QUARTZ BOAT TRANSMISSION MECHANISM USED IN DIFFUSION FURNACE

Abstract

A quartz boat transmission mechanism used in a diffusion furnace includes a vertically-upward stand column and a boat pushing mechanism fixed on opposite sides in the diffusion furnace and a side boat leaving mechanism fixed at the bottom of the diffusion furnace. Separated temporary storage sections are fixed on the stand column from top to bottom, an SIC oar horizontally stretches from the boat pushing mechanism, a lift channel section is arranged between the SIC oar and the temporary storage sections, the stand column has a manipulator moving up and down along the stand column, and the side boat leaving mechanism is fixed at the bottom of the diffusion furnace and located below the temporary storage sections.

Claims

1. A quartz boat transmission mechanism used in a diffusion furnace, comprising a vertically-upward stand column (1) fixed on one side in the diffusion furnace (9), a boat pushing mechanism (2) fixed on the other side in the diffusion furnace and a side boat leaving mechanism (6) fixed at the bottom of the diffusion furnace, wherein a plurality of separated temporary storage sections (3) are fixed on the stand column from top to bottom, an SIC oar (4) horizontally stretches from the boat pushing mechanism, a lift channel section (5) is arranged between the SIC oar and the temporary storage sections, the stand column is further provided with a manipulator (7) moving up and down along the stand column, and the side boat leaving mechanism is fixed at the bottom of the diffusion furnace and located below the temporary storage sections.

2. The quartz boat transmission mechanism used in a diffusion furnace according to claim 1, wherein the manipulator (7) comprises a horizontal arm (71) and a grip (72), one end of the horizontal arm is installed on the stand column (1), the grip is installed on the other end of the horizontal arm, and the grip moves left and right along the horizontal arm.

3. The quartz boat transmission mechanism used in a diffusion furnace according to claim 1, wherein the side boat leaving mechanism (6) is fixed at the bottom of the diffusion furnace (9) through a fixing seat (61), the fixing seat comprises a connecting plate (611) and at least two separated annular frames (612) arranged at the same side as the connecting plate; the bottom of the diffusion furnace is provided with a beam (91), and the annular frame is sleeved on the beam and connected to the beam through a screw.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The accompanying drawings illustrate one or more embodiments of the disclosure and together with the written description, serve to explain the principles of the disclosure. Wherever possible, the same reference numbers are used throughout the drawings to refer to the same or like elements of an embodiment, and wherein:

[0014] FIG. 1 is a schematic diagram of transmitting a quartz boat when the position of an SIC oar for taking and placing the boat is relatively high in the prior art;

[0015] FIG. 2 is a schematic diagram of transmitting the quartz boat when the position of the SIC oar for taking and placing the boat is relatively low in the prior art;

[0016] FIG. 3 is a schematic diagram of a quartz boat transmission mechanism installed in a diffusion furnace according to the present invention;

[0017] FIG. 4 is a schematic diagram of the quartz boat transmission mechanism according to the present invention;

[0018] FIG. 5 is a structure diagram of a fixing seat in the present invention;

[0019] FIG. 6 is a bottom structure diagram of the diffusion furnace in the present invention;

[0020] FIG. 7 is a schematic diagram of connecting the fixing seat with a beam; and

[0021] FIG. 8 is an enlarged diagram of part A in FIG. 6.

DETAILED DESCRIPTION

[0022] The present disclosure will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like reference numerals refer to like elements throughout.

[0023] As shown in FIG. 3 and FIG. 4, the present invention provides a quartz boat transmission mechanism used in a diffusion furnace, which comprises a vertically-upward stand column 1 fixed on one side in the diffusion furnace 9, a boat pushing mechanism 2 fixed on the other side in the diffusion furnace 9 and a side boat leaving mechanism 6 fixed at the bottom of the diffusion furnace 9. A plurality of separated temporary storage sections 3 are fixed on the stand column 1 from top to bottom, the temporary storage sections 3 are used for placing the quartz boat processed or to be processed, and the temporary storage sections 3 have a temporary storage section center line 31 in a vertical direction. The stand column 1 is further provided with a manipulator 7 moving up and down along the stand column 1, the manipulator 7 comprises a horizontal arm 71 and a grip 72, one end of the horizontal arm 71 is installed on the stand column 1, the grip 72 is installed on the other end of the horizontal arm 71, the grip 72 is used for grabbing the quartz boat, and the grip 72 moves left and right along the horizontal arm 71, so as to transmit the quartz boat.

[0024] An SIC oar 4 horizontally stretches from the boat pushing mechanism 2, the SIC oar 4 is used for taking out/feeding the quartz boat processed/to be processed from/into a quartz tube, and the height of the position of the SIC oar 4 for taking the boat adjusted by the height of the position on the diffusion furnace where the boat pushing mechanism is installed on. The SIC oar 4 has an SIC oar center line 41 in a vertical direction.

[0025] A lift channel section 5 is arranged between the SIC oar 4 and the temporary storage sections 3, the lift channel section 5 is an operation area where the manipulator goes up or down, and after the manipulator grabs the quartz boat 8 on the SIC oar 4, the manipulator needs to return back to the lift channel section 5 firstly, and then carry out next movement after the manipulator goes up or down to the required height in the lift channel section 5. The lift channel section 5 has a lift channel section center line 51 in a vertical direction.

[0026] In the embodiment, the side boat pushing mechanism 6 is fixed at the bottom of the diffusion furnace 9 that is below the temporary storage sections 3. Thus, since the side boat pushing mechanism 6 is at the right side of the lift channel section, whether the position of the SIC oar 4 for taking the boat is relatively high or low, the grip 72 cannot collide with the quartz boat 8 transmitted on the side boat leaving mechanism 6 in the process that the grip 72 is transmitted to the lift channel section 5 after the grip 72 grabs the quartz boat 8 on the SIC oar 4.

[0027] As shown in FIG. 4, the side boat leaving mechanism 6 is fixed at the bottom of the diffusion furnace through a fixing seat 61. As shown in FIG. 5, the fixing seat 61 comprises a connecting plate 611 and at least two separated annular frames 612 arranged at the same side as the connecting plate 611. As shown in FIG. 6, the bottom of the diffusion furnace is provided with a beam 91, and the beam 91 is welded at the bottom of a PECVD device 9. As shown in FIG. 7 and FIG. 8, the annular frame 612 is sleeved on the beam 91 and connected to the beam through a screw.

[0028] According to the quartz boat transmission mechanism used in a diffusion furnace provided by the present invention, the side boat leaving mechanism is fixed at the bottom of the diffusion furnace that is below the temporary storage sections, and the manipulator cannot collide with the quartz boat transmitted on the side boat leaving mechanism when the manipulator grabs the quartz boat on the SIC oar and then transmits the quartz boat to the lift channel section. Moreover, the height of the position of the SIC oar for taking the boat decides the overall height of the diffusion furnace to a large extent. Therefore, under the condition of the same quantity of the tubes of the diffusion furnace, when the position of the SIC oar for taking the boat is relatively low, the overall height of the diffusion furnace can also be reduced, so that the adaptive performance of the diffusion furnace can be greatly increased.

[0029] The description above is only the preferable embodiment of the present invention, and is not used to limit the present invention. Any modification, equal replacement and improvement made in the spirit and principle of the present invention shall fall in the protection scope of the present invention.