons having ordinary skill in the art that the embodiments are not limiting, as elements in such embodiments may vary. It should likewise be understood that a particular embodiment described and/or illustrated herein has elements which may be readily separated from the particular embodiment and optionally combined with any of several other embodiments or substituted for elements in any of several other embodiments described herein.
[0019] It should also be understood by persons having ordinary skill in the art that the terminology used herein is for the purpose of describing the certain concepts, and the terminology is not intended to be limiting. Unless indicated otherwise, ordinal numbers (e.g., first, second, third, etc.) are used to distinguish or identify different elements or steps in a group of elements or steps, and do not supply a serial or numerical limitation on the elements or steps of the embodiments thereof. For example, "first," "second," and "third" elements or steps need not necessarily appear in that order, and the embodiments thereof need not necessarily be limited to three elements or steps. It should also be understood that, unless indicated otherwise, any labels such as "left," "right," "front," "back," "top," "middle," "bottom," "forward," "reverse," "clockwise," "counter clockwise," "up," "down," or other similar terms such as "upper," "lower," "above," "below," "vertical," "horizontal," "proximal," "distal," and the like are used for convenience and are not intended to imply, for example, any particular fixed location, orientation, or direction. Instead, such labels are used to reflect, for example, relative location, orientation, or directions. It should also be understood that the singular forms of "a," "an," and "the" include plural references unless the context clearly dictates otherwise.
[0020] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by persons of ordinary skill in the art to which the embodiments pertain.
[0021] As described above, a need has arisen to protect the electronic device from being exposed to the external environment, e.g., water, gas, etc., and to detect presence of liquid. Moreover, a need has arisen to take remedial actions, e.g., removal of the unwanted liquid, in response to detecting presence of unwanted liquid.
[0022]
[0023] It is appreciated that in order to protect the device and electronic components within from the external environment, e.g., liquid such as water or oil, gas, etc., the internal environment 154 may be filled with gel 160, e.g., silicone and fluoro silicone. It is appreciated that the gel may be a pressure transmitting dielectric.
[0024] It is appreciated that in the illustrated embodiment, the housing unit 150 coupled to the substrate 110 forms a housing for the electronic components therein. However, it is appreciated that in some embodiments, the housing unit 150 may further house and hold the exterior surfaces, e.g., bottom surface, side surfaces, etc., of the substrate 110 (not shown here).
[0025] The device further includes a liquid detection unit 180 that detects presence of unwanted liquid within the internal environment 154 of the housing unit 150. It is appreciated that in some embodiments, the liquid detection unit 180 detects the presence of unwanted liquid, e.g., water, oil, etc., by measuring the thermal conductance changes. For example, thermal conductance may be higher when unwanted liquid is present. In some embodiments, the liquid detection unit 180 may detect the presence of unwanted liquid by measuring a change in impedance. For example, the impedance (i.e. resistance) may change when unwanted liquid is present in comparison to when unwanted liquid is absent. In some embodiments, the resistance may be measured by the liquid detection unit 180 at different voltages and the measured values may be fitted to a voltage-current curve where the second order of the coefficient is an indication of thermal conductivity to the environment. In some embodiments, the thermal conductance is higher in presence of unwanted liquid.
[0026] It is appreciated that in some embodiments, the liquid detection unit 180 may detect the presence of unwanted liquid by measuring a change in capacitance. For example, the capacitance value may change when unwanted liquid is present in comparison to when unwanted liquid is absent. In other words, according to some illustrative embodiments, the liquid detection unit 180 may detect presence of unwanted liquid by measuring a change in electrical characteristics, e.g., impedance, capacitance, etc. In some embodiments, the liquid detection unit 180 may include a heating element to generate heat and may detect presence of unwanted liquid by applying a predetermined temperature, e.g., 10° C., and using a temperature sensor to measure the amount of time that it takes for the temperature sensor to measure a predetermined temperature and comparing it to the amount of time that it takes to measure the predetermined temperature in absence of the unwanted liquid. If the difference in the amount of time is greater than a threshold then the liquid detection unit 180 may determine that unwanted liquid is present. In some embodiments, the liquid detection unit 180 is configured to detect presence of liquid responsive to detecting a change in output from the sensor die 130 to a calibrated model. It is appreciated that the liquid detection unit 180 may transmit the measured value(s) to the die 130 for processing.
[0027] Referring now to
[0028] In some embodiments, the electrodes 170 are a pair of looped wires sharing the same electrical connections but have a separation around their midpoint. As such, the gap in between the pair of wires can measure a change in permeability when unwanted liquid is present. In some embodiments, the pair of wires may measure the permeability when unwanted liquid is absent (i.e. during a controlled measurement prior to field use). The permeability may be:
In contrast, when unwanted liquid is present, the permeability changes and can be measures by:
[0029] Referring now to
[0030] Referring now to
[0031] Referring now to
[0032] Referring now to
[0033] Referring now to
[0034] According to some embodiment, in response to detecting the unwanted liquid is present, remedial action is taken. The control circuitry (e.g., within the die 130) is configured to turn the heating element 510 on and maintain a temperature at a predetermined temperature responsive to the liquid detection unit 180 determining that liquid is present until the liquid is evaporated or until the liquid detection unit 180 determines that no more unwanted liquid is present.
[0035] It is appreciated that the heating element 510 may also be used to compensate for a drift in the sensor. For example, the control circuity turns the heating element on to maintain a predetermined temperature in response to detecting that output from the sensor die has drifted. It is appreciated that the heating element 510 may be disposed within a plane of the movable membrane of the sensor (within the die 130). In some embodiments, the heating element 510 is disposed around the movable membrane of the sensor (within the die 130). It is appreciated that the heating element 510 may include silicon, metal, etc.
[0036] Referring now to
[0037] While the embodiments have been described and/or illustrated by means of particular examples, and while these embodiments and/or examples have been described in considerable detail, it is not the intention of the Applicants to restrict or in any way limit the scope of the embodiments to such detail. Additional adaptations and/or modifications of the embodiments may readily appear to persons having ordinary skill in the art to which the embodiments pertain, and, in its broader aspects, the embodiments may encompass these adaptations and/or modifications. Accordingly, departures may be made from the foregoing embodiments and/or examples without departing from the scope of the concepts described herein. The implementations described above and other implementations are within the scope of the following claims.