APPARATUS FOR COATING SUBSTRATES

Abstract

An apparatus for coating substrates includes a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in the vacuum chamber; a cooling unit configured to cool the substrates and/or a heating unit configured to heat the substrates; rotating means configured to rotate substrates relative to the one or more targets, the cooling unit and/or the heating unit; and a lifting chamber that communicates with the interior of the vacuum chamber and is configured to receive the cooling unit and the heating unit. The vacuum chamber defines a lifting axis along which the cooling unit and/or the heating unit and the lifting chamber are arranged, and the apparatus further comprises displacement means configured to displace the cooling unit and/or the heating unit along the lifting axis and between the vacuum chamber and the lifting chamber.

Claims

1. An apparatus for coating substrates, the apparatus comprising: a vacuum chamber having an opening through which substrates can be received and a door configured to seal the opening; one or more targets arranged in the vacuum chamber; at least one of a cooling unit configured to cool the substrates and a heating unit configured to heat the substrates; rotating means configured to rotate the substrates relative to at least one of the one or more targets, the cooling unit and the heating unit; and a lifting chamber that communicates with the interior of the vacuum chamber and is configured to receive at least one of the cooling unit and the heating unit; wherein the vacuum chamber defines a lifting axis along which at least one of the cooling unit and the heating unit as well as the lifting chamber are arranged; and wherein the apparatus further comprises displacement means configured to displace at least one of the cooling unit and the heating unit along the lifting axis and between the vacuum chamber and the lifting chamber.

2. The apparatus in accordance with claim 1 wherein the displacement means are configured to displace at least one of the cooling unit and the heating unit along the lifting axis such that at least one of the cooling unit and the heating unit do not rotate about the lifting axis.

3. The apparatus in accordance with claim 1 wherein the apparatus comprises a cooling unit and a heating unit, and the displacement means are configured to displace both the cooling unit and the heating unit.

4. The apparatus in accordance with claim 3 wherein the displacement means are configured to displace one of the cooling unit and the heating unit independently from the other.

5. The apparatus in accordance with claim 3 wherein the cooling unit defines a hollow body configured to enclose the heating unit.

6. The apparatus in accordance with claim 1 wherein the cooling unit comprises at least one cooling passage through which a refrigerant is configured to pass.

7. The apparatus in accordance with claim 6 wherein the heating unit is formed by passing a heating liquid through the at least one cooling passage.

8. The apparatus in accordance with claim 6 wherein the cooling unit includes a water-cooled drum.

9. The apparatus in accordance with claim 1 further comprising at least one of one or more auxiliary heating elements arranged at the interior wall of the vacuum chamber and one or more auxiliary cooling elements arranged at the interior wall of the vacuum chamber.

10. The apparatus in accordance with claim 9 wherein the cooling elements are formed by cooling panels arranged at the interior wall of the vacuum chamber.

11. The apparatus in accordance with claim 1 further comprising a temperature sensor configured to detect the temperature of the substrates and connected to a temperature control module configured to control the operation of at least one of the heating unit and the cooling unit.

12. The apparatus in accordance with claim 1 wherein the displacement means include one or more linear actuators arranged in parallel to the lifting axis of the vacuum chamber.

13. The apparatus in accordance with claim 1 wherein the displacement means include one or more rails arranged in parallel to the lifting axis of the vacuum chamber, with the one or more rails being connected to one of the cooling unit and the heating unit and one or more guiding elements arranged in the lifting chamber, wherein the guiding elements are configured to cooperate with the rails and driven by a motor.

14. The apparatus in accordance with claim 1 wherein the displacement means are arranged inside of at least one of the lifting chamber and the vacuum chamber.

15. The apparatus in accordance with claim 1 further comprising one or more connecting members that are configured to connect at least one of the heating unit and the cooling unit to the displacement means, with the displacement means being arranged outside the vacuum chamber and the lifting chamber.

16. The apparatus in accordance with claim 1 wherein the rotating means include a planetary gear arrangement in which the individual substrates are each supported on a rod, such that the individual substrates can rotate both with respect to the lifting axis of the vacuum chamber and about the rod.

