Base substrate which prevents burrs generated during the cutting process and method for manufacturing the same
09913381 ยท 2018-03-06
Assignee
Inventors
Cpc classification
H01L33/62
ELECTRICITY
H05K2201/10
ELECTRICITY
H01L2924/0002
ELECTRICITY
Y10T29/49155
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01L2924/00
ELECTRICITY
H01L2924/0002
ELECTRICITY
H05K3/0052
ELECTRICITY
H05K2201/09854
ELECTRICITY
H05K1/183
ELECTRICITY
H05K2201/10121
ELECTRICITY
International classification
Abstract
A base substrate which prevents burrs generated during the cutting process includes: multiple conductive layers stacked in one direction with respect to the base substrate; at least one insulation layer being alternately stacked with said conductive layers and electrically separating said conductive layers; and a through-hole penetrating said base substrate covering said insulation layer at the contact region where said cut surface and said insulation layer meet during the cutting of said base substrate in accordance with a predetermined region of the chip substrate. A method of manufacturing the base substrate includes alternately stacking conductive layers and insulation layers and forming a through-hole.
Claims
1. An uncut substrate having an upper surface and a lower surface, the substrate comprising: a plurality of conductive layers arranged laterally in one direction; at least one vertical insulation layer interposed between and laterally adjacent to the conductive layers so as to electrically separate the conductive layers from one another; a plurality of cavities, each of which comprising a concave pit downwardly reaching from the upper surface of the uncut substrate to a predetermined depth at a region of the upper surface including a portion of the insulation layer; and a plurality of through holes that are empty inside, wherein the uncut substrate is partitioned into a plurality of unit substrate areas arranged in a two-dimensional array along a plurality of rows and a plurality of columns, each of the unit substrate areas accommodating one of the cavities at a central region thereof, wherein each of the through holes is located on one of border lines between the plurality of columns, and completely penetrates a portion of the vertical insulation layer and a portion of the conductive layers adjacent to the portion of the insulation layer from the upper surface to the lower surface so as to prevent generation of burrs in case of the uncut substrate being cut along the border lines between the plurality of columns.
2. The uncut substrate according to claim 1, further comprising a resist portion to prevent an exposed portion of the insulation layer from being deteriorated in insulation property.
3. The uncut substrate according to claim 1, further comprising an electrode indication marker on the upper surface of the uncut substrate to mark one of the conductive layers.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
DESCRIPTION OF EMBODIMENTS
(6) Contents of the description below merely exemplify the principle of the invention. Therefore those of ordinary skill in the art may implement the theory of the invention and invent various apparatuses which are included within the concept and the scope of the invention even though it is not clearly explained or illustrated in the description. Furthermore, in principle all the conditional terms and embodiments listed in this description are clearly intended for the purpose of understanding the concept of the invention, and one should understand that this invention is not limited to such specially listed exemplary embodiments and the conditions.
(7) The above described objectives, features, and advantages will be more apparent through the following detailed description related to the accompanying drawings, and thus those of ordinary skill in the art may easily implement the technical spirit of the invention. Hereinafter, a preferred exemplary embodiment according to the present invention will be described with reference to the accompanying drawings.
(8)
(9) In an exemplary embodiment of the present invention, the base substrate is an array of chip substrates comprising multiple chip substrates having a predetermined size, and it is utilized by cutting the base substrate into each individual chip substrates. At this time, the cross-section 10 is formed to have a front view as shown in
(10) A base substrate which may not generate burrs during the separation process of an optical device i.e. sawing or dicing process, more particularly a configuration of a chip substrate being configured on a base substrate is proposed. Hereinafter, a method for manufacturing a base substrate which prevents burrs generated during the cutting process, and a base substrate manufactured by using the method will be described with reference to
(11)
(12) In the stacking step S100, the multiple conductive layers and at least one insulation layer, which is for electrically separating said conductive layers, are alternately stacked in one direction with respect to the base substrate.
(13) As shown in
(14) By heating and compressing while they are being stacked, a lump of conductive material wherein multiple insulation layers B are arranged with a distance is produced as shown in
(15) Next, by vertically cutting the lump of conductive material produced using such a way including the insulation layers B as illustrated using dotted line in
(16) In the through-hole forming step S200 of an exemplary embodiment of the present invention, a through-hole penetrating said base substrate covering said insulation layer B at the region where the cut surface and said insulation layer are in contact when cutting said base substrate in accordance with a predetermined chip substrate area.
