METHOD FOR ACTIVATING AN ACTUATOR UNIT AND MICROMECHANICAL DEVICE

Abstract

A method for activating a deflectable micromechanical actuator unit, in particular a micromirror. A periodic setpoint deflection profile of a deflection of the actuator unit is predefined at a predefined period duration. The actuator unit is periodically activated based on an activation signal according to the predefined period duration. A deflection profile of the deflection of the actuator unit is measured during at least one activation period. The activation signal is adapted for at least one of the following activation periods based on the setpoint deflection profile and on the measured deflection profile.

Claims

1. A method for activating a deflectable micromechanical actuator unit, comprising: predefining a periodic setpoint deflection profile of a deflection of the actuator unit at a predefined period duration; and periodically activating the actuator unit based on an activation signal according to the predefined period duration; measuring a deflection profile of the deflection of the actuator unit during at least one activation period; and adapting the activation signal for at least one of the following activation periods based on the setpoint deflection profile and on the measured deflection profile.

2. The method as recited in claim 1, wherein the actuator unit is a micromirror.

3. The method as recited in claim 1, wherein the activation signal is adapted by using one of a fast block LMS algorithm, an LMS algorithm, or an RLS algorithm.

4. The method as recited in claim 1, wherein the activation signal is further adapted based on a property of the actuator unit, the property being a resonance frequency of the actuator unit.

5. The method as recited in claim 1, wherein the predefined period duration corresponds to a resonance frequency of the actuator unit.

6. The method as recited in claim 1, wherein the measuring of the deflection profile is repeated in every nth activation period, n being a positive natural number.

7. The method as recited in claim 1, wherein the adapted activation signal is used for activating the actuator unit starting with an mth subsequent activation period, m being a positive natural number.

8. The method as recited in claim 1, wherein the actuator unit is deflectable in multiple deflection directions and the method is carried out separately for every deflection direction.

9. A micromechanical device having a periodic drive, comprising: a deflectable actuator unit; a control unit designed to periodically activate the actuator unit at a predefined period duration based on an activation signal; and a measuring device designed to measure a deflection profile of a deflection of the actuator unit during at least one activation period; wherein the control unit is designed to adapt the activation signal for at least one of the following activation periods based on a periodic setpoint deflection profile and on the measured deflection profile, a period duration of the setpoint deflection profile corresponding to the predefined period duration.

10. The micromechanical device as recited in claim 9, wherein the actuator unit includes a micromirror.

11. The micromechanical device as recited in claim 9, wherein the control unit is designed to adapt the activation signal by using one of a fast block LMS algorithm, an LMS algorithm, or an RLS algorithm.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG. 1 shows a flow chart of a method for activating a deflectable micromechanical actuator unit according to one specific embodiment of the present invention;

[0021] FIG. 2 shows a schematic illustration of a setpoint deflection profile, a measured deflection profile, and an activation signal.

[0022] FIG. 3 shows a schematic view of a micromechanical device including a periodic drive according to one specific embodiment of the present invention.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

[0023] The numbering of the method steps is used for clarification purposes and is in general not supposed to imply a specific chronological sequence. In particular, several method steps may be carried out simultaneously. Various specific embodiments may be arbitrarily combined with one another, if expedient.

DETAILED DESCRIPTION OF THE INVENTION

[0024] FIG. 1 shows a flow chart for elucidating a method for activating a deflectable micromechanical actuator unit. The actuator unit may in particular include at least one micromirror or a micromirror array. The actuator unit is deflectable, rotatable, or pivotable about one axis or two or multiple axes.

[0025] In a first method step S1, a periodic setpoint deflection profile of a deflection of the actuator unit is predefined. In FIG. 2, an exemplary setpoint deflection profile f1 of an amplitude A of the deflection of the actuator unit is illustrated, setpoint deflection profile f1 having a predefined period duration T. Predefined period duration T may preferably correspond to a resonance frequency of the actuator unit.

[0026] In another method step S2, the actuator unit is periodically activated based on an activation signal f2 according to predefined period duration T. A period duration of the activation signal and thus also every activation period is equal to predefined activation period T. An exemplary characteristic of a signal intensity S of activation signal f2 is also illustrated in FIG. 2.

[0027] A deflection profile f3 of the deflection of the actuator unit is measured during an activation period which is referred to as a measuring period in the following. An exemplary time curve of an amplitude A of measured deflection profile f3 is illustrated in FIG. 2. Corresponding measured values of the deflection of the actuator unit are preferably measured for a plurality of measuring points within the activation period, for example 512 measuring points, and deflection profile f3 is determined by interpolation.