Description

[0016] Further features and advantages of the present invention will become apparent from the following detailed description, the accompanying drawings, and the appended claims.

[0017] FIG. 1 shows a horizontal cross-section through a vacuum chamber in which a plurality of substrates is arranged about a heating unit and a cooling unit.

[0018] FIG. 2 shows a horizontal cross-section similar to FIG. 1 in which the apparatus has an alternative configuration of the heating and cooling units.

[0019] FIG. 3 shows a horizontal cross-section similar to FIGS. 1 and 2 in which the apparatus has a further configuration of the heating and cooling units.

[0020] FIGS. 4A to 4C schematically illustrate an embodiment with pneumatic displacement means for lifting the heating unit and cooling unit of FIG. 1.

[0021] FIG. 5 shows an alternative to FIG. 4 in which the displacement means are arranged outside of the lifting chamber and the vacuum chamber.

[0022] FIGS. 6A to 6C schematically illustrate an embodiment with mechanical displacement means for lifting the heating unit and cooling unit of FIG. 1.

[0023] FIG. 1 shows a horizontal cross-section through an apparatus 10 for coating a plurality of substrates 12. In the figures, the substrates 12 are illustrated schematically as having a simple cylindrical shape, but the substrates 12 may also have a complex outer geometry. The substrates 12 are arranged within a vacuum chamber 14 and are supported on a removable table 16 (see FIG. 4A). The vacuum chamber 14 comprises a plurality of targets 22 arranged at an interior wall 24 of the vacuum chamber 14. FIG. 1 specifically shows a door 18 through which the inside of the vacuum chamber 14 is accessible. While the door 18 is not shown in the other figures, it is understood that the vacuum chambers 14 in the other figures also comprise such a door 18.

[0024] The apparatus 10 further comprises a cooling unit consisting of a cooling drum 20, for example a water-cooled drum. The cooling drum 20 is arranged at the table 16, and the substrates 12 are arranged around the outer surface of the cooling drum 20. The table 16 includes a rotating means configured to rotate each of the substrates 12 about a rod 50 (see FIG. 4A) and relative to the cooling drum 20.

[0025] In the embodiment of FIG. 1, the cooling drum 20 forms a hollow body that encloses a plurality of heating elements 26 that form a heating unit of the apparatus 10. The heating elements 26, shown here schematically, can be either resistive tubu-lar heating elements, infrared heaters or heating elements in which a special oil or other medium is passed through heating tubes.

[0026] As shown in FIGS. 4C and 6C, the cooling drum 20 can be lifted to expose the substrates 12 to the heating elements 26. Since the heating elements 26 are also arranged at the center of the table 16, the rotating means of the table 16 are also able to rotate the substrates 12 relative to the heating elements 26 for homoge-nous and efficient heating of the substrates 12. Though FIG. 1 shows an apparatus 10 that includes both a cooling drum 20 and heating elements 26, it is also possible to have an apparatus 10 (not shown) with either a cooling drum 20 or the heating elements 26, but not the other.

[0027] In addition to the cooling drum 20 and the heating elements 26 arranged at the center of the table 16, the embodiment of FIG. 1 also includes a plurality of auxiliary heating or cooling panels 28 that are arranged at corners of the interior wall 24 of the vacuum chamber 14.

[0028] Furthermore, the apparatus 10 comprises a temperature sensor 30 that is configured to detect the temperature of the substrates 12 and is connected to a temperature control module 32 configured to control the operation of the cooling drum 20, the heating elements 26 and/or the auxiliary heating or cooling panels 28. Though FIG. 1 shows the temperature sensor 30 arranged at the interior wall 24 of the vacuum chamber 14, the specific location of the temperature sensor 30 within the apparatus 10 may vary. For example, the sensor 30 may be placed on the table 16. Alternatively, the sensor 30 may be arranged at the cooling drum 20 and/or at the heating elements 26 so that the substrates 12 also rotate about the sensor 30 and the sensor 30 can be lifted together with the cooling drum 20 and/or at the heating elements 26.

