Method of bonding with silver paste

Abstract

A method for bonding with a silver paste includes coating a semiconductor device or a substrate with the silver paste. The silver paste contains a plurality of silver particles and a plurality of bismuth particles. The method further includes disposing the semiconductor on the substrate and forming a bonding layer by heating the silver paste, wherein the semiconductor and the substrate are bonded to each other by the bonding layer.

Claims

1. A method for bonding with a silver paste, the method comprising: coating a semiconductor or a substrate with the silver paste, the silver paste comprising a plurality of silver particles and a plurality of bismuth particles; disposing the semiconductor on the substrate; and forming a bonding layer by heating the silver paste, wherein the semiconductor and the substrate are bonded to each other by the bonding layer, wherein the forming of the bonding layer comprises: heating the silver paste to transform the bismuth particles into bismuth liquids; covering surfaces of the silver particles with the bismuth liquids; causing the bismuth liquids covering the surfaces of the silver particles to contact adjacent bismuth liquids; diffusing the bismuth liquids into the silver particles while also diffusing the silver particles into the bismuth liquids to form a bonding region in which the silver particles are joined to each other, and wherein in the forming of the bonding layer, substantially all of the bismuth liquids diffuse into the silver particles, and wherein the bismuth liquid substantially disappears.

2. The method of claim 1, wherein in the forming of the bonding layer, the heating is conducted at 272 C. or higher.

3. The method of claim 2, wherein in the forming of the bonding layer, the heating is conducted at 300 C. or higher.

4. The method of claim 1, wherein the bismuth particles are contained in the silver paste at 10 wt % or less.

5. The method of claim 4, wherein the bismuth particles are contained in the silver paste at 5 wt % or less.

6. The method of claim 1, wherein the silver particles have a diameter within the range of 1 m to 10 m.

7. The method of claim 1, wherein the bismuth particles have a diameter within the range of 1 m to 10 m.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIGS. 1 and 2 are views schematically showing a process of bonding a semiconductor device to a substrate using a silver paste.

(2) FIG. 3 is a view schematically showing a silver paste according to an exemplary embodiment of the present invention.

(3) FIGS. 4 to 8 are views sequentially showing a method for bonding with a silver paste according to an exemplary embodiment of the present invention.

DETAILED DESCRIPTION

(4) Exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein, and thus may be embodied in many different forms.

(5) In the drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity. Further, it will be understood that when a layer is referred to as being on another layer or a substrate, it may be formed directly on another layer or the substrate or a third layer may be interposed therebetween. Throughout the specification, like numerals substantially refer to like components.

(6) Now, a method for bonding with a silver paste according to an exemplary embodiment of the present invention will be described with reference to FIGS. 1 to 8.

(7) FIGS. 1 and 2 are views schematically showing a process of bonding a semiconductor device to a substrate using a silver paste.

(8) Referring to FIGS. 1 and 2, after a silver paste 30 is coated on a substrate 10, a silicon carbide (SiC) semiconductor device 20 is disposed on the substrate 10 coated with the silver paste 30, and then the silver paste 30 is heated and sintered to form a bonding layer 35. Hence, the semiconductor device 20 and the substrate 10 are bonded to each other through the bonding layer 35. The silver paste 30 is coated on the substrate 10 in the present exemplary embodiment, but the present invention is not limited thereto. For example, in certain embodiments, the silver paste 30 may be coated on the semiconductor device 20 before the silver paste 30 is heated and sintered.

(9) Hereinafter, a silver paste and a method of bonding with a silver paste according to an exemplary embodiment of the present invention will be described in detail.

(10) FIG. 3 is a view schematically showing a silver paste according to an exemplary embodiment of the present invention.

(11) Referring to FIG. 3, a silver paste 30 according to the present exemplary embodiment contains a plurality of silver particles 100 and a plurality of bismuth (Bi) particles 200. In certain embodiments, the silver particles 100 and the bismuth particles 200 may each have a diameter of 1 m to 10 m.

(12) In certain embodiments, the bismuth particles 200 may be contained in the silver paste 30 at 10 wt % or less. In certain embodiments, the bismuth particles 200 may be contained in the silver paste 30 at 5 wt % or less. When the bismuth particles 200 are contained in the silver paste 30 at more than 10 wt %, at the time of sintering the silver paste 30, the heating temperature may increase or the bismuth ingredient may remain on the bonding layer 35, causing bonding to be difficult.

