PROCESS AIR UNIT FOR HEATING PROCESS AIR
20240377102 ยท 2024-11-14
Inventors
Cpc classification
F26B21/10
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F26B2210/12
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F26B23/02
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H2210/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F26B21/002
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Y02E20/34
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
F24H15/204
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H9/1881
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H9/0068
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F23J15/06
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H3/087
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H15/345
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F26B15/12
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H15/36
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H15/208
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H9/2085
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
International classification
F24H9/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H9/1881
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F24H15/204
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
Abstract
A process air unit (20) for heating a process air (21) for a workpiece processing system comprises a process air duct (22) through which a process air (21) can flow, a combustion chamber (30) for burning a combustion air, which is overflowed by the process air (21) in the process air duct (22) and thereby transfers heat to the process air (21), and a tube bundle arrangement (35) connected to the combustion chamber, which comprises at least one tube bundle (36) having a plurality of tubes (38) through which the flue gas (34) from the combustion chamber (30) can flow. The plurality of tubes (38) of the at least one tube bundle (36) is oriented in the process air duct (22) transversely to the process air flow direction, so that they are overflowed by the process air (21) and thereby transfer heat from the flue gas (34) to the process air (21), and the tube bundle arrangement (35) is arranged, with respect to the process air flow direction, upstream of the combustion chamber (30) in the process air duct (22) in order to achieve increased energy efficiency.
Claims
1. A process air unit for heating a process air, comprising: a process air duct through which a process air can flow and which comprises, in the region of a first duct end, an inlet opening for taking in a process air to be heated and, in the region of a second duct end opposite the first duct end, an outlet opening for discharging a heated process air; a combustion chamber for burning a combustion air, which is arranged at least partially within the process air duct so that the combustion chamber is overflowed by the process air and thereby transfers heat to the process air; and a tube bundle arrangement being connected to the combustion chamber and including at least one tube bundle having a plurality of tubes through which the flue gas from the combustion chamber can flow, wherein the plurality of tubes of the at least one tube bundle is oriented transversely to the process air flow direction and is arranged at least partially within the process air duct so that they are overflowed by the process air and thereby transfer heat from the flue gas to the process air, and wherein the tube bundle arrangement is arranged, with respect to the process air flow direction, upstream of the combustion chamber in the process air duct.
2. The process air unit according to claim 1, in which the tube bundle arrangement includes a plurality of tube bundles which are arranged one behind the other in the process air duct with respect to the process air flow direction, the flue gas passing through the different tube bundles one after the other in a sequence counter to the process air flow direction and thereby flowing through the tubes of the successively arranged tube bundles in opposite directions, each transverse to the process air flow direction.
3. The process air unit according to claim 2, in which the plurality of tube bundles of the tube bundle arrangement each comprise include a plurality of tube rows which extend one behind the other with respect to the process air flow direction, in each case in comparison between two adjacent ones of the plurality of tube bundles, the tube bundle closer to the combustion chamber having a larger number of tube rows than the tube bundle further away from the combustion chamber.
4. The process air unit according to claim 3, wherein the reduction in the number of tube rows between two adjacent tube bundles in the direction away from the combustion chamber each is 20% to 50%.
5. The process air unit according to claim 1, wherein: a combustion air supply for introducing combustion air into the combustion chamber and a flue gas discharge line for discharging the flue gas after flowing through the tube bundle arrangement are arranged on the same side of the process air duct, and the tube bundle arrangement contains an odd number of tube bundles.
6. The process air unit according to any of claims claim 1, further including: a first collecting box in the peripheral region of the process air duct, which connects the combustion chamber to all tubes of the tube bundle of the tube bundle arrangement facing the combustion chamber: a second collecting box in the peripheral region of the process air duct, which connects all the tubes of the tube bundle of the tube bundle arrangement facing away from the combustion chamber to the flue gas discharge line; and if the tube bundle arrangement comprises includes several tube bundles, in each case a further collecting box in the peripheral region of the process air duct, which connects all tubes of a tube bundle to all tubes of an adjacent tube bundle of the tube bundle arrangement.
