Silver nanowire conductive film and method of fabricating the same
09899116 ยท 2018-02-20
Assignee
Inventors
- Hyun Suk JUNG (Seoul, KR)
- Dong Jun Lee (Namyangju-si, KR)
- Yun Jin An (Jeju-si, KR)
- Gi Ra Yi (Suwon-si, KR)
Cpc classification
H01L31/1884
ELECTRICITY
H01L31/022491
ELECTRICITY
G02F1/13439
PHYSICS
Y10T428/249948
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y02E10/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
Abstract
Provided are a silver nanowire conductive film coated with an oxidation protection layer and a method for fabricating the same. A silver nanowire conductive film coated with an oxidation protection layer includes: a substrate; silver nanowires disposed on the substrate; and an oxidation protection layer coated on the silver nanowires, wherein the oxidation protection layer comprises an oxide.
Claims
1. A silver nanowire conductive film, comprising: a substrate; silver nanowires disposed on the substrate; and an oxidation protection layer coated on the silver nanowires, wherein the oxidation protection layer comprises an oxide, wherein a thickness of the oxidation protection layer is 18 nm to 23 nm, wherein the oxidation protection layer comprises tubular structures, each encapsulating a silver nanowire among the silver nanowires, and wherein the silver nanowire conductive film is a flexible transparent conductive film having a light transmittance of 70% or greater between 400-800 nm.
2. The silver nanowire conductive film of claim 1, wherein the substrate comprises a flexible polymer film, and the silver nanowires are disposed on the polymer film by spreading a silver nanowire resin in which the silver nanowires are dispersed with a doctor blade.
3. The silver nanowire conductive film of claim 1, wherein the oxide is a metal oxide or a metalloid oxide comprising at least one selected from the group consisting of Ti, V, Ni, Cu, Zr, Nb, Al, Si, Sn, and In.
4. The silver nanowire conductive film of claim 1, wherein the oxidation protection layer is coated by an atomic layer deposition (ALD) process.
5. The silver nanowire conductive film of claim 1, wherein the thickness of the oxidation protection layer is 18 nm to 20 nm.
6. The silver nanowire conductive film of claim 1, wherein sheet resistance of the silver nanowire conductive film remains under 100 /sq after 60-day exposure to atmosphere under a standard temperature and pressure condition.
7. A display device comprising an electrode comprising the silver nanowire conductive film of claim 1.
8. The display device of claim 7, wherein the display device is an LCD screen.
9. The display device of claim 8, wherein the thickness of the oxidation protection layer is 20 nm.
10. The silver nanowire conductive film of claim 1, wherein the oxide is formed of Y.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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(12) Throughout the drawings and the detailed description, unless otherwise described, the same drawing reference numerals will be understood to refer to the same elements, features, and structures. The relative size and depiction of these elements may be exaggerated for clarity, illustration, and convenience.
DETAILED DESCRIPTION
(13) The following detailed description is provided to assist the reader in gaining a comprehensive understanding of the methods, apparatuses, and/or systems described herein. Accordingly, various changes, modifications, and equivalents of the systems, apparatuses and/or methods described herein will be suggested to those of ordinary skill in the art. Also, descriptions of well-known functions and constructions may be omitted for increased clarity and conciseness.
(14) As mentioned above, the conductivity of silver nanoparticles may decrease over time due to oxidation. This results in an increase in sheet resistance over time, as illustrated in
(15) As illustrated in
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(18) Due to the oxide layer, the sheet resistance of the silver nanowire transparent conductive film increased drastically (see
(19) In one example, the inventors of the present disclosure propose fabricating a flexible transparent conductive film capable of preventing an increase in sheet resistance by coating a thin oxidation protection layer on the surface of silver nanoparticles. Such a flexible transparent conductive film may be used in a various application. For example, the flexible transparent conductive film may be used as an electrode for a flexible solar cell, and may replace an indium tin oxide (ITO) or fluorine-doped tin oxide (FTO) electrode that are often used in such a solar cell.
(20) According to one example, the silver nanowire conductive film coated with an oxidation protection layer may include a polymer film onto which silver nanowires are applied, and an oxidation protection layer coated on the surface of the silver nanowires.
(21) The polymer film may be a film having flexibility and transparency, such as a polyester (PET) film. The silver nanowires may be applied onto the polymer film by various methods, including a doctor blade technique.
(22) Referring to
(23) In a silver nanowire conductive film having the illustrated structure, the oxidation protection layer is formed of an oxide that does not react with H.sub.2O and CO.sub.2. The oxide may contain at least one selected from the group consisting of Ti, V, Ni, Cu, Zn, Zr, Nb, Y, Al, Si, Sn, and In.
(24) Referring to
(25) The polymer film may be a film having flexibility and transparency, such as a PET film. The silver nanowires are applied to a surface of the polymer film. While a polymer film is used in this example, a different flexible material may be used as the substrate.
(26) In this example, the silver nanowires may have a thickness of approximately 40 nm to 200 nm, or 100 nm to 150 nm The silver nanowires may be applied on the polymer film by forming a resin paste of the silver nanowires, and applying the resin paste on the polymer film as to form a silver nanowire layer of a thickness of 300-1000 nm, 400-800 nm, or 500-700 nm, for example, by a doctor blade technique. However, various different methods may be used to apply the silver nanowires onto the polymer film.
(27) Next, the oxidation protection layer is coated on the surface of the silver nanowires. A material for the oxidation protection layer has been already mentioned as above, and a method of coating the oxidation protection layer may be atomic layer deposition (ALD).
(28) Methods other than ALD may also be used. However, the thickness of the oxidation protection layer can be precisely adjusted using ALD. As will be described below, the thickness of the oxidation protection layer also affects light transmittance and sheet resistance. Thus, the thickness of the oxidation protection layer needs to be precisely adjusted, and ALD may be used for this purpose.