[0028] For at least one of the activation periods following the measuring periods, activation signal f2 is adapted based on setpoint deflection profile f1 and measured deflection profile f3.

[0029] In the following, the adaptation of the activation signal is elucidated in greater detail with the aid of an algorithm which is derived from the fast block LMS algorithm. For this purpose, the values of deflection profile f3 which are measured during the measuring period at the measuring points in time are plotted as components in a measuring deflection vector. A setpoint deflection vector, whose components are equal to the values of setpoint deflection profile f1 at the particular measuring points in time, is similarly created. A Fourier-transformed measuring deflection vector and a Fourier-transformed setpoint deflection vector are determined by a Fourier transform of the measuring deflection vector or of the setpoint deflection vector. An error vector is computed with the aid of difference formation of the Fourier-transformed setpoint deflection vector and of the Fourier-transformed measuring deflection vector. The error vector is multiplied by a predefined scaling value and by a transfer function and an offset vector is computed therefrom. The transfer function may be selected as a function of frequency and may be determined, in particular, as a function of a property of the actuator unit, in particular of a resonance frequency of the actuator unit. The transfer function may, however, also be set to a constant value. According to another specific embodiment, corresponding offset vectors are computed for a phase as well as for an amplitude of the error vector. Activation signal f2 is also Fourier-transformed and a Fourier-transformed control signal vector having corresponding components is computed for each measuring point in time. The Fourier-transformed control signal vector is adapted through the addition of the offset vector and a new Fourier-transformed control signal vector is thus computed. The offset vector may also be weighted, in particular in order to adjust and improve the convergence and stability of the algorithm. Adapted activation signal f2 is determined with the aid of an inverse Fourier transform of the Fourier-transformed control signal vector and, potentially, by interpolation.

[0030] According to another specific embodiment, an LMS or an RLS algorithm may also be used to determine adapted activation signal f2.

[0031] According to one refinement of the method, the transfer function is determined via LMS algorithm in order to improve the convergence of the fast block LMS algorithm.

[0032] According to another specific embodiment, a wavelet decomposition may be used.

[0033] According to one specific embodiment, the actuator unit is activated based on the adapted activation signal during the activation period immediately following the measuring period. Deflection profile f3 of the deflection of actuator unit 2 is preferably measured during each individual activation period and activation signal f2 is adapted for the subsequent activation period.

[0034] The present invention is, however, not limited thereto. For example, the measuring of deflection profile f3 may also be carried out only for every nth activation period, n being a positive natural number. The deflection profile is measured for every second, third, or fourth activation period, for example. Accordingly, adapted activation signal f2 may be used to activate the actuator unit starting with the mth subsequent activation period, m being a positive natural number. For example, the deflection profile may be measured during a first activation period, the activation signal may be adapted during a subsequent second activation period, and the actuator unit is activated in an additional subsequent third activation period based on the adapted activation signal.

[0035] According to one refinement, the actuator unit is deflectable along several axes, a corresponding periodic setpoint deflection profile being predefined for each deflection and the activation signal being adapted according to the above-described method.

[0036] FIG. 3 shows a schematic view of a micromechanical device 1 including a periodic drive. Micromechanical device 1 includes a deflectable actuator unit 2, in particular a micromirror or a micromirror array, actuator unit 2 being rotatable, pivotable, or deflectable about one axis or multiple axes. Micromechanical device 1 further includes a control unit 3, and a measuring device 4. Control unit 3 is designed to periodically activate actuator unit 2 at a predefined period duration T based on an activation signal f2. Activation signal f2 may, for example, predefine a time curve of a voltage or of an electric current of an actuator for deflecting actuator unit 2.

[0037] Measuring device 4 is designed to measure a deflection profile f3 of the deflection of actuator unit 2 during at least one activation period.

[0038] Control unit 3 is furthermore designed to adapt activation signal f2 for at least one of the following activation periods based on a periodic setpoint deflection profile f1 and based on measured deflection profile f3. A period duration of setpoint deflection profile f1 corresponds in this case to predefined period duration T.

[0039] Control unit 3 may be designed, in particular, to adapt the activation signal by using a fast block LMS algorithm or an LMS algorithm, in particular according to the above-described method.

[0040] Control unit 3 may be designed to carry out each of the above-described methods.