Laser rapid fabrication method for flexible gallium nitride photodetector

Abstract

The invention provides a laser rapid fabrication method for flexible gallium nitride (GaN) photodetector which comprises the following steps: (1) bonding a flexible substrate to a GaN epitaxial wafer; (2) adjusting the focal plane position of a light beam, and ensuring that the light beam is incident from the side of a GaN epitaxial wafer substrate; (3) enabling the light beam to perform scanning irradiation from the edge of a sample structure obtained in the step (1); (4) adjusting the process parameters, and scanning irradiation in the reverse direction along the path in the step (3); (5) remove the original rigid transparent substrate of the epitaxial wafer to obtain a Ga metal nanoparticle/GaN film/flexible substrate structure; and (6) preparing interdigital electrodes on the surfaces of the Ga metal nanoparticles obtained in the step (5).

The flexible GaN photodetector with Ga metal nanoparticle in-situ distribution detection surface is prepared in one step through laser technology, the process is simplified, meanwhile, the surface of the detector is induced to form the surface plasmon resonance effect, the light absorption and light response performance is greatly enhanced, and the flexible gallium nitride photodetector is suitable for industrial production.

Claims

1. A laser rapid fabrication method for flexible gallium nitride (GaN) photodetector, comprising the following steps: 1) a flexible substrate is bonded to an epitaxial wafer of GaN thin film, wherein the epitaxial wafer of GaN film needs to be a rigid transparent substrate/GaN film structure, after bonding, a rigid transparent substrate/GaN film/flexible substrate structure is obtained; 2) put a sample on a processing table with a fixed height below a light outlet, adjust focus position of a laser beam so that its focal plane is within a range of 0.2 mm between an interface of the rigid transparent substrate and the GaN film in the rigid transparent substrate/GaN film/flexible substrate structure described in step 1), a spot size l.sub.0 of the focal plane is 5-100 μm, and the laser beam is guaranteed to be incident from a side of the rigid transparent substrate; 3.) laser wavelength is selected as 250-1200 nm, and a ultrafast laser with pulse width less than or equal to 10.sup.−12 s is selected, set laser pulse frequency f.sub.0 to 200 kHz-1 MHz; low single pulse energy l.sub.1 of 0.1-1 μJ, low laser scanning speed vi and small scanning spacing d.sub.1 are selected as processing parameters which are used for scanning from an edge of the structure obtained in step 1), and meets the requirement of: $0\le \left(1-\frac{v_1}{l_0⨯f_0}\right)⨯100\%<1\mathrm{and}0\le \left(1-\frac{d_1}{l_0}\right)⨯100\%<1,$ Ga metal nanoparticles were precipitated by irradiation; 4) laser pulse width, wavelength and pulse frequency are selected the same as described in step 3); high single pulse energy I.sub.2 of 1-2 μJ high laser scanning speed v.sub.2 and large scanning spacing d.sub.2 are selected as processing parameters which are used for scanning in the reverse direction along the scan path in step 3), and meets the requirement of: $\left(1-\frac{v_2}{l_0⨯f_0}\right)⨯100\%<0\mathrm{and}\left(1-\frac{d_2}{l_0}\right)⨯100\%<0,$ separate the interface between the GaN film and the rigid transparent substrate; 5) remove the rigid transparent substrate separated by laser scanning to obtain a Ga metal nanoparticle/GaN film/flexible substrate structure; 6) interdigital electrodes are prepared on a surface of the Ga metal nanoparticles in the structure obtained in step 5) to obtain the flexible GaN photodetector.

2. A laser rapid fabrication method for flexible GaN photodetector according to claim 1, characterized in that: in step 3), the laser wavelength is selected in a range where its photon energy is less than a band gap of the corresponding rigid transparent substrate.

3. A laser rapid fabrication method for flexible GaN photodetector according to claim 1, characterized in that: in step 6), the material of the interdigital electrode is a metal with a metal work function higher than the semiconductor affinity of the GaN and forms a Schottky contact with the GaN film.

Description

DESCRIPTION OF DRAWINGS

[0015] FIG. 1 includes FIGS. 1(a), 1(b), 1(c), 1(d) and 1(e) showing a flow diagram of the laser rapid fabrication method for flexible GaN photodetector provided by the present invention;

[0016] FIG. 1(e) is a schematic cross-sectional view of the flexible GaN photodetector provided by the present invention;

[0017] FIG. 2 is a schematic top view of a flexible GaN photodetector provided by the present invention.

[0018] Where, 1. rigid transparent substrate, 2. GaN epitaxial wafer, 3. Ga metal nanoparticles, 4. interdigital electrode, 5. flexible substrate, 6. ultrafast laser beam.