(13) FIGS. 4 to 8 are views sequentially showing a method for bonding with a silver paste according to an exemplary embodiment of the present invention.

(14) Referring to FIG. 4, the silver paste 30 containing the plurality of silver particles 100 and the plurality of bismuth particles 200 is heated. In certain embodiments, the heating is conducted at a temperature of 272 C. or higher. In certain embodiments, the heating is conducted at 300 C. In cases where the heating temperature is higher than the melting point of bismuth, approximately 272 C., the bismuth particles 200 melt into bismuth liquid 210. Since the melting point of silver is approximately 962 C., the silver particles 100 maintain the particle state even though they are heated to 300 C. In addition, a chemical reaction does not occur between the bismuth liquid 210 and the silver particles 100.

(15) Referring to FIGS. 5 and 6, the bismuth liquid 210 is in a wetting state on a surface of each of the silver particles 100, and thus the bismuth liquid 210 covers the surface of each of the silver particles 100. The term wetting state refers to a change of a solid-gas interface into a solid-liquid interface since a gas contacting a surface of a solid is pushed out by a liquid.

(16) Then, the bismuth liquid 210 covering the surface of the silver particles 100 is in contact with the neighboring bismuth liquid 210, and thus the bismuth liquids 210 covering the respective silver particles 100 contact each other.

(17) Referring to FIG. 7, the bismuth liquids 210 covering the silver particles 100 gradually diffuse into the silver particles 100 through the contact between the bismuth liquid 210 and the bismuth liquid 210. Thus, the amount of bismuth liquid 210 covering the silver particles 100 decreases. In addition, the silver particles 100 diffuse into the bismuth liquids 210, which are in contact, to form a bonding region 110 in which the respective silver particles are joined to each other.

(18) Referring to FIG. 8, substantially all the bismuth liquid 210 covering the silver particles 100 diffuses into the silver particles 100, and hence the bismuth liquid 210 substantially disappears. Thus, the respective silver particles 100 are joined to each other by the bonding region 110 to form the bonding layer 35. Therefore, the silver paste 30 according to FIG. 1 forms the bonding layer 35, and the semiconductor device 20 is bonded to the substrate 10 through the bonding layer 35.

(19) This bonding method is called a transient liquid phase diffusion bonding method.

(20) According to the transient liquid phase diffusion bonding method, in order to bond same metals A to each other, a metal B having a lower melting point than the metal A is positioned between metals A and then heating is conducted at a temperature higher than the melting point of the metal B, so that the metal B is liquefied to diffuse in the solid phase metal A. In certain embodiments, the metal B disappears, and the solid phase metals A are joined to each other.

(21) In the present exemplary embodiment, silver materials are joined to each other by using bismuth, which is a metal material having a lower melting point than silver. In other words, since the melting point of silver is sufficiently higher than that of bismuth, the silver particles 100 are used for joining, and the bismuth particles 200 are an activating material for joining the silver particles 100. However, the present invention is not limited to silver and bismuth; other metals may be substituted for the joining and activating materials, as long as the melting point of the activating material is lower than that of the joining material.

(22) As such, at the time of bonding with the silver paste 30, the diffusion of the bismuth liquid 210 into the silver particles 100 and the diffusion of the silver particles into the bismuth liquid 210 are simultaneously conducted, thereby shortening the bonding time.

(23) Meanwhile, in the related art, the existing bonding with the silver paste is achieved by sintering, and the sintering temperature and the sintering time depend on the size of the silver particles. However, in the present exemplary embodiment, the silver particles can be bonded to each other merely by heating the silver paste at only the melting point of bismuth or higher without melting the silver particles, thereby making it possible to use relatively large-sized silver particles. In addition, at the time of heating for sintering, heating may be conducted at only the melting point of bismuth or higher, thereby shortening the sintering time and thus reducing the time when a semiconductor device is exposed to high temperature, so that damage to the semiconductor device can be minimized at the time of bonding.

(24) Further, an existing silver paste in the related art contains a sintering mediator material such as glass frit, but this sintering mediator material is not a metal material, causing the increase in electrical resistance. However, in the present exemplary embodiment, the bismuth particles are used as an activating material for joining the silver particles without using the sintering mediator material, thereby reducing the electrical resistance.

(25) While this invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.