(17) With reference to
(18) Further, a cavity D is formed after the through-hole is formed through the cavity forming step S300. Otherwise, in accordance with the manufacturing process, the through-hole G may be formed together with the cavity D, or the through-hole G may also be formed after the cavity D is formed.
(19) In the cavity forming step S300 of an exemplary embodiment of the present invention, a space comprising a concave pit downwardly reaching from the upper surface of said base substrate to a predetermined depth with respect to the region covering said insulation layer B is formed.
(20) A cavity D, which is downwardly reaching from the upper surface of the chip substrate to a predetermined depth, is formed by, for example, machining and the like, and in this case the vertical insulation layer B must pass through the bottom of the cavity D. It is advantageous in that the cavity D is formed to have a downwardly narrowing taper.
(21) In addition, with reference to
(22)
(23) With reference to
(24) A chip substrate formed by cutting the base substrate wherein a through-hole and a cavity are formed according to the above exemplary embodiment, is shown in
(25)
(26) With reference to
(27) A conductive layer A is formed by being stacked along one direction with respect to the base substrate. In here, one direction is determined in accordance with the stacking direction of the conductive layer A which is alternately stacked with the insulation layer B in the stacking step as described above. In other words, for a case shown in
(28) The insulation layer B is alternately stacked with the conductive layer A, thereby electrically separating the conductive layer A. In other words, the chip substrates being isolated with the interposed insulation layer B therebetween may function as a positive (+) electrode terminal, and a negative () electrode terminals respectively.
(29) A through-hole penetrates said base substrate covering said insulation layers B at the contact region where said cut surface and said insulation layer B meet during the cutting of said base substrate in accordance with a predetermined region of the chip substrate. In the exemplary embodiment, a through-hole may be formed through drilling as a hole-making process in a substrate state. In other words a through-hole penetrating the substrate is formed in a substrate state as shown in the above described in
(30) Further, in the exemplary embodiment of the present invention, a through-hole penetrates covering the insulation layer B, and covering the insulation layer B could mean that a through-hole having a larger diameter or a wider width than the thickness of the insulation layer B is formed. In other words, a through-hole penetrates through the insulation layer B in a substrate state. Since hole-making is used in forming a through-hole, generation of burrs during the cutting of the insulation layer B in a conventional sawing or dicing process, may be prevented.
(31) In an exemplary embodiment of the present invention, the cutting plane of said base substrate by the through-hole is formed towards the inward direction with respect to the cut surface 50 cut off from said base substrate covering said insulation layer B. In other words, with reference to
(32) Further, as described above, the chip substrate which has undergone the cavity forming step S300 according to an exemplary embodiment of the present invention includes a space comprising a concave pit downwardly reaching from the upper surface of the base substrate to a predetermined depth with respect to the region covering said insulation layer B is formed. As described above, it is advantageous in that the cavity D is formed to have a downwardly narrowing taper. In an exemplary embodiment of the present invention, a chip substrate is manufactured by cutting off the base substrate, wherein the multiple through-holes and the cavities D are formed therein, in accordance with a predetermined chip substrate region.
(33) Further, an optical device chip is mounted inside the cavity of the chip substrate. After the plating is completed the optical device chips are mounted inside of the each individual cavities D of the base substrate, and then wire bonded for bonding to any one conductive layer A of the separated (isolated) conductive layers A by the isolation layer. In addition, one electrode of the optical device chip is electrically connected to other conductive layer A of said conductive layers A wherein said optical device chip is not bonded thereto.
(34) Next, individual chip substrates as shown in
(35) In addition, with reference to
(36) Above description is merely an exemplary description of the technical spirit of the present invention, and various modifications, changes, and substitutions are possible for a person of skill in the art within the scope without deviating from the fundamental characteristics of the present invention.
(37) Therefore, the exemplary embodiment and the accompanying drawings disclosed in the present invention is for explanation and not for limiting the technical spirit of the present invention, and the scope of the technical spirit of the present invention is not limited by these exemplary embodiments and the accompanying drawings. The scope of protection of the present invention must be interpreted according to the following claims, and it must be interpreted in such a way that all the technical spirits within the equivalent scope of the present invention are included in the scope of the rights of the present invention.