Single-slot tubular cathode
D1051838 ยท 2024-11-19
Assignee
Inventors
- Bon-Woong Koo (Andover, MA, US)
- Frank Sinclair (Hartland, ME, US)
- Alexandre Likhanskii (Malden, MA, US)
- Svetlana Radovanov (Brookline, MA, US)
- Alexander Perel (Danvers, MA, US)
- Graham Wright (Newburyport, MA, US)
- Jay T. Scheuer (Rowley, MA, US)
- Daniel Tieger (Manchester, MA, US)
- You Chia Li (Reading, MA, US)
- Jay Johnson (Gloucester, MA, US)
- Tseh-Jen Hsieh (Rowley, MA, US)
- Ronald Johnson (Gloucester, MA, US)
Cpc classification
H01J37/317
ELECTRICITY
for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
International classification
Abstract
Claims
The ornamental design for a single-slot tubular cathode substantially as shown and described.
Description
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(9) The broken lines illustrate the environmental structure and form no part of the claimed design.