[0029] FIG. 2 shows another embodiment of an apparatus 10 having the same components as the apparatus 10 of FIG. 1 apart from the cooling drum 20. In the place of the cooling drum 20 in the apparatus 10 of FIG. 1, FIG. 2 shows a cross-shaped cooling panel 34 arranged between the four heating elements 26. Though the heating panel 34 is cross-shaped to enable an overall compact design of the heating unit and cooling unit, it is understood that the specific number of heating elements 26 and/or the cross-sectional shape of such a cooling panel 34 may vary.

[0030] FIG. 3 shows a further alternative to the cooling drum 20 of FIG. 1 and the cooling panels 34 of FIG. 2. Specifically, the cooling unit in the embodiment of FIG. 3 is a cooling drum 36 whose outer surface includes a plurality of recesses 38 for receiving the heating elements 26. Alternatively, the cooling drum 36 may be circular in cross section, i.e. not have any recesses 38. In this case, the heating elements 26 may simply be arranged in intervals about the outer surface of the cooling drum 36.

[0031] FIGS. 4A to 4C show a vertical cross section through the apparatus 10 of FIG. 1, in particular a lifting chamber 40 that communicates with the interior of the vacuum chamber 14 and is configured to receive the cooling drum 20 and the heating elements 26. Specifically, the vacuum chamber 14 defines a lifting axis, in this case a centrally arranged central axis X, and the cooling drum 20, the heating elements 26 and the lifting chamber 40 are all coaxially aligned along the central axis X of the vacuum chamber 14. FIGS. 4 to 6 show a design in which the vacuum chamber 14 and the lifting chamber 40 are recognizable as distinct, interconnected sections of the apparatus 10. However, it is also possible for the lifting chamber 40 to be part of, i.e. formed within, the vacuum chamber 14. In this alternative, it is not nec-essary for there to be a distinct border or separation between the vacuum chamber 14 and the lifting chamber 40.

[0032] The apparatus 10 further comprises displacement means in the form of linear actuators 42 that each include a rod 58 arranged within a cylinder 60, for example pneumatic linear actuators. The linear actuators 42 are arranged inside of the lifting chamber 40 and in parallel to the central axis X and are respectively configured to move the cooling drum 20 and the heating elements 26 between the vacuum chamber 14 and the lifting chamber 40.

[0033] FIG. 4A shows the apparatus 10 in a state of loading or unloading in which both the cooling drum 20 and the heating elements 26 have been lifted out of the vacuum chamber 14 and into the lifting chamber 40. In this state, the table 16 can be quickly and easily moved out of an opening 44 to the vacuum chamber 14 which is otherwise sealed off by the door 18 (see FIG. 1).

[0034] FIG. 4A also schematically illustrates where a sealing assembly 54 that is configured to seal the lifting chamber 40 from the vacuum chamber 14 in an airtight manner, for example by means of a vacuum valve, may be located. When the cooling drum 20 and the heating elements 26 are in the lifted state, the sealing assembly 54 may be closed so that the heating elements 26 and/or the cooling drum 20 are enclosed by the walls of the lifting chamber 40, a lid portion 64 of the lifting chamber 40 and the sealing assembly 54 to preserve the vacuum inside of the lifting chamber 40.

[0035] With the cooling drum 20 and the heating elements 26 arranged in the lifting chamber 40, it is possible to more clearly see the support structure comprised by the table 16 for supporting the substrates 12 in the vacuum chamber 14. Specifically, the table 16 includes a wheeled base 46 for rolling the table 16 through the opening 44 of the vacuum chamber 14. An upper rack 48 is arranged above the wheeled base 46 and a plurality of rods 50 are supported between the upper rack 48 and the base 46. Each of the substrates 12 is supported by an individual rod 50 so that the substrate 12 may rotate about the rod 50. A motor 52, shown schematically, is connected to and drives the table 16 so that the substrates 12 rotate sim-ultaneously about the rods 50 and about the central axis X in a planetary arrangement.