7. The process air unit according to claim 1, wherein the inlet opening for taking in the process air to be heated is provided at the first duct end in an end face of the process air duct.
8. The process air unit according to claim 1, wherein the inlet opening for receiving the process air to be heated is provided at the first duct end in a peripheral side of the process air duct, and a baffle plate is arranged on the tube bundle arrangement on the side facing the inlet opening, which, starting from the combustion chamber side, blocks at least a portion of the tubes against overflow from the peripheral side of the process air duct.
9. The process air unit according to claim 1, further including a filter being arranged downstream of the combustion chamber with respect to the process air flow direction, a perforated plate for distributing the process air to the filter being arranged between the combustion chamber and the filter.
10. The process air unit according to claim 1, further including a perforated plate, arranged downstream of the combustion chamber with respect to the process air flow direction, for distributing the process air over the entire depth of the combustion chamber.
11. The process air unit according to claim 1, further comprising including a fan which is arranged upstream of the tube bundle arrangement with respect to the process air flow direction, the process air duct between the fan and the tube bundle arrangement including a continuously expanded duct section.
12. The process air unit according to claim 1, further including a fan which is arranged upstream of the tube bundle arrangement with respect to the process air flow direction, the process air duct between the fan and the tube bundle arrangement comprising including at least one air baffle for expanding the process air flow.
13. The process air unit according to claim 1, further including a fan being arranged downstream of the combustion chamber with respect to the process air flow direction.
14. The process air unit according to claim 1, further including at least one temperature detection apparatus for detecting a temperature of the process air upstream of the tube bundle arrangement and/or a temperature of the process air downstream of the combustion chamber.
15. A workpiece processing system, comprising at least one process chamber for processing workpieces; and at least one process air supply line for supplying a process air into the at least one process chamber, wherein a process air unit for heating the process air according to claim 1 is arranged in the at least one process air supply line.
16. The process air unit according to claim 11, wherein the process air duct between the fan and the tube bundle arrangement includes at least one air baffle for expanding the process air flow.
17. The process air unit according to claim 12, wherein the process air duct between the fan and the tube bundle arrangement includes a continuously expanded duct section.
Description
BRIEF DESCRIPTION OF THE FIGURES
[0020] The above and other features and advantages of examples disclosed herein will be better understood from the following description of preferred, non-limiting embodiments with reference to the accompanying drawing. Therein show, mostly schematically:
[0021]
[0022]
[0023]
[0024]
[0025]
[0026]
[0027]
[0028]
DETAILED DESCRIPTION
[0029] With reference to
[0030] The workpiece processing system 10 shown in
[0031] To the process chamber 12 or its zones is supplied a corresponding process air via at least one process air supply line 18. In the exemplary embodiment of
[0032] As indicated in
[0033] Referring to
[0034] The process air unit 20 has a process air duct 22, through which the respective process air 21 (e.g. fresh air or recirculating air) can flow. In the area of a first duct end (right in
[0035] In the process air duct 22, there is arranged a combustion chamber 30 in the form of a normal gas combustion chamber, over which the process air 21 flows (i.e. does not flow in). The combustion chamber 30 has, for example, a round tubular shape (as can be seen, for example, in
[0036] In the process air duct 22, there is also arranged a tube bundle arrangement 35, over which the process air 21 also flows. The combustion chamber 30 and the tube bundle arrangement 35 connected to it form a compact unit that can be inserted as a component into the process air unit 20. The tube bundle arrangement 35 comprises at least one tube bundle with several tubes and is connected to the combustion chamber 30 via a first collecting box 40, so that the flue gas 34 from the combustion chamber 30 flows through the tubes of the tube bundle arrangement 35. As illustrated in
[0037] As shown in
[0038] As illustrated in
[0039] As an alternative or in addition to the fan 26a/26b, as illustrated in
[0040] With reference to
[0041]
[0042]
[0043] The plurality of tube bundles 36a, 36b, 36c is arranged one behind the other with respect to the process air flow direction (right-left direction in
[0044] In order to ensure an optimum flow through the tubes 38 of the tube bundles 36n and to keep the pressure loss as low as possible, the individual tube bundles 36n of the tube bundle arrangement 35 preferably have different numbers of tube rows 37 and thus also of tubes 38. The first tube bundle 36a closest to the combustion chamber 30 preferably has the highest number of tube rows 37, since the temperature of the flue gas 34 and thus the operating volume flow are highest here. With each further tube bundle 36b, 36c, the number of tube rows 37 or tubes 38 decreases in the direction away from the combustion chamber 30, preferably by about 20% to 50% in each case, optionally by about 30% to 40%. In the exemplary embodiment of
[0045] Depending on the application of the process air unit 20, for example, there may be different sizes and orientations of the parking positions. This can result in different inflow and outflow situations for the process air, which must be taken into account in the design of the process air unit.