PREFERRED EMBODIMENTS

[0019] In order to make the purposes, technical schema and advantages of the present invention clearer, the technical schema of the present invention will be described clearly and completely below with the embodiments and the accompanying drawings. Obviously, the described embodiments are one embodiment of the invention and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

Embodiment 1

[0020] Referring to FIG. 1, a laser rapid fabrication method for a flexible GaN photodetector provided in this embodiment includes the following steps:

[0021] 1) Bonding the thermal release tape flexible substrate and the sapphire GaN film epitaxial wafer to obtain a sapphire substrate/GaN film/thermal release tape flexible substrate structure; [0022] 2) The sapphire substrate/GaN film/thermal release tape flexible substrate structure described in step 1) is put on a processing table with a fixed height below the light outlet, and the focal plane of the laser beam is arranged between the interface of sapphire substrate and the GaN film. Since the thickness of GaN epitaxial layer used is 4 μm, and the thickness of the thermal release tape flexible substrate is 500 μm, the focus position is set to 504 μm on the processing table, and the beam is incident from the sapphire substrate side, and the spot size is 10 μm. [0023] 3) Since the sapphire substrate has a high transmittance to short-wavelength laser beams, a laser beam with a pulse width of 10 picoseconds (10.sup.−12 s) was selected at 355 nm. The energy distribution of the beam is an ordinary circular spot Gaussian beam, adjust beam energy to 0.5 μJ, the repetition frequency is 250 kHz, the scanning speed is 100 mm/s, the scanning path of the laser beam is line scanning filling, and the scanning spacing is 8 μm. Start scanning and irradiating from the edge of sapphire substrate/GaN film/thermal release tape structure obtained in step 1), thereby inducing in-situ growth of Ga metal nanoparticles at the interface between the GaN film and the sapphire substrate. [0024] 4) Laser pulse width, wavelength and pulse frequency are selected the same as described in step 3). The single pulse energy is adjusted to 1.5 μJ, the scanning speed is 3500 mm/s, and the scanning spacing is 20 μm. Starting point of the scanning path is set as the end point of the scanning path in step 3), and scanning is performed in the reverse direction along the path in step 3). [0025] 5) After scanning, remove the sapphire substrate. At this point, a GaN film/thermal release tape flexible substrate structure is obtained, and the surface of the GaN film is covered with uniformly distributed Ga metal nanoparticles; [0026] 6) Au interdigital electrodes are evaporated on the surface of Ga metal nanoparticles obtained in step 5), and the thickness of the electrodes is 80 nm, so as to form Schottky contact with the structure obtained in step 5), that is, a flexible GaN photodetector with an average size of Ga metal nanoparticles on the surface of 160 nm is prepared. The flexible gallium nitride photodetector, compared with the GaN photodetector formed by Schottky electrode evaporation directly on a rigid substrate, its light response intensity for 280-400 nm band is improved, and the response peak appears at 350 nm, which is increased by 28 times.

Embodiment 2

[0027] Referring to FIG. 1, a laser rapid fabrication method for a flexible GaN photodetector provided in this embodiment includes the following steps: [0028] 1) Bonding the PET flexible substrate and the sapphire GaN film epitaxial wafer to obtain a sapphire substrate/GaN film/PET flexible substrate structure; [0029] 2) The sapphire substrate/GaN film/PET flexible substrate structure described in step 1) is put on a processing table with a fixed height below the light outlet, and the focal plane of the laser beam is arranged between the interface of sapphire substrate and the GaN film. Since the thickness of GaN epitaxial layer used is 4 μm, and the thickness of the PET flexible substrate is 250 μm, the focus position is set to 254 μm on the processing table, and the beam is incident from the sapphire substrate side, and the spot size is 10 μm. [0030] 3) Since the sapphire substrate has a high transmittance to short-wavelength laser beams, a laser beam with a pulse width of 10 picoseconds (10.sup.−12 s) was selected at 355 nm. The energy distribution of the beam is a circular spot flat-top beam, adjust beam energy to 0.7 μJ, the repetition frequency is 250 kHz, the scanning speed is 100 mm/s, the scanning path of the laser beam is line scanning filling, and the scanning spacing is 5 μm. Start scanning and irradiating from the edge of sapphire substrate/GaN film/PET structure obtained in step 1), thereby inducing in-situ growth of Ga metal nanoparticles at the interface between the GaN film and the sapphire substrate. [0031] 4) Laser pulse width, wavelength and pulse frequency are selected the same as described in step 3). The single pulse energy is adjusted to 1.8 μJ, the scanning speed is 3000 mm/s, and the scanning spacing is 15 μm. Starting point of the scanning path is set as the end point of the scanning path in step 3), and scanning is performed in the reverse direction along the path in step 3). [0032] 5) After scanning, remove the sapphire substrate. At this point, a GaN film/PET flexible substrate structure is obtained, and the surface of the GaN film is covered with uniformly distributed Ga metal nanoparticles; [0033] 6) Au interdigital electrodes are evaporated on the surface of Ga metal nanoparticles obtained in step 5), and the thickness of the electrodes is 80 nm, so as to form Schottky contact with the structure obtained in step 5), that is, a flexible GaN photodetector with an average size of Ga metal nanoparticles on the surface of 80 nm is prepared. The flexible gallium nitride photodetector, compared with the gallium nitride photodetector formed by Schottky electrode evaporation directly on a rigid substrate, its light response intensity for 280-400 nm band is improved, and the response peak appears at 350 nm, which is increased by 35 times.

[0034] The above embodiment 1 and embodiment 2 are only examples, wherein the selection of rigid transparent substrate and flexible substrate, the setting of various parameters of laser beam are only examples, and not limitations of the present invention. For example, PI or PDMS can also be selected for flexible substrates, SiC can also be selected for rigid transparent substrates, and Pt can be selected for interdigital electrode materials.