[0036] Once the table 16 and the substrates 12 has been loaded into the vacuum chamber 14, the door 18 can be closed, as in FIG. 4B, and the vacuum chamber 14 can be evacuated via a pump 56. Once the vacuum chamber 14 has been placed under a vacuum, the coating process may begin. During the coating process, either the cooling drum 20 (FIG. 4B) or the heating elements 26 (FIG. 4C) may be lowered into the vacuum chamber 14 so that they are arranged at the center of the table 16.

[0037] As shown in FIGS. 4B and 4C, whichever of the cooling drum 20 or the heating elements 26 that are not in use during the process step may remain in the lifting chamber 40 to reduce exposure to the vaporized source material of the coating process. This prevents the cooling drum 20 and the heating elements 26 from becoming coated in source material as quickly as in conventional coating apparatuses, which reduces the frequency of maintenance of the apparatus 10. The heating elements 26 and the cooling drum 20 may be further shielded from unintended source material by closing the sealing assembly 54 when the heating elements 26 or the cooling drum 20 is retracted into the lifting chamber 40.

[0038] In the embodiment shown in FIGS. 4B and 4C, the cooling drum 20 and the heating elements 26 are each connected to the piston rod 58 of the linear actuators 42, while the cylinder 60 of the linear actuator 42 is fixed to an interior wall of the lifting chamber 40. In place of the linear actuators 42, it is also possible to use a linear electric motor or any other alternative linear actuator as a displacement means for the cooling drum 20 and the heating elements 26.

[0039] FIG. 5 shows an apparatus 10 that is substantially the same as the apparatus 10 shown in FIG. 4. However, in FIG. 5, the cylinder 60 of the linear actuator 42 is arranged outside of both the vacuum chamber 14 and the lifting chamber 40. The piston 58 of the linear actuator 42 is connected to the cooling drum 20, and to the heating elements 26 (not shown), via a connecting member 62 that extends through a sealed aperture provided in the lid portion 64 of the lifting chamber 40. By arranging the linear actuator 42 outside of the lifting chamber 40 and the vacuum chamber 14, the linear actuator 42 is not subjected to a vacuum. This makes it possible to easily and reliably use hydraulic linear actuators, which otherwise present a risk of leaking hydraulic fluid when they are subjected to very low pres-sures.

[0040] FIGS. 6A to 6C show an apparatus 10 that substantially corresponds to the apparatus 10 of FIGS. 4A to 4C apart from the displacement means. In the embodiment of FIGS. 6A to 6C, gear wheels 66 are fixed to the interior wall of the lifting chamber 40 and cooperate with toothed racks 68 that are attached to the cooling drum 20 and the heating elements 26 respectively. The gear wheels 66 are driven by a motor 67 (shown schematically only in FIG. 6A), and when the motor 67 causes the gear wheels to turn, the racks 68 move downwards or upwards to move the cooling drum 20 and the heating elements 26 between the vacuum chamber 14 and the lifting chamber 40.

REFERENCE NUMERALS

[0041] 10 apparatus [0042] 12 substrates [0043] 14 vacuum chamber [0044] 16 table [0045] 18 door [0046] 20 cooling drum [0047] 22 targets [0048] 24 interior wall of the vacuum chamber [0049] 26 heating elements [0050] 28 heating or cooling panels [0051] 30 temperature sensor [0052] 32 temperature control module [0053] 34 cooling panel [0054] 36 cooling drum [0055] 38 recesses [0056] 40 lifting chamber [0057] 42 linear actuator [0058] 44 opening [0059] 46 base [0060] 48 upper rack [0061] 50 rods [0062] 52 motor [0063] 54 shutter assembly [0064] 56 vacuum pump [0065] 58 piston [0066] 60 cylinder [0067] 62 connecting member [0068] 64 lid portion [0069] 66 gear wheels [0070] 67 motor [0071] 68 toothed rack [0072] X central axis