[0046]
[0047]
[0048] In another embodiment of examples disclosed herein (not shown), such a perforated plate 48 can also be arranged downstream of the combustion chamber 30 without a filter 28. Even without a filter 28, this perforated plate 48 contributes that the process air (e.g. with a downstream fan 26b) flows evenly over the entire depth of the combustion chamber 30. As a result, the process air unit 20 is operated optimally in terms of its heat transfer efficiency, and the combustion chamber 30 is cooled evenly.
[0049]
[0050] In an alternative embodiment of examples disclosed herein (not shown), the continuously expanded duct section 23 of the process air duct 22 could also be completely replaced by air baffles in the process air duct 22. In this case, a linear or stepwise expansion of the process air duct could be used, and one or preferably more air baffles could be designed in this way and arranged in the process air duct 22 in such a way that at least the main part of the process air flow is continuously expanded/relaxed by the outer air baffles taking over the continuous expansion.
[0051] The scope of protection of examples disclosed herein is defined by the appended set of claims. The exemplary embodiments and application examples of the process air unit explained above, including variants thereof, serve in particular to provide a better understanding of examples disclosed herein, but are not intended to limit the scope of protection. The person skilled in the art will be able to recognize further embodiment variants within the scope of protection of examples disclosed herein, which are based, for example, on further combinations of features of the above exemplary embodiments, further combinations of one or more of the above exemplary embodiments (i.e. not only expressly mentioned combination examples), on individual omitted features of the above exemplary embodiments and/or on individual modified features of the above exemplary embodiment.
REFERENCE NUMBER LIST
[0052] 10 Workpiece processing system [0053] 12 Process chamber [0054] 14 Workpiece [0055] 15 Carrier [0056] 16 Fan (separate from 20) [0057] 17 Temperature detection apparatus (separate from 20) [0058] 18 Process air supply line (18a fresh air line/18b recirculating air line) [0059] 20 Process air unit (20a fresh air unit/20b recirculating air unit) [0060] 21 Process air [0061] 22 Process air duct [0062] 23 continuously expanded duct section [0063] 24a Inlet opening [0064] 24b Outlet opening [0065] 26 Fan (as part of 20) [0066] (26a upstream tube bundle arrangement/26b downstream combustion chamber) [0067] 27 Temperature detection apparatus (as part of 20) [0068] 28 Filter [0069] 30 Combustion chamber [0070] 32 Burner [0071] 33a Combustible supply [0072] 33b Combustion air supply [0073] 34 Flue gas [0074] 35 Tube bundle arrangement [0075] 36 Tube bundle [0076] 36n Tube bundle [0077] 37 Tube rows [0078] 38 Tubes [0079] 40 first collecting box between combustion chamber and tube bundle arrangement [0080] 41 further collecting box between two tube bundles [0081] 42 second collecting box at the end of the tube bundle arrangement [0082] 44 Flue gas discharge line [0083] 46 Baffle plate [0084] 48 perforated plate