(29) The oxidation protection layer is coated on the surface of the silver nanowire so as to prevent the oxidation of the silver nanowire transparent conductive film. In this example, if light transmittance is lowered or sheet resistance increases due to the oxidation protection layer coating, this adversely affects characteristics of an electrode. Thus, the thickness of the coated oxidation protection layer should be adjusted to maintain low sheet resistance and desired light transmittance. According to one example, the oxidation protection layer may be formed of a TiO2 layer and may have a thickness of approximately 10 nm to 25 nm, 15 nm to 23 nm, 18 nm to 21 nm, or approximately 20 nm.
(30) Various methods may be used to form the oxidation protection layer on the silver nanowires. Further, in another example, the oxidation protection layer can be first formed on the silver nanowires, and the coated silver nanowires can be applied to the polymer film to form a silver nanowire layer above the polymer film.
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(33) Based on the data of
(34) In addition, when the silver nanowire transparent conductive film is used as an electrode, it is mainly used in an application, such as a solar cell, rather than in the field of displays. In this case, the conductivity of the silver nanowire transparent conductive film is a controlling design factor rather than its transparency. Thus, the most preferable thickness of the oxidation protection layer may be 20 nm, or approximately 18-23 nm, at which the sheet resistance of the silver nanowire transparent conductive film is maintained at a low level without diminishing performance. By adjusting the thickness, it is possible to prevent the performance of a flexible transparent electrode from diminishing over time, and to provide a flexible transparent conductive film having little or no change in performance over time.
(35) Hereinafter, the present invention will be additionally described based on an actual Experimental Example.
EXAMPLE 1
(36) First, a PET film was prepared, and silver (Ag) nanowires were applied onto the PET film. (thickness of Ag nanowires and method of applying the naowires to the PET film, the specific PET film used, etc. may be described here). Next, a TiO.sub.2 oxide was coated on the surface of the silver nanowires using an ALD process.
(37) TTIP (UP chemical) was used as a material for a TiO.sub.2 oxidation protection layer, and the ALD process was performed using ALD system (ForALL) equipment at a pressure of 110.sup.3 torr and a temperature of 120 C. A desired number of 250-cycle (10 nm) and 500-cycle (20 nm) processes were performed according to the thickness of the TiO.sub.2 oxidation protection layer.
(38) In order to compare a transparent conductive film not coated with an oxidation protection layer with a transparent conductive film coated with an oxidation protection layer, XPS was used to check oxidation of the transparent conductive film over time. In order to analyze the form of the TiO.sub.2 oxygen preventing layer and the silver nanowire film, measurement was performed using FE-SEM and HR-TEM.
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(40) In addition, the optical characteristics of the silver nanowire transparent conductive film over time and the oxidation protection layer coating were measured using UV-vis spectroscopy, and the electrical characteristics thereof were measured using 4-point probe equipment. These results are shown in
(41) According to the experimental results, the sheet resistance of a film that is not coated with an oxidation protection layer increases rapidly due to oxidation over time. On the other hand, the change in sheet resistance of a film coated with an oxidation protection layer is substantially smaller over time. Thus, it can be seen that applying an oxidation protection layer is very effective in preventing the oxidation of a silver nanowire conductive film.
(42) Described above are various methods of fabricating a flexible transparent conductive film. In some of the examples, a thin oxidation protection layer is coated on the surface of silver nanoparticles and a reduction in conductivity is prevented so that no significant change in performance occurs over time.
(43) When the surface of a silver nanowire is exposed to the air, oxidation may occur on the silver nanowire due to oxygen in the air, which causes an increase in sheet resistance. The present disclosure is also directed to preventing the oxidation of silver nanowires by coating a thin oxygen preventing layer on the surface of the silver nanowires and protecting the silver nanowires from exposure to oxygen and preventing an increase in sheet resistance of the silver nanowires over time.
(44) The flexible transparent conductive film coated with an oxidation protection layer on the surface of the silver nanoparticles is provided so that conductivity of the flexible transparent conductive film is maintained as time elapses and reliable and stable conductivity is guaranteed.
(45) According to an example, there is provided a silver nanowire conductive film coated with an oxidation protection layer, including: a polymer film onto which a silver nanowire is applied; and an oxidation protection layer coated on a surface of the silver nanowire, wherein the oxidation protection layer is formed of an oxide that does not react with H.sub.2O and CO.sub.2. The oxide may be formed from at least one selected from the group consisting of Ti, V, Ni, Cu, Zn, Zr, Nb, Y, Al, Si, Sn, and In, and the oxidation protection layer may be coated by an atomic layer deposition (ALD) process. A thickness of the oxidation protection layer may be 20 nm or less, or may be 20 nm.
(46) According to another example, there is provided a method of fabricating a silver nanowire conductive film coated with an oxidation protection layer, the method including: applying silver nanowires onto a polymer film; and coating an oxidation protection layer on a surface of the silver nanowires, wherein the oxidation protection layer is formed of an oxide that does not react with H.sub.2O and CO.sub.2. The oxide may be formed from at least one selected from the group consisting of Ti, V, Ni, Cu, Zn, Zr, Nb, Y, Al, Si, Sn, and In, and the applying an oxidation protection layer on a surface of the silver nanowires may be performed by an atomic layer deposition (ALD) process. A thickness of the oxidation protection layer may be 20 nm or less, or may be 20 nm.
(47) A number of examples have been described above. Nevertheless, it will be understood that various modifications may be made. For example, suitable results may be achieved if the described techniques are performed in a different order and/or if components in a described system, architecture, device, or circuit are combined in a different manner and/or replaced or supplemented by other components or their equivalents. Accordingly, other implementations are within the scope of the following claims.